2/15/2012	7:35:18 AM	Helium valve closed
2/15/2012	7:35:18 AM	H2 valve closed
2/15/2012	7:35:18 AM	BCl3 valve closed
2/15/2012	7:35:18 AM	PH3 valve closed
2/15/2012	7:35:18 AM	SiCl4 pre valve closed
2/15/2012	7:35:18 AM	SiCl4 post valve closed
2/15/2012	7:35:18 AM	Bypass valve closed
2/15/2012	7:35:18 AM	Bubbler valve closed
2/15/2012	7:35:18 AM	Main Vac valve opened
2/15/2012	7:35:18 AM	Helium MFC set to  0.000000
2/15/2012	7:35:18 AM	H2 MFC set to  0.000000
2/15/2012	7:35:18 AM	BCl3 MFC set to  0.000000
2/15/2012	7:35:18 AM	PH3 MFC set to  0.000000
2/15/2012	7:35:18 AM	SiCl4 MFC set to  0.000000
2/15/2012	7:35:18 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:35:19 AM	Tube furnace set to 0
2/15/2012	7:35:20 AM	Run finished at 7:35 AM
2/15/2012	8:26:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2012	8:26:17 AM	Recipe started at 8:26 AM
2/15/2012	8:26:17 AM	Helium valve closed
2/15/2012	8:26:17 AM	H2 valve closed
2/15/2012	8:26:17 AM	BCl3 valve closed
2/15/2012	8:26:17 AM	PH3 valve closed
2/15/2012	8:26:17 AM	SiCl4 pre valve closed
2/15/2012	8:26:17 AM	SiCl4 post valve closed
2/15/2012	8:26:17 AM	Main Vac valve closed
2/15/2012	8:26:17 AM	Bypass valve closed
2/15/2012	8:26:17 AM	Bubbler valve closed
2/15/2012	8:26:17 AM	Helium MFC set to  0.000000
2/15/2012	8:26:17 AM	H2 MFC set to  0.000000
2/15/2012	8:26:17 AM	BCl3 MFC set to  0.000000
2/15/2012	8:26:17 AM	PH3 MFC set to  0.000000
2/15/2012	8:26:17 AM	SiCl4 MFC set to  0.000000
2/15/2012	8:26:17 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	8:26:17 AM	Tube furnace set to 0
2/15/2012	8:26:20 AM	H2 valve closed
2/15/2012	8:26:20 AM	BCl3 valve closed
2/15/2012	8:26:20 AM	PH3 valve closed
2/15/2012	8:26:20 AM	SiCl4 pre valve closed
2/15/2012	8:26:20 AM	SiCl4 post valve closed
2/15/2012	8:26:20 AM	Main Vac valve closed
2/15/2012	8:26:20 AM	Bypass valve closed
2/15/2012	8:26:20 AM	Bubbler valve closed
2/15/2012	8:26:20 AM	Helium valve opened
2/15/2012	8:26:20 AM	Helium MFC set to  500.000000
2/15/2012	8:26:20 AM	H2 MFC set to  0.000000
2/15/2012	8:26:20 AM	BCl3 MFC set to  0.000000
2/15/2012	8:26:20 AM	PH3 MFC set to  0.000000
2/15/2012	8:26:20 AM	SiCl4 MFC set to  0.000000
2/15/2012	8:26:20 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	8:26:20 AM	Tube furnace set to 0
2/15/2012	8:27:21 AM	Helium valve closed
2/15/2012	8:27:21 AM	H2 valve closed
2/15/2012	8:27:21 AM	BCl3 valve closed
2/15/2012	8:27:21 AM	PH3 valve closed
2/15/2012	8:27:21 AM	SiCl4 pre valve closed
2/15/2012	8:27:21 AM	SiCl4 post valve closed
2/15/2012	8:27:21 AM	Main Vac valve closed
2/15/2012	8:27:21 AM	Bypass valve closed
2/15/2012	8:27:21 AM	Bubbler valve closed
2/15/2012	8:27:21 AM	Helium MFC set to  0.000000
2/15/2012	8:27:21 AM	H2 MFC set to  0.000000
2/15/2012	8:27:21 AM	BCl3 MFC set to  0.000000
2/15/2012	8:27:21 AM	PH3 MFC set to  0.000000
2/15/2012	8:27:21 AM	SiCl4 MFC set to  0.000000
2/15/2012	8:27:21 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	8:27:22 AM	Tube furnace set to 0
2/15/2012	8:27:23 AM	Run finished at 8:27 AM
2/15/2012	8:27:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2012	8:41:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2012	8:41:04 AM	Recipe started at 8:41 AM
2/15/2012	8:41:04 AM	Helium valve closed
2/15/2012	8:41:04 AM	H2 valve closed
2/15/2012	8:41:04 AM	BCl3 valve closed
2/15/2012	8:41:04 AM	PH3 valve closed
2/15/2012	8:41:04 AM	SiCl4 pre valve closed
2/15/2012	8:41:04 AM	SiCl4 post valve closed
2/15/2012	8:41:04 AM	Main Vac valve closed
2/15/2012	8:41:04 AM	Bubbler valve closed
2/15/2012	8:41:04 AM	Bypass valve opened
2/15/2012	8:41:04 AM	Helium MFC set to  0.000000
2/15/2012	8:41:04 AM	H2 MFC set to  0.000000
2/15/2012	8:41:04 AM	BCl3 MFC set to  0.000000
2/15/2012	8:41:04 AM	PH3 MFC set to  0.000000
2/15/2012	8:41:04 AM	SiCl4 MFC set to  0.000000
2/15/2012	8:41:04 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	8:41:04 AM	Tube furnace set to 0
2/15/2012	8:42:10 AM	Helium valve closed
2/15/2012	8:42:10 AM	H2 valve closed
2/15/2012	8:42:10 AM	BCl3 valve closed
2/15/2012	8:42:10 AM	PH3 valve closed
2/15/2012	8:42:10 AM	SiCl4 pre valve closed
2/15/2012	8:42:10 AM	SiCl4 post valve closed
2/15/2012	8:42:10 AM	Main Vac valve closed
2/15/2012	8:42:10 AM	Bubbler valve closed
2/15/2012	8:42:10 AM	Bypass valve opened
2/15/2012	8:42:10 AM	Helium MFC set to  0.000000
2/15/2012	8:42:10 AM	H2 MFC set to  0.000000
2/15/2012	8:42:10 AM	BCl3 MFC set to  0.000000
2/15/2012	8:42:10 AM	PH3 MFC set to  0.000000
2/15/2012	8:42:10 AM	SiCl4 MFC set to  0.000000
2/15/2012	8:42:10 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	8:42:10 AM	Tube furnace set to 0
2/15/2012	8:43:10 AM	Helium valve closed
2/15/2012	8:43:10 AM	H2 valve closed
2/15/2012	8:43:10 AM	BCl3 valve closed
2/15/2012	8:43:10 AM	PH3 valve closed
2/15/2012	8:43:10 AM	SiCl4 pre valve closed
2/15/2012	8:43:10 AM	SiCl4 post valve closed
2/15/2012	8:43:10 AM	Bypass valve closed
2/15/2012	8:43:10 AM	Bubbler valve closed
2/15/2012	8:43:10 AM	Main Vac valve opened
2/15/2012	8:43:10 AM	Helium MFC set to  0.000000
2/15/2012	8:43:10 AM	H2 MFC set to  0.000000
2/15/2012	8:43:10 AM	BCl3 MFC set to  0.000000
2/15/2012	8:43:10 AM	PH3 MFC set to  0.000000
2/15/2012	8:43:10 AM	SiCl4 MFC set to  0.000000
2/15/2012	8:43:10 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	8:43:10 AM	Tube furnace set to 0
2/15/2012	8:43:11 AM	Run finished at 8:43 AM
2/15/2012	8:43:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2012	9:22:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/15/2012	9:23:02 AM	Recipe started at 9:22 AM
2/15/2012	9:23:02 AM	Helium valve closed
2/15/2012	9:23:02 AM	H2 valve closed
2/15/2012	9:23:02 AM	BCl3 valve closed
2/15/2012	9:23:02 AM	PH3 valve closed
2/15/2012	9:23:02 AM	SiCl4 pre valve closed
2/15/2012	9:23:02 AM	SiCl4 post valve closed
2/15/2012	9:23:02 AM	Main Vac valve closed
2/15/2012	9:23:02 AM	Bubbler valve closed
2/15/2012	9:23:02 AM	Bypass valve opened
2/15/2012	9:23:02 AM	Helium MFC set to  0.000000
2/15/2012	9:23:02 AM	H2 MFC set to  0.000000
2/15/2012	9:23:02 AM	BCl3 MFC set to  0.000000
2/15/2012	9:23:02 AM	PH3 MFC set to  0.000000
2/15/2012	9:23:02 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:23:02 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:23:02 AM	Tube furnace set to 0
2/15/2012	9:23:02 AM	Helium valve closed
2/15/2012	9:23:02 AM	H2 valve closed
2/15/2012	9:23:02 AM	BCl3 valve closed
2/15/2012	9:23:02 AM	PH3 valve closed
2/15/2012	9:23:02 AM	SiCl4 pre valve closed
2/15/2012	9:23:02 AM	SiCl4 post valve closed
2/15/2012	9:23:02 AM	Main Vac valve closed
2/15/2012	9:23:02 AM	Bubbler valve closed
2/15/2012	9:23:02 AM	Bypass valve opened
2/15/2012	9:23:02 AM	Helium MFC set to  0.000000
2/15/2012	9:23:02 AM	H2 MFC set to  0.000000
2/15/2012	9:23:02 AM	BCl3 MFC set to  0.000000
2/15/2012	9:23:02 AM	PH3 MFC set to  0.000000
2/15/2012	9:23:02 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:23:02 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:23:02 AM	Tube furnace set to 0
2/15/2012	9:23:32 AM	Helium valve closed
2/15/2012	9:23:32 AM	H2 valve closed
2/15/2012	9:23:32 AM	BCl3 valve closed
2/15/2012	9:23:32 AM	PH3 valve closed
2/15/2012	9:23:32 AM	SiCl4 pre valve closed
2/15/2012	9:23:32 AM	SiCl4 post valve closed
2/15/2012	9:23:32 AM	Bypass valve closed
2/15/2012	9:23:32 AM	Bubbler valve closed
2/15/2012	9:23:32 AM	Main Vac valve opened
2/15/2012	9:23:32 AM	Helium MFC set to  0.000000
2/15/2012	9:23:32 AM	H2 MFC set to  0.000000
2/15/2012	9:23:32 AM	BCl3 MFC set to  0.000000
2/15/2012	9:23:32 AM	PH3 MFC set to  0.000000
2/15/2012	9:23:32 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:23:32 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:23:33 AM	Tube furnace set to 0
2/15/2012	9:24:03 AM	H2 valve closed
2/15/2012	9:24:03 AM	BCl3 valve closed
2/15/2012	9:24:03 AM	PH3 valve closed
2/15/2012	9:24:03 AM	SiCl4 pre valve closed
2/15/2012	9:24:03 AM	SiCl4 post valve closed
2/15/2012	9:24:03 AM	Bypass valve closed
2/15/2012	9:24:03 AM	Bubbler valve closed
2/15/2012	9:24:03 AM	Helium valve opened
2/15/2012	9:24:03 AM	Main Vac valve opened
2/15/2012	9:24:03 AM	Helium MFC set to  20.000000
2/15/2012	9:24:03 AM	H2 MFC set to  0.000000
2/15/2012	9:24:03 AM	BCl3 MFC set to  0.000000
2/15/2012	9:24:03 AM	PH3 MFC set to  0.000000
2/15/2012	9:24:03 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:24:03 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:24:03 AM	Tube furnace set to 0
2/15/2012	9:24:33 AM	Helium valve closed
2/15/2012	9:24:33 AM	H2 valve closed
2/15/2012	9:24:33 AM	BCl3 valve closed
2/15/2012	9:24:33 AM	PH3 valve closed
2/15/2012	9:24:33 AM	SiCl4 pre valve closed
2/15/2012	9:24:33 AM	SiCl4 post valve closed
2/15/2012	9:24:33 AM	Bypass valve closed
2/15/2012	9:24:33 AM	Bubbler valve closed
2/15/2012	9:24:33 AM	Main Vac valve opened
2/15/2012	9:24:33 AM	Helium MFC set to  0.000000
2/15/2012	9:24:33 AM	H2 MFC set to  0.000000
2/15/2012	9:24:33 AM	BCl3 MFC set to  0.000000
2/15/2012	9:24:33 AM	PH3 MFC set to  0.000000
2/15/2012	9:24:33 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:24:33 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:24:33 AM	Tube furnace set to 0
2/15/2012	9:25:03 AM	H2 valve closed
2/15/2012	9:25:03 AM	BCl3 valve closed
2/15/2012	9:25:03 AM	PH3 valve closed
2/15/2012	9:25:03 AM	SiCl4 pre valve closed
2/15/2012	9:25:03 AM	SiCl4 post valve closed
2/15/2012	9:25:03 AM	Bypass valve closed
2/15/2012	9:25:03 AM	Bubbler valve closed
2/15/2012	9:25:03 AM	Helium valve opened
2/15/2012	9:25:03 AM	Main Vac valve opened
2/15/2012	9:25:03 AM	Helium MFC set to  20.000000
2/15/2012	9:25:03 AM	H2 MFC set to  0.000000
2/15/2012	9:25:03 AM	BCl3 MFC set to  0.000000
2/15/2012	9:25:03 AM	PH3 MFC set to  0.000000
2/15/2012	9:25:03 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:25:03 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:25:03 AM	Tube furnace set to 0
2/15/2012	9:25:33 AM	Helium valve closed
2/15/2012	9:25:33 AM	H2 valve closed
2/15/2012	9:25:33 AM	BCl3 valve closed
2/15/2012	9:25:33 AM	PH3 valve closed
2/15/2012	9:25:33 AM	SiCl4 pre valve closed
2/15/2012	9:25:33 AM	SiCl4 post valve closed
2/15/2012	9:25:33 AM	Bypass valve closed
2/15/2012	9:25:33 AM	Bubbler valve closed
2/15/2012	9:25:33 AM	Main Vac valve opened
2/15/2012	9:25:33 AM	Helium MFC set to  0.000000
2/15/2012	9:25:33 AM	H2 MFC set to  0.000000
2/15/2012	9:25:33 AM	BCl3 MFC set to  0.000000
2/15/2012	9:25:33 AM	PH3 MFC set to  0.000000
2/15/2012	9:25:33 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:25:33 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:25:33 AM	Tube furnace set to 0
2/15/2012	9:26:03 AM	H2 valve closed
2/15/2012	9:26:03 AM	BCl3 valve closed
2/15/2012	9:26:03 AM	PH3 valve closed
2/15/2012	9:26:03 AM	SiCl4 pre valve closed
2/15/2012	9:26:03 AM	SiCl4 post valve closed
2/15/2012	9:26:04 AM	Bypass valve closed
2/15/2012	9:26:04 AM	Bubbler valve closed
2/15/2012	9:26:04 AM	Helium valve opened
2/15/2012	9:26:04 AM	Main Vac valve opened
2/15/2012	9:26:04 AM	Helium MFC set to  20.000000
2/15/2012	9:26:04 AM	H2 MFC set to  0.000000
2/15/2012	9:26:04 AM	BCl3 MFC set to  0.000000
2/15/2012	9:26:04 AM	PH3 MFC set to  0.000000
2/15/2012	9:26:04 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:26:04 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:26:04 AM	Tube furnace set to 0
2/15/2012	9:26:34 AM	Helium valve closed
2/15/2012	9:26:34 AM	H2 valve closed
2/15/2012	9:26:34 AM	BCl3 valve closed
2/15/2012	9:26:34 AM	PH3 valve closed
2/15/2012	9:26:34 AM	SiCl4 pre valve closed
2/15/2012	9:26:34 AM	SiCl4 post valve closed
2/15/2012	9:26:34 AM	Bypass valve closed
2/15/2012	9:26:34 AM	Bubbler valve closed
2/15/2012	9:26:34 AM	Main Vac valve opened
2/15/2012	9:26:34 AM	Helium MFC set to  0.000000
2/15/2012	9:26:34 AM	H2 MFC set to  0.000000
2/15/2012	9:26:34 AM	BCl3 MFC set to  0.000000
2/15/2012	9:26:34 AM	PH3 MFC set to  0.000000
2/15/2012	9:26:34 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:26:34 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:26:34 AM	Tube furnace set to 0
2/15/2012	9:27:04 AM	H2 valve closed
2/15/2012	9:27:04 AM	BCl3 valve closed
2/15/2012	9:27:04 AM	PH3 valve closed
2/15/2012	9:27:04 AM	SiCl4 pre valve closed
2/15/2012	9:27:04 AM	SiCl4 post valve closed
2/15/2012	9:27:04 AM	Bypass valve closed
2/15/2012	9:27:04 AM	Bubbler valve closed
2/15/2012	9:27:04 AM	Helium valve opened
2/15/2012	9:27:04 AM	Main Vac valve opened
2/15/2012	9:27:04 AM	Helium MFC set to  20.000000
2/15/2012	9:27:04 AM	H2 MFC set to  0.000000
2/15/2012	9:27:04 AM	BCl3 MFC set to  0.000000
2/15/2012	9:27:04 AM	PH3 MFC set to  0.000000
2/15/2012	9:27:04 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:27:04 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:27:04 AM	Tube furnace set to 0
2/15/2012	9:27:34 AM	Helium valve closed
2/15/2012	9:27:34 AM	H2 valve closed
2/15/2012	9:27:34 AM	BCl3 valve closed
2/15/2012	9:27:34 AM	PH3 valve closed
2/15/2012	9:27:34 AM	SiCl4 pre valve closed
2/15/2012	9:27:34 AM	SiCl4 post valve closed
2/15/2012	9:27:34 AM	Bypass valve closed
2/15/2012	9:27:34 AM	Bubbler valve closed
2/15/2012	9:27:34 AM	Main Vac valve opened
2/15/2012	9:27:34 AM	Helium MFC set to  0.000000
2/15/2012	9:27:34 AM	H2 MFC set to  0.000000
2/15/2012	9:27:34 AM	BCl3 MFC set to  0.000000
2/15/2012	9:27:34 AM	PH3 MFC set to  0.000000
2/15/2012	9:27:34 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:27:34 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:27:34 AM	Tube furnace set to 0
2/15/2012	9:28:04 AM	H2 valve closed
2/15/2012	9:28:04 AM	BCl3 valve closed
2/15/2012	9:28:04 AM	PH3 valve closed
2/15/2012	9:28:04 AM	SiCl4 pre valve closed
2/15/2012	9:28:04 AM	SiCl4 post valve closed
2/15/2012	9:28:04 AM	Bypass valve closed
2/15/2012	9:28:04 AM	Bubbler valve closed
2/15/2012	9:28:04 AM	Helium valve opened
2/15/2012	9:28:04 AM	Main Vac valve opened
2/15/2012	9:28:04 AM	Helium MFC set to  20.000000
2/15/2012	9:28:04 AM	H2 MFC set to  0.000000
2/15/2012	9:28:04 AM	BCl3 MFC set to  0.000000
2/15/2012	9:28:04 AM	PH3 MFC set to  0.000000
2/15/2012	9:28:04 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:28:04 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:28:04 AM	Tube furnace set to 0
2/15/2012	9:28:35 AM	Helium valve closed
2/15/2012	9:28:35 AM	H2 valve closed
2/15/2012	9:28:35 AM	BCl3 valve closed
2/15/2012	9:28:35 AM	PH3 valve closed
2/15/2012	9:28:35 AM	SiCl4 pre valve closed
2/15/2012	9:28:35 AM	SiCl4 post valve closed
2/15/2012	9:28:35 AM	Bypass valve closed
2/15/2012	9:28:35 AM	Bubbler valve closed
2/15/2012	9:28:35 AM	Main Vac valve opened
2/15/2012	9:28:35 AM	Helium MFC set to  0.000000
2/15/2012	9:28:35 AM	H2 MFC set to  0.000000
2/15/2012	9:28:35 AM	BCl3 MFC set to  0.000000
2/15/2012	9:28:35 AM	PH3 MFC set to  0.000000
2/15/2012	9:28:35 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:28:35 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:28:35 AM	Tube furnace set to 0
2/15/2012	9:29:05 AM	H2 valve closed
2/15/2012	9:29:05 AM	BCl3 valve closed
2/15/2012	9:29:05 AM	PH3 valve closed
2/15/2012	9:29:05 AM	SiCl4 pre valve closed
2/15/2012	9:29:05 AM	SiCl4 post valve closed
2/15/2012	9:29:05 AM	Bypass valve closed
2/15/2012	9:29:05 AM	Bubbler valve closed
2/15/2012	9:29:05 AM	Helium valve opened
2/15/2012	9:29:05 AM	Main Vac valve opened
2/15/2012	9:29:05 AM	Helium MFC set to  20.000000
2/15/2012	9:29:05 AM	H2 MFC set to  0.000000
2/15/2012	9:29:05 AM	BCl3 MFC set to  0.000000
2/15/2012	9:29:05 AM	PH3 MFC set to  0.000000
2/15/2012	9:29:05 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:29:05 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:29:05 AM	Tube furnace set to 0
2/15/2012	9:29:35 AM	Helium valve closed
2/15/2012	9:29:35 AM	H2 valve closed
2/15/2012	9:29:35 AM	BCl3 valve closed
2/15/2012	9:29:35 AM	PH3 valve closed
2/15/2012	9:29:35 AM	SiCl4 pre valve closed
2/15/2012	9:29:35 AM	SiCl4 post valve closed
2/15/2012	9:29:35 AM	Bypass valve closed
2/15/2012	9:29:35 AM	Bubbler valve closed
2/15/2012	9:29:35 AM	Main Vac valve opened
2/15/2012	9:29:35 AM	Helium MFC set to  0.000000
2/15/2012	9:29:35 AM	H2 MFC set to  0.000000
2/15/2012	9:29:35 AM	BCl3 MFC set to  0.000000
2/15/2012	9:29:35 AM	PH3 MFC set to  0.000000
2/15/2012	9:29:35 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:29:35 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:29:35 AM	Tube furnace set to 0
2/15/2012	9:30:05 AM	H2 valve closed
2/15/2012	9:30:05 AM	BCl3 valve closed
2/15/2012	9:30:05 AM	PH3 valve closed
2/15/2012	9:30:05 AM	SiCl4 pre valve closed
2/15/2012	9:30:05 AM	SiCl4 post valve closed
2/15/2012	9:30:05 AM	Bypass valve closed
2/15/2012	9:30:05 AM	Bubbler valve closed
2/15/2012	9:30:05 AM	Helium valve opened
2/15/2012	9:30:05 AM	Main Vac valve opened
2/15/2012	9:30:05 AM	Helium MFC set to  20.000000
2/15/2012	9:30:05 AM	H2 MFC set to  0.000000
2/15/2012	9:30:05 AM	BCl3 MFC set to  0.000000
2/15/2012	9:30:05 AM	PH3 MFC set to  0.000000
2/15/2012	9:30:05 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:30:05 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:30:05 AM	Tube furnace set to 0
2/15/2012	9:30:35 AM	Helium valve closed
2/15/2012	9:30:35 AM	H2 valve closed
2/15/2012	9:30:35 AM	BCl3 valve closed
2/15/2012	9:30:35 AM	PH3 valve closed
2/15/2012	9:30:35 AM	SiCl4 pre valve closed
2/15/2012	9:30:35 AM	SiCl4 post valve closed
2/15/2012	9:30:35 AM	Bypass valve closed
2/15/2012	9:30:35 AM	Bubbler valve closed
2/15/2012	9:30:35 AM	Main Vac valve opened
2/15/2012	9:30:35 AM	Helium MFC set to  0.000000
2/15/2012	9:30:35 AM	H2 MFC set to  0.000000
2/15/2012	9:30:35 AM	BCl3 MFC set to  0.000000
2/15/2012	9:30:35 AM	PH3 MFC set to  0.000000
2/15/2012	9:30:35 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:30:35 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:30:36 AM	Tube furnace set to 0
2/15/2012	9:31:06 AM	H2 valve closed
2/15/2012	9:31:06 AM	BCl3 valve closed
2/15/2012	9:31:06 AM	PH3 valve closed
2/15/2012	9:31:06 AM	SiCl4 pre valve closed
2/15/2012	9:31:06 AM	SiCl4 post valve closed
2/15/2012	9:31:06 AM	Bypass valve closed
2/15/2012	9:31:06 AM	Bubbler valve closed
2/15/2012	9:31:06 AM	Helium valve opened
2/15/2012	9:31:06 AM	Main Vac valve opened
2/15/2012	9:31:06 AM	Helium MFC set to  20.000000
2/15/2012	9:31:06 AM	H2 MFC set to  0.000000
2/15/2012	9:31:06 AM	BCl3 MFC set to  0.000000
2/15/2012	9:31:06 AM	PH3 MFC set to  0.000000
2/15/2012	9:31:06 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:31:06 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:31:06 AM	Tube furnace set to 0
2/15/2012	9:31:36 AM	Helium valve closed
2/15/2012	9:31:36 AM	H2 valve closed
2/15/2012	9:31:36 AM	BCl3 valve closed
2/15/2012	9:31:36 AM	PH3 valve closed
2/15/2012	9:31:36 AM	SiCl4 pre valve closed
2/15/2012	9:31:36 AM	SiCl4 post valve closed
2/15/2012	9:31:36 AM	Bypass valve closed
2/15/2012	9:31:36 AM	Bubbler valve closed
2/15/2012	9:31:36 AM	Main Vac valve opened
2/15/2012	9:31:36 AM	Helium MFC set to  0.000000
2/15/2012	9:31:36 AM	H2 MFC set to  0.000000
2/15/2012	9:31:36 AM	BCl3 MFC set to  0.000000
2/15/2012	9:31:36 AM	PH3 MFC set to  0.000000
2/15/2012	9:31:36 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:31:36 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:31:36 AM	Tube furnace set to 0
2/15/2012	9:32:06 AM	H2 valve closed
2/15/2012	9:32:06 AM	BCl3 valve closed
2/15/2012	9:32:06 AM	PH3 valve closed
2/15/2012	9:32:06 AM	SiCl4 pre valve closed
2/15/2012	9:32:06 AM	SiCl4 post valve closed
2/15/2012	9:32:06 AM	Bypass valve closed
2/15/2012	9:32:06 AM	Bubbler valve closed
2/15/2012	9:32:06 AM	Helium valve opened
2/15/2012	9:32:06 AM	Main Vac valve opened
2/15/2012	9:32:06 AM	Helium MFC set to  20.000000
2/15/2012	9:32:06 AM	H2 MFC set to  0.000000
2/15/2012	9:32:06 AM	BCl3 MFC set to  0.000000
2/15/2012	9:32:06 AM	PH3 MFC set to  0.000000
2/15/2012	9:32:06 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:32:06 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:32:06 AM	Tube furnace set to 0
2/15/2012	9:32:36 AM	Helium valve closed
2/15/2012	9:32:36 AM	H2 valve closed
2/15/2012	9:32:36 AM	BCl3 valve closed
2/15/2012	9:32:36 AM	PH3 valve closed
2/15/2012	9:32:36 AM	SiCl4 pre valve closed
2/15/2012	9:32:36 AM	SiCl4 post valve closed
2/15/2012	9:32:36 AM	Bypass valve closed
2/15/2012	9:32:36 AM	Bubbler valve closed
2/15/2012	9:32:36 AM	Main Vac valve opened
2/15/2012	9:32:36 AM	Helium MFC set to  0.000000
2/15/2012	9:32:36 AM	H2 MFC set to  0.000000
2/15/2012	9:32:36 AM	BCl3 MFC set to  0.000000
2/15/2012	9:32:36 AM	PH3 MFC set to  0.000000
2/15/2012	9:32:36 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:32:36 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:32:36 AM	Tube furnace set to 0
2/15/2012	9:33:06 AM	H2 valve closed
2/15/2012	9:33:06 AM	BCl3 valve closed
2/15/2012	9:33:06 AM	PH3 valve closed
2/15/2012	9:33:06 AM	SiCl4 pre valve closed
2/15/2012	9:33:06 AM	SiCl4 post valve closed
2/15/2012	9:33:06 AM	Bypass valve closed
2/15/2012	9:33:06 AM	Bubbler valve closed
2/15/2012	9:33:06 AM	Helium valve opened
2/15/2012	9:33:06 AM	Main Vac valve opened
2/15/2012	9:33:06 AM	Helium MFC set to  20.000000
2/15/2012	9:33:06 AM	H2 MFC set to  0.000000
2/15/2012	9:33:06 AM	BCl3 MFC set to  0.000000
2/15/2012	9:33:06 AM	PH3 MFC set to  0.000000
2/15/2012	9:33:06 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:33:06 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:33:07 AM	Tube furnace set to 0
2/15/2012	9:33:37 AM	Helium valve closed
2/15/2012	9:33:37 AM	H2 valve closed
2/15/2012	9:33:37 AM	BCl3 valve closed
2/15/2012	9:33:37 AM	PH3 valve closed
2/15/2012	9:33:37 AM	SiCl4 pre valve closed
2/15/2012	9:33:37 AM	SiCl4 post valve closed
2/15/2012	9:33:37 AM	Bypass valve closed
2/15/2012	9:33:37 AM	Bubbler valve closed
2/15/2012	9:33:37 AM	Main Vac valve opened
2/15/2012	9:33:37 AM	Helium MFC set to  0.000000
2/15/2012	9:33:37 AM	H2 MFC set to  0.000000
2/15/2012	9:33:37 AM	BCl3 MFC set to  0.000000
2/15/2012	9:33:37 AM	PH3 MFC set to  0.000000
2/15/2012	9:33:37 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:33:37 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:33:37 AM	Tube furnace set to 0
2/15/2012	9:33:38 AM	Run finished at 9:33 AM
2/15/2012	9:33:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/15/2012	9:34:17 AM	Tube furnace set to 150
2/15/2012	9:34:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/15/2012	9:34:38 AM	Recipe started at 9:34 AM
2/15/2012	9:34:38 AM	Helium valve closed
2/15/2012	9:34:38 AM	H2 valve closed
2/15/2012	9:34:38 AM	BCl3 valve closed
2/15/2012	9:34:38 AM	PH3 valve closed
2/15/2012	9:34:38 AM	SiCl4 pre valve closed
2/15/2012	9:34:38 AM	SiCl4 post valve closed
2/15/2012	9:34:38 AM	Main Vac valve closed
2/15/2012	9:34:38 AM	Bubbler valve closed
2/15/2012	9:34:38 AM	Bypass valve opened
2/15/2012	9:34:38 AM	Helium MFC set to  0.000000
2/15/2012	9:34:38 AM	H2 MFC set to  0.000000
2/15/2012	9:34:38 AM	BCl3 MFC set to  0.000000
2/15/2012	9:34:38 AM	PH3 MFC set to  0.000000
2/15/2012	9:34:38 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:34:38 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:34:38 AM	Tube furnace set to 0
2/15/2012	9:34:39 AM	Helium valve closed
2/15/2012	9:34:39 AM	H2 valve closed
2/15/2012	9:34:39 AM	BCl3 valve closed
2/15/2012	9:34:39 AM	PH3 valve closed
2/15/2012	9:34:39 AM	SiCl4 pre valve closed
2/15/2012	9:34:39 AM	SiCl4 post valve closed
2/15/2012	9:34:39 AM	Main Vac valve closed
2/15/2012	9:34:39 AM	Bubbler valve closed
2/15/2012	9:34:39 AM	Bypass valve opened
2/15/2012	9:34:39 AM	Helium MFC set to  0.000000
2/15/2012	9:34:39 AM	H2 MFC set to  0.000000
2/15/2012	9:34:39 AM	BCl3 MFC set to  0.000000
2/15/2012	9:34:39 AM	PH3 MFC set to  0.000000
2/15/2012	9:34:39 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:34:39 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:34:39 AM	Tube furnace set to 0
2/15/2012	9:35:09 AM	Helium valve closed
2/15/2012	9:35:09 AM	H2 valve closed
2/15/2012	9:35:09 AM	BCl3 valve closed
2/15/2012	9:35:09 AM	PH3 valve closed
2/15/2012	9:35:09 AM	SiCl4 pre valve closed
2/15/2012	9:35:09 AM	SiCl4 post valve closed
2/15/2012	9:35:09 AM	Bypass valve closed
2/15/2012	9:35:09 AM	Bubbler valve closed
2/15/2012	9:35:09 AM	Main Vac valve opened
2/15/2012	9:35:09 AM	Helium MFC set to  0.000000
2/15/2012	9:35:09 AM	H2 MFC set to  0.000000
2/15/2012	9:35:09 AM	BCl3 MFC set to  0.000000
2/15/2012	9:35:09 AM	PH3 MFC set to  0.000000
2/15/2012	9:35:09 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:35:09 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:35:09 AM	Tube furnace set to 0
2/15/2012	9:35:21 AM	H2 valve closed
2/15/2012	9:35:21 AM	BCl3 valve closed
2/15/2012	9:35:21 AM	PH3 valve closed
2/15/2012	9:35:21 AM	SiCl4 pre valve closed
2/15/2012	9:35:21 AM	SiCl4 post valve closed
2/15/2012	9:35:21 AM	Bypass valve closed
2/15/2012	9:35:21 AM	Bubbler valve closed
2/15/2012	9:35:21 AM	Helium valve opened
2/15/2012	9:35:21 AM	Main Vac valve opened
2/15/2012	9:35:21 AM	Helium MFC set to  20.000000
2/15/2012	9:35:21 AM	H2 MFC set to  0.000000
2/15/2012	9:35:21 AM	BCl3 MFC set to  0.000000
2/15/2012	9:35:21 AM	PH3 MFC set to  0.000000
2/15/2012	9:35:21 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:35:21 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:35:21 AM	Tube furnace set to 0
2/15/2012	9:35:51 AM	Helium valve closed
2/15/2012	9:35:51 AM	H2 valve closed
2/15/2012	9:35:51 AM	BCl3 valve closed
2/15/2012	9:35:51 AM	PH3 valve closed
2/15/2012	9:35:51 AM	SiCl4 pre valve closed
2/15/2012	9:35:51 AM	SiCl4 post valve closed
2/15/2012	9:35:51 AM	Bypass valve closed
2/15/2012	9:35:51 AM	Bubbler valve closed
2/15/2012	9:35:51 AM	Main Vac valve opened
2/15/2012	9:35:51 AM	Helium MFC set to  0.000000
2/15/2012	9:35:51 AM	H2 MFC set to  0.000000
2/15/2012	9:35:51 AM	BCl3 MFC set to  0.000000
2/15/2012	9:35:51 AM	PH3 MFC set to  0.000000
2/15/2012	9:35:51 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:35:51 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:35:51 AM	Tube furnace set to 0
2/15/2012	9:36:21 AM	H2 valve closed
2/15/2012	9:36:21 AM	BCl3 valve closed
2/15/2012	9:36:21 AM	PH3 valve closed
2/15/2012	9:36:21 AM	SiCl4 pre valve closed
2/15/2012	9:36:21 AM	SiCl4 post valve closed
2/15/2012	9:36:21 AM	Bypass valve closed
2/15/2012	9:36:21 AM	Bubbler valve closed
2/15/2012	9:36:21 AM	Helium valve opened
2/15/2012	9:36:21 AM	Main Vac valve opened
2/15/2012	9:36:21 AM	Helium MFC set to  20.000000
2/15/2012	9:36:21 AM	H2 MFC set to  0.000000
2/15/2012	9:36:21 AM	BCl3 MFC set to  0.000000
2/15/2012	9:36:21 AM	PH3 MFC set to  0.000000
2/15/2012	9:36:21 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:36:21 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:36:21 AM	Tube furnace set to 0
2/15/2012	9:36:51 AM	Helium valve closed
2/15/2012	9:36:51 AM	H2 valve closed
2/15/2012	9:36:51 AM	BCl3 valve closed
2/15/2012	9:36:51 AM	PH3 valve closed
2/15/2012	9:36:51 AM	SiCl4 pre valve closed
2/15/2012	9:36:51 AM	SiCl4 post valve closed
2/15/2012	9:36:51 AM	Bypass valve closed
2/15/2012	9:36:51 AM	Bubbler valve closed
2/15/2012	9:36:51 AM	Main Vac valve opened
2/15/2012	9:36:51 AM	Helium MFC set to  0.000000
2/15/2012	9:36:51 AM	H2 MFC set to  0.000000
2/15/2012	9:36:51 AM	BCl3 MFC set to  0.000000
2/15/2012	9:36:51 AM	PH3 MFC set to  0.000000
2/15/2012	9:36:51 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:36:51 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:36:51 AM	Tube furnace set to 0
2/15/2012	9:37:21 AM	H2 valve closed
2/15/2012	9:37:21 AM	BCl3 valve closed
2/15/2012	9:37:21 AM	PH3 valve closed
2/15/2012	9:37:22 AM	SiCl4 pre valve closed
2/15/2012	9:37:22 AM	SiCl4 post valve closed
2/15/2012	9:37:22 AM	Bypass valve closed
2/15/2012	9:37:22 AM	Bubbler valve closed
2/15/2012	9:37:22 AM	Helium valve opened
2/15/2012	9:37:22 AM	Main Vac valve opened
2/15/2012	9:37:22 AM	Helium MFC set to  20.000000
2/15/2012	9:37:22 AM	H2 MFC set to  0.000000
2/15/2012	9:37:22 AM	BCl3 MFC set to  0.000000
2/15/2012	9:37:22 AM	PH3 MFC set to  0.000000
2/15/2012	9:37:22 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:37:22 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:37:22 AM	Tube furnace set to 0
2/15/2012	9:37:52 AM	Helium valve closed
2/15/2012	9:37:52 AM	H2 valve closed
2/15/2012	9:37:52 AM	BCl3 valve closed
2/15/2012	9:37:52 AM	PH3 valve closed
2/15/2012	9:37:52 AM	SiCl4 pre valve closed
2/15/2012	9:37:52 AM	SiCl4 post valve closed
2/15/2012	9:37:52 AM	Bypass valve closed
2/15/2012	9:37:52 AM	Bubbler valve closed
2/15/2012	9:37:52 AM	Main Vac valve opened
2/15/2012	9:37:52 AM	Helium MFC set to  0.000000
2/15/2012	9:37:52 AM	H2 MFC set to  0.000000
2/15/2012	9:37:52 AM	BCl3 MFC set to  0.000000
2/15/2012	9:37:52 AM	PH3 MFC set to  0.000000
2/15/2012	9:37:52 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:37:52 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:37:52 AM	Tube furnace set to 0
2/15/2012	9:38:22 AM	H2 valve closed
2/15/2012	9:38:22 AM	BCl3 valve closed
2/15/2012	9:38:22 AM	PH3 valve closed
2/15/2012	9:38:22 AM	SiCl4 pre valve closed
2/15/2012	9:38:22 AM	SiCl4 post valve closed
2/15/2012	9:38:22 AM	Bypass valve closed
2/15/2012	9:38:22 AM	Bubbler valve closed
2/15/2012	9:38:22 AM	Helium valve opened
2/15/2012	9:38:22 AM	Main Vac valve opened
2/15/2012	9:38:22 AM	Helium MFC set to  20.000000
2/15/2012	9:38:22 AM	H2 MFC set to  0.000000
2/15/2012	9:38:22 AM	BCl3 MFC set to  0.000000
2/15/2012	9:38:22 AM	PH3 MFC set to  0.000000
2/15/2012	9:38:22 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:38:22 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:38:22 AM	Tube furnace set to 0
2/15/2012	9:38:52 AM	Helium valve closed
2/15/2012	9:38:52 AM	H2 valve closed
2/15/2012	9:38:52 AM	BCl3 valve closed
2/15/2012	9:38:52 AM	PH3 valve closed
2/15/2012	9:38:52 AM	SiCl4 pre valve closed
2/15/2012	9:38:52 AM	SiCl4 post valve closed
2/15/2012	9:38:52 AM	Bypass valve closed
2/15/2012	9:38:52 AM	Bubbler valve closed
2/15/2012	9:38:52 AM	Main Vac valve opened
2/15/2012	9:38:52 AM	Helium MFC set to  0.000000
2/15/2012	9:38:52 AM	H2 MFC set to  0.000000
2/15/2012	9:38:52 AM	BCl3 MFC set to  0.000000
2/15/2012	9:38:52 AM	PH3 MFC set to  0.000000
2/15/2012	9:38:52 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:38:52 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:38:52 AM	Tube furnace set to 0
2/15/2012	9:39:22 AM	H2 valve closed
2/15/2012	9:39:22 AM	BCl3 valve closed
2/15/2012	9:39:22 AM	PH3 valve closed
2/15/2012	9:39:22 AM	SiCl4 pre valve closed
2/15/2012	9:39:22 AM	SiCl4 post valve closed
2/15/2012	9:39:22 AM	Bypass valve closed
2/15/2012	9:39:22 AM	Bubbler valve closed
2/15/2012	9:39:22 AM	Helium valve opened
2/15/2012	9:39:22 AM	Main Vac valve opened
2/15/2012	9:39:22 AM	Helium MFC set to  20.000000
2/15/2012	9:39:22 AM	H2 MFC set to  0.000000
2/15/2012	9:39:22 AM	BCl3 MFC set to  0.000000
2/15/2012	9:39:22 AM	PH3 MFC set to  0.000000
2/15/2012	9:39:22 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:39:22 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:39:22 AM	Tube furnace set to 0
2/15/2012	9:39:53 AM	Helium valve closed
2/15/2012	9:39:53 AM	H2 valve closed
2/15/2012	9:39:53 AM	BCl3 valve closed
2/15/2012	9:39:53 AM	PH3 valve closed
2/15/2012	9:39:53 AM	SiCl4 pre valve closed
2/15/2012	9:39:53 AM	SiCl4 post valve closed
2/15/2012	9:39:53 AM	Bypass valve closed
2/15/2012	9:39:53 AM	Bubbler valve closed
2/15/2012	9:39:53 AM	Main Vac valve opened
2/15/2012	9:39:53 AM	Helium MFC set to  0.000000
2/15/2012	9:39:53 AM	H2 MFC set to  0.000000
2/15/2012	9:39:53 AM	BCl3 MFC set to  0.000000
2/15/2012	9:39:53 AM	PH3 MFC set to  0.000000
2/15/2012	9:39:53 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:39:53 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:39:53 AM	Tube furnace set to 0
2/15/2012	9:40:23 AM	H2 valve closed
2/15/2012	9:40:23 AM	BCl3 valve closed
2/15/2012	9:40:23 AM	PH3 valve closed
2/15/2012	9:40:23 AM	SiCl4 pre valve closed
2/15/2012	9:40:23 AM	SiCl4 post valve closed
2/15/2012	9:40:23 AM	Bypass valve closed
2/15/2012	9:40:23 AM	Bubbler valve closed
2/15/2012	9:40:23 AM	Helium valve opened
2/15/2012	9:40:23 AM	Main Vac valve opened
2/15/2012	9:40:23 AM	Helium MFC set to  20.000000
2/15/2012	9:40:23 AM	H2 MFC set to  0.000000
2/15/2012	9:40:23 AM	BCl3 MFC set to  0.000000
2/15/2012	9:40:23 AM	PH3 MFC set to  0.000000
2/15/2012	9:40:23 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:40:23 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:40:23 AM	Tube furnace set to 0
2/15/2012	9:40:53 AM	Helium valve closed
2/15/2012	9:40:53 AM	H2 valve closed
2/15/2012	9:40:53 AM	BCl3 valve closed
2/15/2012	9:40:53 AM	PH3 valve closed
2/15/2012	9:40:53 AM	SiCl4 pre valve closed
2/15/2012	9:40:53 AM	SiCl4 post valve closed
2/15/2012	9:40:53 AM	Bypass valve closed
2/15/2012	9:40:53 AM	Bubbler valve closed
2/15/2012	9:40:53 AM	Main Vac valve opened
2/15/2012	9:40:53 AM	Helium MFC set to  0.000000
2/15/2012	9:40:53 AM	H2 MFC set to  0.000000
2/15/2012	9:40:53 AM	BCl3 MFC set to  0.000000
2/15/2012	9:40:53 AM	PH3 MFC set to  0.000000
2/15/2012	9:40:53 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:40:53 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:40:53 AM	Tube furnace set to 0
2/15/2012	9:41:23 AM	H2 valve closed
2/15/2012	9:41:23 AM	BCl3 valve closed
2/15/2012	9:41:23 AM	PH3 valve closed
2/15/2012	9:41:23 AM	SiCl4 pre valve closed
2/15/2012	9:41:23 AM	SiCl4 post valve closed
2/15/2012	9:41:23 AM	Bypass valve closed
2/15/2012	9:41:23 AM	Bubbler valve closed
2/15/2012	9:41:23 AM	Helium valve opened
2/15/2012	9:41:23 AM	Main Vac valve opened
2/15/2012	9:41:23 AM	Helium MFC set to  20.000000
2/15/2012	9:41:23 AM	H2 MFC set to  0.000000
2/15/2012	9:41:23 AM	BCl3 MFC set to  0.000000
2/15/2012	9:41:23 AM	PH3 MFC set to  0.000000
2/15/2012	9:41:23 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:41:23 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:41:23 AM	Tube furnace set to 0
2/15/2012	9:41:53 AM	Helium valve closed
2/15/2012	9:41:53 AM	H2 valve closed
2/15/2012	9:41:53 AM	BCl3 valve closed
2/15/2012	9:41:53 AM	PH3 valve closed
2/15/2012	9:41:53 AM	SiCl4 pre valve closed
2/15/2012	9:41:53 AM	SiCl4 post valve closed
2/15/2012	9:41:53 AM	Bypass valve closed
2/15/2012	9:41:53 AM	Bubbler valve closed
2/15/2012	9:41:53 AM	Main Vac valve opened
2/15/2012	9:41:53 AM	Helium MFC set to  0.000000
2/15/2012	9:41:53 AM	H2 MFC set to  0.000000
2/15/2012	9:41:53 AM	BCl3 MFC set to  0.000000
2/15/2012	9:41:53 AM	PH3 MFC set to  0.000000
2/15/2012	9:41:53 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:41:53 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:41:54 AM	Tube furnace set to 0
2/15/2012	9:42:24 AM	H2 valve closed
2/15/2012	9:42:24 AM	BCl3 valve closed
2/15/2012	9:42:24 AM	PH3 valve closed
2/15/2012	9:42:24 AM	SiCl4 pre valve closed
2/15/2012	9:42:24 AM	SiCl4 post valve closed
2/15/2012	9:42:24 AM	Bypass valve closed
2/15/2012	9:42:24 AM	Bubbler valve closed
2/15/2012	9:42:24 AM	Helium valve opened
2/15/2012	9:42:24 AM	Main Vac valve opened
2/15/2012	9:42:24 AM	Helium MFC set to  20.000000
2/15/2012	9:42:24 AM	H2 MFC set to  0.000000
2/15/2012	9:42:24 AM	BCl3 MFC set to  0.000000
2/15/2012	9:42:24 AM	PH3 MFC set to  0.000000
2/15/2012	9:42:24 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:42:24 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:42:24 AM	Tube furnace set to 0
2/15/2012	9:42:54 AM	Helium valve closed
2/15/2012	9:42:54 AM	H2 valve closed
2/15/2012	9:42:54 AM	BCl3 valve closed
2/15/2012	9:42:54 AM	PH3 valve closed
2/15/2012	9:42:54 AM	SiCl4 pre valve closed
2/15/2012	9:42:54 AM	SiCl4 post valve closed
2/15/2012	9:42:54 AM	Bypass valve closed
2/15/2012	9:42:54 AM	Bubbler valve closed
2/15/2012	9:42:54 AM	Main Vac valve opened
2/15/2012	9:42:54 AM	Helium MFC set to  0.000000
2/15/2012	9:42:54 AM	H2 MFC set to  0.000000
2/15/2012	9:42:54 AM	BCl3 MFC set to  0.000000
2/15/2012	9:42:54 AM	PH3 MFC set to  0.000000
2/15/2012	9:42:54 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:42:54 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:42:54 AM	Tube furnace set to 0
2/15/2012	9:43:24 AM	H2 valve closed
2/15/2012	9:43:24 AM	BCl3 valve closed
2/15/2012	9:43:24 AM	PH3 valve closed
2/15/2012	9:43:24 AM	SiCl4 pre valve closed
2/15/2012	9:43:24 AM	SiCl4 post valve closed
2/15/2012	9:43:24 AM	Bypass valve closed
2/15/2012	9:43:24 AM	Bubbler valve closed
2/15/2012	9:43:24 AM	Helium valve opened
2/15/2012	9:43:24 AM	Main Vac valve opened
2/15/2012	9:43:24 AM	Helium MFC set to  20.000000
2/15/2012	9:43:24 AM	H2 MFC set to  0.000000
2/15/2012	9:43:24 AM	BCl3 MFC set to  0.000000
2/15/2012	9:43:24 AM	PH3 MFC set to  0.000000
2/15/2012	9:43:24 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:43:24 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:43:24 AM	Tube furnace set to 0
2/15/2012	9:43:54 AM	Helium valve closed
2/15/2012	9:43:54 AM	H2 valve closed
2/15/2012	9:43:54 AM	BCl3 valve closed
2/15/2012	9:43:54 AM	PH3 valve closed
2/15/2012	9:43:54 AM	SiCl4 pre valve closed
2/15/2012	9:43:54 AM	SiCl4 post valve closed
2/15/2012	9:43:54 AM	Bypass valve closed
2/15/2012	9:43:54 AM	Bubbler valve closed
2/15/2012	9:43:54 AM	Main Vac valve opened
2/15/2012	9:43:54 AM	Helium MFC set to  0.000000
2/15/2012	9:43:54 AM	H2 MFC set to  0.000000
2/15/2012	9:43:54 AM	BCl3 MFC set to  0.000000
2/15/2012	9:43:54 AM	PH3 MFC set to  0.000000
2/15/2012	9:43:54 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:43:54 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:43:54 AM	Tube furnace set to 0
2/15/2012	9:44:24 AM	H2 valve closed
2/15/2012	9:44:24 AM	BCl3 valve closed
2/15/2012	9:44:24 AM	PH3 valve closed
2/15/2012	9:44:24 AM	SiCl4 pre valve closed
2/15/2012	9:44:24 AM	SiCl4 post valve closed
2/15/2012	9:44:24 AM	Bypass valve closed
2/15/2012	9:44:24 AM	Bubbler valve closed
2/15/2012	9:44:24 AM	Helium valve opened
2/15/2012	9:44:24 AM	Main Vac valve opened
2/15/2012	9:44:24 AM	Helium MFC set to  20.000000
2/15/2012	9:44:24 AM	H2 MFC set to  0.000000
2/15/2012	9:44:24 AM	BCl3 MFC set to  0.000000
2/15/2012	9:44:24 AM	PH3 MFC set to  0.000000
2/15/2012	9:44:24 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:44:24 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:44:25 AM	Tube furnace set to 0
2/15/2012	9:44:55 AM	Helium valve closed
2/15/2012	9:44:55 AM	H2 valve closed
2/15/2012	9:44:55 AM	BCl3 valve closed
2/15/2012	9:44:55 AM	PH3 valve closed
2/15/2012	9:44:55 AM	SiCl4 pre valve closed
2/15/2012	9:44:55 AM	SiCl4 post valve closed
2/15/2012	9:44:55 AM	Bypass valve closed
2/15/2012	9:44:55 AM	Bubbler valve closed
2/15/2012	9:44:55 AM	Main Vac valve opened
2/15/2012	9:44:55 AM	Helium MFC set to  0.000000
2/15/2012	9:44:55 AM	H2 MFC set to  0.000000
2/15/2012	9:44:55 AM	BCl3 MFC set to  0.000000
2/15/2012	9:44:55 AM	PH3 MFC set to  0.000000
2/15/2012	9:44:55 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:44:55 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:44:55 AM	Tube furnace set to 0
2/15/2012	9:44:56 AM	Run finished at 9:44 AM
2/15/2012	9:44:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/15/2012	9:45:42 AM	Main Vac valve closed
2/15/2012	9:46:06 AM	Main Vac valve opened
2/15/2012	9:51:01 AM	Recipe started at 9:50 AM
2/15/2012	9:51:01 AM	Helium valve closed
2/15/2012	9:51:01 AM	H2 valve closed
2/15/2012	9:51:01 AM	BCl3 valve closed
2/15/2012	9:51:01 AM	PH3 valve closed
2/15/2012	9:51:01 AM	SiCl4 pre valve closed
2/15/2012	9:51:01 AM	SiCl4 post valve closed
2/15/2012	9:51:01 AM	Main Vac valve closed
2/15/2012	9:51:01 AM	Bypass valve closed
2/15/2012	9:51:01 AM	Bubbler valve closed
2/15/2012	9:51:01 AM	Helium MFC set to  0.000000
2/15/2012	9:51:01 AM	H2 MFC set to  0.000000
2/15/2012	9:51:01 AM	BCl3 MFC set to  0.000000
2/15/2012	9:51:01 AM	PH3 MFC set to  0.000000
2/15/2012	9:51:01 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:51:01 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:51:01 AM	Tube furnace set to 0
2/15/2012	9:51:04 AM	Helium valve closed
2/15/2012	9:51:04 AM	BCl3 valve closed
2/15/2012	9:51:04 AM	PH3 valve closed
2/15/2012	9:51:04 AM	SiCl4 pre valve closed
2/15/2012	9:51:04 AM	SiCl4 post valve closed
2/15/2012	9:51:04 AM	Main Vac valve closed
2/15/2012	9:51:04 AM	Bypass valve closed
2/15/2012	9:51:04 AM	Bubbler valve closed
2/15/2012	9:51:04 AM	H2 valve opened
2/15/2012	9:51:04 AM	Helium MFC set to  0.000000
2/15/2012	9:51:04 AM	H2 MFC set to  500.000000
2/15/2012	9:51:04 AM	BCl3 MFC set to  0.000000
2/15/2012	9:51:04 AM	PH3 MFC set to  0.000000
2/15/2012	9:51:04 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:51:04 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:51:04 AM	Tube furnace set to 0
2/15/2012	9:52:09 AM	Helium valve closed
2/15/2012	9:52:09 AM	BCl3 valve closed
2/15/2012	9:52:09 AM	PH3 valve closed
2/15/2012	9:52:09 AM	SiCl4 pre valve closed
2/15/2012	9:52:09 AM	SiCl4 post valve closed
2/15/2012	9:52:09 AM	Main Vac valve closed
2/15/2012	9:52:09 AM	Bypass valve closed
2/15/2012	9:52:09 AM	H2 valve opened
2/15/2012	9:52:09 AM	Bubbler valve opened
2/15/2012	9:52:09 AM	Helium MFC set to  0.000000
2/15/2012	9:52:09 AM	H2 MFC set to  500.000000
2/15/2012	9:52:09 AM	BCl3 MFC set to  0.000000
2/15/2012	9:52:09 AM	PH3 MFC set to  0.000000
2/15/2012	9:52:09 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:52:09 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:52:09 AM	Tube furnace set to 0
2/15/2012	9:52:10 AM	Helium valve closed
2/15/2012	9:52:10 AM	BCl3 valve closed
2/15/2012	9:52:10 AM	PH3 valve closed
2/15/2012	9:52:10 AM	SiCl4 pre valve closed
2/15/2012	9:52:10 AM	SiCl4 post valve closed
2/15/2012	9:52:10 AM	Main Vac valve closed
2/15/2012	9:52:10 AM	Bypass valve closed
2/15/2012	9:52:10 AM	H2 valve opened
2/15/2012	9:52:10 AM	Bubbler valve opened
2/15/2012	9:52:10 AM	Helium MFC set to  0.000000
2/15/2012	9:52:10 AM	H2 MFC set to  450.000000
2/15/2012	9:52:10 AM	BCl3 MFC set to  0.000000
2/15/2012	9:52:10 AM	PH3 MFC set to  0.000000
2/15/2012	9:52:10 AM	SiCl4 MFC set to  0.000000
2/15/2012	9:52:10 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:52:11 AM	Tube furnace set to 1000
2/15/2012	10:17:11 AM	Helium valve closed
2/15/2012	10:17:11 AM	PH3 valve closed
2/15/2012	10:17:11 AM	Main Vac valve closed
2/15/2012	10:17:11 AM	Bypass valve closed
2/15/2012	10:17:11 AM	H2 valve opened
2/15/2012	10:17:11 AM	BCl3 valve opened
2/15/2012	10:17:11 AM	SiCl4 pre valve opened
2/15/2012	10:17:11 AM	SiCl4 post valve opened
2/15/2012	10:17:11 AM	Bubbler valve opened
2/15/2012	10:17:11 AM	Helium MFC set to  0.000000
2/15/2012	10:17:11 AM	H2 MFC set to  450.000000
2/15/2012	10:17:11 AM	BCl3 MFC set to  1.500000
2/15/2012	10:17:11 AM	PH3 MFC set to  0.000000
2/15/2012	10:17:11 AM	SiCl4 MFC set to  50.000000
2/15/2012	10:17:11 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:17:11 AM	Tube furnace set to 1000
2/15/2012	10:25:11 AM	Helium valve closed
2/15/2012	10:25:11 AM	BCl3 valve closed
2/15/2012	10:25:11 AM	PH3 valve closed
2/15/2012	10:25:11 AM	SiCl4 pre valve closed
2/15/2012	10:25:11 AM	SiCl4 post valve closed
2/15/2012	10:25:11 AM	Main Vac valve closed
2/15/2012	10:25:11 AM	Bypass valve closed
2/15/2012	10:25:11 AM	H2 valve opened
2/15/2012	10:25:11 AM	Bubbler valve opened
2/15/2012	10:25:11 AM	Helium MFC set to  0.000000
2/15/2012	10:25:11 AM	H2 MFC set to  450.000000
2/15/2012	10:25:11 AM	BCl3 MFC set to  0.000000
2/15/2012	10:25:11 AM	PH3 MFC set to  0.000000
2/15/2012	10:25:11 AM	SiCl4 MFC set to  0.000000
2/15/2012	10:25:11 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:25:11 AM	Tube furnace set to 750
2/15/2012	10:30:11 AM	H2 valve closed
2/15/2012	10:30:11 AM	BCl3 valve closed
2/15/2012	10:30:11 AM	PH3 valve closed
2/15/2012	10:30:11 AM	SiCl4 pre valve closed
2/15/2012	10:30:11 AM	SiCl4 post valve closed
2/15/2012	10:30:11 AM	Main Vac valve closed
2/15/2012	10:30:11 AM	Bypass valve closed
2/15/2012	10:30:11 AM	Helium valve opened
2/15/2012	10:30:11 AM	Bubbler valve opened
2/15/2012	10:30:11 AM	Helium MFC set to  500.000000
2/15/2012	10:30:11 AM	H2 MFC set to  0.000000
2/15/2012	10:30:11 AM	BCl3 MFC set to  0.000000
2/15/2012	10:30:11 AM	PH3 MFC set to  0.000000
2/15/2012	10:30:11 AM	SiCl4 MFC set to  0.000000
2/15/2012	10:30:11 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:30:11 AM	Tube furnace set to 0
2/15/2012	10:50:11 AM	Helium valve closed
2/15/2012	10:50:11 AM	H2 valve closed
2/15/2012	10:50:11 AM	BCl3 valve closed
2/15/2012	10:50:11 AM	PH3 valve closed
2/15/2012	10:50:11 AM	SiCl4 pre valve closed
2/15/2012	10:50:11 AM	SiCl4 post valve closed
2/15/2012	10:50:11 AM	Main Vac valve closed
2/15/2012	10:50:11 AM	Bypass valve closed
2/15/2012	10:50:11 AM	Bubbler valve closed
2/15/2012	10:50:11 AM	Helium MFC set to  0.000000
2/15/2012	10:50:11 AM	H2 MFC set to  0.000000
2/15/2012	10:50:11 AM	BCl3 MFC set to  0.000000
2/15/2012	10:50:11 AM	PH3 MFC set to  0.000000
2/15/2012	10:50:11 AM	SiCl4 MFC set to  0.000000
2/15/2012	10:50:11 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:50:12 AM	Tube furnace set to 0
2/15/2012	10:50:13 AM	Run finished at 10:50 AM
2/15/2012	10:51:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2012	10:51:15 AM	Recipe started at 10:51 AM
2/15/2012	10:51:15 AM	Helium valve closed
2/15/2012	10:51:15 AM	H2 valve closed
2/15/2012	10:51:15 AM	BCl3 valve closed
2/15/2012	10:51:15 AM	PH3 valve closed
2/15/2012	10:51:15 AM	SiCl4 pre valve closed
2/15/2012	10:51:15 AM	SiCl4 post valve closed
2/15/2012	10:51:15 AM	Main Vac valve closed
2/15/2012	10:51:15 AM	Bypass valve closed
2/15/2012	10:51:15 AM	Bubbler valve closed
2/15/2012	10:51:15 AM	Helium MFC set to  0.000000
2/15/2012	10:51:15 AM	H2 MFC set to  0.000000
2/15/2012	10:51:15 AM	BCl3 MFC set to  0.000000
2/15/2012	10:51:15 AM	PH3 MFC set to  0.000000
2/15/2012	10:51:15 AM	SiCl4 MFC set to  0.000000
2/15/2012	10:51:15 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:51:16 AM	Tube furnace set to 0
2/15/2012	10:51:19 AM	H2 valve closed
2/15/2012	10:51:19 AM	BCl3 valve closed
2/15/2012	10:51:19 AM	PH3 valve closed
2/15/2012	10:51:19 AM	SiCl4 pre valve closed
2/15/2012	10:51:19 AM	SiCl4 post valve closed
2/15/2012	10:51:19 AM	Main Vac valve closed
2/15/2012	10:51:19 AM	Bypass valve closed
2/15/2012	10:51:19 AM	Bubbler valve closed
2/15/2012	10:51:19 AM	Helium valve opened
2/15/2012	10:51:19 AM	Helium MFC set to  500.000000
2/15/2012	10:51:19 AM	H2 MFC set to  0.000000
2/15/2012	10:51:19 AM	BCl3 MFC set to  0.000000
2/15/2012	10:51:19 AM	PH3 MFC set to  0.000000
2/15/2012	10:51:19 AM	SiCl4 MFC set to  0.000000
2/15/2012	10:51:19 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:51:19 AM	Tube furnace set to 0
2/15/2012	10:51:19 AM	Helium valve closed
2/15/2012	10:51:19 AM	H2 valve closed
2/15/2012	10:51:19 AM	BCl3 valve closed
2/15/2012	10:51:19 AM	PH3 valve closed
2/15/2012	10:51:19 AM	SiCl4 pre valve closed
2/15/2012	10:51:19 AM	SiCl4 post valve closed
2/15/2012	10:51:19 AM	Main Vac valve closed
2/15/2012	10:51:19 AM	Bypass valve closed
2/15/2012	10:51:19 AM	Bubbler valve closed
2/15/2012	10:51:19 AM	Helium MFC set to  0.000000
2/15/2012	10:51:19 AM	H2 MFC set to  0.000000
2/15/2012	10:51:19 AM	BCl3 MFC set to  0.000000
2/15/2012	10:51:19 AM	PH3 MFC set to  0.000000
2/15/2012	10:51:19 AM	SiCl4 MFC set to  0.000000
2/15/2012	10:51:19 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:51:19 AM	Tube furnace set to 0
2/15/2012	10:51:20 AM	Run finished at 10:51 AM
2/15/2012	10:51:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2012	11:02:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2012	11:03:00 AM	Recipe started at 11:02 AM
2/15/2012	11:03:00 AM	Helium valve closed
2/15/2012	11:03:00 AM	H2 valve closed
2/15/2012	11:03:00 AM	BCl3 valve closed
2/15/2012	11:03:00 AM	PH3 valve closed
2/15/2012	11:03:00 AM	SiCl4 pre valve closed
2/15/2012	11:03:00 AM	SiCl4 post valve closed
2/15/2012	11:03:00 AM	Main Vac valve closed
2/15/2012	11:03:00 AM	Bubbler valve closed
2/15/2012	11:03:00 AM	Bypass valve opened
2/15/2012	11:03:00 AM	Helium MFC set to  0.000000
2/15/2012	11:03:00 AM	H2 MFC set to  0.000000
2/15/2012	11:03:00 AM	BCl3 MFC set to  0.000000
2/15/2012	11:03:00 AM	PH3 MFC set to  0.000000
2/15/2012	11:03:00 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:03:00 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:03:00 AM	Tube furnace set to 0
2/15/2012	11:04:05 AM	Helium valve closed
2/15/2012	11:04:05 AM	H2 valve closed
2/15/2012	11:04:05 AM	BCl3 valve closed
2/15/2012	11:04:05 AM	PH3 valve closed
2/15/2012	11:04:05 AM	SiCl4 pre valve closed
2/15/2012	11:04:05 AM	SiCl4 post valve closed
2/15/2012	11:04:05 AM	Main Vac valve closed
2/15/2012	11:04:05 AM	Bubbler valve closed
2/15/2012	11:04:05 AM	Bypass valve opened
2/15/2012	11:04:05 AM	Helium MFC set to  0.000000
2/15/2012	11:04:05 AM	H2 MFC set to  0.000000
2/15/2012	11:04:05 AM	BCl3 MFC set to  0.000000
2/15/2012	11:04:05 AM	PH3 MFC set to  0.000000
2/15/2012	11:04:05 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:04:05 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:04:05 AM	Tube furnace set to 0
2/15/2012	11:05:05 AM	Helium valve closed
2/15/2012	11:05:05 AM	H2 valve closed
2/15/2012	11:05:05 AM	BCl3 valve closed
2/15/2012	11:05:05 AM	PH3 valve closed
2/15/2012	11:05:05 AM	SiCl4 pre valve closed
2/15/2012	11:05:05 AM	SiCl4 post valve closed
2/15/2012	11:05:05 AM	Bypass valve closed
2/15/2012	11:05:05 AM	Bubbler valve closed
2/15/2012	11:05:05 AM	Main Vac valve opened
2/15/2012	11:05:05 AM	Helium MFC set to  0.000000
2/15/2012	11:05:05 AM	H2 MFC set to  0.000000
2/15/2012	11:05:05 AM	BCl3 MFC set to  0.000000
2/15/2012	11:05:05 AM	PH3 MFC set to  0.000000
2/15/2012	11:05:05 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:05:05 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:05:05 AM	Tube furnace set to 0
2/15/2012	11:05:06 AM	Run finished at 11:05 AM
2/15/2012	11:05:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2012	11:06:09 AM	Recipe started at 11:06 AM
2/15/2012	11:06:09 AM	Helium valve closed
2/15/2012	11:06:09 AM	H2 valve closed
2/15/2012	11:06:09 AM	BCl3 valve closed
2/15/2012	11:06:09 AM	PH3 valve closed
2/15/2012	11:06:09 AM	SiCl4 pre valve closed
2/15/2012	11:06:09 AM	SiCl4 post valve closed
2/15/2012	11:06:09 AM	Bypass valve closed
2/15/2012	11:06:09 AM	Bubbler valve closed
2/15/2012	11:06:09 AM	Main Vac valve opened
2/15/2012	11:06:09 AM	Helium MFC set to  0.000000
2/15/2012	11:06:09 AM	H2 MFC set to  0.000000
2/15/2012	11:06:09 AM	BCl3 MFC set to  0.000000
2/15/2012	11:06:09 AM	PH3 MFC set to  0.000000
2/15/2012	11:06:09 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:06:09 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:06:09 AM	Tube furnace set to 150
2/15/2012	11:06:22 AM	Run aborted at 11:06 AM
2/15/2012	11:06:22 AM	Helium valve closed
2/15/2012	11:06:22 AM	H2 valve closed
2/15/2012	11:06:22 AM	BCl3 valve closed
2/15/2012	11:06:22 AM	PH3 valve closed
2/15/2012	11:06:22 AM	SiCl4 pre valve closed
2/15/2012	11:06:22 AM	SiCl4 post valve closed
2/15/2012	11:06:22 AM	Bypass valve closed
2/15/2012	11:06:22 AM	Main Vac valve closed
2/15/2012	11:06:22 AM	Bubbler valve closed
2/15/2012	11:06:22 AM	Helium MFC set to  0.000000
2/15/2012	11:06:22 AM	H2 MFC set to  0.000000
2/15/2012	11:06:22 AM	BCl3 MFC set to  0.000000
2/15/2012	11:06:22 AM	PH3 MFC set to  0.000000
2/15/2012	11:06:22 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:06:22 AM	Tube furnace set to 0
2/15/2012	11:06:27 AM	Main Vac valve opened
2/15/2012	11:18:04 AM	Recipe started at 11:17 AM
2/15/2012	11:18:04 AM	Helium valve closed
2/15/2012	11:18:04 AM	H2 valve closed
2/15/2012	11:18:04 AM	BCl3 valve closed
2/15/2012	11:18:04 AM	PH3 valve closed
2/15/2012	11:18:04 AM	SiCl4 pre valve closed
2/15/2012	11:18:04 AM	SiCl4 post valve closed
2/15/2012	11:18:04 AM	Bypass valve closed
2/15/2012	11:18:04 AM	Bubbler valve closed
2/15/2012	11:18:04 AM	Main Vac valve opened
2/15/2012	11:18:04 AM	Helium MFC set to  0.000000
2/15/2012	11:18:04 AM	H2 MFC set to  0.000000
2/15/2012	11:18:04 AM	BCl3 MFC set to  0.000000
2/15/2012	11:18:04 AM	PH3 MFC set to  0.000000
2/15/2012	11:18:04 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:18:04 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:18:04 AM	Tube furnace set to 150
2/15/2012	11:18:34 AM	H2 valve closed
2/15/2012	11:18:34 AM	BCl3 valve closed
2/15/2012	11:18:34 AM	PH3 valve closed
2/15/2012	11:18:34 AM	SiCl4 pre valve closed
2/15/2012	11:18:34 AM	SiCl4 post valve closed
2/15/2012	11:18:34 AM	Bypass valve closed
2/15/2012	11:18:34 AM	Bubbler valve closed
2/15/2012	11:18:34 AM	Helium valve opened
2/15/2012	11:18:34 AM	Main Vac valve opened
2/15/2012	11:18:34 AM	Helium MFC set to  20.000000
2/15/2012	11:18:34 AM	H2 MFC set to  0.000000
2/15/2012	11:18:34 AM	BCl3 MFC set to  0.000000
2/15/2012	11:18:34 AM	PH3 MFC set to  0.000000
2/15/2012	11:18:34 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:18:34 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:18:34 AM	Tube furnace set to 150
2/15/2012	11:19:04 AM	Helium valve closed
2/15/2012	11:19:04 AM	H2 valve closed
2/15/2012	11:19:04 AM	BCl3 valve closed
2/15/2012	11:19:04 AM	PH3 valve closed
2/15/2012	11:19:04 AM	SiCl4 pre valve closed
2/15/2012	11:19:04 AM	SiCl4 post valve closed
2/15/2012	11:19:04 AM	Bypass valve closed
2/15/2012	11:19:04 AM	Bubbler valve closed
2/15/2012	11:19:04 AM	Main Vac valve opened
2/15/2012	11:19:04 AM	Helium MFC set to  0.000000
2/15/2012	11:19:04 AM	H2 MFC set to  0.000000
2/15/2012	11:19:04 AM	BCl3 MFC set to  0.000000
2/15/2012	11:19:04 AM	PH3 MFC set to  0.000000
2/15/2012	11:19:04 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:19:04 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:19:05 AM	Tube furnace set to 150
2/15/2012	11:19:35 AM	H2 valve closed
2/15/2012	11:19:35 AM	BCl3 valve closed
2/15/2012	11:19:35 AM	PH3 valve closed
2/15/2012	11:19:35 AM	SiCl4 pre valve closed
2/15/2012	11:19:35 AM	SiCl4 post valve closed
2/15/2012	11:19:35 AM	Bypass valve closed
2/15/2012	11:19:35 AM	Bubbler valve closed
2/15/2012	11:19:35 AM	Helium valve opened
2/15/2012	11:19:35 AM	Main Vac valve opened
2/15/2012	11:19:35 AM	Helium MFC set to  20.000000
2/15/2012	11:19:35 AM	H2 MFC set to  0.000000
2/15/2012	11:19:35 AM	BCl3 MFC set to  0.000000
2/15/2012	11:19:35 AM	PH3 MFC set to  0.000000
2/15/2012	11:19:35 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:19:35 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:19:35 AM	Tube furnace set to 150
2/15/2012	11:20:05 AM	Helium valve closed
2/15/2012	11:20:05 AM	H2 valve closed
2/15/2012	11:20:05 AM	BCl3 valve closed
2/15/2012	11:20:05 AM	PH3 valve closed
2/15/2012	11:20:05 AM	SiCl4 pre valve closed
2/15/2012	11:20:05 AM	SiCl4 post valve closed
2/15/2012	11:20:05 AM	Bypass valve closed
2/15/2012	11:20:05 AM	Bubbler valve closed
2/15/2012	11:20:05 AM	Main Vac valve opened
2/15/2012	11:20:05 AM	Helium MFC set to  0.000000
2/15/2012	11:20:05 AM	H2 MFC set to  0.000000
2/15/2012	11:20:05 AM	BCl3 MFC set to  0.000000
2/15/2012	11:20:05 AM	PH3 MFC set to  0.000000
2/15/2012	11:20:05 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:20:05 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:20:05 AM	Tube furnace set to 150
2/15/2012	11:20:35 AM	H2 valve closed
2/15/2012	11:20:35 AM	BCl3 valve closed
2/15/2012	11:20:35 AM	PH3 valve closed
2/15/2012	11:20:35 AM	SiCl4 pre valve closed
2/15/2012	11:20:35 AM	SiCl4 post valve closed
2/15/2012	11:20:35 AM	Bypass valve closed
2/15/2012	11:20:35 AM	Bubbler valve closed
2/15/2012	11:20:35 AM	Helium valve opened
2/15/2012	11:20:35 AM	Main Vac valve opened
2/15/2012	11:20:35 AM	Helium MFC set to  20.000000
2/15/2012	11:20:35 AM	H2 MFC set to  0.000000
2/15/2012	11:20:35 AM	BCl3 MFC set to  0.000000
2/15/2012	11:20:35 AM	PH3 MFC set to  0.000000
2/15/2012	11:20:35 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:20:35 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:20:35 AM	Tube furnace set to 150
2/15/2012	11:21:05 AM	Helium valve closed
2/15/2012	11:21:05 AM	H2 valve closed
2/15/2012	11:21:05 AM	BCl3 valve closed
2/15/2012	11:21:05 AM	PH3 valve closed
2/15/2012	11:21:05 AM	SiCl4 pre valve closed
2/15/2012	11:21:05 AM	SiCl4 post valve closed
2/15/2012	11:21:05 AM	Bypass valve closed
2/15/2012	11:21:05 AM	Bubbler valve closed
2/15/2012	11:21:05 AM	Main Vac valve opened
2/15/2012	11:21:05 AM	Helium MFC set to  0.000000
2/15/2012	11:21:05 AM	H2 MFC set to  0.000000
2/15/2012	11:21:05 AM	BCl3 MFC set to  0.000000
2/15/2012	11:21:05 AM	PH3 MFC set to  0.000000
2/15/2012	11:21:05 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:21:05 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:21:05 AM	Tube furnace set to 150
2/15/2012	11:21:36 AM	H2 valve closed
2/15/2012	11:21:36 AM	BCl3 valve closed
2/15/2012	11:21:36 AM	PH3 valve closed
2/15/2012	11:21:36 AM	SiCl4 pre valve closed
2/15/2012	11:21:36 AM	SiCl4 post valve closed
2/15/2012	11:21:36 AM	Bypass valve closed
2/15/2012	11:21:36 AM	Bubbler valve closed
2/15/2012	11:21:36 AM	Helium valve opened
2/15/2012	11:21:36 AM	Main Vac valve opened
2/15/2012	11:21:36 AM	Helium MFC set to  20.000000
2/15/2012	11:21:36 AM	H2 MFC set to  0.000000
2/15/2012	11:21:36 AM	BCl3 MFC set to  0.000000
2/15/2012	11:21:36 AM	PH3 MFC set to  0.000000
2/15/2012	11:21:36 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:21:36 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:21:36 AM	Tube furnace set to 150
2/15/2012	11:22:06 AM	Helium valve closed
2/15/2012	11:22:06 AM	H2 valve closed
2/15/2012	11:22:06 AM	BCl3 valve closed
2/15/2012	11:22:06 AM	PH3 valve closed
2/15/2012	11:22:06 AM	SiCl4 pre valve closed
2/15/2012	11:22:06 AM	SiCl4 post valve closed
2/15/2012	11:22:06 AM	Bypass valve closed
2/15/2012	11:22:06 AM	Bubbler valve closed
2/15/2012	11:22:06 AM	Main Vac valve opened
2/15/2012	11:22:06 AM	Helium MFC set to  0.000000
2/15/2012	11:22:06 AM	H2 MFC set to  0.000000
2/15/2012	11:22:06 AM	BCl3 MFC set to  0.000000
2/15/2012	11:22:06 AM	PH3 MFC set to  0.000000
2/15/2012	11:22:06 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:22:06 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:22:06 AM	Tube furnace set to 150
2/15/2012	11:22:36 AM	H2 valve closed
2/15/2012	11:22:36 AM	BCl3 valve closed
2/15/2012	11:22:36 AM	PH3 valve closed
2/15/2012	11:22:36 AM	SiCl4 pre valve closed
2/15/2012	11:22:36 AM	SiCl4 post valve closed
2/15/2012	11:22:36 AM	Bypass valve closed
2/15/2012	11:22:36 AM	Bubbler valve closed
2/15/2012	11:22:36 AM	Helium valve opened
2/15/2012	11:22:36 AM	Main Vac valve opened
2/15/2012	11:22:36 AM	Helium MFC set to  20.000000
2/15/2012	11:22:36 AM	H2 MFC set to  0.000000
2/15/2012	11:22:36 AM	BCl3 MFC set to  0.000000
2/15/2012	11:22:36 AM	PH3 MFC set to  0.000000
2/15/2012	11:22:36 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:22:36 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:22:36 AM	Tube furnace set to 150
2/15/2012	11:23:06 AM	Helium valve closed
2/15/2012	11:23:06 AM	H2 valve closed
2/15/2012	11:23:06 AM	BCl3 valve closed
2/15/2012	11:23:06 AM	PH3 valve closed
2/15/2012	11:23:06 AM	SiCl4 pre valve closed
2/15/2012	11:23:06 AM	SiCl4 post valve closed
2/15/2012	11:23:06 AM	Bypass valve closed
2/15/2012	11:23:06 AM	Bubbler valve closed
2/15/2012	11:23:06 AM	Main Vac valve opened
2/15/2012	11:23:06 AM	Helium MFC set to  0.000000
2/15/2012	11:23:06 AM	H2 MFC set to  0.000000
2/15/2012	11:23:06 AM	BCl3 MFC set to  0.000000
2/15/2012	11:23:06 AM	PH3 MFC set to  0.000000
2/15/2012	11:23:06 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:23:06 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:23:06 AM	Tube furnace set to 150
2/15/2012	11:23:36 AM	H2 valve closed
2/15/2012	11:23:36 AM	BCl3 valve closed
2/15/2012	11:23:36 AM	PH3 valve closed
2/15/2012	11:23:36 AM	SiCl4 pre valve closed
2/15/2012	11:23:36 AM	SiCl4 post valve closed
2/15/2012	11:23:36 AM	Bypass valve closed
2/15/2012	11:23:36 AM	Bubbler valve closed
2/15/2012	11:23:36 AM	Helium valve opened
2/15/2012	11:23:36 AM	Main Vac valve opened
2/15/2012	11:23:36 AM	Helium MFC set to  20.000000
2/15/2012	11:23:36 AM	H2 MFC set to  0.000000
2/15/2012	11:23:36 AM	BCl3 MFC set to  0.000000
2/15/2012	11:23:36 AM	PH3 MFC set to  0.000000
2/15/2012	11:23:36 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:23:36 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:23:37 AM	Tube furnace set to 150
2/15/2012	11:24:07 AM	Helium valve closed
2/15/2012	11:24:07 AM	H2 valve closed
2/15/2012	11:24:07 AM	BCl3 valve closed
2/15/2012	11:24:07 AM	PH3 valve closed
2/15/2012	11:24:07 AM	SiCl4 pre valve closed
2/15/2012	11:24:07 AM	SiCl4 post valve closed
2/15/2012	11:24:07 AM	Bypass valve closed
2/15/2012	11:24:07 AM	Bubbler valve closed
2/15/2012	11:24:07 AM	Main Vac valve opened
2/15/2012	11:24:07 AM	Helium MFC set to  0.000000
2/15/2012	11:24:07 AM	H2 MFC set to  0.000000
2/15/2012	11:24:07 AM	BCl3 MFC set to  0.000000
2/15/2012	11:24:07 AM	PH3 MFC set to  0.000000
2/15/2012	11:24:07 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:24:07 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:24:07 AM	Tube furnace set to 150
2/15/2012	11:24:37 AM	H2 valve closed
2/15/2012	11:24:37 AM	BCl3 valve closed
2/15/2012	11:24:37 AM	PH3 valve closed
2/15/2012	11:24:37 AM	SiCl4 pre valve closed
2/15/2012	11:24:37 AM	SiCl4 post valve closed
2/15/2012	11:24:37 AM	Bypass valve closed
2/15/2012	11:24:37 AM	Bubbler valve closed
2/15/2012	11:24:37 AM	Helium valve opened
2/15/2012	11:24:37 AM	Main Vac valve opened
2/15/2012	11:24:37 AM	Helium MFC set to  20.000000
2/15/2012	11:24:37 AM	H2 MFC set to  0.000000
2/15/2012	11:24:37 AM	BCl3 MFC set to  0.000000
2/15/2012	11:24:37 AM	PH3 MFC set to  0.000000
2/15/2012	11:24:37 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:24:37 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:24:37 AM	Tube furnace set to 150
2/15/2012	11:25:07 AM	Helium valve closed
2/15/2012	11:25:07 AM	H2 valve closed
2/15/2012	11:25:07 AM	BCl3 valve closed
2/15/2012	11:25:07 AM	PH3 valve closed
2/15/2012	11:25:07 AM	SiCl4 pre valve closed
2/15/2012	11:25:07 AM	SiCl4 post valve closed
2/15/2012	11:25:07 AM	Bypass valve closed
2/15/2012	11:25:07 AM	Bubbler valve closed
2/15/2012	11:25:07 AM	Main Vac valve opened
2/15/2012	11:25:07 AM	Helium MFC set to  0.000000
2/15/2012	11:25:07 AM	H2 MFC set to  0.000000
2/15/2012	11:25:07 AM	BCl3 MFC set to  0.000000
2/15/2012	11:25:07 AM	PH3 MFC set to  0.000000
2/15/2012	11:25:07 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:25:07 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:25:07 AM	Tube furnace set to 150
2/15/2012	11:25:37 AM	H2 valve closed
2/15/2012	11:25:37 AM	BCl3 valve closed
2/15/2012	11:25:37 AM	PH3 valve closed
2/15/2012	11:25:37 AM	SiCl4 pre valve closed
2/15/2012	11:25:37 AM	SiCl4 post valve closed
2/15/2012	11:25:37 AM	Bypass valve closed
2/15/2012	11:25:37 AM	Bubbler valve closed
2/15/2012	11:25:37 AM	Helium valve opened
2/15/2012	11:25:37 AM	Main Vac valve opened
2/15/2012	11:25:37 AM	Helium MFC set to  20.000000
2/15/2012	11:25:37 AM	H2 MFC set to  0.000000
2/15/2012	11:25:37 AM	BCl3 MFC set to  0.000000
2/15/2012	11:25:37 AM	PH3 MFC set to  0.000000
2/15/2012	11:25:37 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:25:37 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:25:37 AM	Tube furnace set to 150
2/15/2012	11:26:07 AM	Helium valve closed
2/15/2012	11:26:07 AM	H2 valve closed
2/15/2012	11:26:07 AM	BCl3 valve closed
2/15/2012	11:26:07 AM	PH3 valve closed
2/15/2012	11:26:07 AM	SiCl4 pre valve closed
2/15/2012	11:26:07 AM	SiCl4 post valve closed
2/15/2012	11:26:07 AM	Bypass valve closed
2/15/2012	11:26:07 AM	Bubbler valve closed
2/15/2012	11:26:07 AM	Main Vac valve opened
2/15/2012	11:26:07 AM	Helium MFC set to  0.000000
2/15/2012	11:26:07 AM	H2 MFC set to  0.000000
2/15/2012	11:26:07 AM	BCl3 MFC set to  0.000000
2/15/2012	11:26:07 AM	PH3 MFC set to  0.000000
2/15/2012	11:26:07 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:26:07 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:26:08 AM	Tube furnace set to 150
2/15/2012	11:26:38 AM	H2 valve closed
2/15/2012	11:26:38 AM	BCl3 valve closed
2/15/2012	11:26:38 AM	PH3 valve closed
2/15/2012	11:26:38 AM	SiCl4 pre valve closed
2/15/2012	11:26:38 AM	SiCl4 post valve closed
2/15/2012	11:26:38 AM	Bypass valve closed
2/15/2012	11:26:38 AM	Bubbler valve closed
2/15/2012	11:26:38 AM	Helium valve opened
2/15/2012	11:26:38 AM	Main Vac valve opened
2/15/2012	11:26:38 AM	Helium MFC set to  20.000000
2/15/2012	11:26:38 AM	H2 MFC set to  0.000000
2/15/2012	11:26:38 AM	BCl3 MFC set to  0.000000
2/15/2012	11:26:38 AM	PH3 MFC set to  0.000000
2/15/2012	11:26:38 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:26:38 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:26:38 AM	Tube furnace set to 150
2/15/2012	11:27:08 AM	Helium valve closed
2/15/2012	11:27:08 AM	H2 valve closed
2/15/2012	11:27:08 AM	BCl3 valve closed
2/15/2012	11:27:08 AM	PH3 valve closed
2/15/2012	11:27:08 AM	SiCl4 pre valve closed
2/15/2012	11:27:08 AM	SiCl4 post valve closed
2/15/2012	11:27:08 AM	Bypass valve closed
2/15/2012	11:27:08 AM	Bubbler valve closed
2/15/2012	11:27:08 AM	Main Vac valve opened
2/15/2012	11:27:08 AM	Helium MFC set to  0.000000
2/15/2012	11:27:08 AM	H2 MFC set to  0.000000
2/15/2012	11:27:08 AM	BCl3 MFC set to  0.000000
2/15/2012	11:27:08 AM	PH3 MFC set to  0.000000
2/15/2012	11:27:08 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:27:08 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:27:08 AM	Tube furnace set to 150
2/15/2012	11:27:38 AM	H2 valve closed
2/15/2012	11:27:38 AM	BCl3 valve closed
2/15/2012	11:27:38 AM	PH3 valve closed
2/15/2012	11:27:38 AM	SiCl4 pre valve closed
2/15/2012	11:27:38 AM	SiCl4 post valve closed
2/15/2012	11:27:38 AM	Bypass valve closed
2/15/2012	11:27:38 AM	Bubbler valve closed
2/15/2012	11:27:38 AM	Helium valve opened
2/15/2012	11:27:38 AM	Main Vac valve opened
2/15/2012	11:27:38 AM	Helium MFC set to  20.000000
2/15/2012	11:27:38 AM	H2 MFC set to  0.000000
2/15/2012	11:27:38 AM	BCl3 MFC set to  0.000000
2/15/2012	11:27:38 AM	PH3 MFC set to  0.000000
2/15/2012	11:27:38 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:27:38 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:27:38 AM	Tube furnace set to 150
2/15/2012	11:28:08 AM	Helium valve closed
2/15/2012	11:28:08 AM	H2 valve closed
2/15/2012	11:28:08 AM	BCl3 valve closed
2/15/2012	11:28:08 AM	PH3 valve closed
2/15/2012	11:28:08 AM	SiCl4 pre valve closed
2/15/2012	11:28:08 AM	SiCl4 post valve closed
2/15/2012	11:28:08 AM	Bypass valve closed
2/15/2012	11:28:08 AM	Bubbler valve closed
2/15/2012	11:28:08 AM	Main Vac valve opened
2/15/2012	11:28:08 AM	Helium MFC set to  0.000000
2/15/2012	11:28:08 AM	H2 MFC set to  0.000000
2/15/2012	11:28:08 AM	BCl3 MFC set to  0.000000
2/15/2012	11:28:08 AM	PH3 MFC set to  0.000000
2/15/2012	11:28:08 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:28:08 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:28:08 AM	Tube furnace set to 150
2/15/2012	11:28:09 AM	Run finished at 11:28 AM
2/15/2012	11:28:31 AM	Recipe started at 11:28 AM
2/15/2012	11:28:31 AM	Helium valve closed
2/15/2012	11:28:31 AM	H2 valve closed
2/15/2012	11:28:31 AM	BCl3 valve closed
2/15/2012	11:28:31 AM	PH3 valve closed
2/15/2012	11:28:31 AM	SiCl4 pre valve closed
2/15/2012	11:28:31 AM	SiCl4 post valve closed
2/15/2012	11:28:31 AM	Bypass valve closed
2/15/2012	11:28:31 AM	Bubbler valve closed
2/15/2012	11:28:31 AM	Main Vac valve opened
2/15/2012	11:28:31 AM	Helium MFC set to  0.000000
2/15/2012	11:28:31 AM	H2 MFC set to  0.000000
2/15/2012	11:28:31 AM	BCl3 MFC set to  0.000000
2/15/2012	11:28:31 AM	PH3 MFC set to  0.000000
2/15/2012	11:28:31 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:28:31 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:28:32 AM	Tube furnace set to 150
2/15/2012	11:29:02 AM	H2 valve closed
2/15/2012	11:29:02 AM	BCl3 valve closed
2/15/2012	11:29:02 AM	PH3 valve closed
2/15/2012	11:29:02 AM	SiCl4 pre valve closed
2/15/2012	11:29:02 AM	SiCl4 post valve closed
2/15/2012	11:29:02 AM	Bypass valve closed
2/15/2012	11:29:02 AM	Bubbler valve closed
2/15/2012	11:29:02 AM	Helium valve opened
2/15/2012	11:29:02 AM	Main Vac valve opened
2/15/2012	11:29:02 AM	Helium MFC set to  20.000000
2/15/2012	11:29:02 AM	H2 MFC set to  0.000000
2/15/2012	11:29:02 AM	BCl3 MFC set to  0.000000
2/15/2012	11:29:02 AM	PH3 MFC set to  0.000000
2/15/2012	11:29:02 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:29:02 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:29:02 AM	Tube furnace set to 150
2/15/2012	11:29:32 AM	Helium valve closed
2/15/2012	11:29:32 AM	H2 valve closed
2/15/2012	11:29:32 AM	BCl3 valve closed
2/15/2012	11:29:32 AM	PH3 valve closed
2/15/2012	11:29:32 AM	SiCl4 pre valve closed
2/15/2012	11:29:32 AM	SiCl4 post valve closed
2/15/2012	11:29:32 AM	Bypass valve closed
2/15/2012	11:29:32 AM	Bubbler valve closed
2/15/2012	11:29:32 AM	Main Vac valve opened
2/15/2012	11:29:32 AM	Helium MFC set to  0.000000
2/15/2012	11:29:32 AM	H2 MFC set to  0.000000
2/15/2012	11:29:32 AM	BCl3 MFC set to  0.000000
2/15/2012	11:29:32 AM	PH3 MFC set to  0.000000
2/15/2012	11:29:32 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:29:32 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:29:32 AM	Tube furnace set to 150
2/15/2012	11:30:02 AM	H2 valve closed
2/15/2012	11:30:02 AM	BCl3 valve closed
2/15/2012	11:30:02 AM	PH3 valve closed
2/15/2012	11:30:02 AM	SiCl4 pre valve closed
2/15/2012	11:30:02 AM	SiCl4 post valve closed
2/15/2012	11:30:02 AM	Bypass valve closed
2/15/2012	11:30:02 AM	Bubbler valve closed
2/15/2012	11:30:02 AM	Helium valve opened
2/15/2012	11:30:02 AM	Main Vac valve opened
2/15/2012	11:30:02 AM	Helium MFC set to  20.000000
2/15/2012	11:30:02 AM	H2 MFC set to  0.000000
2/15/2012	11:30:02 AM	BCl3 MFC set to  0.000000
2/15/2012	11:30:02 AM	PH3 MFC set to  0.000000
2/15/2012	11:30:02 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:30:02 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:30:02 AM	Tube furnace set to 150
2/15/2012	11:30:32 AM	Helium valve closed
2/15/2012	11:30:32 AM	H2 valve closed
2/15/2012	11:30:32 AM	BCl3 valve closed
2/15/2012	11:30:32 AM	PH3 valve closed
2/15/2012	11:30:32 AM	SiCl4 pre valve closed
2/15/2012	11:30:32 AM	SiCl4 post valve closed
2/15/2012	11:30:32 AM	Bypass valve closed
2/15/2012	11:30:32 AM	Bubbler valve closed
2/15/2012	11:30:32 AM	Main Vac valve opened
2/15/2012	11:30:32 AM	Helium MFC set to  0.000000
2/15/2012	11:30:32 AM	H2 MFC set to  0.000000
2/15/2012	11:30:32 AM	BCl3 MFC set to  0.000000
2/15/2012	11:30:32 AM	PH3 MFC set to  0.000000
2/15/2012	11:30:32 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:30:32 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:30:32 AM	Tube furnace set to 150
2/15/2012	11:31:02 AM	H2 valve closed
2/15/2012	11:31:02 AM	BCl3 valve closed
2/15/2012	11:31:02 AM	PH3 valve closed
2/15/2012	11:31:02 AM	SiCl4 pre valve closed
2/15/2012	11:31:02 AM	SiCl4 post valve closed
2/15/2012	11:31:02 AM	Bypass valve closed
2/15/2012	11:31:02 AM	Bubbler valve closed
2/15/2012	11:31:02 AM	Helium valve opened
2/15/2012	11:31:02 AM	Main Vac valve opened
2/15/2012	11:31:02 AM	Helium MFC set to  20.000000
2/15/2012	11:31:02 AM	H2 MFC set to  0.000000
2/15/2012	11:31:02 AM	BCl3 MFC set to  0.000000
2/15/2012	11:31:02 AM	PH3 MFC set to  0.000000
2/15/2012	11:31:02 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:31:02 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:31:03 AM	Tube furnace set to 150
2/15/2012	11:31:33 AM	Helium valve closed
2/15/2012	11:31:33 AM	H2 valve closed
2/15/2012	11:31:33 AM	BCl3 valve closed
2/15/2012	11:31:33 AM	PH3 valve closed
2/15/2012	11:31:33 AM	SiCl4 pre valve closed
2/15/2012	11:31:33 AM	SiCl4 post valve closed
2/15/2012	11:31:33 AM	Bypass valve closed
2/15/2012	11:31:33 AM	Bubbler valve closed
2/15/2012	11:31:33 AM	Main Vac valve opened
2/15/2012	11:31:33 AM	Helium MFC set to  0.000000
2/15/2012	11:31:33 AM	H2 MFC set to  0.000000
2/15/2012	11:31:33 AM	BCl3 MFC set to  0.000000
2/15/2012	11:31:33 AM	PH3 MFC set to  0.000000
2/15/2012	11:31:33 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:31:33 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:31:33 AM	Tube furnace set to 150
2/15/2012	11:32:03 AM	H2 valve closed
2/15/2012	11:32:03 AM	BCl3 valve closed
2/15/2012	11:32:03 AM	PH3 valve closed
2/15/2012	11:32:03 AM	SiCl4 pre valve closed
2/15/2012	11:32:03 AM	SiCl4 post valve closed
2/15/2012	11:32:03 AM	Bypass valve closed
2/15/2012	11:32:03 AM	Bubbler valve closed
2/15/2012	11:32:03 AM	Helium valve opened
2/15/2012	11:32:03 AM	Main Vac valve opened
2/15/2012	11:32:03 AM	Helium MFC set to  20.000000
2/15/2012	11:32:03 AM	H2 MFC set to  0.000000
2/15/2012	11:32:03 AM	BCl3 MFC set to  0.000000
2/15/2012	11:32:03 AM	PH3 MFC set to  0.000000
2/15/2012	11:32:03 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:32:03 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:32:03 AM	Tube furnace set to 150
2/15/2012	11:32:33 AM	Helium valve closed
2/15/2012	11:32:33 AM	H2 valve closed
2/15/2012	11:32:33 AM	BCl3 valve closed
2/15/2012	11:32:33 AM	PH3 valve closed
2/15/2012	11:32:33 AM	SiCl4 pre valve closed
2/15/2012	11:32:33 AM	SiCl4 post valve closed
2/15/2012	11:32:33 AM	Bypass valve closed
2/15/2012	11:32:33 AM	Bubbler valve closed
2/15/2012	11:32:33 AM	Main Vac valve opened
2/15/2012	11:32:33 AM	Helium MFC set to  0.000000
2/15/2012	11:32:33 AM	H2 MFC set to  0.000000
2/15/2012	11:32:33 AM	BCl3 MFC set to  0.000000
2/15/2012	11:32:33 AM	PH3 MFC set to  0.000000
2/15/2012	11:32:33 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:32:33 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:32:33 AM	Tube furnace set to 150
2/15/2012	11:33:03 AM	H2 valve closed
2/15/2012	11:33:03 AM	BCl3 valve closed
2/15/2012	11:33:03 AM	PH3 valve closed
2/15/2012	11:33:03 AM	SiCl4 pre valve closed
2/15/2012	11:33:03 AM	SiCl4 post valve closed
2/15/2012	11:33:03 AM	Bypass valve closed
2/15/2012	11:33:03 AM	Bubbler valve closed
2/15/2012	11:33:03 AM	Helium valve opened
2/15/2012	11:33:03 AM	Main Vac valve opened
2/15/2012	11:33:03 AM	Helium MFC set to  20.000000
2/15/2012	11:33:03 AM	H2 MFC set to  0.000000
2/15/2012	11:33:03 AM	BCl3 MFC set to  0.000000
2/15/2012	11:33:03 AM	PH3 MFC set to  0.000000
2/15/2012	11:33:03 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:33:03 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:33:03 AM	Tube furnace set to 150
2/15/2012	11:33:33 AM	Helium valve closed
2/15/2012	11:33:33 AM	H2 valve closed
2/15/2012	11:33:33 AM	BCl3 valve closed
2/15/2012	11:33:33 AM	PH3 valve closed
2/15/2012	11:33:33 AM	SiCl4 pre valve closed
2/15/2012	11:33:33 AM	SiCl4 post valve closed
2/15/2012	11:33:33 AM	Bypass valve closed
2/15/2012	11:33:33 AM	Bubbler valve closed
2/15/2012	11:33:33 AM	Main Vac valve opened
2/15/2012	11:33:33 AM	Helium MFC set to  0.000000
2/15/2012	11:33:33 AM	H2 MFC set to  0.000000
2/15/2012	11:33:33 AM	BCl3 MFC set to  0.000000
2/15/2012	11:33:33 AM	PH3 MFC set to  0.000000
2/15/2012	11:33:33 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:33:33 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:33:34 AM	Tube furnace set to 150
2/15/2012	11:34:04 AM	H2 valve closed
2/15/2012	11:34:04 AM	BCl3 valve closed
2/15/2012	11:34:04 AM	PH3 valve closed
2/15/2012	11:34:04 AM	SiCl4 pre valve closed
2/15/2012	11:34:04 AM	SiCl4 post valve closed
2/15/2012	11:34:04 AM	Bypass valve closed
2/15/2012	11:34:04 AM	Bubbler valve closed
2/15/2012	11:34:04 AM	Helium valve opened
2/15/2012	11:34:04 AM	Main Vac valve opened
2/15/2012	11:34:04 AM	Helium MFC set to  20.000000
2/15/2012	11:34:04 AM	H2 MFC set to  0.000000
2/15/2012	11:34:04 AM	BCl3 MFC set to  0.000000
2/15/2012	11:34:04 AM	PH3 MFC set to  0.000000
2/15/2012	11:34:04 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:34:04 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:34:04 AM	Tube furnace set to 150
2/15/2012	11:34:34 AM	Helium valve closed
2/15/2012	11:34:34 AM	H2 valve closed
2/15/2012	11:34:34 AM	BCl3 valve closed
2/15/2012	11:34:34 AM	PH3 valve closed
2/15/2012	11:34:34 AM	SiCl4 pre valve closed
2/15/2012	11:34:34 AM	SiCl4 post valve closed
2/15/2012	11:34:34 AM	Bypass valve closed
2/15/2012	11:34:34 AM	Bubbler valve closed
2/15/2012	11:34:34 AM	Main Vac valve opened
2/15/2012	11:34:34 AM	Helium MFC set to  0.000000
2/15/2012	11:34:34 AM	H2 MFC set to  0.000000
2/15/2012	11:34:34 AM	BCl3 MFC set to  0.000000
2/15/2012	11:34:34 AM	PH3 MFC set to  0.000000
2/15/2012	11:34:34 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:34:34 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:34:34 AM	Tube furnace set to 150
2/15/2012	11:35:04 AM	H2 valve closed
2/15/2012	11:35:04 AM	BCl3 valve closed
2/15/2012	11:35:04 AM	PH3 valve closed
2/15/2012	11:35:04 AM	SiCl4 pre valve closed
2/15/2012	11:35:04 AM	SiCl4 post valve closed
2/15/2012	11:35:04 AM	Bypass valve closed
2/15/2012	11:35:04 AM	Bubbler valve closed
2/15/2012	11:35:04 AM	Helium valve opened
2/15/2012	11:35:04 AM	Main Vac valve opened
2/15/2012	11:35:04 AM	Helium MFC set to  20.000000
2/15/2012	11:35:04 AM	H2 MFC set to  0.000000
2/15/2012	11:35:04 AM	BCl3 MFC set to  0.000000
2/15/2012	11:35:04 AM	PH3 MFC set to  0.000000
2/15/2012	11:35:04 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:35:04 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:35:04 AM	Tube furnace set to 150
2/15/2012	11:35:34 AM	Helium valve closed
2/15/2012	11:35:34 AM	H2 valve closed
2/15/2012	11:35:34 AM	BCl3 valve closed
2/15/2012	11:35:34 AM	PH3 valve closed
2/15/2012	11:35:34 AM	SiCl4 pre valve closed
2/15/2012	11:35:34 AM	SiCl4 post valve closed
2/15/2012	11:35:34 AM	Bypass valve closed
2/15/2012	11:35:34 AM	Bubbler valve closed
2/15/2012	11:35:34 AM	Main Vac valve opened
2/15/2012	11:35:34 AM	Helium MFC set to  0.000000
2/15/2012	11:35:34 AM	H2 MFC set to  0.000000
2/15/2012	11:35:34 AM	BCl3 MFC set to  0.000000
2/15/2012	11:35:34 AM	PH3 MFC set to  0.000000
2/15/2012	11:35:34 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:35:34 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:35:34 AM	Tube furnace set to 150
2/15/2012	11:36:04 AM	H2 valve closed
2/15/2012	11:36:04 AM	BCl3 valve closed
2/15/2012	11:36:04 AM	PH3 valve closed
2/15/2012	11:36:04 AM	SiCl4 pre valve closed
2/15/2012	11:36:04 AM	SiCl4 post valve closed
2/15/2012	11:36:04 AM	Bypass valve closed
2/15/2012	11:36:04 AM	Bubbler valve closed
2/15/2012	11:36:04 AM	Helium valve opened
2/15/2012	11:36:04 AM	Main Vac valve opened
2/15/2012	11:36:04 AM	Helium MFC set to  20.000000
2/15/2012	11:36:04 AM	H2 MFC set to  0.000000
2/15/2012	11:36:04 AM	BCl3 MFC set to  0.000000
2/15/2012	11:36:04 AM	PH3 MFC set to  0.000000
2/15/2012	11:36:04 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:36:04 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:36:05 AM	Tube furnace set to 150
2/15/2012	11:36:35 AM	Helium valve closed
2/15/2012	11:36:35 AM	H2 valve closed
2/15/2012	11:36:35 AM	BCl3 valve closed
2/15/2012	11:36:35 AM	PH3 valve closed
2/15/2012	11:36:35 AM	SiCl4 pre valve closed
2/15/2012	11:36:35 AM	SiCl4 post valve closed
2/15/2012	11:36:35 AM	Bypass valve closed
2/15/2012	11:36:35 AM	Bubbler valve closed
2/15/2012	11:36:35 AM	Main Vac valve opened
2/15/2012	11:36:35 AM	Helium MFC set to  0.000000
2/15/2012	11:36:35 AM	H2 MFC set to  0.000000
2/15/2012	11:36:35 AM	BCl3 MFC set to  0.000000
2/15/2012	11:36:35 AM	PH3 MFC set to  0.000000
2/15/2012	11:36:35 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:36:35 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:36:35 AM	Tube furnace set to 150
2/15/2012	11:37:05 AM	H2 valve closed
2/15/2012	11:37:05 AM	BCl3 valve closed
2/15/2012	11:37:05 AM	PH3 valve closed
2/15/2012	11:37:05 AM	SiCl4 pre valve closed
2/15/2012	11:37:05 AM	SiCl4 post valve closed
2/15/2012	11:37:05 AM	Bypass valve closed
2/15/2012	11:37:05 AM	Bubbler valve closed
2/15/2012	11:37:05 AM	Helium valve opened
2/15/2012	11:37:05 AM	Main Vac valve opened
2/15/2012	11:37:05 AM	Helium MFC set to  20.000000
2/15/2012	11:37:05 AM	H2 MFC set to  0.000000
2/15/2012	11:37:05 AM	BCl3 MFC set to  0.000000
2/15/2012	11:37:05 AM	PH3 MFC set to  0.000000
2/15/2012	11:37:05 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:37:05 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:37:05 AM	Tube furnace set to 150
2/15/2012	11:37:35 AM	Helium valve closed
2/15/2012	11:37:35 AM	H2 valve closed
2/15/2012	11:37:35 AM	BCl3 valve closed
2/15/2012	11:37:35 AM	PH3 valve closed
2/15/2012	11:37:35 AM	SiCl4 pre valve closed
2/15/2012	11:37:35 AM	SiCl4 post valve closed
2/15/2012	11:37:35 AM	Bypass valve closed
2/15/2012	11:37:35 AM	Bubbler valve closed
2/15/2012	11:37:35 AM	Main Vac valve opened
2/15/2012	11:37:35 AM	Helium MFC set to  0.000000
2/15/2012	11:37:35 AM	H2 MFC set to  0.000000
2/15/2012	11:37:35 AM	BCl3 MFC set to  0.000000
2/15/2012	11:37:35 AM	PH3 MFC set to  0.000000
2/15/2012	11:37:35 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:37:35 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:37:35 AM	Tube furnace set to 150
2/15/2012	11:38:05 AM	H2 valve closed
2/15/2012	11:38:05 AM	BCl3 valve closed
2/15/2012	11:38:05 AM	PH3 valve closed
2/15/2012	11:38:05 AM	SiCl4 pre valve closed
2/15/2012	11:38:05 AM	SiCl4 post valve closed
2/15/2012	11:38:05 AM	Bypass valve closed
2/15/2012	11:38:05 AM	Bubbler valve closed
2/15/2012	11:38:05 AM	Helium valve opened
2/15/2012	11:38:05 AM	Main Vac valve opened
2/15/2012	11:38:05 AM	Helium MFC set to  20.000000
2/15/2012	11:38:05 AM	H2 MFC set to  0.000000
2/15/2012	11:38:05 AM	BCl3 MFC set to  0.000000
2/15/2012	11:38:05 AM	PH3 MFC set to  0.000000
2/15/2012	11:38:05 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:38:05 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:38:05 AM	Tube furnace set to 150
2/15/2012	11:38:35 AM	Helium valve closed
2/15/2012	11:38:35 AM	H2 valve closed
2/15/2012	11:38:35 AM	BCl3 valve closed
2/15/2012	11:38:35 AM	PH3 valve closed
2/15/2012	11:38:35 AM	SiCl4 pre valve closed
2/15/2012	11:38:35 AM	SiCl4 post valve closed
2/15/2012	11:38:35 AM	Bypass valve closed
2/15/2012	11:38:35 AM	Bubbler valve closed
2/15/2012	11:38:35 AM	Main Vac valve opened
2/15/2012	11:38:35 AM	Helium MFC set to  0.000000
2/15/2012	11:38:35 AM	H2 MFC set to  0.000000
2/15/2012	11:38:35 AM	BCl3 MFC set to  0.000000
2/15/2012	11:38:35 AM	PH3 MFC set to  0.000000
2/15/2012	11:38:35 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:38:35 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:38:36 AM	Tube furnace set to 150
2/15/2012	11:38:37 AM	Run finished at 11:38 AM
2/15/2012	11:48:38 AM	Recipe started at 11:48 AM
2/15/2012	11:48:38 AM	Helium valve closed
2/15/2012	11:48:38 AM	H2 valve closed
2/15/2012	11:48:38 AM	BCl3 valve closed
2/15/2012	11:48:38 AM	PH3 valve closed
2/15/2012	11:48:38 AM	SiCl4 pre valve closed
2/15/2012	11:48:38 AM	SiCl4 post valve closed
2/15/2012	11:48:38 AM	Bypass valve closed
2/15/2012	11:48:38 AM	Bubbler valve closed
2/15/2012	11:48:38 AM	Main Vac valve opened
2/15/2012	11:48:38 AM	Helium MFC set to  0.000000
2/15/2012	11:48:38 AM	H2 MFC set to  0.000000
2/15/2012	11:48:38 AM	BCl3 MFC set to  0.000000
2/15/2012	11:48:38 AM	PH3 MFC set to  0.000000
2/15/2012	11:48:38 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:48:38 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:48:38 AM	Tube furnace set to 150
2/15/2012	11:49:08 AM	H2 valve closed
2/15/2012	11:49:08 AM	BCl3 valve closed
2/15/2012	11:49:08 AM	PH3 valve closed
2/15/2012	11:49:08 AM	SiCl4 pre valve closed
2/15/2012	11:49:08 AM	SiCl4 post valve closed
2/15/2012	11:49:08 AM	Bypass valve closed
2/15/2012	11:49:08 AM	Bubbler valve closed
2/15/2012	11:49:08 AM	Helium valve opened
2/15/2012	11:49:08 AM	Main Vac valve opened
2/15/2012	11:49:08 AM	Helium MFC set to  20.000000
2/15/2012	11:49:08 AM	H2 MFC set to  0.000000
2/15/2012	11:49:08 AM	BCl3 MFC set to  0.000000
2/15/2012	11:49:08 AM	PH3 MFC set to  0.000000
2/15/2012	11:49:08 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:49:08 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:49:08 AM	Tube furnace set to 150
2/15/2012	11:49:38 AM	Helium valve closed
2/15/2012	11:49:38 AM	H2 valve closed
2/15/2012	11:49:38 AM	BCl3 valve closed
2/15/2012	11:49:38 AM	PH3 valve closed
2/15/2012	11:49:38 AM	SiCl4 pre valve closed
2/15/2012	11:49:38 AM	SiCl4 post valve closed
2/15/2012	11:49:38 AM	Bypass valve closed
2/15/2012	11:49:38 AM	Bubbler valve closed
2/15/2012	11:49:38 AM	Main Vac valve opened
2/15/2012	11:49:38 AM	Helium MFC set to  0.000000
2/15/2012	11:49:38 AM	H2 MFC set to  0.000000
2/15/2012	11:49:38 AM	BCl3 MFC set to  0.000000
2/15/2012	11:49:38 AM	PH3 MFC set to  0.000000
2/15/2012	11:49:38 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:49:38 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:49:38 AM	Tube furnace set to 150
2/15/2012	11:50:09 AM	H2 valve closed
2/15/2012	11:50:09 AM	BCl3 valve closed
2/15/2012	11:50:09 AM	PH3 valve closed
2/15/2012	11:50:09 AM	SiCl4 pre valve closed
2/15/2012	11:50:09 AM	SiCl4 post valve closed
2/15/2012	11:50:09 AM	Bypass valve closed
2/15/2012	11:50:09 AM	Bubbler valve closed
2/15/2012	11:50:09 AM	Helium valve opened
2/15/2012	11:50:09 AM	Main Vac valve opened
2/15/2012	11:50:09 AM	Helium MFC set to  20.000000
2/15/2012	11:50:09 AM	H2 MFC set to  0.000000
2/15/2012	11:50:09 AM	BCl3 MFC set to  0.000000
2/15/2012	11:50:09 AM	PH3 MFC set to  0.000000
2/15/2012	11:50:09 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:50:09 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:50:09 AM	Tube furnace set to 150
2/15/2012	11:50:39 AM	Helium valve closed
2/15/2012	11:50:39 AM	H2 valve closed
2/15/2012	11:50:39 AM	BCl3 valve closed
2/15/2012	11:50:39 AM	PH3 valve closed
2/15/2012	11:50:39 AM	SiCl4 pre valve closed
2/15/2012	11:50:39 AM	SiCl4 post valve closed
2/15/2012	11:50:39 AM	Bypass valve closed
2/15/2012	11:50:39 AM	Bubbler valve closed
2/15/2012	11:50:39 AM	Main Vac valve opened
2/15/2012	11:50:39 AM	Helium MFC set to  0.000000
2/15/2012	11:50:39 AM	H2 MFC set to  0.000000
2/15/2012	11:50:39 AM	BCl3 MFC set to  0.000000
2/15/2012	11:50:39 AM	PH3 MFC set to  0.000000
2/15/2012	11:50:39 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:50:39 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:50:39 AM	Tube furnace set to 150
2/15/2012	11:51:09 AM	H2 valve closed
2/15/2012	11:51:09 AM	BCl3 valve closed
2/15/2012	11:51:09 AM	PH3 valve closed
2/15/2012	11:51:09 AM	SiCl4 pre valve closed
2/15/2012	11:51:09 AM	SiCl4 post valve closed
2/15/2012	11:51:09 AM	Bypass valve closed
2/15/2012	11:51:09 AM	Bubbler valve closed
2/15/2012	11:51:09 AM	Helium valve opened
2/15/2012	11:51:09 AM	Main Vac valve opened
2/15/2012	11:51:09 AM	Helium MFC set to  20.000000
2/15/2012	11:51:09 AM	H2 MFC set to  0.000000
2/15/2012	11:51:09 AM	BCl3 MFC set to  0.000000
2/15/2012	11:51:09 AM	PH3 MFC set to  0.000000
2/15/2012	11:51:09 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:51:09 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:51:09 AM	Tube furnace set to 150
2/15/2012	11:51:39 AM	Helium valve closed
2/15/2012	11:51:39 AM	H2 valve closed
2/15/2012	11:51:39 AM	BCl3 valve closed
2/15/2012	11:51:39 AM	PH3 valve closed
2/15/2012	11:51:39 AM	SiCl4 pre valve closed
2/15/2012	11:51:39 AM	SiCl4 post valve closed
2/15/2012	11:51:39 AM	Bypass valve closed
2/15/2012	11:51:39 AM	Bubbler valve closed
2/15/2012	11:51:39 AM	Main Vac valve opened
2/15/2012	11:51:39 AM	Helium MFC set to  0.000000
2/15/2012	11:51:39 AM	H2 MFC set to  0.000000
2/15/2012	11:51:39 AM	BCl3 MFC set to  0.000000
2/15/2012	11:51:39 AM	PH3 MFC set to  0.000000
2/15/2012	11:51:39 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:51:39 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:51:39 AM	Tube furnace set to 150
2/15/2012	11:52:09 AM	H2 valve closed
2/15/2012	11:52:09 AM	BCl3 valve closed
2/15/2012	11:52:09 AM	PH3 valve closed
2/15/2012	11:52:09 AM	SiCl4 pre valve closed
2/15/2012	11:52:09 AM	SiCl4 post valve closed
2/15/2012	11:52:09 AM	Bypass valve closed
2/15/2012	11:52:09 AM	Bubbler valve closed
2/15/2012	11:52:09 AM	Helium valve opened
2/15/2012	11:52:09 AM	Main Vac valve opened
2/15/2012	11:52:09 AM	Helium MFC set to  20.000000
2/15/2012	11:52:09 AM	H2 MFC set to  0.000000
2/15/2012	11:52:09 AM	BCl3 MFC set to  0.000000
2/15/2012	11:52:09 AM	PH3 MFC set to  0.000000
2/15/2012	11:52:09 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:52:09 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:52:10 AM	Tube furnace set to 150
2/15/2012	11:52:40 AM	Helium valve closed
2/15/2012	11:52:40 AM	H2 valve closed
2/15/2012	11:52:40 AM	BCl3 valve closed
2/15/2012	11:52:40 AM	PH3 valve closed
2/15/2012	11:52:40 AM	SiCl4 pre valve closed
2/15/2012	11:52:40 AM	SiCl4 post valve closed
2/15/2012	11:52:40 AM	Bypass valve closed
2/15/2012	11:52:40 AM	Bubbler valve closed
2/15/2012	11:52:40 AM	Main Vac valve opened
2/15/2012	11:52:40 AM	Helium MFC set to  0.000000
2/15/2012	11:52:40 AM	H2 MFC set to  0.000000
2/15/2012	11:52:40 AM	BCl3 MFC set to  0.000000
2/15/2012	11:52:40 AM	PH3 MFC set to  0.000000
2/15/2012	11:52:40 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:52:40 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:52:40 AM	Tube furnace set to 150
2/15/2012	11:53:10 AM	H2 valve closed
2/15/2012	11:53:10 AM	BCl3 valve closed
2/15/2012	11:53:10 AM	PH3 valve closed
2/15/2012	11:53:10 AM	SiCl4 pre valve closed
2/15/2012	11:53:10 AM	SiCl4 post valve closed
2/15/2012	11:53:10 AM	Bypass valve closed
2/15/2012	11:53:10 AM	Bubbler valve closed
2/15/2012	11:53:10 AM	Helium valve opened
2/15/2012	11:53:10 AM	Main Vac valve opened
2/15/2012	11:53:10 AM	Helium MFC set to  20.000000
2/15/2012	11:53:10 AM	H2 MFC set to  0.000000
2/15/2012	11:53:10 AM	BCl3 MFC set to  0.000000
2/15/2012	11:53:10 AM	PH3 MFC set to  0.000000
2/15/2012	11:53:10 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:53:10 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:53:10 AM	Tube furnace set to 150
2/15/2012	11:53:40 AM	Helium valve closed
2/15/2012	11:53:40 AM	H2 valve closed
2/15/2012	11:53:40 AM	BCl3 valve closed
2/15/2012	11:53:40 AM	PH3 valve closed
2/15/2012	11:53:40 AM	SiCl4 pre valve closed
2/15/2012	11:53:40 AM	SiCl4 post valve closed
2/15/2012	11:53:40 AM	Bypass valve closed
2/15/2012	11:53:40 AM	Bubbler valve closed
2/15/2012	11:53:40 AM	Main Vac valve opened
2/15/2012	11:53:40 AM	Helium MFC set to  0.000000
2/15/2012	11:53:40 AM	H2 MFC set to  0.000000
2/15/2012	11:53:40 AM	BCl3 MFC set to  0.000000
2/15/2012	11:53:40 AM	PH3 MFC set to  0.000000
2/15/2012	11:53:40 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:53:40 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:53:40 AM	Tube furnace set to 150
2/15/2012	11:54:10 AM	H2 valve closed
2/15/2012	11:54:10 AM	BCl3 valve closed
2/15/2012	11:54:10 AM	PH3 valve closed
2/15/2012	11:54:10 AM	SiCl4 pre valve closed
2/15/2012	11:54:10 AM	SiCl4 post valve closed
2/15/2012	11:54:10 AM	Bypass valve closed
2/15/2012	11:54:10 AM	Bubbler valve closed
2/15/2012	11:54:10 AM	Helium valve opened
2/15/2012	11:54:10 AM	Main Vac valve opened
2/15/2012	11:54:10 AM	Helium MFC set to  20.000000
2/15/2012	11:54:10 AM	H2 MFC set to  0.000000
2/15/2012	11:54:10 AM	BCl3 MFC set to  0.000000
2/15/2012	11:54:10 AM	PH3 MFC set to  0.000000
2/15/2012	11:54:10 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:54:10 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:54:10 AM	Tube furnace set to 150
2/15/2012	11:54:40 AM	Helium valve closed
2/15/2012	11:54:40 AM	H2 valve closed
2/15/2012	11:54:40 AM	BCl3 valve closed
2/15/2012	11:54:40 AM	PH3 valve closed
2/15/2012	11:54:40 AM	SiCl4 pre valve closed
2/15/2012	11:54:40 AM	SiCl4 post valve closed
2/15/2012	11:54:40 AM	Bypass valve closed
2/15/2012	11:54:40 AM	Bubbler valve closed
2/15/2012	11:54:40 AM	Main Vac valve opened
2/15/2012	11:54:40 AM	Helium MFC set to  0.000000
2/15/2012	11:54:40 AM	H2 MFC set to  0.000000
2/15/2012	11:54:40 AM	BCl3 MFC set to  0.000000
2/15/2012	11:54:40 AM	PH3 MFC set to  0.000000
2/15/2012	11:54:40 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:54:40 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:54:41 AM	Tube furnace set to 150
2/15/2012	11:54:59 AM	Run aborted at 11:54 AM
2/15/2012	11:54:59 AM	Helium valve closed
2/15/2012	11:54:59 AM	H2 valve closed
2/15/2012	11:54:59 AM	BCl3 valve closed
2/15/2012	11:54:59 AM	PH3 valve closed
2/15/2012	11:54:59 AM	SiCl4 pre valve closed
2/15/2012	11:54:59 AM	SiCl4 post valve closed
2/15/2012	11:54:59 AM	Bypass valve closed
2/15/2012	11:54:59 AM	Main Vac valve closed
2/15/2012	11:54:59 AM	Bubbler valve closed
2/15/2012	11:54:59 AM	Helium MFC set to  0.000000
2/15/2012	11:54:59 AM	H2 MFC set to  0.000000
2/15/2012	11:54:59 AM	BCl3 MFC set to  0.000000
2/15/2012	11:54:59 AM	PH3 MFC set to  0.000000
2/15/2012	11:54:59 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:55:00 AM	Tube furnace set to 0
2/15/2012	11:55:02 AM	Main Vac valve opened
2/15/2012	11:55:14 AM	Main Vac valve closed
2/15/2012	11:55:24 AM	Main Vac valve opened
2/15/2012	11:55:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/15/2012	11:55:40 AM	Recipe started at 11:55 AM
2/15/2012	11:55:40 AM	Helium valve closed
2/15/2012	11:55:40 AM	H2 valve closed
2/15/2012	11:55:40 AM	BCl3 valve closed
2/15/2012	11:55:40 AM	PH3 valve closed
2/15/2012	11:55:40 AM	SiCl4 pre valve closed
2/15/2012	11:55:40 AM	SiCl4 post valve closed
2/15/2012	11:55:40 AM	Main Vac valve closed
2/15/2012	11:55:40 AM	Bubbler valve closed
2/15/2012	11:55:40 AM	Bypass valve opened
2/15/2012	11:55:40 AM	Helium MFC set to  0.000000
2/15/2012	11:55:40 AM	H2 MFC set to  0.000000
2/15/2012	11:55:40 AM	BCl3 MFC set to  0.000000
2/15/2012	11:55:40 AM	PH3 MFC set to  0.000000
2/15/2012	11:55:40 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:55:40 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:55:40 AM	Tube furnace set to 0
2/15/2012	11:55:41 AM	Helium valve closed
2/15/2012	11:55:41 AM	H2 valve closed
2/15/2012	11:55:41 AM	BCl3 valve closed
2/15/2012	11:55:41 AM	PH3 valve closed
2/15/2012	11:55:41 AM	SiCl4 pre valve closed
2/15/2012	11:55:41 AM	SiCl4 post valve closed
2/15/2012	11:55:41 AM	Main Vac valve closed
2/15/2012	11:55:41 AM	Bubbler valve closed
2/15/2012	11:55:41 AM	Bypass valve opened
2/15/2012	11:55:41 AM	Helium MFC set to  0.000000
2/15/2012	11:55:41 AM	H2 MFC set to  0.000000
2/15/2012	11:55:41 AM	BCl3 MFC set to  0.000000
2/15/2012	11:55:41 AM	PH3 MFC set to  0.000000
2/15/2012	11:55:41 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:55:41 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:55:41 AM	Tube furnace set to 0
2/15/2012	11:55:45 AM	Helium valve closed
2/15/2012	11:55:45 AM	H2 valve closed
2/15/2012	11:55:45 AM	BCl3 valve closed
2/15/2012	11:55:45 AM	PH3 valve closed
2/15/2012	11:55:45 AM	SiCl4 pre valve closed
2/15/2012	11:55:45 AM	SiCl4 post valve closed
2/15/2012	11:55:45 AM	Bypass valve closed
2/15/2012	11:55:45 AM	Bubbler valve closed
2/15/2012	11:55:45 AM	Main Vac valve opened
2/15/2012	11:55:45 AM	Helium MFC set to  0.000000
2/15/2012	11:55:45 AM	H2 MFC set to  0.000000
2/15/2012	11:55:45 AM	BCl3 MFC set to  0.000000
2/15/2012	11:55:45 AM	PH3 MFC set to  0.000000
2/15/2012	11:55:45 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:55:45 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:55:45 AM	Tube furnace set to 0
2/15/2012	11:55:46 AM	H2 valve closed
2/15/2012	11:55:46 AM	BCl3 valve closed
2/15/2012	11:55:46 AM	PH3 valve closed
2/15/2012	11:55:46 AM	SiCl4 pre valve closed
2/15/2012	11:55:46 AM	SiCl4 post valve closed
2/15/2012	11:55:46 AM	Bypass valve closed
2/15/2012	11:55:46 AM	Bubbler valve closed
2/15/2012	11:55:46 AM	Helium valve opened
2/15/2012	11:55:46 AM	Main Vac valve opened
2/15/2012	11:55:46 AM	Helium MFC set to  20.000000
2/15/2012	11:55:46 AM	H2 MFC set to  0.000000
2/15/2012	11:55:46 AM	BCl3 MFC set to  0.000000
2/15/2012	11:55:46 AM	PH3 MFC set to  0.000000
2/15/2012	11:55:46 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:55:46 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:55:46 AM	Tube furnace set to 0
2/15/2012	11:55:47 AM	Helium valve closed
2/15/2012	11:55:47 AM	H2 valve closed
2/15/2012	11:55:47 AM	BCl3 valve closed
2/15/2012	11:55:47 AM	PH3 valve closed
2/15/2012	11:55:47 AM	SiCl4 pre valve closed
2/15/2012	11:55:47 AM	SiCl4 post valve closed
2/15/2012	11:55:47 AM	Bypass valve closed
2/15/2012	11:55:47 AM	Bubbler valve closed
2/15/2012	11:55:47 AM	Main Vac valve opened
2/15/2012	11:55:47 AM	Helium MFC set to  0.000000
2/15/2012	11:55:47 AM	H2 MFC set to  0.000000
2/15/2012	11:55:47 AM	BCl3 MFC set to  0.000000
2/15/2012	11:55:47 AM	PH3 MFC set to  0.000000
2/15/2012	11:55:47 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:55:47 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:55:47 AM	Tube furnace set to 0
2/15/2012	11:55:49 AM	H2 valve closed
2/15/2012	11:55:49 AM	BCl3 valve closed
2/15/2012	11:55:49 AM	PH3 valve closed
2/15/2012	11:55:49 AM	SiCl4 pre valve closed
2/15/2012	11:55:49 AM	SiCl4 post valve closed
2/15/2012	11:55:49 AM	Bypass valve closed
2/15/2012	11:55:49 AM	Bubbler valve closed
2/15/2012	11:55:49 AM	Helium valve opened
2/15/2012	11:55:49 AM	Main Vac valve opened
2/15/2012	11:55:49 AM	Helium MFC set to  20.000000
2/15/2012	11:55:49 AM	H2 MFC set to  0.000000
2/15/2012	11:55:49 AM	BCl3 MFC set to  0.000000
2/15/2012	11:55:49 AM	PH3 MFC set to  0.000000
2/15/2012	11:55:49 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:55:49 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:55:49 AM	Tube furnace set to 0
2/15/2012	11:55:50 AM	Helium valve closed
2/15/2012	11:55:50 AM	H2 valve closed
2/15/2012	11:55:50 AM	BCl3 valve closed
2/15/2012	11:55:50 AM	PH3 valve closed
2/15/2012	11:55:50 AM	SiCl4 pre valve closed
2/15/2012	11:55:50 AM	SiCl4 post valve closed
2/15/2012	11:55:50 AM	Bypass valve closed
2/15/2012	11:55:50 AM	Bubbler valve closed
2/15/2012	11:55:50 AM	Main Vac valve opened
2/15/2012	11:55:50 AM	Helium MFC set to  0.000000
2/15/2012	11:55:50 AM	H2 MFC set to  0.000000
2/15/2012	11:55:50 AM	BCl3 MFC set to  0.000000
2/15/2012	11:55:50 AM	PH3 MFC set to  0.000000
2/15/2012	11:55:50 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:55:50 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:55:50 AM	Tube furnace set to 0
2/15/2012	11:55:51 AM	H2 valve closed
2/15/2012	11:55:51 AM	BCl3 valve closed
2/15/2012	11:55:51 AM	PH3 valve closed
2/15/2012	11:55:51 AM	SiCl4 pre valve closed
2/15/2012	11:55:51 AM	SiCl4 post valve closed
2/15/2012	11:55:51 AM	Bypass valve closed
2/15/2012	11:55:51 AM	Bubbler valve closed
2/15/2012	11:55:51 AM	Helium valve opened
2/15/2012	11:55:51 AM	Main Vac valve opened
2/15/2012	11:55:51 AM	Helium MFC set to  20.000000
2/15/2012	11:55:51 AM	H2 MFC set to  0.000000
2/15/2012	11:55:51 AM	BCl3 MFC set to  0.000000
2/15/2012	11:55:51 AM	PH3 MFC set to  0.000000
2/15/2012	11:55:51 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:55:51 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:55:51 AM	Tube furnace set to 0
2/15/2012	11:56:21 AM	Helium valve closed
2/15/2012	11:56:21 AM	H2 valve closed
2/15/2012	11:56:21 AM	BCl3 valve closed
2/15/2012	11:56:21 AM	PH3 valve closed
2/15/2012	11:56:21 AM	SiCl4 pre valve closed
2/15/2012	11:56:21 AM	SiCl4 post valve closed
2/15/2012	11:56:21 AM	Bypass valve closed
2/15/2012	11:56:21 AM	Bubbler valve closed
2/15/2012	11:56:21 AM	Main Vac valve opened
2/15/2012	11:56:21 AM	Helium MFC set to  0.000000
2/15/2012	11:56:21 AM	H2 MFC set to  0.000000
2/15/2012	11:56:21 AM	BCl3 MFC set to  0.000000
2/15/2012	11:56:21 AM	PH3 MFC set to  0.000000
2/15/2012	11:56:21 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:56:21 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:56:21 AM	Tube furnace set to 0
2/15/2012	11:56:51 AM	H2 valve closed
2/15/2012	11:56:51 AM	BCl3 valve closed
2/15/2012	11:56:51 AM	PH3 valve closed
2/15/2012	11:56:51 AM	SiCl4 pre valve closed
2/15/2012	11:56:51 AM	SiCl4 post valve closed
2/15/2012	11:56:51 AM	Bypass valve closed
2/15/2012	11:56:51 AM	Bubbler valve closed
2/15/2012	11:56:51 AM	Helium valve opened
2/15/2012	11:56:51 AM	Main Vac valve opened
2/15/2012	11:56:51 AM	Helium MFC set to  20.000000
2/15/2012	11:56:51 AM	H2 MFC set to  0.000000
2/15/2012	11:56:51 AM	BCl3 MFC set to  0.000000
2/15/2012	11:56:51 AM	PH3 MFC set to  0.000000
2/15/2012	11:56:51 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:56:51 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:56:51 AM	Tube furnace set to 0
2/15/2012	11:57:21 AM	Helium valve closed
2/15/2012	11:57:21 AM	H2 valve closed
2/15/2012	11:57:21 AM	BCl3 valve closed
2/15/2012	11:57:21 AM	PH3 valve closed
2/15/2012	11:57:21 AM	SiCl4 pre valve closed
2/15/2012	11:57:21 AM	SiCl4 post valve closed
2/15/2012	11:57:21 AM	Bypass valve closed
2/15/2012	11:57:21 AM	Bubbler valve closed
2/15/2012	11:57:21 AM	Main Vac valve opened
2/15/2012	11:57:21 AM	Helium MFC set to  0.000000
2/15/2012	11:57:21 AM	H2 MFC set to  0.000000
2/15/2012	11:57:21 AM	BCl3 MFC set to  0.000000
2/15/2012	11:57:21 AM	PH3 MFC set to  0.000000
2/15/2012	11:57:21 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:57:21 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:57:21 AM	Tube furnace set to 0
2/15/2012	11:57:51 AM	H2 valve closed
2/15/2012	11:57:51 AM	BCl3 valve closed
2/15/2012	11:57:51 AM	PH3 valve closed
2/15/2012	11:57:51 AM	SiCl4 pre valve closed
2/15/2012	11:57:51 AM	SiCl4 post valve closed
2/15/2012	11:57:51 AM	Bypass valve closed
2/15/2012	11:57:51 AM	Bubbler valve closed
2/15/2012	11:57:51 AM	Helium valve opened
2/15/2012	11:57:51 AM	Main Vac valve opened
2/15/2012	11:57:51 AM	Helium MFC set to  20.000000
2/15/2012	11:57:51 AM	H2 MFC set to  0.000000
2/15/2012	11:57:51 AM	BCl3 MFC set to  0.000000
2/15/2012	11:57:51 AM	PH3 MFC set to  0.000000
2/15/2012	11:57:51 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:57:51 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:57:52 AM	Tube furnace set to 0
2/15/2012	11:58:22 AM	Helium valve closed
2/15/2012	11:58:22 AM	H2 valve closed
2/15/2012	11:58:22 AM	BCl3 valve closed
2/15/2012	11:58:22 AM	PH3 valve closed
2/15/2012	11:58:22 AM	SiCl4 pre valve closed
2/15/2012	11:58:22 AM	SiCl4 post valve closed
2/15/2012	11:58:22 AM	Bypass valve closed
2/15/2012	11:58:22 AM	Bubbler valve closed
2/15/2012	11:58:22 AM	Main Vac valve opened
2/15/2012	11:58:22 AM	Helium MFC set to  0.000000
2/15/2012	11:58:22 AM	H2 MFC set to  0.000000
2/15/2012	11:58:22 AM	BCl3 MFC set to  0.000000
2/15/2012	11:58:22 AM	PH3 MFC set to  0.000000
2/15/2012	11:58:22 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:58:22 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:58:22 AM	Tube furnace set to 0
2/15/2012	11:58:52 AM	H2 valve closed
2/15/2012	11:58:52 AM	BCl3 valve closed
2/15/2012	11:58:52 AM	PH3 valve closed
2/15/2012	11:58:52 AM	SiCl4 pre valve closed
2/15/2012	11:58:52 AM	SiCl4 post valve closed
2/15/2012	11:58:52 AM	Bypass valve closed
2/15/2012	11:58:52 AM	Bubbler valve closed
2/15/2012	11:58:52 AM	Helium valve opened
2/15/2012	11:58:52 AM	Main Vac valve opened
2/15/2012	11:58:52 AM	Helium MFC set to  20.000000
2/15/2012	11:58:52 AM	H2 MFC set to  0.000000
2/15/2012	11:58:52 AM	BCl3 MFC set to  0.000000
2/15/2012	11:58:52 AM	PH3 MFC set to  0.000000
2/15/2012	11:58:52 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:58:52 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:58:52 AM	Tube furnace set to 0
2/15/2012	11:59:22 AM	Helium valve closed
2/15/2012	11:59:22 AM	H2 valve closed
2/15/2012	11:59:22 AM	BCl3 valve closed
2/15/2012	11:59:22 AM	PH3 valve closed
2/15/2012	11:59:22 AM	SiCl4 pre valve closed
2/15/2012	11:59:22 AM	SiCl4 post valve closed
2/15/2012	11:59:22 AM	Bypass valve closed
2/15/2012	11:59:22 AM	Bubbler valve closed
2/15/2012	11:59:22 AM	Main Vac valve opened
2/15/2012	11:59:22 AM	Helium MFC set to  0.000000
2/15/2012	11:59:22 AM	H2 MFC set to  0.000000
2/15/2012	11:59:22 AM	BCl3 MFC set to  0.000000
2/15/2012	11:59:22 AM	PH3 MFC set to  0.000000
2/15/2012	11:59:22 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:59:22 AM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:59:22 AM	Tube furnace set to 0
2/15/2012	11:59:48 AM	Run aborted at 11:59 AM
2/15/2012	11:59:48 AM	Helium valve closed
2/15/2012	11:59:48 AM	H2 valve closed
2/15/2012	11:59:48 AM	BCl3 valve closed
2/15/2012	11:59:48 AM	PH3 valve closed
2/15/2012	11:59:48 AM	SiCl4 pre valve closed
2/15/2012	11:59:48 AM	SiCl4 post valve closed
2/15/2012	11:59:48 AM	Bypass valve closed
2/15/2012	11:59:48 AM	Main Vac valve closed
2/15/2012	11:59:48 AM	Bubbler valve closed
2/15/2012	11:59:48 AM	Helium MFC set to  0.000000
2/15/2012	11:59:48 AM	H2 MFC set to  0.000000
2/15/2012	11:59:48 AM	BCl3 MFC set to  0.000000
2/15/2012	11:59:48 AM	PH3 MFC set to  0.000000
2/15/2012	11:59:48 AM	SiCl4 MFC set to  0.000000
2/15/2012	11:59:49 AM	Tube furnace set to 0
2/15/2012	11:59:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/15/2012	11:59:51 AM	Main Vac valve opened
2/15/2012	12:00:03 PM	Main Vac valve closed
2/15/2012	12:00:16 PM	Main Vac valve opened
2/15/2012	12:01:22 PM	Recipe started at 12:01 PM
2/15/2012	12:01:22 PM	Helium valve closed
2/15/2012	12:01:22 PM	H2 valve closed
2/15/2012	12:01:22 PM	BCl3 valve closed
2/15/2012	12:01:22 PM	PH3 valve closed
2/15/2012	12:01:22 PM	SiCl4 pre valve closed
2/15/2012	12:01:22 PM	SiCl4 post valve closed
2/15/2012	12:01:22 PM	Main Vac valve closed
2/15/2012	12:01:22 PM	Bypass valve closed
2/15/2012	12:01:22 PM	Bubbler valve closed
2/15/2012	12:01:22 PM	Helium MFC set to  0.000000
2/15/2012	12:01:22 PM	H2 MFC set to  0.000000
2/15/2012	12:01:22 PM	BCl3 MFC set to  0.000000
2/15/2012	12:01:22 PM	PH3 MFC set to  0.000000
2/15/2012	12:01:22 PM	SiCl4 MFC set to  0.000000
2/15/2012	12:01:22 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	12:01:22 PM	Tube furnace set to 0
2/15/2012	12:01:26 PM	Helium valve closed
2/15/2012	12:01:26 PM	BCl3 valve closed
2/15/2012	12:01:26 PM	PH3 valve closed
2/15/2012	12:01:26 PM	SiCl4 pre valve closed
2/15/2012	12:01:26 PM	SiCl4 post valve closed
2/15/2012	12:01:26 PM	Main Vac valve closed
2/15/2012	12:01:26 PM	Bypass valve closed
2/15/2012	12:01:26 PM	Bubbler valve closed
2/15/2012	12:01:26 PM	H2 valve opened
2/15/2012	12:01:26 PM	Helium MFC set to  0.000000
2/15/2012	12:01:26 PM	H2 MFC set to  500.000000
2/15/2012	12:01:26 PM	BCl3 MFC set to  0.000000
2/15/2012	12:01:26 PM	PH3 MFC set to  0.000000
2/15/2012	12:01:26 PM	SiCl4 MFC set to  0.000000
2/15/2012	12:01:26 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	12:01:26 PM	Tube furnace set to 0
2/15/2012	12:02:29 PM	Helium valve closed
2/15/2012	12:02:29 PM	BCl3 valve closed
2/15/2012	12:02:29 PM	PH3 valve closed
2/15/2012	12:02:29 PM	SiCl4 pre valve closed
2/15/2012	12:02:29 PM	SiCl4 post valve closed
2/15/2012	12:02:29 PM	Main Vac valve closed
2/15/2012	12:02:29 PM	Bypass valve closed
2/15/2012	12:02:29 PM	H2 valve opened
2/15/2012	12:02:30 PM	Bubbler valve opened
2/15/2012	12:02:30 PM	Helium MFC set to  0.000000
2/15/2012	12:02:30 PM	H2 MFC set to  500.000000
2/15/2012	12:02:30 PM	BCl3 MFC set to  0.000000
2/15/2012	12:02:30 PM	PH3 MFC set to  0.000000
2/15/2012	12:02:30 PM	SiCl4 MFC set to  0.000000
2/15/2012	12:02:30 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	12:02:30 PM	Tube furnace set to 0
2/15/2012	12:02:31 PM	Helium valve closed
2/15/2012	12:02:31 PM	BCl3 valve closed
2/15/2012	12:02:31 PM	PH3 valve closed
2/15/2012	12:02:31 PM	SiCl4 pre valve closed
2/15/2012	12:02:31 PM	SiCl4 post valve closed
2/15/2012	12:02:31 PM	Main Vac valve closed
2/15/2012	12:02:31 PM	Bypass valve closed
2/15/2012	12:02:31 PM	H2 valve opened
2/15/2012	12:02:31 PM	Bubbler valve opened
2/15/2012	12:02:31 PM	Helium MFC set to  0.000000
2/15/2012	12:02:31 PM	H2 MFC set to  450.000000
2/15/2012	12:02:31 PM	BCl3 MFC set to  0.000000
2/15/2012	12:02:31 PM	PH3 MFC set to  0.000000
2/15/2012	12:02:31 PM	SiCl4 MFC set to  0.000000
2/15/2012	12:02:31 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	12:02:31 PM	Tube furnace set to 1000
2/15/2012	12:27:31 PM	Helium valve closed
2/15/2012	12:27:31 PM	PH3 valve closed
2/15/2012	12:27:31 PM	Main Vac valve closed
2/15/2012	12:27:31 PM	Bypass valve closed
2/15/2012	12:27:31 PM	H2 valve opened
2/15/2012	12:27:31 PM	BCl3 valve opened
2/15/2012	12:27:31 PM	SiCl4 pre valve opened
2/15/2012	12:27:31 PM	SiCl4 post valve opened
2/15/2012	12:27:31 PM	Bubbler valve opened
2/15/2012	12:27:31 PM	Helium MFC set to  0.000000
2/15/2012	12:27:31 PM	H2 MFC set to  450.000000
2/15/2012	12:27:31 PM	BCl3 MFC set to  1.500000
2/15/2012	12:27:31 PM	PH3 MFC set to  0.000000
2/15/2012	12:27:31 PM	SiCl4 MFC set to  50.000000
2/15/2012	12:27:31 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	12:27:31 PM	Tube furnace set to 1000
2/15/2012	12:32:31 PM	Helium valve closed
2/15/2012	12:32:31 PM	BCl3 valve closed
2/15/2012	12:32:31 PM	PH3 valve closed
2/15/2012	12:32:31 PM	SiCl4 pre valve closed
2/15/2012	12:32:31 PM	SiCl4 post valve closed
2/15/2012	12:32:31 PM	Main Vac valve closed
2/15/2012	12:32:31 PM	Bypass valve closed
2/15/2012	12:32:31 PM	H2 valve opened
2/15/2012	12:32:31 PM	Bubbler valve opened
2/15/2012	12:32:31 PM	Helium MFC set to  0.000000
2/15/2012	12:32:31 PM	H2 MFC set to  500.000000
2/15/2012	12:32:31 PM	BCl3 MFC set to  0.000000
2/15/2012	12:32:31 PM	PH3 MFC set to  0.000000
2/15/2012	12:32:31 PM	SiCl4 MFC set to  0.000000
2/15/2012	12:32:31 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	12:32:31 PM	Tube furnace set to 750
2/15/2012	12:37:31 PM	H2 valve closed
2/15/2012	12:37:31 PM	BCl3 valve closed
2/15/2012	12:37:31 PM	PH3 valve closed
2/15/2012	12:37:31 PM	SiCl4 pre valve closed
2/15/2012	12:37:31 PM	SiCl4 post valve closed
2/15/2012	12:37:31 PM	Main Vac valve closed
2/15/2012	12:37:31 PM	Bypass valve closed
2/15/2012	12:37:31 PM	Helium valve opened
2/15/2012	12:37:31 PM	Bubbler valve opened
2/15/2012	12:37:31 PM	Helium MFC set to  500.000000
2/15/2012	12:37:31 PM	H2 MFC set to  0.000000
2/15/2012	12:37:31 PM	BCl3 MFC set to  0.000000
2/15/2012	12:37:31 PM	PH3 MFC set to  0.000000
2/15/2012	12:37:31 PM	SiCl4 MFC set to  0.000000
2/15/2012	12:37:31 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	12:37:32 PM	Tube furnace set to 0
2/15/2012	12:57:32 PM	Helium valve closed
2/15/2012	12:57:32 PM	H2 valve closed
2/15/2012	12:57:32 PM	BCl3 valve closed
2/15/2012	12:57:32 PM	PH3 valve closed
2/15/2012	12:57:32 PM	SiCl4 pre valve closed
2/15/2012	12:57:32 PM	SiCl4 post valve closed
2/15/2012	12:57:32 PM	Main Vac valve closed
2/15/2012	12:57:32 PM	Bypass valve closed
2/15/2012	12:57:32 PM	Bubbler valve closed
2/15/2012	12:57:32 PM	Helium MFC set to  0.000000
2/15/2012	12:57:32 PM	H2 MFC set to  0.000000
2/15/2012	12:57:32 PM	BCl3 MFC set to  0.000000
2/15/2012	12:57:32 PM	PH3 MFC set to  0.000000
2/15/2012	12:57:32 PM	SiCl4 MFC set to  0.000000
2/15/2012	12:57:32 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	12:57:32 PM	Tube furnace set to 0
2/15/2012	12:57:33 PM	Run finished at 12:57 PM
2/15/2012	1:05:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2012	1:05:14 PM	Recipe started at 1:05 PM
2/15/2012	1:05:14 PM	Helium valve closed
2/15/2012	1:05:14 PM	H2 valve closed
2/15/2012	1:05:14 PM	BCl3 valve closed
2/15/2012	1:05:14 PM	PH3 valve closed
2/15/2012	1:05:14 PM	SiCl4 pre valve closed
2/15/2012	1:05:14 PM	SiCl4 post valve closed
2/15/2012	1:05:14 PM	Main Vac valve closed
2/15/2012	1:05:14 PM	Bypass valve closed
2/15/2012	1:05:14 PM	Bubbler valve closed
2/15/2012	1:05:14 PM	Helium MFC set to  0.000000
2/15/2012	1:05:14 PM	H2 MFC set to  0.000000
2/15/2012	1:05:14 PM	BCl3 MFC set to  0.000000
2/15/2012	1:05:14 PM	PH3 MFC set to  0.000000
2/15/2012	1:05:14 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:05:14 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:05:14 PM	Tube furnace set to 0
2/15/2012	1:05:17 PM	H2 valve closed
2/15/2012	1:05:17 PM	BCl3 valve closed
2/15/2012	1:05:17 PM	PH3 valve closed
2/15/2012	1:05:17 PM	SiCl4 pre valve closed
2/15/2012	1:05:17 PM	SiCl4 post valve closed
2/15/2012	1:05:17 PM	Main Vac valve closed
2/15/2012	1:05:17 PM	Bypass valve closed
2/15/2012	1:05:17 PM	Bubbler valve closed
2/15/2012	1:05:17 PM	Helium valve opened
2/15/2012	1:05:17 PM	Helium MFC set to  500.000000
2/15/2012	1:05:17 PM	H2 MFC set to  0.000000
2/15/2012	1:05:17 PM	BCl3 MFC set to  0.000000
2/15/2012	1:05:17 PM	PH3 MFC set to  0.000000
2/15/2012	1:05:17 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:05:17 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:05:17 PM	Tube furnace set to 0
2/15/2012	1:05:19 PM	Helium valve closed
2/15/2012	1:05:19 PM	H2 valve closed
2/15/2012	1:05:19 PM	BCl3 valve closed
2/15/2012	1:05:19 PM	PH3 valve closed
2/15/2012	1:05:19 PM	SiCl4 pre valve closed
2/15/2012	1:05:19 PM	SiCl4 post valve closed
2/15/2012	1:05:19 PM	Main Vac valve closed
2/15/2012	1:05:19 PM	Bypass valve closed
2/15/2012	1:05:19 PM	Bubbler valve closed
2/15/2012	1:05:19 PM	Helium MFC set to  0.000000
2/15/2012	1:05:19 PM	H2 MFC set to  0.000000
2/15/2012	1:05:19 PM	BCl3 MFC set to  0.000000
2/15/2012	1:05:19 PM	PH3 MFC set to  0.000000
2/15/2012	1:05:19 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:05:19 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:05:19 PM	Tube furnace set to 0
2/15/2012	1:05:20 PM	Run finished at 1:05 PM
2/15/2012	1:05:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2012	1:11:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2012	1:11:06 PM	Recipe started at 1:11 PM
2/15/2012	1:11:06 PM	Helium valve closed
2/15/2012	1:11:06 PM	H2 valve closed
2/15/2012	1:11:06 PM	BCl3 valve closed
2/15/2012	1:11:06 PM	PH3 valve closed
2/15/2012	1:11:06 PM	SiCl4 pre valve closed
2/15/2012	1:11:06 PM	SiCl4 post valve closed
2/15/2012	1:11:06 PM	Main Vac valve closed
2/15/2012	1:11:06 PM	Bubbler valve closed
2/15/2012	1:11:06 PM	Bypass valve opened
2/15/2012	1:11:06 PM	Helium MFC set to  0.000000
2/15/2012	1:11:06 PM	H2 MFC set to  0.000000
2/15/2012	1:11:06 PM	BCl3 MFC set to  0.000000
2/15/2012	1:11:06 PM	PH3 MFC set to  0.000000
2/15/2012	1:11:06 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:11:06 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:11:06 PM	Tube furnace set to 0
2/15/2012	1:12:07 PM	Helium valve closed
2/15/2012	1:12:07 PM	H2 valve closed
2/15/2012	1:12:07 PM	BCl3 valve closed
2/15/2012	1:12:07 PM	PH3 valve closed
2/15/2012	1:12:07 PM	SiCl4 pre valve closed
2/15/2012	1:12:07 PM	SiCl4 post valve closed
2/15/2012	1:12:07 PM	Main Vac valve closed
2/15/2012	1:12:07 PM	Bubbler valve closed
2/15/2012	1:12:07 PM	Bypass valve opened
2/15/2012	1:12:07 PM	Helium MFC set to  0.000000
2/15/2012	1:12:07 PM	H2 MFC set to  0.000000
2/15/2012	1:12:07 PM	BCl3 MFC set to  0.000000
2/15/2012	1:12:07 PM	PH3 MFC set to  0.000000
2/15/2012	1:12:07 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:12:07 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:12:07 PM	Tube furnace set to 0
2/15/2012	1:13:07 PM	Helium valve closed
2/15/2012	1:13:07 PM	H2 valve closed
2/15/2012	1:13:07 PM	BCl3 valve closed
2/15/2012	1:13:07 PM	PH3 valve closed
2/15/2012	1:13:07 PM	SiCl4 pre valve closed
2/15/2012	1:13:07 PM	SiCl4 post valve closed
2/15/2012	1:13:07 PM	Bypass valve closed
2/15/2012	1:13:07 PM	Bubbler valve closed
2/15/2012	1:13:07 PM	Main Vac valve opened
2/15/2012	1:13:07 PM	Helium MFC set to  0.000000
2/15/2012	1:13:07 PM	H2 MFC set to  0.000000
2/15/2012	1:13:07 PM	BCl3 MFC set to  0.000000
2/15/2012	1:13:07 PM	PH3 MFC set to  0.000000
2/15/2012	1:13:07 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:13:07 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:13:07 PM	Tube furnace set to 0
2/15/2012	1:13:08 PM	Run finished at 1:13 PM
2/15/2012	1:13:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2012	1:24:56 PM	Recipe started at 1:24 PM
2/15/2012	1:24:56 PM	Helium valve closed
2/15/2012	1:24:56 PM	H2 valve closed
2/15/2012	1:24:56 PM	BCl3 valve closed
2/15/2012	1:24:56 PM	PH3 valve closed
2/15/2012	1:24:56 PM	SiCl4 pre valve closed
2/15/2012	1:24:56 PM	SiCl4 post valve closed
2/15/2012	1:24:56 PM	Bypass valve closed
2/15/2012	1:24:56 PM	Bubbler valve closed
2/15/2012	1:24:56 PM	Main Vac valve opened
2/15/2012	1:24:56 PM	Helium MFC set to  0.000000
2/15/2012	1:24:56 PM	H2 MFC set to  0.000000
2/15/2012	1:24:56 PM	BCl3 MFC set to  0.000000
2/15/2012	1:24:56 PM	PH3 MFC set to  0.000000
2/15/2012	1:24:56 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:24:56 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:24:56 PM	Tube furnace set to 150
2/15/2012	1:25:26 PM	H2 valve closed
2/15/2012	1:25:26 PM	BCl3 valve closed
2/15/2012	1:25:26 PM	PH3 valve closed
2/15/2012	1:25:26 PM	SiCl4 pre valve closed
2/15/2012	1:25:26 PM	SiCl4 post valve closed
2/15/2012	1:25:26 PM	Bypass valve closed
2/15/2012	1:25:26 PM	Bubbler valve closed
2/15/2012	1:25:26 PM	Helium valve opened
2/15/2012	1:25:26 PM	Main Vac valve opened
2/15/2012	1:25:26 PM	Helium MFC set to  20.000000
2/15/2012	1:25:26 PM	H2 MFC set to  0.000000
2/15/2012	1:25:26 PM	BCl3 MFC set to  0.000000
2/15/2012	1:25:26 PM	PH3 MFC set to  0.000000
2/15/2012	1:25:26 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:25:26 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:25:26 PM	Tube furnace set to 150
2/15/2012	1:25:56 PM	Helium valve closed
2/15/2012	1:25:57 PM	H2 valve closed
2/15/2012	1:25:57 PM	BCl3 valve closed
2/15/2012	1:25:57 PM	PH3 valve closed
2/15/2012	1:25:57 PM	SiCl4 pre valve closed
2/15/2012	1:25:57 PM	SiCl4 post valve closed
2/15/2012	1:25:57 PM	Bypass valve closed
2/15/2012	1:25:57 PM	Bubbler valve closed
2/15/2012	1:25:57 PM	Main Vac valve opened
2/15/2012	1:25:57 PM	Helium MFC set to  0.000000
2/15/2012	1:25:57 PM	H2 MFC set to  0.000000
2/15/2012	1:25:57 PM	BCl3 MFC set to  0.000000
2/15/2012	1:25:57 PM	PH3 MFC set to  0.000000
2/15/2012	1:25:57 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:25:57 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:25:57 PM	Tube furnace set to 150
2/15/2012	1:26:27 PM	H2 valve closed
2/15/2012	1:26:27 PM	BCl3 valve closed
2/15/2012	1:26:27 PM	PH3 valve closed
2/15/2012	1:26:27 PM	SiCl4 pre valve closed
2/15/2012	1:26:27 PM	SiCl4 post valve closed
2/15/2012	1:26:27 PM	Bypass valve closed
2/15/2012	1:26:27 PM	Bubbler valve closed
2/15/2012	1:26:27 PM	Helium valve opened
2/15/2012	1:26:27 PM	Main Vac valve opened
2/15/2012	1:26:27 PM	Helium MFC set to  20.000000
2/15/2012	1:26:27 PM	H2 MFC set to  0.000000
2/15/2012	1:26:27 PM	BCl3 MFC set to  0.000000
2/15/2012	1:26:27 PM	PH3 MFC set to  0.000000
2/15/2012	1:26:27 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:26:27 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:26:27 PM	Tube furnace set to 150
2/15/2012	1:26:57 PM	Helium valve closed
2/15/2012	1:26:57 PM	H2 valve closed
2/15/2012	1:26:57 PM	BCl3 valve closed
2/15/2012	1:26:57 PM	PH3 valve closed
2/15/2012	1:26:57 PM	SiCl4 pre valve closed
2/15/2012	1:26:57 PM	SiCl4 post valve closed
2/15/2012	1:26:57 PM	Bypass valve closed
2/15/2012	1:26:57 PM	Bubbler valve closed
2/15/2012	1:26:57 PM	Main Vac valve opened
2/15/2012	1:26:57 PM	Helium MFC set to  0.000000
2/15/2012	1:26:57 PM	H2 MFC set to  0.000000
2/15/2012	1:26:57 PM	BCl3 MFC set to  0.000000
2/15/2012	1:26:57 PM	PH3 MFC set to  0.000000
2/15/2012	1:26:57 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:26:57 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:26:57 PM	Tube furnace set to 150
2/15/2012	1:27:27 PM	H2 valve closed
2/15/2012	1:27:27 PM	BCl3 valve closed
2/15/2012	1:27:27 PM	PH3 valve closed
2/15/2012	1:27:27 PM	SiCl4 pre valve closed
2/15/2012	1:27:27 PM	SiCl4 post valve closed
2/15/2012	1:27:27 PM	Bypass valve closed
2/15/2012	1:27:27 PM	Bubbler valve closed
2/15/2012	1:27:27 PM	Helium valve opened
2/15/2012	1:27:27 PM	Main Vac valve opened
2/15/2012	1:27:27 PM	Helium MFC set to  20.000000
2/15/2012	1:27:27 PM	H2 MFC set to  0.000000
2/15/2012	1:27:27 PM	BCl3 MFC set to  0.000000
2/15/2012	1:27:27 PM	PH3 MFC set to  0.000000
2/15/2012	1:27:27 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:27:27 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:27:27 PM	Tube furnace set to 150
2/15/2012	1:27:57 PM	Helium valve closed
2/15/2012	1:27:57 PM	H2 valve closed
2/15/2012	1:27:57 PM	BCl3 valve closed
2/15/2012	1:27:57 PM	PH3 valve closed
2/15/2012	1:27:57 PM	SiCl4 pre valve closed
2/15/2012	1:27:57 PM	SiCl4 post valve closed
2/15/2012	1:27:57 PM	Bypass valve closed
2/15/2012	1:27:57 PM	Bubbler valve closed
2/15/2012	1:27:57 PM	Main Vac valve opened
2/15/2012	1:27:57 PM	Helium MFC set to  0.000000
2/15/2012	1:27:57 PM	H2 MFC set to  0.000000
2/15/2012	1:27:57 PM	BCl3 MFC set to  0.000000
2/15/2012	1:27:57 PM	PH3 MFC set to  0.000000
2/15/2012	1:27:57 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:27:57 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:27:58 PM	Tube furnace set to 150
2/15/2012	1:28:28 PM	H2 valve closed
2/15/2012	1:28:28 PM	BCl3 valve closed
2/15/2012	1:28:28 PM	PH3 valve closed
2/15/2012	1:28:28 PM	SiCl4 pre valve closed
2/15/2012	1:28:28 PM	SiCl4 post valve closed
2/15/2012	1:28:28 PM	Bypass valve closed
2/15/2012	1:28:28 PM	Bubbler valve closed
2/15/2012	1:28:28 PM	Helium valve opened
2/15/2012	1:28:28 PM	Main Vac valve opened
2/15/2012	1:28:28 PM	Helium MFC set to  20.000000
2/15/2012	1:28:28 PM	H2 MFC set to  0.000000
2/15/2012	1:28:28 PM	BCl3 MFC set to  0.000000
2/15/2012	1:28:28 PM	PH3 MFC set to  0.000000
2/15/2012	1:28:28 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:28:28 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:28:28 PM	Tube furnace set to 150
2/15/2012	1:28:58 PM	Helium valve closed
2/15/2012	1:28:58 PM	H2 valve closed
2/15/2012	1:28:58 PM	BCl3 valve closed
2/15/2012	1:28:58 PM	PH3 valve closed
2/15/2012	1:28:58 PM	SiCl4 pre valve closed
2/15/2012	1:28:58 PM	SiCl4 post valve closed
2/15/2012	1:28:58 PM	Bypass valve closed
2/15/2012	1:28:58 PM	Bubbler valve closed
2/15/2012	1:28:58 PM	Main Vac valve opened
2/15/2012	1:28:58 PM	Helium MFC set to  0.000000
2/15/2012	1:28:58 PM	H2 MFC set to  0.000000
2/15/2012	1:28:58 PM	BCl3 MFC set to  0.000000
2/15/2012	1:28:58 PM	PH3 MFC set to  0.000000
2/15/2012	1:28:58 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:28:58 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:28:58 PM	Tube furnace set to 150
2/15/2012	1:29:28 PM	H2 valve closed
2/15/2012	1:29:28 PM	BCl3 valve closed
2/15/2012	1:29:28 PM	PH3 valve closed
2/15/2012	1:29:28 PM	SiCl4 pre valve closed
2/15/2012	1:29:28 PM	SiCl4 post valve closed
2/15/2012	1:29:28 PM	Bypass valve closed
2/15/2012	1:29:28 PM	Bubbler valve closed
2/15/2012	1:29:28 PM	Helium valve opened
2/15/2012	1:29:28 PM	Main Vac valve opened
2/15/2012	1:29:28 PM	Helium MFC set to  20.000000
2/15/2012	1:29:28 PM	H2 MFC set to  0.000000
2/15/2012	1:29:28 PM	BCl3 MFC set to  0.000000
2/15/2012	1:29:28 PM	PH3 MFC set to  0.000000
2/15/2012	1:29:28 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:29:28 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:29:28 PM	Tube furnace set to 150
2/15/2012	1:29:58 PM	Helium valve closed
2/15/2012	1:29:58 PM	H2 valve closed
2/15/2012	1:29:58 PM	BCl3 valve closed
2/15/2012	1:29:58 PM	PH3 valve closed
2/15/2012	1:29:58 PM	SiCl4 pre valve closed
2/15/2012	1:29:58 PM	SiCl4 post valve closed
2/15/2012	1:29:58 PM	Bypass valve closed
2/15/2012	1:29:58 PM	Bubbler valve closed
2/15/2012	1:29:58 PM	Main Vac valve opened
2/15/2012	1:29:58 PM	Helium MFC set to  0.000000
2/15/2012	1:29:58 PM	H2 MFC set to  0.000000
2/15/2012	1:29:58 PM	BCl3 MFC set to  0.000000
2/15/2012	1:29:58 PM	PH3 MFC set to  0.000000
2/15/2012	1:29:58 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:29:58 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:29:58 PM	Tube furnace set to 150
2/15/2012	1:30:28 PM	H2 valve closed
2/15/2012	1:30:28 PM	BCl3 valve closed
2/15/2012	1:30:28 PM	PH3 valve closed
2/15/2012	1:30:28 PM	SiCl4 pre valve closed
2/15/2012	1:30:28 PM	SiCl4 post valve closed
2/15/2012	1:30:28 PM	Bypass valve closed
2/15/2012	1:30:28 PM	Bubbler valve closed
2/15/2012	1:30:28 PM	Helium valve opened
2/15/2012	1:30:28 PM	Main Vac valve opened
2/15/2012	1:30:28 PM	Helium MFC set to  20.000000
2/15/2012	1:30:28 PM	H2 MFC set to  0.000000
2/15/2012	1:30:28 PM	BCl3 MFC set to  0.000000
2/15/2012	1:30:28 PM	PH3 MFC set to  0.000000
2/15/2012	1:30:28 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:30:28 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:30:29 PM	Tube furnace set to 150
2/15/2012	1:30:59 PM	Helium valve closed
2/15/2012	1:30:59 PM	H2 valve closed
2/15/2012	1:30:59 PM	BCl3 valve closed
2/15/2012	1:30:59 PM	PH3 valve closed
2/15/2012	1:30:59 PM	SiCl4 pre valve closed
2/15/2012	1:30:59 PM	SiCl4 post valve closed
2/15/2012	1:30:59 PM	Bypass valve closed
2/15/2012	1:30:59 PM	Bubbler valve closed
2/15/2012	1:30:59 PM	Main Vac valve opened
2/15/2012	1:30:59 PM	Helium MFC set to  0.000000
2/15/2012	1:30:59 PM	H2 MFC set to  0.000000
2/15/2012	1:30:59 PM	BCl3 MFC set to  0.000000
2/15/2012	1:30:59 PM	PH3 MFC set to  0.000000
2/15/2012	1:30:59 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:30:59 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:30:59 PM	Tube furnace set to 150
2/15/2012	1:31:29 PM	H2 valve closed
2/15/2012	1:31:29 PM	BCl3 valve closed
2/15/2012	1:31:29 PM	PH3 valve closed
2/15/2012	1:31:29 PM	SiCl4 pre valve closed
2/15/2012	1:31:29 PM	SiCl4 post valve closed
2/15/2012	1:31:29 PM	Bypass valve closed
2/15/2012	1:31:29 PM	Bubbler valve closed
2/15/2012	1:31:29 PM	Helium valve opened
2/15/2012	1:31:29 PM	Main Vac valve opened
2/15/2012	1:31:29 PM	Helium MFC set to  20.000000
2/15/2012	1:31:29 PM	H2 MFC set to  0.000000
2/15/2012	1:31:29 PM	BCl3 MFC set to  0.000000
2/15/2012	1:31:29 PM	PH3 MFC set to  0.000000
2/15/2012	1:31:29 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:31:29 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:31:29 PM	Tube furnace set to 150
2/15/2012	1:31:59 PM	Helium valve closed
2/15/2012	1:31:59 PM	H2 valve closed
2/15/2012	1:31:59 PM	BCl3 valve closed
2/15/2012	1:31:59 PM	PH3 valve closed
2/15/2012	1:31:59 PM	SiCl4 pre valve closed
2/15/2012	1:31:59 PM	SiCl4 post valve closed
2/15/2012	1:31:59 PM	Bypass valve closed
2/15/2012	1:31:59 PM	Bubbler valve closed
2/15/2012	1:31:59 PM	Main Vac valve opened
2/15/2012	1:31:59 PM	Helium MFC set to  0.000000
2/15/2012	1:31:59 PM	H2 MFC set to  0.000000
2/15/2012	1:31:59 PM	BCl3 MFC set to  0.000000
2/15/2012	1:31:59 PM	PH3 MFC set to  0.000000
2/15/2012	1:31:59 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:31:59 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:31:59 PM	Tube furnace set to 150
2/15/2012	1:32:29 PM	H2 valve closed
2/15/2012	1:32:29 PM	BCl3 valve closed
2/15/2012	1:32:29 PM	PH3 valve closed
2/15/2012	1:32:29 PM	SiCl4 pre valve closed
2/15/2012	1:32:29 PM	SiCl4 post valve closed
2/15/2012	1:32:29 PM	Bypass valve closed
2/15/2012	1:32:29 PM	Bubbler valve closed
2/15/2012	1:32:29 PM	Helium valve opened
2/15/2012	1:32:29 PM	Main Vac valve opened
2/15/2012	1:32:29 PM	Helium MFC set to  20.000000
2/15/2012	1:32:29 PM	H2 MFC set to  0.000000
2/15/2012	1:32:29 PM	BCl3 MFC set to  0.000000
2/15/2012	1:32:29 PM	PH3 MFC set to  0.000000
2/15/2012	1:32:29 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:32:29 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:32:29 PM	Tube furnace set to 150
2/15/2012	1:32:59 PM	Helium valve closed
2/15/2012	1:32:59 PM	H2 valve closed
2/15/2012	1:32:59 PM	BCl3 valve closed
2/15/2012	1:32:59 PM	PH3 valve closed
2/15/2012	1:32:59 PM	SiCl4 pre valve closed
2/15/2012	1:32:59 PM	SiCl4 post valve closed
2/15/2012	1:32:59 PM	Bypass valve closed
2/15/2012	1:32:59 PM	Bubbler valve closed
2/15/2012	1:32:59 PM	Main Vac valve opened
2/15/2012	1:32:59 PM	Helium MFC set to  0.000000
2/15/2012	1:32:59 PM	H2 MFC set to  0.000000
2/15/2012	1:32:59 PM	BCl3 MFC set to  0.000000
2/15/2012	1:32:59 PM	PH3 MFC set to  0.000000
2/15/2012	1:32:59 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:33:00 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:33:00 PM	Tube furnace set to 150
2/15/2012	1:33:30 PM	H2 valve closed
2/15/2012	1:33:30 PM	BCl3 valve closed
2/15/2012	1:33:30 PM	PH3 valve closed
2/15/2012	1:33:30 PM	SiCl4 pre valve closed
2/15/2012	1:33:30 PM	SiCl4 post valve closed
2/15/2012	1:33:30 PM	Bypass valve closed
2/15/2012	1:33:30 PM	Bubbler valve closed
2/15/2012	1:33:30 PM	Helium valve opened
2/15/2012	1:33:30 PM	Main Vac valve opened
2/15/2012	1:33:30 PM	Helium MFC set to  20.000000
2/15/2012	1:33:30 PM	H2 MFC set to  0.000000
2/15/2012	1:33:30 PM	BCl3 MFC set to  0.000000
2/15/2012	1:33:30 PM	PH3 MFC set to  0.000000
2/15/2012	1:33:30 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:33:30 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:33:30 PM	Tube furnace set to 150
2/15/2012	1:34:00 PM	Helium valve closed
2/15/2012	1:34:00 PM	H2 valve closed
2/15/2012	1:34:00 PM	BCl3 valve closed
2/15/2012	1:34:00 PM	PH3 valve closed
2/15/2012	1:34:00 PM	SiCl4 pre valve closed
2/15/2012	1:34:00 PM	SiCl4 post valve closed
2/15/2012	1:34:00 PM	Bypass valve closed
2/15/2012	1:34:00 PM	Bubbler valve closed
2/15/2012	1:34:00 PM	Main Vac valve opened
2/15/2012	1:34:00 PM	Helium MFC set to  0.000000
2/15/2012	1:34:00 PM	H2 MFC set to  0.000000
2/15/2012	1:34:00 PM	BCl3 MFC set to  0.000000
2/15/2012	1:34:00 PM	PH3 MFC set to  0.000000
2/15/2012	1:34:00 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:34:00 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:34:00 PM	Tube furnace set to 150
2/15/2012	1:34:30 PM	H2 valve closed
2/15/2012	1:34:30 PM	BCl3 valve closed
2/15/2012	1:34:30 PM	PH3 valve closed
2/15/2012	1:34:30 PM	SiCl4 pre valve closed
2/15/2012	1:34:30 PM	SiCl4 post valve closed
2/15/2012	1:34:30 PM	Bypass valve closed
2/15/2012	1:34:30 PM	Bubbler valve closed
2/15/2012	1:34:30 PM	Helium valve opened
2/15/2012	1:34:30 PM	Main Vac valve opened
2/15/2012	1:34:30 PM	Helium MFC set to  20.000000
2/15/2012	1:34:30 PM	H2 MFC set to  0.000000
2/15/2012	1:34:30 PM	BCl3 MFC set to  0.000000
2/15/2012	1:34:30 PM	PH3 MFC set to  0.000000
2/15/2012	1:34:30 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:34:30 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:34:30 PM	Tube furnace set to 150
2/15/2012	1:35:00 PM	Helium valve closed
2/15/2012	1:35:00 PM	H2 valve closed
2/15/2012	1:35:00 PM	BCl3 valve closed
2/15/2012	1:35:00 PM	PH3 valve closed
2/15/2012	1:35:00 PM	SiCl4 pre valve closed
2/15/2012	1:35:00 PM	SiCl4 post valve closed
2/15/2012	1:35:00 PM	Bypass valve closed
2/15/2012	1:35:00 PM	Bubbler valve closed
2/15/2012	1:35:00 PM	Main Vac valve opened
2/15/2012	1:35:00 PM	Helium MFC set to  0.000000
2/15/2012	1:35:00 PM	H2 MFC set to  0.000000
2/15/2012	1:35:00 PM	BCl3 MFC set to  0.000000
2/15/2012	1:35:00 PM	PH3 MFC set to  0.000000
2/15/2012	1:35:00 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:35:00 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:35:01 PM	Tube furnace set to 150
2/15/2012	1:35:02 PM	Run finished at 1:35 PM
2/15/2012	1:35:34 PM	Recipe started at 1:35 PM
2/15/2012	1:35:34 PM	Helium valve closed
2/15/2012	1:35:34 PM	H2 valve closed
2/15/2012	1:35:34 PM	BCl3 valve closed
2/15/2012	1:35:34 PM	PH3 valve closed
2/15/2012	1:35:34 PM	SiCl4 pre valve closed
2/15/2012	1:35:34 PM	SiCl4 post valve closed
2/15/2012	1:35:34 PM	Bypass valve closed
2/15/2012	1:35:34 PM	Bubbler valve closed
2/15/2012	1:35:34 PM	Main Vac valve opened
2/15/2012	1:35:34 PM	Helium MFC set to  0.000000
2/15/2012	1:35:34 PM	H2 MFC set to  0.000000
2/15/2012	1:35:34 PM	BCl3 MFC set to  0.000000
2/15/2012	1:35:34 PM	PH3 MFC set to  0.000000
2/15/2012	1:35:34 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:35:34 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:35:34 PM	Tube furnace set to 150
2/15/2012	1:36:04 PM	H2 valve closed
2/15/2012	1:36:04 PM	BCl3 valve closed
2/15/2012	1:36:04 PM	PH3 valve closed
2/15/2012	1:36:04 PM	SiCl4 pre valve closed
2/15/2012	1:36:04 PM	SiCl4 post valve closed
2/15/2012	1:36:04 PM	Bypass valve closed
2/15/2012	1:36:04 PM	Bubbler valve closed
2/15/2012	1:36:04 PM	Helium valve opened
2/15/2012	1:36:04 PM	Main Vac valve opened
2/15/2012	1:36:04 PM	Helium MFC set to  20.000000
2/15/2012	1:36:04 PM	H2 MFC set to  0.000000
2/15/2012	1:36:04 PM	BCl3 MFC set to  0.000000
2/15/2012	1:36:04 PM	PH3 MFC set to  0.000000
2/15/2012	1:36:04 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:36:04 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:36:04 PM	Tube furnace set to 150
2/15/2012	1:36:34 PM	Helium valve closed
2/15/2012	1:36:34 PM	H2 valve closed
2/15/2012	1:36:34 PM	BCl3 valve closed
2/15/2012	1:36:34 PM	PH3 valve closed
2/15/2012	1:36:34 PM	SiCl4 pre valve closed
2/15/2012	1:36:34 PM	SiCl4 post valve closed
2/15/2012	1:36:34 PM	Bypass valve closed
2/15/2012	1:36:34 PM	Bubbler valve closed
2/15/2012	1:36:34 PM	Main Vac valve opened
2/15/2012	1:36:34 PM	Helium MFC set to  0.000000
2/15/2012	1:36:34 PM	H2 MFC set to  0.000000
2/15/2012	1:36:34 PM	BCl3 MFC set to  0.000000
2/15/2012	1:36:34 PM	PH3 MFC set to  0.000000
2/15/2012	1:36:34 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:36:34 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:36:34 PM	Tube furnace set to 150
2/15/2012	1:37:04 PM	H2 valve closed
2/15/2012	1:37:04 PM	BCl3 valve closed
2/15/2012	1:37:04 PM	PH3 valve closed
2/15/2012	1:37:04 PM	SiCl4 pre valve closed
2/15/2012	1:37:04 PM	SiCl4 post valve closed
2/15/2012	1:37:04 PM	Bypass valve closed
2/15/2012	1:37:04 PM	Bubbler valve closed
2/15/2012	1:37:04 PM	Helium valve opened
2/15/2012	1:37:04 PM	Main Vac valve opened
2/15/2012	1:37:04 PM	Helium MFC set to  20.000000
2/15/2012	1:37:04 PM	H2 MFC set to  0.000000
2/15/2012	1:37:04 PM	BCl3 MFC set to  0.000000
2/15/2012	1:37:04 PM	PH3 MFC set to  0.000000
2/15/2012	1:37:04 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:37:04 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:37:04 PM	Tube furnace set to 150
2/15/2012	1:37:34 PM	Helium valve closed
2/15/2012	1:37:34 PM	H2 valve closed
2/15/2012	1:37:34 PM	BCl3 valve closed
2/15/2012	1:37:34 PM	PH3 valve closed
2/15/2012	1:37:34 PM	SiCl4 pre valve closed
2/15/2012	1:37:34 PM	SiCl4 post valve closed
2/15/2012	1:37:34 PM	Bypass valve closed
2/15/2012	1:37:34 PM	Bubbler valve closed
2/15/2012	1:37:34 PM	Main Vac valve opened
2/15/2012	1:37:34 PM	Helium MFC set to  0.000000
2/15/2012	1:37:34 PM	H2 MFC set to  0.000000
2/15/2012	1:37:34 PM	BCl3 MFC set to  0.000000
2/15/2012	1:37:34 PM	PH3 MFC set to  0.000000
2/15/2012	1:37:34 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:37:34 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:37:35 PM	Tube furnace set to 150
2/15/2012	1:38:05 PM	H2 valve closed
2/15/2012	1:38:05 PM	BCl3 valve closed
2/15/2012	1:38:05 PM	PH3 valve closed
2/15/2012	1:38:05 PM	SiCl4 pre valve closed
2/15/2012	1:38:05 PM	SiCl4 post valve closed
2/15/2012	1:38:05 PM	Bypass valve closed
2/15/2012	1:38:05 PM	Bubbler valve closed
2/15/2012	1:38:05 PM	Helium valve opened
2/15/2012	1:38:05 PM	Main Vac valve opened
2/15/2012	1:38:05 PM	Helium MFC set to  20.000000
2/15/2012	1:38:05 PM	H2 MFC set to  0.000000
2/15/2012	1:38:05 PM	BCl3 MFC set to  0.000000
2/15/2012	1:38:05 PM	PH3 MFC set to  0.000000
2/15/2012	1:38:05 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:38:05 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:38:05 PM	Tube furnace set to 150
2/15/2012	1:38:35 PM	Helium valve closed
2/15/2012	1:38:35 PM	H2 valve closed
2/15/2012	1:38:35 PM	BCl3 valve closed
2/15/2012	1:38:35 PM	PH3 valve closed
2/15/2012	1:38:35 PM	SiCl4 pre valve closed
2/15/2012	1:38:35 PM	SiCl4 post valve closed
2/15/2012	1:38:35 PM	Bypass valve closed
2/15/2012	1:38:35 PM	Bubbler valve closed
2/15/2012	1:38:35 PM	Main Vac valve opened
2/15/2012	1:38:35 PM	Helium MFC set to  0.000000
2/15/2012	1:38:35 PM	H2 MFC set to  0.000000
2/15/2012	1:38:35 PM	BCl3 MFC set to  0.000000
2/15/2012	1:38:35 PM	PH3 MFC set to  0.000000
2/15/2012	1:38:35 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:38:35 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:38:35 PM	Tube furnace set to 150
2/15/2012	1:39:05 PM	H2 valve closed
2/15/2012	1:39:05 PM	BCl3 valve closed
2/15/2012	1:39:05 PM	PH3 valve closed
2/15/2012	1:39:05 PM	SiCl4 pre valve closed
2/15/2012	1:39:05 PM	SiCl4 post valve closed
2/15/2012	1:39:05 PM	Bypass valve closed
2/15/2012	1:39:05 PM	Bubbler valve closed
2/15/2012	1:39:05 PM	Helium valve opened
2/15/2012	1:39:05 PM	Main Vac valve opened
2/15/2012	1:39:05 PM	Helium MFC set to  20.000000
2/15/2012	1:39:05 PM	H2 MFC set to  0.000000
2/15/2012	1:39:05 PM	BCl3 MFC set to  0.000000
2/15/2012	1:39:05 PM	PH3 MFC set to  0.000000
2/15/2012	1:39:05 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:39:05 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:39:05 PM	Tube furnace set to 150
2/15/2012	1:39:35 PM	Helium valve closed
2/15/2012	1:39:35 PM	H2 valve closed
2/15/2012	1:39:35 PM	BCl3 valve closed
2/15/2012	1:39:35 PM	PH3 valve closed
2/15/2012	1:39:35 PM	SiCl4 pre valve closed
2/15/2012	1:39:35 PM	SiCl4 post valve closed
2/15/2012	1:39:35 PM	Bypass valve closed
2/15/2012	1:39:35 PM	Bubbler valve closed
2/15/2012	1:39:35 PM	Main Vac valve opened
2/15/2012	1:39:35 PM	Helium MFC set to  0.000000
2/15/2012	1:39:35 PM	H2 MFC set to  0.000000
2/15/2012	1:39:35 PM	BCl3 MFC set to  0.000000
2/15/2012	1:39:35 PM	PH3 MFC set to  0.000000
2/15/2012	1:39:35 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:39:35 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:39:35 PM	Tube furnace set to 150
2/15/2012	1:40:05 PM	H2 valve closed
2/15/2012	1:40:05 PM	BCl3 valve closed
2/15/2012	1:40:05 PM	PH3 valve closed
2/15/2012	1:40:05 PM	SiCl4 pre valve closed
2/15/2012	1:40:05 PM	SiCl4 post valve closed
2/15/2012	1:40:05 PM	Bypass valve closed
2/15/2012	1:40:05 PM	Bubbler valve closed
2/15/2012	1:40:05 PM	Helium valve opened
2/15/2012	1:40:05 PM	Main Vac valve opened
2/15/2012	1:40:05 PM	Helium MFC set to  20.000000
2/15/2012	1:40:05 PM	H2 MFC set to  0.000000
2/15/2012	1:40:05 PM	BCl3 MFC set to  0.000000
2/15/2012	1:40:05 PM	PH3 MFC set to  0.000000
2/15/2012	1:40:05 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:40:05 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:40:06 PM	Tube furnace set to 150
2/15/2012	1:40:36 PM	Helium valve closed
2/15/2012	1:40:36 PM	H2 valve closed
2/15/2012	1:40:36 PM	BCl3 valve closed
2/15/2012	1:40:36 PM	PH3 valve closed
2/15/2012	1:40:36 PM	SiCl4 pre valve closed
2/15/2012	1:40:36 PM	SiCl4 post valve closed
2/15/2012	1:40:36 PM	Bypass valve closed
2/15/2012	1:40:36 PM	Bubbler valve closed
2/15/2012	1:40:36 PM	Main Vac valve opened
2/15/2012	1:40:36 PM	Helium MFC set to  0.000000
2/15/2012	1:40:36 PM	H2 MFC set to  0.000000
2/15/2012	1:40:36 PM	BCl3 MFC set to  0.000000
2/15/2012	1:40:36 PM	PH3 MFC set to  0.000000
2/15/2012	1:40:36 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:40:36 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:40:36 PM	Tube furnace set to 150
2/15/2012	1:41:06 PM	H2 valve closed
2/15/2012	1:41:06 PM	BCl3 valve closed
2/15/2012	1:41:06 PM	PH3 valve closed
2/15/2012	1:41:06 PM	SiCl4 pre valve closed
2/15/2012	1:41:06 PM	SiCl4 post valve closed
2/15/2012	1:41:06 PM	Bypass valve closed
2/15/2012	1:41:06 PM	Bubbler valve closed
2/15/2012	1:41:06 PM	Helium valve opened
2/15/2012	1:41:06 PM	Main Vac valve opened
2/15/2012	1:41:06 PM	Helium MFC set to  20.000000
2/15/2012	1:41:06 PM	H2 MFC set to  0.000000
2/15/2012	1:41:06 PM	BCl3 MFC set to  0.000000
2/15/2012	1:41:06 PM	PH3 MFC set to  0.000000
2/15/2012	1:41:06 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:41:06 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:41:06 PM	Tube furnace set to 150
2/15/2012	1:41:36 PM	Helium valve closed
2/15/2012	1:41:36 PM	H2 valve closed
2/15/2012	1:41:36 PM	BCl3 valve closed
2/15/2012	1:41:36 PM	PH3 valve closed
2/15/2012	1:41:36 PM	SiCl4 pre valve closed
2/15/2012	1:41:36 PM	SiCl4 post valve closed
2/15/2012	1:41:36 PM	Bypass valve closed
2/15/2012	1:41:36 PM	Bubbler valve closed
2/15/2012	1:41:36 PM	Main Vac valve opened
2/15/2012	1:41:36 PM	Helium MFC set to  0.000000
2/15/2012	1:41:36 PM	H2 MFC set to  0.000000
2/15/2012	1:41:36 PM	BCl3 MFC set to  0.000000
2/15/2012	1:41:36 PM	PH3 MFC set to  0.000000
2/15/2012	1:41:36 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:41:36 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:41:36 PM	Tube furnace set to 150
2/15/2012	1:42:06 PM	H2 valve closed
2/15/2012	1:42:06 PM	BCl3 valve closed
2/15/2012	1:42:06 PM	PH3 valve closed
2/15/2012	1:42:06 PM	SiCl4 pre valve closed
2/15/2012	1:42:06 PM	SiCl4 post valve closed
2/15/2012	1:42:06 PM	Bypass valve closed
2/15/2012	1:42:06 PM	Bubbler valve closed
2/15/2012	1:42:06 PM	Helium valve opened
2/15/2012	1:42:06 PM	Main Vac valve opened
2/15/2012	1:42:06 PM	Helium MFC set to  20.000000
2/15/2012	1:42:06 PM	H2 MFC set to  0.000000
2/15/2012	1:42:06 PM	BCl3 MFC set to  0.000000
2/15/2012	1:42:06 PM	PH3 MFC set to  0.000000
2/15/2012	1:42:06 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:42:06 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:42:06 PM	Tube furnace set to 150
2/15/2012	1:42:37 PM	Helium valve closed
2/15/2012	1:42:37 PM	H2 valve closed
2/15/2012	1:42:37 PM	BCl3 valve closed
2/15/2012	1:42:37 PM	PH3 valve closed
2/15/2012	1:42:37 PM	SiCl4 pre valve closed
2/15/2012	1:42:37 PM	SiCl4 post valve closed
2/15/2012	1:42:37 PM	Bypass valve closed
2/15/2012	1:42:37 PM	Bubbler valve closed
2/15/2012	1:42:37 PM	Main Vac valve opened
2/15/2012	1:42:37 PM	Helium MFC set to  0.000000
2/15/2012	1:42:37 PM	H2 MFC set to  0.000000
2/15/2012	1:42:37 PM	BCl3 MFC set to  0.000000
2/15/2012	1:42:37 PM	PH3 MFC set to  0.000000
2/15/2012	1:42:37 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:42:37 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:42:37 PM	Tube furnace set to 150
2/15/2012	1:43:07 PM	H2 valve closed
2/15/2012	1:43:07 PM	BCl3 valve closed
2/15/2012	1:43:07 PM	PH3 valve closed
2/15/2012	1:43:07 PM	SiCl4 pre valve closed
2/15/2012	1:43:07 PM	SiCl4 post valve closed
2/15/2012	1:43:07 PM	Bypass valve closed
2/15/2012	1:43:07 PM	Bubbler valve closed
2/15/2012	1:43:07 PM	Helium valve opened
2/15/2012	1:43:07 PM	Main Vac valve opened
2/15/2012	1:43:07 PM	Helium MFC set to  20.000000
2/15/2012	1:43:07 PM	H2 MFC set to  0.000000
2/15/2012	1:43:07 PM	BCl3 MFC set to  0.000000
2/15/2012	1:43:07 PM	PH3 MFC set to  0.000000
2/15/2012	1:43:07 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:43:07 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:43:07 PM	Tube furnace set to 150
2/15/2012	1:43:37 PM	Helium valve closed
2/15/2012	1:43:37 PM	H2 valve closed
2/15/2012	1:43:37 PM	BCl3 valve closed
2/15/2012	1:43:37 PM	PH3 valve closed
2/15/2012	1:43:37 PM	SiCl4 pre valve closed
2/15/2012	1:43:37 PM	SiCl4 post valve closed
2/15/2012	1:43:37 PM	Bypass valve closed
2/15/2012	1:43:37 PM	Bubbler valve closed
2/15/2012	1:43:37 PM	Main Vac valve opened
2/15/2012	1:43:37 PM	Helium MFC set to  0.000000
2/15/2012	1:43:37 PM	H2 MFC set to  0.000000
2/15/2012	1:43:37 PM	BCl3 MFC set to  0.000000
2/15/2012	1:43:37 PM	PH3 MFC set to  0.000000
2/15/2012	1:43:37 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:43:37 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:43:37 PM	Tube furnace set to 150
2/15/2012	1:44:07 PM	H2 valve closed
2/15/2012	1:44:07 PM	BCl3 valve closed
2/15/2012	1:44:07 PM	PH3 valve closed
2/15/2012	1:44:07 PM	SiCl4 pre valve closed
2/15/2012	1:44:07 PM	SiCl4 post valve closed
2/15/2012	1:44:07 PM	Bypass valve closed
2/15/2012	1:44:07 PM	Bubbler valve closed
2/15/2012	1:44:07 PM	Helium valve opened
2/15/2012	1:44:07 PM	Main Vac valve opened
2/15/2012	1:44:07 PM	Helium MFC set to  20.000000
2/15/2012	1:44:07 PM	H2 MFC set to  0.000000
2/15/2012	1:44:07 PM	BCl3 MFC set to  0.000000
2/15/2012	1:44:07 PM	PH3 MFC set to  0.000000
2/15/2012	1:44:07 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:44:07 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:44:07 PM	Tube furnace set to 150
2/15/2012	1:44:37 PM	Helium valve closed
2/15/2012	1:44:37 PM	H2 valve closed
2/15/2012	1:44:37 PM	BCl3 valve closed
2/15/2012	1:44:37 PM	PH3 valve closed
2/15/2012	1:44:37 PM	SiCl4 pre valve closed
2/15/2012	1:44:37 PM	SiCl4 post valve closed
2/15/2012	1:44:37 PM	Bypass valve closed
2/15/2012	1:44:37 PM	Bubbler valve closed
2/15/2012	1:44:37 PM	Main Vac valve opened
2/15/2012	1:44:37 PM	Helium MFC set to  0.000000
2/15/2012	1:44:37 PM	H2 MFC set to  0.000000
2/15/2012	1:44:37 PM	BCl3 MFC set to  0.000000
2/15/2012	1:44:37 PM	PH3 MFC set to  0.000000
2/15/2012	1:44:37 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:44:37 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:44:38 PM	Tube furnace set to 150
2/15/2012	1:45:08 PM	H2 valve closed
2/15/2012	1:45:08 PM	BCl3 valve closed
2/15/2012	1:45:08 PM	PH3 valve closed
2/15/2012	1:45:08 PM	SiCl4 pre valve closed
2/15/2012	1:45:08 PM	SiCl4 post valve closed
2/15/2012	1:45:08 PM	Bypass valve closed
2/15/2012	1:45:08 PM	Bubbler valve closed
2/15/2012	1:45:08 PM	Helium valve opened
2/15/2012	1:45:08 PM	Main Vac valve opened
2/15/2012	1:45:08 PM	Helium MFC set to  20.000000
2/15/2012	1:45:08 PM	H2 MFC set to  0.000000
2/15/2012	1:45:08 PM	BCl3 MFC set to  0.000000
2/15/2012	1:45:08 PM	PH3 MFC set to  0.000000
2/15/2012	1:45:08 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:45:08 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:45:08 PM	Tube furnace set to 150
2/15/2012	1:45:38 PM	Helium valve closed
2/15/2012	1:45:38 PM	H2 valve closed
2/15/2012	1:45:38 PM	BCl3 valve closed
2/15/2012	1:45:38 PM	PH3 valve closed
2/15/2012	1:45:38 PM	SiCl4 pre valve closed
2/15/2012	1:45:38 PM	SiCl4 post valve closed
2/15/2012	1:45:38 PM	Bypass valve closed
2/15/2012	1:45:38 PM	Bubbler valve closed
2/15/2012	1:45:38 PM	Main Vac valve opened
2/15/2012	1:45:38 PM	Helium MFC set to  0.000000
2/15/2012	1:45:38 PM	H2 MFC set to  0.000000
2/15/2012	1:45:38 PM	BCl3 MFC set to  0.000000
2/15/2012	1:45:38 PM	PH3 MFC set to  0.000000
2/15/2012	1:45:38 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:45:38 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:45:38 PM	Tube furnace set to 150
2/15/2012	1:45:39 PM	Run finished at 1:45 PM
2/15/2012	1:46:10 PM	Recipe started at 1:46 PM
2/15/2012	1:46:11 PM	Helium valve closed
2/15/2012	1:46:11 PM	H2 valve closed
2/15/2012	1:46:11 PM	BCl3 valve closed
2/15/2012	1:46:11 PM	PH3 valve closed
2/15/2012	1:46:11 PM	SiCl4 pre valve closed
2/15/2012	1:46:11 PM	SiCl4 post valve closed
2/15/2012	1:46:11 PM	Bypass valve closed
2/15/2012	1:46:11 PM	Bubbler valve closed
2/15/2012	1:46:11 PM	Main Vac valve opened
2/15/2012	1:46:11 PM	Helium MFC set to  0.000000
2/15/2012	1:46:11 PM	H2 MFC set to  0.000000
2/15/2012	1:46:11 PM	BCl3 MFC set to  0.000000
2/15/2012	1:46:11 PM	PH3 MFC set to  0.000000
2/15/2012	1:46:11 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:46:11 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:46:11 PM	Tube furnace set to 150
2/15/2012	1:46:16 PM	H2 valve closed
2/15/2012	1:46:16 PM	BCl3 valve closed
2/15/2012	1:46:16 PM	PH3 valve closed
2/15/2012	1:46:16 PM	SiCl4 pre valve closed
2/15/2012	1:46:16 PM	SiCl4 post valve closed
2/15/2012	1:46:16 PM	Bypass valve closed
2/15/2012	1:46:16 PM	Bubbler valve closed
2/15/2012	1:46:16 PM	Helium valve opened
2/15/2012	1:46:16 PM	Main Vac valve opened
2/15/2012	1:46:16 PM	Helium MFC set to  20.000000
2/15/2012	1:46:16 PM	H2 MFC set to  0.000000
2/15/2012	1:46:16 PM	BCl3 MFC set to  0.000000
2/15/2012	1:46:16 PM	PH3 MFC set to  0.000000
2/15/2012	1:46:16 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:46:16 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:46:16 PM	Tube furnace set to 150
2/15/2012	1:46:46 PM	Helium valve closed
2/15/2012	1:46:46 PM	H2 valve closed
2/15/2012	1:46:46 PM	BCl3 valve closed
2/15/2012	1:46:46 PM	PH3 valve closed
2/15/2012	1:46:46 PM	SiCl4 pre valve closed
2/15/2012	1:46:46 PM	SiCl4 post valve closed
2/15/2012	1:46:46 PM	Bypass valve closed
2/15/2012	1:46:46 PM	Bubbler valve closed
2/15/2012	1:46:46 PM	Main Vac valve opened
2/15/2012	1:46:46 PM	Helium MFC set to  0.000000
2/15/2012	1:46:46 PM	H2 MFC set to  0.000000
2/15/2012	1:46:46 PM	BCl3 MFC set to  0.000000
2/15/2012	1:46:46 PM	PH3 MFC set to  0.000000
2/15/2012	1:46:46 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:46:46 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:46:46 PM	Tube furnace set to 150
2/15/2012	1:47:16 PM	H2 valve closed
2/15/2012	1:47:16 PM	BCl3 valve closed
2/15/2012	1:47:16 PM	PH3 valve closed
2/15/2012	1:47:16 PM	SiCl4 pre valve closed
2/15/2012	1:47:16 PM	SiCl4 post valve closed
2/15/2012	1:47:16 PM	Bypass valve closed
2/15/2012	1:47:16 PM	Bubbler valve closed
2/15/2012	1:47:16 PM	Helium valve opened
2/15/2012	1:47:16 PM	Main Vac valve opened
2/15/2012	1:47:16 PM	Helium MFC set to  20.000000
2/15/2012	1:47:16 PM	H2 MFC set to  0.000000
2/15/2012	1:47:16 PM	BCl3 MFC set to  0.000000
2/15/2012	1:47:16 PM	PH3 MFC set to  0.000000
2/15/2012	1:47:16 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:47:16 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:47:16 PM	Tube furnace set to 150
2/15/2012	1:47:46 PM	Helium valve closed
2/15/2012	1:47:46 PM	H2 valve closed
2/15/2012	1:47:46 PM	BCl3 valve closed
2/15/2012	1:47:46 PM	PH3 valve closed
2/15/2012	1:47:46 PM	SiCl4 pre valve closed
2/15/2012	1:47:46 PM	SiCl4 post valve closed
2/15/2012	1:47:46 PM	Bypass valve closed
2/15/2012	1:47:46 PM	Bubbler valve closed
2/15/2012	1:47:46 PM	Main Vac valve opened
2/15/2012	1:47:46 PM	Helium MFC set to  0.000000
2/15/2012	1:47:46 PM	H2 MFC set to  0.000000
2/15/2012	1:47:46 PM	BCl3 MFC set to  0.000000
2/15/2012	1:47:46 PM	PH3 MFC set to  0.000000
2/15/2012	1:47:46 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:47:46 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:47:47 PM	Tube furnace set to 150
2/15/2012	1:48:17 PM	H2 valve closed
2/15/2012	1:48:17 PM	BCl3 valve closed
2/15/2012	1:48:17 PM	PH3 valve closed
2/15/2012	1:48:17 PM	SiCl4 pre valve closed
2/15/2012	1:48:17 PM	SiCl4 post valve closed
2/15/2012	1:48:17 PM	Bypass valve closed
2/15/2012	1:48:17 PM	Bubbler valve closed
2/15/2012	1:48:17 PM	Helium valve opened
2/15/2012	1:48:17 PM	Main Vac valve opened
2/15/2012	1:48:17 PM	Helium MFC set to  20.000000
2/15/2012	1:48:17 PM	H2 MFC set to  0.000000
2/15/2012	1:48:17 PM	BCl3 MFC set to  0.000000
2/15/2012	1:48:17 PM	PH3 MFC set to  0.000000
2/15/2012	1:48:17 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:48:17 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:48:17 PM	Tube furnace set to 150
2/15/2012	1:48:47 PM	Helium valve closed
2/15/2012	1:48:47 PM	H2 valve closed
2/15/2012	1:48:47 PM	BCl3 valve closed
2/15/2012	1:48:47 PM	PH3 valve closed
2/15/2012	1:48:47 PM	SiCl4 pre valve closed
2/15/2012	1:48:47 PM	SiCl4 post valve closed
2/15/2012	1:48:47 PM	Bypass valve closed
2/15/2012	1:48:47 PM	Bubbler valve closed
2/15/2012	1:48:47 PM	Main Vac valve opened
2/15/2012	1:48:47 PM	Helium MFC set to  0.000000
2/15/2012	1:48:47 PM	H2 MFC set to  0.000000
2/15/2012	1:48:47 PM	BCl3 MFC set to  0.000000
2/15/2012	1:48:47 PM	PH3 MFC set to  0.000000
2/15/2012	1:48:47 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:48:47 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:48:47 PM	Tube furnace set to 150
2/15/2012	1:49:17 PM	H2 valve closed
2/15/2012	1:49:17 PM	BCl3 valve closed
2/15/2012	1:49:17 PM	PH3 valve closed
2/15/2012	1:49:17 PM	SiCl4 pre valve closed
2/15/2012	1:49:17 PM	SiCl4 post valve closed
2/15/2012	1:49:17 PM	Bypass valve closed
2/15/2012	1:49:17 PM	Bubbler valve closed
2/15/2012	1:49:17 PM	Helium valve opened
2/15/2012	1:49:17 PM	Main Vac valve opened
2/15/2012	1:49:17 PM	Helium MFC set to  20.000000
2/15/2012	1:49:17 PM	H2 MFC set to  0.000000
2/15/2012	1:49:17 PM	BCl3 MFC set to  0.000000
2/15/2012	1:49:17 PM	PH3 MFC set to  0.000000
2/15/2012	1:49:17 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:49:17 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:49:17 PM	Tube furnace set to 150
2/15/2012	1:49:47 PM	Helium valve closed
2/15/2012	1:49:47 PM	H2 valve closed
2/15/2012	1:49:47 PM	BCl3 valve closed
2/15/2012	1:49:47 PM	PH3 valve closed
2/15/2012	1:49:47 PM	SiCl4 pre valve closed
2/15/2012	1:49:47 PM	SiCl4 post valve closed
2/15/2012	1:49:47 PM	Bypass valve closed
2/15/2012	1:49:47 PM	Bubbler valve closed
2/15/2012	1:49:47 PM	Main Vac valve opened
2/15/2012	1:49:47 PM	Helium MFC set to  0.000000
2/15/2012	1:49:47 PM	H2 MFC set to  0.000000
2/15/2012	1:49:47 PM	BCl3 MFC set to  0.000000
2/15/2012	1:49:47 PM	PH3 MFC set to  0.000000
2/15/2012	1:49:47 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:49:47 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:49:47 PM	Tube furnace set to 150
2/15/2012	1:50:17 PM	H2 valve closed
2/15/2012	1:50:17 PM	BCl3 valve closed
2/15/2012	1:50:17 PM	PH3 valve closed
2/15/2012	1:50:17 PM	SiCl4 pre valve closed
2/15/2012	1:50:17 PM	SiCl4 post valve closed
2/15/2012	1:50:17 PM	Bypass valve closed
2/15/2012	1:50:17 PM	Bubbler valve closed
2/15/2012	1:50:17 PM	Helium valve opened
2/15/2012	1:50:17 PM	Main Vac valve opened
2/15/2012	1:50:17 PM	Helium MFC set to  20.000000
2/15/2012	1:50:17 PM	H2 MFC set to  0.000000
2/15/2012	1:50:17 PM	BCl3 MFC set to  0.000000
2/15/2012	1:50:17 PM	PH3 MFC set to  0.000000
2/15/2012	1:50:17 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:50:17 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:50:18 PM	Tube furnace set to 150
2/15/2012	1:50:48 PM	Helium valve closed
2/15/2012	1:50:48 PM	H2 valve closed
2/15/2012	1:50:48 PM	BCl3 valve closed
2/15/2012	1:50:48 PM	PH3 valve closed
2/15/2012	1:50:48 PM	SiCl4 pre valve closed
2/15/2012	1:50:48 PM	SiCl4 post valve closed
2/15/2012	1:50:48 PM	Bypass valve closed
2/15/2012	1:50:48 PM	Bubbler valve closed
2/15/2012	1:50:48 PM	Main Vac valve opened
2/15/2012	1:50:48 PM	Helium MFC set to  0.000000
2/15/2012	1:50:48 PM	H2 MFC set to  0.000000
2/15/2012	1:50:48 PM	BCl3 MFC set to  0.000000
2/15/2012	1:50:48 PM	PH3 MFC set to  0.000000
2/15/2012	1:50:48 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:50:48 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:50:48 PM	Tube furnace set to 150
2/15/2012	1:51:18 PM	H2 valve closed
2/15/2012	1:51:18 PM	BCl3 valve closed
2/15/2012	1:51:18 PM	PH3 valve closed
2/15/2012	1:51:18 PM	SiCl4 pre valve closed
2/15/2012	1:51:18 PM	SiCl4 post valve closed
2/15/2012	1:51:18 PM	Bypass valve closed
2/15/2012	1:51:18 PM	Bubbler valve closed
2/15/2012	1:51:18 PM	Helium valve opened
2/15/2012	1:51:18 PM	Main Vac valve opened
2/15/2012	1:51:18 PM	Helium MFC set to  20.000000
2/15/2012	1:51:18 PM	H2 MFC set to  0.000000
2/15/2012	1:51:18 PM	BCl3 MFC set to  0.000000
2/15/2012	1:51:18 PM	PH3 MFC set to  0.000000
2/15/2012	1:51:18 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:51:18 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:51:18 PM	Tube furnace set to 150
2/15/2012	1:51:48 PM	Helium valve closed
2/15/2012	1:51:48 PM	H2 valve closed
2/15/2012	1:51:48 PM	BCl3 valve closed
2/15/2012	1:51:48 PM	PH3 valve closed
2/15/2012	1:51:48 PM	SiCl4 pre valve closed
2/15/2012	1:51:48 PM	SiCl4 post valve closed
2/15/2012	1:51:48 PM	Bypass valve closed
2/15/2012	1:51:48 PM	Bubbler valve closed
2/15/2012	1:51:48 PM	Main Vac valve opened
2/15/2012	1:51:48 PM	Helium MFC set to  0.000000
2/15/2012	1:51:48 PM	H2 MFC set to  0.000000
2/15/2012	1:51:48 PM	BCl3 MFC set to  0.000000
2/15/2012	1:51:48 PM	PH3 MFC set to  0.000000
2/15/2012	1:51:48 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:51:48 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:51:48 PM	Tube furnace set to 150
2/15/2012	1:52:18 PM	H2 valve closed
2/15/2012	1:52:18 PM	BCl3 valve closed
2/15/2012	1:52:18 PM	PH3 valve closed
2/15/2012	1:52:18 PM	SiCl4 pre valve closed
2/15/2012	1:52:18 PM	SiCl4 post valve closed
2/15/2012	1:52:18 PM	Bypass valve closed
2/15/2012	1:52:18 PM	Bubbler valve closed
2/15/2012	1:52:18 PM	Helium valve opened
2/15/2012	1:52:18 PM	Main Vac valve opened
2/15/2012	1:52:18 PM	Helium MFC set to  20.000000
2/15/2012	1:52:18 PM	H2 MFC set to  0.000000
2/15/2012	1:52:18 PM	BCl3 MFC set to  0.000000
2/15/2012	1:52:18 PM	PH3 MFC set to  0.000000
2/15/2012	1:52:18 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:52:18 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:52:18 PM	Tube furnace set to 150
2/15/2012	1:52:48 PM	Helium valve closed
2/15/2012	1:52:48 PM	H2 valve closed
2/15/2012	1:52:48 PM	BCl3 valve closed
2/15/2012	1:52:48 PM	PH3 valve closed
2/15/2012	1:52:48 PM	SiCl4 pre valve closed
2/15/2012	1:52:48 PM	SiCl4 post valve closed
2/15/2012	1:52:48 PM	Bypass valve closed
2/15/2012	1:52:48 PM	Bubbler valve closed
2/15/2012	1:52:48 PM	Main Vac valve opened
2/15/2012	1:52:48 PM	Helium MFC set to  0.000000
2/15/2012	1:52:48 PM	H2 MFC set to  0.000000
2/15/2012	1:52:48 PM	BCl3 MFC set to  0.000000
2/15/2012	1:52:48 PM	PH3 MFC set to  0.000000
2/15/2012	1:52:48 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:52:48 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:52:49 PM	Tube furnace set to 150
2/15/2012	1:53:19 PM	H2 valve closed
2/15/2012	1:53:19 PM	BCl3 valve closed
2/15/2012	1:53:19 PM	PH3 valve closed
2/15/2012	1:53:19 PM	SiCl4 pre valve closed
2/15/2012	1:53:19 PM	SiCl4 post valve closed
2/15/2012	1:53:19 PM	Bypass valve closed
2/15/2012	1:53:19 PM	Bubbler valve closed
2/15/2012	1:53:19 PM	Helium valve opened
2/15/2012	1:53:19 PM	Main Vac valve opened
2/15/2012	1:53:19 PM	Helium MFC set to  20.000000
2/15/2012	1:53:19 PM	H2 MFC set to  0.000000
2/15/2012	1:53:19 PM	BCl3 MFC set to  0.000000
2/15/2012	1:53:19 PM	PH3 MFC set to  0.000000
2/15/2012	1:53:19 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:53:19 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:53:19 PM	Tube furnace set to 150
2/15/2012	1:53:49 PM	Helium valve closed
2/15/2012	1:53:49 PM	H2 valve closed
2/15/2012	1:53:49 PM	BCl3 valve closed
2/15/2012	1:53:49 PM	PH3 valve closed
2/15/2012	1:53:49 PM	SiCl4 pre valve closed
2/15/2012	1:53:49 PM	SiCl4 post valve closed
2/15/2012	1:53:49 PM	Bypass valve closed
2/15/2012	1:53:49 PM	Bubbler valve closed
2/15/2012	1:53:49 PM	Main Vac valve opened
2/15/2012	1:53:49 PM	Helium MFC set to  0.000000
2/15/2012	1:53:49 PM	H2 MFC set to  0.000000
2/15/2012	1:53:49 PM	BCl3 MFC set to  0.000000
2/15/2012	1:53:49 PM	PH3 MFC set to  0.000000
2/15/2012	1:53:49 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:53:49 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:53:49 PM	Tube furnace set to 150
2/15/2012	1:54:19 PM	H2 valve closed
2/15/2012	1:54:19 PM	BCl3 valve closed
2/15/2012	1:54:19 PM	PH3 valve closed
2/15/2012	1:54:19 PM	SiCl4 pre valve closed
2/15/2012	1:54:19 PM	SiCl4 post valve closed
2/15/2012	1:54:19 PM	Bypass valve closed
2/15/2012	1:54:19 PM	Bubbler valve closed
2/15/2012	1:54:19 PM	Helium valve opened
2/15/2012	1:54:19 PM	Main Vac valve opened
2/15/2012	1:54:19 PM	Helium MFC set to  20.000000
2/15/2012	1:54:19 PM	H2 MFC set to  0.000000
2/15/2012	1:54:19 PM	BCl3 MFC set to  0.000000
2/15/2012	1:54:19 PM	PH3 MFC set to  0.000000
2/15/2012	1:54:19 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:54:19 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:54:19 PM	Tube furnace set to 150
2/15/2012	1:54:49 PM	Helium valve closed
2/15/2012	1:54:49 PM	H2 valve closed
2/15/2012	1:54:49 PM	BCl3 valve closed
2/15/2012	1:54:49 PM	PH3 valve closed
2/15/2012	1:54:49 PM	SiCl4 pre valve closed
2/15/2012	1:54:49 PM	SiCl4 post valve closed
2/15/2012	1:54:49 PM	Bypass valve closed
2/15/2012	1:54:49 PM	Bubbler valve closed
2/15/2012	1:54:49 PM	Main Vac valve opened
2/15/2012	1:54:49 PM	Helium MFC set to  0.000000
2/15/2012	1:54:49 PM	H2 MFC set to  0.000000
2/15/2012	1:54:49 PM	BCl3 MFC set to  0.000000
2/15/2012	1:54:49 PM	PH3 MFC set to  0.000000
2/15/2012	1:54:49 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:54:49 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:54:49 PM	Tube furnace set to 150
2/15/2012	1:55:19 PM	H2 valve closed
2/15/2012	1:55:19 PM	BCl3 valve closed
2/15/2012	1:55:19 PM	PH3 valve closed
2/15/2012	1:55:19 PM	SiCl4 pre valve closed
2/15/2012	1:55:19 PM	SiCl4 post valve closed
2/15/2012	1:55:19 PM	Bypass valve closed
2/15/2012	1:55:19 PM	Bubbler valve closed
2/15/2012	1:55:19 PM	Helium valve opened
2/15/2012	1:55:19 PM	Main Vac valve opened
2/15/2012	1:55:19 PM	Helium MFC set to  20.000000
2/15/2012	1:55:19 PM	H2 MFC set to  0.000000
2/15/2012	1:55:19 PM	BCl3 MFC set to  0.000000
2/15/2012	1:55:19 PM	PH3 MFC set to  0.000000
2/15/2012	1:55:19 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:55:19 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:55:20 PM	Tube furnace set to 150
2/15/2012	1:55:50 PM	Helium valve closed
2/15/2012	1:55:50 PM	H2 valve closed
2/15/2012	1:55:50 PM	BCl3 valve closed
2/15/2012	1:55:50 PM	PH3 valve closed
2/15/2012	1:55:50 PM	SiCl4 pre valve closed
2/15/2012	1:55:50 PM	SiCl4 post valve closed
2/15/2012	1:55:50 PM	Bypass valve closed
2/15/2012	1:55:50 PM	Bubbler valve closed
2/15/2012	1:55:50 PM	Main Vac valve opened
2/15/2012	1:55:50 PM	Helium MFC set to  0.000000
2/15/2012	1:55:50 PM	H2 MFC set to  0.000000
2/15/2012	1:55:50 PM	BCl3 MFC set to  0.000000
2/15/2012	1:55:50 PM	PH3 MFC set to  0.000000
2/15/2012	1:55:50 PM	SiCl4 MFC set to  0.000000
2/15/2012	1:55:50 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	1:55:50 PM	Tube furnace set to 150
2/15/2012	1:55:51 PM	Run finished at 1:55 PM
2/15/2012	2:08:04 PM	Main Vac valve closed
2/15/2012	2:08:16 PM	Main Vac valve opened
2/15/2012	2:08:50 PM	Recipe started at 2:08 PM
2/15/2012	2:08:50 PM	Helium valve closed
2/15/2012	2:08:50 PM	H2 valve closed
2/15/2012	2:08:50 PM	BCl3 valve closed
2/15/2012	2:08:50 PM	PH3 valve closed
2/15/2012	2:08:50 PM	SiCl4 pre valve closed
2/15/2012	2:08:50 PM	SiCl4 post valve closed
2/15/2012	2:08:50 PM	Main Vac valve closed
2/15/2012	2:08:50 PM	Bypass valve closed
2/15/2012	2:08:50 PM	Bubbler valve closed
2/15/2012	2:08:50 PM	Helium MFC set to  0.000000
2/15/2012	2:08:50 PM	H2 MFC set to  0.000000
2/15/2012	2:08:50 PM	BCl3 MFC set to  0.000000
2/15/2012	2:08:50 PM	PH3 MFC set to  0.000000
2/15/2012	2:08:50 PM	SiCl4 MFC set to  0.000000
2/15/2012	2:08:50 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	2:08:50 PM	Tube furnace set to 0
2/15/2012	2:08:53 PM	Helium valve closed
2/15/2012	2:08:53 PM	BCl3 valve closed
2/15/2012	2:08:53 PM	PH3 valve closed
2/15/2012	2:08:53 PM	SiCl4 pre valve closed
2/15/2012	2:08:53 PM	SiCl4 post valve closed
2/15/2012	2:08:53 PM	Main Vac valve closed
2/15/2012	2:08:53 PM	Bypass valve closed
2/15/2012	2:08:53 PM	Bubbler valve closed
2/15/2012	2:08:53 PM	H2 valve opened
2/15/2012	2:08:53 PM	Helium MFC set to  0.000000
2/15/2012	2:08:53 PM	H2 MFC set to  500.000000
2/15/2012	2:08:53 PM	BCl3 MFC set to  0.000000
2/15/2012	2:08:53 PM	PH3 MFC set to  0.000000
2/15/2012	2:08:53 PM	SiCl4 MFC set to  0.000000
2/15/2012	2:08:53 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	2:08:54 PM	Tube furnace set to 0
2/15/2012	2:09:57 PM	Helium valve closed
2/15/2012	2:09:57 PM	BCl3 valve closed
2/15/2012	2:09:57 PM	PH3 valve closed
2/15/2012	2:09:57 PM	SiCl4 pre valve closed
2/15/2012	2:09:57 PM	SiCl4 post valve closed
2/15/2012	2:09:57 PM	Main Vac valve closed
2/15/2012	2:09:57 PM	Bypass valve closed
2/15/2012	2:09:57 PM	H2 valve opened
2/15/2012	2:09:57 PM	Bubbler valve opened
2/15/2012	2:09:57 PM	Helium MFC set to  0.000000
2/15/2012	2:09:57 PM	H2 MFC set to  500.000000
2/15/2012	2:09:57 PM	BCl3 MFC set to  0.000000
2/15/2012	2:09:57 PM	PH3 MFC set to  0.000000
2/15/2012	2:09:57 PM	SiCl4 MFC set to  0.000000
2/15/2012	2:09:57 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	2:09:58 PM	Tube furnace set to 0
2/15/2012	2:09:59 PM	Helium valve closed
2/15/2012	2:09:59 PM	BCl3 valve closed
2/15/2012	2:09:59 PM	PH3 valve closed
2/15/2012	2:09:59 PM	SiCl4 pre valve closed
2/15/2012	2:09:59 PM	SiCl4 post valve closed
2/15/2012	2:09:59 PM	Main Vac valve closed
2/15/2012	2:09:59 PM	Bypass valve closed
2/15/2012	2:09:59 PM	H2 valve opened
2/15/2012	2:09:59 PM	Bubbler valve opened
2/15/2012	2:09:59 PM	Helium MFC set to  0.000000
2/15/2012	2:09:59 PM	H2 MFC set to  450.000000
2/15/2012	2:09:59 PM	BCl3 MFC set to  0.000000
2/15/2012	2:09:59 PM	PH3 MFC set to  0.000000
2/15/2012	2:09:59 PM	SiCl4 MFC set to  0.000000
2/15/2012	2:09:59 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	2:09:59 PM	Tube furnace set to 1000
2/15/2012	2:34:59 PM	Helium valve closed
2/15/2012	2:34:59 PM	PH3 valve closed
2/15/2012	2:34:59 PM	Main Vac valve closed
2/15/2012	2:34:59 PM	Bypass valve closed
2/15/2012	2:34:59 PM	H2 valve opened
2/15/2012	2:34:59 PM	BCl3 valve opened
2/15/2012	2:34:59 PM	SiCl4 pre valve opened
2/15/2012	2:34:59 PM	SiCl4 post valve opened
2/15/2012	2:34:59 PM	Bubbler valve opened
2/15/2012	2:34:59 PM	Helium MFC set to  0.000000
2/15/2012	2:34:59 PM	H2 MFC set to  450.000000
2/15/2012	2:34:59 PM	BCl3 MFC set to  1.500000
2/15/2012	2:34:59 PM	PH3 MFC set to  0.000000
2/15/2012	2:34:59 PM	SiCl4 MFC set to  50.000000
2/15/2012	2:34:59 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	2:34:59 PM	Tube furnace set to 1000
2/15/2012	2:39:59 PM	Helium valve closed
2/15/2012	2:39:59 PM	BCl3 valve closed
2/15/2012	2:39:59 PM	PH3 valve closed
2/15/2012	2:39:59 PM	SiCl4 pre valve closed
2/15/2012	2:39:59 PM	SiCl4 post valve closed
2/15/2012	2:39:59 PM	Main Vac valve closed
2/15/2012	2:39:59 PM	Bypass valve closed
2/15/2012	2:39:59 PM	H2 valve opened
2/15/2012	2:39:59 PM	Bubbler valve opened
2/15/2012	2:39:59 PM	Helium MFC set to  0.000000
2/15/2012	2:39:59 PM	H2 MFC set to  500.000000
2/15/2012	2:39:59 PM	BCl3 MFC set to  0.000000
2/15/2012	2:39:59 PM	PH3 MFC set to  0.000000
2/15/2012	2:39:59 PM	SiCl4 MFC set to  0.000000
2/15/2012	2:39:59 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	2:39:59 PM	Tube furnace set to 750
2/15/2012	2:44:59 PM	H2 valve closed
2/15/2012	2:44:59 PM	BCl3 valve closed
2/15/2012	2:44:59 PM	PH3 valve closed
2/15/2012	2:44:59 PM	SiCl4 pre valve closed
2/15/2012	2:44:59 PM	SiCl4 post valve closed
2/15/2012	2:44:59 PM	Main Vac valve closed
2/15/2012	2:44:59 PM	Bypass valve closed
2/15/2012	2:44:59 PM	Helium valve opened
2/15/2012	2:44:59 PM	Bubbler valve opened
2/15/2012	2:44:59 PM	Helium MFC set to  500.000000
2/15/2012	2:44:59 PM	H2 MFC set to  0.000000
2/15/2012	2:44:59 PM	BCl3 MFC set to  0.000000
2/15/2012	2:44:59 PM	PH3 MFC set to  0.000000
2/15/2012	2:44:59 PM	SiCl4 MFC set to  0.000000
2/15/2012	2:44:59 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	2:44:59 PM	Tube furnace set to 0
2/15/2012	3:04:59 PM	Helium valve closed
2/15/2012	3:04:59 PM	H2 valve closed
2/15/2012	3:04:59 PM	BCl3 valve closed
2/15/2012	3:04:59 PM	PH3 valve closed
2/15/2012	3:04:59 PM	SiCl4 pre valve closed
2/15/2012	3:04:59 PM	SiCl4 post valve closed
2/15/2012	3:04:59 PM	Main Vac valve closed
2/15/2012	3:04:59 PM	Bypass valve closed
2/15/2012	3:04:59 PM	Bubbler valve closed
2/15/2012	3:04:59 PM	Helium MFC set to  0.000000
2/15/2012	3:04:59 PM	H2 MFC set to  0.000000
2/15/2012	3:04:59 PM	BCl3 MFC set to  0.000000
2/15/2012	3:04:59 PM	PH3 MFC set to  0.000000
2/15/2012	3:04:59 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:04:59 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:04:59 PM	Tube furnace set to 0
2/15/2012	3:05:00 PM	Run finished at 3:05 PM
2/15/2012	3:22:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2012	3:22:01 PM	Recipe started at 3:22 PM
2/15/2012	3:22:01 PM	Helium valve closed
2/15/2012	3:22:01 PM	H2 valve closed
2/15/2012	3:22:01 PM	BCl3 valve closed
2/15/2012	3:22:01 PM	PH3 valve closed
2/15/2012	3:22:01 PM	SiCl4 pre valve closed
2/15/2012	3:22:01 PM	SiCl4 post valve closed
2/15/2012	3:22:01 PM	Main Vac valve closed
2/15/2012	3:22:01 PM	Bypass valve closed
2/15/2012	3:22:01 PM	Bubbler valve closed
2/15/2012	3:22:01 PM	Helium MFC set to  0.000000
2/15/2012	3:22:01 PM	H2 MFC set to  0.000000
2/15/2012	3:22:01 PM	BCl3 MFC set to  0.000000
2/15/2012	3:22:01 PM	PH3 MFC set to  0.000000
2/15/2012	3:22:01 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:22:01 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:22:01 PM	Tube furnace set to 0
2/15/2012	3:22:04 PM	H2 valve closed
2/15/2012	3:22:04 PM	BCl3 valve closed
2/15/2012	3:22:04 PM	PH3 valve closed
2/15/2012	3:22:04 PM	SiCl4 pre valve closed
2/15/2012	3:22:04 PM	SiCl4 post valve closed
2/15/2012	3:22:04 PM	Main Vac valve closed
2/15/2012	3:22:04 PM	Bypass valve closed
2/15/2012	3:22:04 PM	Bubbler valve closed
2/15/2012	3:22:04 PM	Helium valve opened
2/15/2012	3:22:04 PM	Helium MFC set to  500.000000
2/15/2012	3:22:04 PM	H2 MFC set to  0.000000
2/15/2012	3:22:04 PM	BCl3 MFC set to  0.000000
2/15/2012	3:22:04 PM	PH3 MFC set to  0.000000
2/15/2012	3:22:04 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:22:04 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:22:04 PM	Tube furnace set to 0
2/15/2012	3:22:07 PM	Helium valve closed
2/15/2012	3:22:07 PM	H2 valve closed
2/15/2012	3:22:07 PM	BCl3 valve closed
2/15/2012	3:22:07 PM	PH3 valve closed
2/15/2012	3:22:07 PM	SiCl4 pre valve closed
2/15/2012	3:22:07 PM	SiCl4 post valve closed
2/15/2012	3:22:07 PM	Main Vac valve closed
2/15/2012	3:22:07 PM	Bypass valve closed
2/15/2012	3:22:07 PM	Bubbler valve closed
2/15/2012	3:22:07 PM	Helium MFC set to  0.000000
2/15/2012	3:22:07 PM	H2 MFC set to  0.000000
2/15/2012	3:22:07 PM	BCl3 MFC set to  0.000000
2/15/2012	3:22:07 PM	PH3 MFC set to  0.000000
2/15/2012	3:22:07 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:22:07 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:22:08 PM	Tube furnace set to 0
2/15/2012	3:22:09 PM	Run finished at 3:22 PM
2/15/2012	3:22:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2012	3:22:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2012	3:22:45 PM	Recipe started at 3:22 PM
2/15/2012	3:22:45 PM	Helium valve closed
2/15/2012	3:22:45 PM	H2 valve closed
2/15/2012	3:22:45 PM	BCl3 valve closed
2/15/2012	3:22:45 PM	PH3 valve closed
2/15/2012	3:22:45 PM	SiCl4 pre valve closed
2/15/2012	3:22:45 PM	SiCl4 post valve closed
2/15/2012	3:22:45 PM	Main Vac valve closed
2/15/2012	3:22:45 PM	Bypass valve closed
2/15/2012	3:22:45 PM	Bubbler valve closed
2/15/2012	3:22:45 PM	Helium MFC set to  0.000000
2/15/2012	3:22:45 PM	H2 MFC set to  0.000000
2/15/2012	3:22:45 PM	BCl3 MFC set to  0.000000
2/15/2012	3:22:45 PM	PH3 MFC set to  0.000000
2/15/2012	3:22:45 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:22:45 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:22:45 PM	Tube furnace set to 0
2/15/2012	3:22:48 PM	H2 valve closed
2/15/2012	3:22:48 PM	BCl3 valve closed
2/15/2012	3:22:48 PM	PH3 valve closed
2/15/2012	3:22:48 PM	SiCl4 pre valve closed
2/15/2012	3:22:48 PM	SiCl4 post valve closed
2/15/2012	3:22:48 PM	Main Vac valve closed
2/15/2012	3:22:48 PM	Bypass valve closed
2/15/2012	3:22:48 PM	Bubbler valve closed
2/15/2012	3:22:48 PM	Helium valve opened
2/15/2012	3:22:48 PM	Helium MFC set to  500.000000
2/15/2012	3:22:48 PM	H2 MFC set to  0.000000
2/15/2012	3:22:48 PM	BCl3 MFC set to  0.000000
2/15/2012	3:22:48 PM	PH3 MFC set to  0.000000
2/15/2012	3:22:48 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:22:48 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:22:48 PM	Tube furnace set to 0
2/15/2012	3:22:48 PM	Helium valve closed
2/15/2012	3:22:48 PM	H2 valve closed
2/15/2012	3:22:48 PM	BCl3 valve closed
2/15/2012	3:22:48 PM	PH3 valve closed
2/15/2012	3:22:48 PM	SiCl4 pre valve closed
2/15/2012	3:22:48 PM	SiCl4 post valve closed
2/15/2012	3:22:48 PM	Main Vac valve closed
2/15/2012	3:22:48 PM	Bypass valve closed
2/15/2012	3:22:48 PM	Bubbler valve closed
2/15/2012	3:22:48 PM	Helium MFC set to  0.000000
2/15/2012	3:22:48 PM	H2 MFC set to  0.000000
2/15/2012	3:22:48 PM	BCl3 MFC set to  0.000000
2/15/2012	3:22:48 PM	PH3 MFC set to  0.000000
2/15/2012	3:22:48 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:22:48 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:22:49 PM	Tube furnace set to 0
2/15/2012	3:22:50 PM	Run finished at 3:22 PM
2/15/2012	3:22:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2012	3:29:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2012	3:29:44 PM	Recipe started at 3:29 PM
2/15/2012	3:29:44 PM	Helium valve closed
2/15/2012	3:29:44 PM	H2 valve closed
2/15/2012	3:29:44 PM	BCl3 valve closed
2/15/2012	3:29:44 PM	PH3 valve closed
2/15/2012	3:29:44 PM	SiCl4 pre valve closed
2/15/2012	3:29:44 PM	SiCl4 post valve closed
2/15/2012	3:29:44 PM	Main Vac valve closed
2/15/2012	3:29:44 PM	Bubbler valve closed
2/15/2012	3:29:44 PM	Bypass valve opened
2/15/2012	3:29:44 PM	Helium MFC set to  0.000000
2/15/2012	3:29:44 PM	H2 MFC set to  0.000000
2/15/2012	3:29:44 PM	BCl3 MFC set to  0.000000
2/15/2012	3:29:44 PM	PH3 MFC set to  0.000000
2/15/2012	3:29:44 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:29:44 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:29:44 PM	Tube furnace set to 0
2/15/2012	3:30:46 PM	Helium valve closed
2/15/2012	3:30:46 PM	H2 valve closed
2/15/2012	3:30:46 PM	BCl3 valve closed
2/15/2012	3:30:46 PM	PH3 valve closed
2/15/2012	3:30:46 PM	SiCl4 pre valve closed
2/15/2012	3:30:46 PM	SiCl4 post valve closed
2/15/2012	3:30:46 PM	Main Vac valve closed
2/15/2012	3:30:46 PM	Bubbler valve closed
2/15/2012	3:30:46 PM	Bypass valve opened
2/15/2012	3:30:46 PM	Helium MFC set to  0.000000
2/15/2012	3:30:46 PM	H2 MFC set to  0.000000
2/15/2012	3:30:46 PM	BCl3 MFC set to  0.000000
2/15/2012	3:30:46 PM	PH3 MFC set to  0.000000
2/15/2012	3:30:46 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:30:46 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:30:46 PM	Tube furnace set to 0
2/15/2012	3:31:46 PM	Helium valve closed
2/15/2012	3:31:46 PM	H2 valve closed
2/15/2012	3:31:46 PM	BCl3 valve closed
2/15/2012	3:31:46 PM	PH3 valve closed
2/15/2012	3:31:46 PM	SiCl4 pre valve closed
2/15/2012	3:31:46 PM	SiCl4 post valve closed
2/15/2012	3:31:46 PM	Bypass valve closed
2/15/2012	3:31:46 PM	Bubbler valve closed
2/15/2012	3:31:46 PM	Main Vac valve opened
2/15/2012	3:31:46 PM	Helium MFC set to  0.000000
2/15/2012	3:31:46 PM	H2 MFC set to  0.000000
2/15/2012	3:31:46 PM	BCl3 MFC set to  0.000000
2/15/2012	3:31:46 PM	PH3 MFC set to  0.000000
2/15/2012	3:31:46 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:31:46 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:31:46 PM	Tube furnace set to 0
2/15/2012	3:31:47 PM	Run finished at 3:31 PM
2/15/2012	3:31:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2012	3:42:10 PM	Recipe started at 3:42 PM
2/15/2012	3:42:10 PM	Helium valve closed
2/15/2012	3:42:10 PM	H2 valve closed
2/15/2012	3:42:10 PM	BCl3 valve closed
2/15/2012	3:42:10 PM	PH3 valve closed
2/15/2012	3:42:10 PM	SiCl4 pre valve closed
2/15/2012	3:42:10 PM	SiCl4 post valve closed
2/15/2012	3:42:10 PM	Bypass valve closed
2/15/2012	3:42:10 PM	Bubbler valve closed
2/15/2012	3:42:10 PM	Main Vac valve opened
2/15/2012	3:42:10 PM	Helium MFC set to  0.000000
2/15/2012	3:42:10 PM	H2 MFC set to  0.000000
2/15/2012	3:42:10 PM	BCl3 MFC set to  0.000000
2/15/2012	3:42:10 PM	PH3 MFC set to  0.000000
2/15/2012	3:42:10 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:42:10 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:42:10 PM	Tube furnace set to 150
2/15/2012	3:42:40 PM	H2 valve closed
2/15/2012	3:42:40 PM	BCl3 valve closed
2/15/2012	3:42:40 PM	PH3 valve closed
2/15/2012	3:42:40 PM	SiCl4 pre valve closed
2/15/2012	3:42:40 PM	SiCl4 post valve closed
2/15/2012	3:42:40 PM	Bypass valve closed
2/15/2012	3:42:40 PM	Bubbler valve closed
2/15/2012	3:42:40 PM	Helium valve opened
2/15/2012	3:42:40 PM	Main Vac valve opened
2/15/2012	3:42:40 PM	Helium MFC set to  20.000000
2/15/2012	3:42:40 PM	H2 MFC set to  0.000000
2/15/2012	3:42:40 PM	BCl3 MFC set to  0.000000
2/15/2012	3:42:40 PM	PH3 MFC set to  0.000000
2/15/2012	3:42:40 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:42:40 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:42:41 PM	Tube furnace set to 150
2/15/2012	3:43:11 PM	Helium valve closed
2/15/2012	3:43:11 PM	H2 valve closed
2/15/2012	3:43:11 PM	BCl3 valve closed
2/15/2012	3:43:11 PM	PH3 valve closed
2/15/2012	3:43:11 PM	SiCl4 pre valve closed
2/15/2012	3:43:11 PM	SiCl4 post valve closed
2/15/2012	3:43:11 PM	Bypass valve closed
2/15/2012	3:43:11 PM	Bubbler valve closed
2/15/2012	3:43:11 PM	Main Vac valve opened
2/15/2012	3:43:11 PM	Helium MFC set to  0.000000
2/15/2012	3:43:11 PM	H2 MFC set to  0.000000
2/15/2012	3:43:11 PM	BCl3 MFC set to  0.000000
2/15/2012	3:43:11 PM	PH3 MFC set to  0.000000
2/15/2012	3:43:11 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:43:11 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:43:11 PM	Tube furnace set to 150
2/15/2012	3:43:41 PM	H2 valve closed
2/15/2012	3:43:41 PM	BCl3 valve closed
2/15/2012	3:43:41 PM	PH3 valve closed
2/15/2012	3:43:41 PM	SiCl4 pre valve closed
2/15/2012	3:43:41 PM	SiCl4 post valve closed
2/15/2012	3:43:41 PM	Bypass valve closed
2/15/2012	3:43:41 PM	Bubbler valve closed
2/15/2012	3:43:41 PM	Helium valve opened
2/15/2012	3:43:41 PM	Main Vac valve opened
2/15/2012	3:43:41 PM	Helium MFC set to  20.000000
2/15/2012	3:43:41 PM	H2 MFC set to  0.000000
2/15/2012	3:43:41 PM	BCl3 MFC set to  0.000000
2/15/2012	3:43:41 PM	PH3 MFC set to  0.000000
2/15/2012	3:43:41 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:43:41 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:43:41 PM	Tube furnace set to 150
2/15/2012	3:44:11 PM	Helium valve closed
2/15/2012	3:44:11 PM	H2 valve closed
2/15/2012	3:44:11 PM	BCl3 valve closed
2/15/2012	3:44:11 PM	PH3 valve closed
2/15/2012	3:44:11 PM	SiCl4 pre valve closed
2/15/2012	3:44:11 PM	SiCl4 post valve closed
2/15/2012	3:44:11 PM	Bypass valve closed
2/15/2012	3:44:11 PM	Bubbler valve closed
2/15/2012	3:44:11 PM	Main Vac valve opened
2/15/2012	3:44:11 PM	Helium MFC set to  0.000000
2/15/2012	3:44:11 PM	H2 MFC set to  0.000000
2/15/2012	3:44:11 PM	BCl3 MFC set to  0.000000
2/15/2012	3:44:11 PM	PH3 MFC set to  0.000000
2/15/2012	3:44:11 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:44:11 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:44:11 PM	Tube furnace set to 150
2/15/2012	3:44:41 PM	H2 valve closed
2/15/2012	3:44:41 PM	BCl3 valve closed
2/15/2012	3:44:41 PM	PH3 valve closed
2/15/2012	3:44:41 PM	SiCl4 pre valve closed
2/15/2012	3:44:41 PM	SiCl4 post valve closed
2/15/2012	3:44:41 PM	Bypass valve closed
2/15/2012	3:44:41 PM	Bubbler valve closed
2/15/2012	3:44:41 PM	Helium valve opened
2/15/2012	3:44:41 PM	Main Vac valve opened
2/15/2012	3:44:41 PM	Helium MFC set to  20.000000
2/15/2012	3:44:41 PM	H2 MFC set to  0.000000
2/15/2012	3:44:41 PM	BCl3 MFC set to  0.000000
2/15/2012	3:44:41 PM	PH3 MFC set to  0.000000
2/15/2012	3:44:41 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:44:41 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:44:41 PM	Tube furnace set to 150
2/15/2012	3:45:11 PM	Helium valve closed
2/15/2012	3:45:11 PM	H2 valve closed
2/15/2012	3:45:11 PM	BCl3 valve closed
2/15/2012	3:45:11 PM	PH3 valve closed
2/15/2012	3:45:11 PM	SiCl4 pre valve closed
2/15/2012	3:45:11 PM	SiCl4 post valve closed
2/15/2012	3:45:11 PM	Bypass valve closed
2/15/2012	3:45:11 PM	Bubbler valve closed
2/15/2012	3:45:11 PM	Main Vac valve opened
2/15/2012	3:45:11 PM	Helium MFC set to  0.000000
2/15/2012	3:45:11 PM	H2 MFC set to  0.000000
2/15/2012	3:45:12 PM	BCl3 MFC set to  0.000000
2/15/2012	3:45:12 PM	PH3 MFC set to  0.000000
2/15/2012	3:45:12 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:45:12 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:45:12 PM	Tube furnace set to 150
2/15/2012	3:45:42 PM	H2 valve closed
2/15/2012	3:45:42 PM	BCl3 valve closed
2/15/2012	3:45:42 PM	PH3 valve closed
2/15/2012	3:45:42 PM	SiCl4 pre valve closed
2/15/2012	3:45:42 PM	SiCl4 post valve closed
2/15/2012	3:45:42 PM	Bypass valve closed
2/15/2012	3:45:42 PM	Bubbler valve closed
2/15/2012	3:45:42 PM	Helium valve opened
2/15/2012	3:45:42 PM	Main Vac valve opened
2/15/2012	3:45:42 PM	Helium MFC set to  20.000000
2/15/2012	3:45:42 PM	H2 MFC set to  0.000000
2/15/2012	3:45:42 PM	BCl3 MFC set to  0.000000
2/15/2012	3:45:42 PM	PH3 MFC set to  0.000000
2/15/2012	3:45:42 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:45:42 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:45:42 PM	Tube furnace set to 150
2/15/2012	3:46:12 PM	Helium valve closed
2/15/2012	3:46:12 PM	H2 valve closed
2/15/2012	3:46:12 PM	BCl3 valve closed
2/15/2012	3:46:12 PM	PH3 valve closed
2/15/2012	3:46:12 PM	SiCl4 pre valve closed
2/15/2012	3:46:12 PM	SiCl4 post valve closed
2/15/2012	3:46:12 PM	Bypass valve closed
2/15/2012	3:46:12 PM	Bubbler valve closed
2/15/2012	3:46:12 PM	Main Vac valve opened
2/15/2012	3:46:12 PM	Helium MFC set to  0.000000
2/15/2012	3:46:12 PM	H2 MFC set to  0.000000
2/15/2012	3:46:12 PM	BCl3 MFC set to  0.000000
2/15/2012	3:46:12 PM	PH3 MFC set to  0.000000
2/15/2012	3:46:12 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:46:12 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:46:12 PM	Tube furnace set to 150
2/15/2012	3:46:42 PM	H2 valve closed
2/15/2012	3:46:42 PM	BCl3 valve closed
2/15/2012	3:46:42 PM	PH3 valve closed
2/15/2012	3:46:42 PM	SiCl4 pre valve closed
2/15/2012	3:46:42 PM	SiCl4 post valve closed
2/15/2012	3:46:42 PM	Bypass valve closed
2/15/2012	3:46:42 PM	Bubbler valve closed
2/15/2012	3:46:42 PM	Helium valve opened
2/15/2012	3:46:42 PM	Main Vac valve opened
2/15/2012	3:46:42 PM	Helium MFC set to  20.000000
2/15/2012	3:46:42 PM	H2 MFC set to  0.000000
2/15/2012	3:46:42 PM	BCl3 MFC set to  0.000000
2/15/2012	3:46:42 PM	PH3 MFC set to  0.000000
2/15/2012	3:46:42 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:46:42 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:46:42 PM	Tube furnace set to 150
2/15/2012	3:47:12 PM	Helium valve closed
2/15/2012	3:47:12 PM	H2 valve closed
2/15/2012	3:47:12 PM	BCl3 valve closed
2/15/2012	3:47:12 PM	PH3 valve closed
2/15/2012	3:47:12 PM	SiCl4 pre valve closed
2/15/2012	3:47:12 PM	SiCl4 post valve closed
2/15/2012	3:47:12 PM	Bypass valve closed
2/15/2012	3:47:12 PM	Bubbler valve closed
2/15/2012	3:47:12 PM	Main Vac valve opened
2/15/2012	3:47:12 PM	Helium MFC set to  0.000000
2/15/2012	3:47:12 PM	H2 MFC set to  0.000000
2/15/2012	3:47:12 PM	BCl3 MFC set to  0.000000
2/15/2012	3:47:12 PM	PH3 MFC set to  0.000000
2/15/2012	3:47:12 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:47:12 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:47:13 PM	Tube furnace set to 150
2/15/2012	3:47:43 PM	H2 valve closed
2/15/2012	3:47:43 PM	BCl3 valve closed
2/15/2012	3:47:43 PM	PH3 valve closed
2/15/2012	3:47:43 PM	SiCl4 pre valve closed
2/15/2012	3:47:43 PM	SiCl4 post valve closed
2/15/2012	3:47:43 PM	Bypass valve closed
2/15/2012	3:47:43 PM	Bubbler valve closed
2/15/2012	3:47:43 PM	Helium valve opened
2/15/2012	3:47:43 PM	Main Vac valve opened
2/15/2012	3:47:43 PM	Helium MFC set to  20.000000
2/15/2012	3:47:43 PM	H2 MFC set to  0.000000
2/15/2012	3:47:43 PM	BCl3 MFC set to  0.000000
2/15/2012	3:47:43 PM	PH3 MFC set to  0.000000
2/15/2012	3:47:43 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:47:43 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:47:43 PM	Tube furnace set to 150
2/15/2012	3:48:13 PM	Helium valve closed
2/15/2012	3:48:13 PM	H2 valve closed
2/15/2012	3:48:13 PM	BCl3 valve closed
2/15/2012	3:48:13 PM	PH3 valve closed
2/15/2012	3:48:13 PM	SiCl4 pre valve closed
2/15/2012	3:48:13 PM	SiCl4 post valve closed
2/15/2012	3:48:13 PM	Bypass valve closed
2/15/2012	3:48:13 PM	Bubbler valve closed
2/15/2012	3:48:13 PM	Main Vac valve opened
2/15/2012	3:48:13 PM	Helium MFC set to  0.000000
2/15/2012	3:48:13 PM	H2 MFC set to  0.000000
2/15/2012	3:48:13 PM	BCl3 MFC set to  0.000000
2/15/2012	3:48:13 PM	PH3 MFC set to  0.000000
2/15/2012	3:48:13 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:48:13 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:48:13 PM	Tube furnace set to 150
2/15/2012	3:48:43 PM	H2 valve closed
2/15/2012	3:48:43 PM	BCl3 valve closed
2/15/2012	3:48:43 PM	PH3 valve closed
2/15/2012	3:48:43 PM	SiCl4 pre valve closed
2/15/2012	3:48:43 PM	SiCl4 post valve closed
2/15/2012	3:48:43 PM	Bypass valve closed
2/15/2012	3:48:43 PM	Bubbler valve closed
2/15/2012	3:48:43 PM	Helium valve opened
2/15/2012	3:48:43 PM	Main Vac valve opened
2/15/2012	3:48:43 PM	Helium MFC set to  20.000000
2/15/2012	3:48:43 PM	H2 MFC set to  0.000000
2/15/2012	3:48:43 PM	BCl3 MFC set to  0.000000
2/15/2012	3:48:43 PM	PH3 MFC set to  0.000000
2/15/2012	3:48:43 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:48:43 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:48:43 PM	Tube furnace set to 150
2/15/2012	3:49:13 PM	Helium valve closed
2/15/2012	3:49:13 PM	H2 valve closed
2/15/2012	3:49:13 PM	BCl3 valve closed
2/15/2012	3:49:13 PM	PH3 valve closed
2/15/2012	3:49:13 PM	SiCl4 pre valve closed
2/15/2012	3:49:13 PM	SiCl4 post valve closed
2/15/2012	3:49:13 PM	Bypass valve closed
2/15/2012	3:49:13 PM	Bubbler valve closed
2/15/2012	3:49:13 PM	Main Vac valve opened
2/15/2012	3:49:13 PM	Helium MFC set to  0.000000
2/15/2012	3:49:13 PM	H2 MFC set to  0.000000
2/15/2012	3:49:13 PM	BCl3 MFC set to  0.000000
2/15/2012	3:49:13 PM	PH3 MFC set to  0.000000
2/15/2012	3:49:13 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:49:13 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:49:13 PM	Tube furnace set to 150
2/15/2012	3:49:43 PM	H2 valve closed
2/15/2012	3:49:43 PM	BCl3 valve closed
2/15/2012	3:49:43 PM	PH3 valve closed
2/15/2012	3:49:43 PM	SiCl4 pre valve closed
2/15/2012	3:49:43 PM	SiCl4 post valve closed
2/15/2012	3:49:43 PM	Bypass valve closed
2/15/2012	3:49:43 PM	Bubbler valve closed
2/15/2012	3:49:43 PM	Helium valve opened
2/15/2012	3:49:43 PM	Main Vac valve opened
2/15/2012	3:49:43 PM	Helium MFC set to  20.000000
2/15/2012	3:49:43 PM	H2 MFC set to  0.000000
2/15/2012	3:49:43 PM	BCl3 MFC set to  0.000000
2/15/2012	3:49:43 PM	PH3 MFC set to  0.000000
2/15/2012	3:49:43 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:49:43 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:49:44 PM	Tube furnace set to 150
2/15/2012	3:50:14 PM	Helium valve closed
2/15/2012	3:50:14 PM	H2 valve closed
2/15/2012	3:50:14 PM	BCl3 valve closed
2/15/2012	3:50:14 PM	PH3 valve closed
2/15/2012	3:50:14 PM	SiCl4 pre valve closed
2/15/2012	3:50:14 PM	SiCl4 post valve closed
2/15/2012	3:50:14 PM	Bypass valve closed
2/15/2012	3:50:14 PM	Bubbler valve closed
2/15/2012	3:50:14 PM	Main Vac valve opened
2/15/2012	3:50:14 PM	Helium MFC set to  0.000000
2/15/2012	3:50:14 PM	H2 MFC set to  0.000000
2/15/2012	3:50:14 PM	BCl3 MFC set to  0.000000
2/15/2012	3:50:14 PM	PH3 MFC set to  0.000000
2/15/2012	3:50:14 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:50:14 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:50:14 PM	Tube furnace set to 150
2/15/2012	3:50:44 PM	H2 valve closed
2/15/2012	3:50:44 PM	BCl3 valve closed
2/15/2012	3:50:44 PM	PH3 valve closed
2/15/2012	3:50:44 PM	SiCl4 pre valve closed
2/15/2012	3:50:44 PM	SiCl4 post valve closed
2/15/2012	3:50:44 PM	Bypass valve closed
2/15/2012	3:50:44 PM	Bubbler valve closed
2/15/2012	3:50:44 PM	Helium valve opened
2/15/2012	3:50:44 PM	Main Vac valve opened
2/15/2012	3:50:44 PM	Helium MFC set to  20.000000
2/15/2012	3:50:44 PM	H2 MFC set to  0.000000
2/15/2012	3:50:44 PM	BCl3 MFC set to  0.000000
2/15/2012	3:50:44 PM	PH3 MFC set to  0.000000
2/15/2012	3:50:44 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:50:44 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:50:44 PM	Tube furnace set to 150
2/15/2012	3:51:14 PM	Helium valve closed
2/15/2012	3:51:14 PM	H2 valve closed
2/15/2012	3:51:14 PM	BCl3 valve closed
2/15/2012	3:51:14 PM	PH3 valve closed
2/15/2012	3:51:14 PM	SiCl4 pre valve closed
2/15/2012	3:51:14 PM	SiCl4 post valve closed
2/15/2012	3:51:14 PM	Bypass valve closed
2/15/2012	3:51:14 PM	Bubbler valve closed
2/15/2012	3:51:14 PM	Main Vac valve opened
2/15/2012	3:51:14 PM	Helium MFC set to  0.000000
2/15/2012	3:51:14 PM	H2 MFC set to  0.000000
2/15/2012	3:51:14 PM	BCl3 MFC set to  0.000000
2/15/2012	3:51:14 PM	PH3 MFC set to  0.000000
2/15/2012	3:51:14 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:51:14 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:51:14 PM	Tube furnace set to 150
2/15/2012	3:51:44 PM	H2 valve closed
2/15/2012	3:51:44 PM	BCl3 valve closed
2/15/2012	3:51:44 PM	PH3 valve closed
2/15/2012	3:51:44 PM	SiCl4 pre valve closed
2/15/2012	3:51:44 PM	SiCl4 post valve closed
2/15/2012	3:51:44 PM	Bypass valve closed
2/15/2012	3:51:44 PM	Bubbler valve closed
2/15/2012	3:51:44 PM	Helium valve opened
2/15/2012	3:51:44 PM	Main Vac valve opened
2/15/2012	3:51:44 PM	Helium MFC set to  20.000000
2/15/2012	3:51:44 PM	H2 MFC set to  0.000000
2/15/2012	3:51:44 PM	BCl3 MFC set to  0.000000
2/15/2012	3:51:44 PM	PH3 MFC set to  0.000000
2/15/2012	3:51:44 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:51:44 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:51:44 PM	Tube furnace set to 150
2/15/2012	3:52:14 PM	Helium valve closed
2/15/2012	3:52:14 PM	H2 valve closed
2/15/2012	3:52:14 PM	BCl3 valve closed
2/15/2012	3:52:14 PM	PH3 valve closed
2/15/2012	3:52:14 PM	SiCl4 pre valve closed
2/15/2012	3:52:14 PM	SiCl4 post valve closed
2/15/2012	3:52:14 PM	Bypass valve closed
2/15/2012	3:52:15 PM	Bubbler valve closed
2/15/2012	3:52:15 PM	Main Vac valve opened
2/15/2012	3:52:15 PM	Helium MFC set to  0.000000
2/15/2012	3:52:15 PM	H2 MFC set to  0.000000
2/15/2012	3:52:15 PM	BCl3 MFC set to  0.000000
2/15/2012	3:52:15 PM	PH3 MFC set to  0.000000
2/15/2012	3:52:15 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:52:15 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:52:15 PM	Tube furnace set to 150
2/15/2012	3:52:16 PM	Run finished at 3:52 PM
2/15/2012	3:54:12 PM	Recipe started at 3:54 PM
2/15/2012	3:54:12 PM	Helium valve closed
2/15/2012	3:54:12 PM	H2 valve closed
2/15/2012	3:54:12 PM	BCl3 valve closed
2/15/2012	3:54:12 PM	PH3 valve closed
2/15/2012	3:54:12 PM	SiCl4 pre valve closed
2/15/2012	3:54:12 PM	SiCl4 post valve closed
2/15/2012	3:54:12 PM	Bypass valve closed
2/15/2012	3:54:12 PM	Bubbler valve closed
2/15/2012	3:54:12 PM	Main Vac valve opened
2/15/2012	3:54:12 PM	Helium MFC set to  0.000000
2/15/2012	3:54:12 PM	H2 MFC set to  0.000000
2/15/2012	3:54:12 PM	BCl3 MFC set to  0.000000
2/15/2012	3:54:12 PM	PH3 MFC set to  0.000000
2/15/2012	3:54:12 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:54:12 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:54:12 PM	Tube furnace set to 150
2/15/2012	3:54:42 PM	H2 valve closed
2/15/2012	3:54:42 PM	BCl3 valve closed
2/15/2012	3:54:42 PM	PH3 valve closed
2/15/2012	3:54:42 PM	SiCl4 pre valve closed
2/15/2012	3:54:42 PM	SiCl4 post valve closed
2/15/2012	3:54:42 PM	Bypass valve closed
2/15/2012	3:54:42 PM	Bubbler valve closed
2/15/2012	3:54:42 PM	Helium valve opened
2/15/2012	3:54:42 PM	Main Vac valve opened
2/15/2012	3:54:42 PM	Helium MFC set to  20.000000
2/15/2012	3:54:42 PM	H2 MFC set to  0.000000
2/15/2012	3:54:42 PM	BCl3 MFC set to  0.000000
2/15/2012	3:54:42 PM	PH3 MFC set to  0.000000
2/15/2012	3:54:42 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:54:42 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:54:42 PM	Tube furnace set to 150
2/15/2012	3:55:12 PM	Helium valve closed
2/15/2012	3:55:12 PM	H2 valve closed
2/15/2012	3:55:12 PM	BCl3 valve closed
2/15/2012	3:55:12 PM	PH3 valve closed
2/15/2012	3:55:12 PM	SiCl4 pre valve closed
2/15/2012	3:55:12 PM	SiCl4 post valve closed
2/15/2012	3:55:12 PM	Bypass valve closed
2/15/2012	3:55:12 PM	Bubbler valve closed
2/15/2012	3:55:12 PM	Main Vac valve opened
2/15/2012	3:55:12 PM	Helium MFC set to  0.000000
2/15/2012	3:55:12 PM	H2 MFC set to  0.000000
2/15/2012	3:55:12 PM	BCl3 MFC set to  0.000000
2/15/2012	3:55:12 PM	PH3 MFC set to  0.000000
2/15/2012	3:55:12 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:55:12 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:55:13 PM	Tube furnace set to 150
2/15/2012	3:55:43 PM	H2 valve closed
2/15/2012	3:55:43 PM	BCl3 valve closed
2/15/2012	3:55:43 PM	PH3 valve closed
2/15/2012	3:55:43 PM	SiCl4 pre valve closed
2/15/2012	3:55:43 PM	SiCl4 post valve closed
2/15/2012	3:55:43 PM	Bypass valve closed
2/15/2012	3:55:43 PM	Bubbler valve closed
2/15/2012	3:55:43 PM	Helium valve opened
2/15/2012	3:55:43 PM	Main Vac valve opened
2/15/2012	3:55:43 PM	Helium MFC set to  20.000000
2/15/2012	3:55:43 PM	H2 MFC set to  0.000000
2/15/2012	3:55:43 PM	BCl3 MFC set to  0.000000
2/15/2012	3:55:43 PM	PH3 MFC set to  0.000000
2/15/2012	3:55:43 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:55:43 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:55:43 PM	Tube furnace set to 150
2/15/2012	3:56:13 PM	Helium valve closed
2/15/2012	3:56:13 PM	H2 valve closed
2/15/2012	3:56:13 PM	BCl3 valve closed
2/15/2012	3:56:13 PM	PH3 valve closed
2/15/2012	3:56:13 PM	SiCl4 pre valve closed
2/15/2012	3:56:13 PM	SiCl4 post valve closed
2/15/2012	3:56:13 PM	Bypass valve closed
2/15/2012	3:56:13 PM	Bubbler valve closed
2/15/2012	3:56:13 PM	Main Vac valve opened
2/15/2012	3:56:13 PM	Helium MFC set to  0.000000
2/15/2012	3:56:13 PM	H2 MFC set to  0.000000
2/15/2012	3:56:13 PM	BCl3 MFC set to  0.000000
2/15/2012	3:56:13 PM	PH3 MFC set to  0.000000
2/15/2012	3:56:13 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:56:13 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:56:13 PM	Tube furnace set to 150
2/15/2012	3:56:43 PM	H2 valve closed
2/15/2012	3:56:43 PM	BCl3 valve closed
2/15/2012	3:56:43 PM	PH3 valve closed
2/15/2012	3:56:43 PM	SiCl4 pre valve closed
2/15/2012	3:56:43 PM	SiCl4 post valve closed
2/15/2012	3:56:43 PM	Bypass valve closed
2/15/2012	3:56:43 PM	Bubbler valve closed
2/15/2012	3:56:43 PM	Helium valve opened
2/15/2012	3:56:43 PM	Main Vac valve opened
2/15/2012	3:56:43 PM	Helium MFC set to  20.000000
2/15/2012	3:56:43 PM	H2 MFC set to  0.000000
2/15/2012	3:56:43 PM	BCl3 MFC set to  0.000000
2/15/2012	3:56:43 PM	PH3 MFC set to  0.000000
2/15/2012	3:56:43 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:56:43 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:56:43 PM	Tube furnace set to 150
2/15/2012	3:57:13 PM	Helium valve closed
2/15/2012	3:57:13 PM	H2 valve closed
2/15/2012	3:57:13 PM	BCl3 valve closed
2/15/2012	3:57:13 PM	PH3 valve closed
2/15/2012	3:57:13 PM	SiCl4 pre valve closed
2/15/2012	3:57:13 PM	SiCl4 post valve closed
2/15/2012	3:57:13 PM	Bypass valve closed
2/15/2012	3:57:13 PM	Bubbler valve closed
2/15/2012	3:57:13 PM	Main Vac valve opened
2/15/2012	3:57:13 PM	Helium MFC set to  0.000000
2/15/2012	3:57:13 PM	H2 MFC set to  0.000000
2/15/2012	3:57:13 PM	BCl3 MFC set to  0.000000
2/15/2012	3:57:13 PM	PH3 MFC set to  0.000000
2/15/2012	3:57:13 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:57:13 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:57:13 PM	Tube furnace set to 150
2/15/2012	3:57:43 PM	H2 valve closed
2/15/2012	3:57:43 PM	BCl3 valve closed
2/15/2012	3:57:43 PM	PH3 valve closed
2/15/2012	3:57:43 PM	SiCl4 pre valve closed
2/15/2012	3:57:43 PM	SiCl4 post valve closed
2/15/2012	3:57:43 PM	Bypass valve closed
2/15/2012	3:57:43 PM	Bubbler valve closed
2/15/2012	3:57:43 PM	Helium valve opened
2/15/2012	3:57:43 PM	Main Vac valve opened
2/15/2012	3:57:43 PM	Helium MFC set to  20.000000
2/15/2012	3:57:43 PM	H2 MFC set to  0.000000
2/15/2012	3:57:43 PM	BCl3 MFC set to  0.000000
2/15/2012	3:57:43 PM	PH3 MFC set to  0.000000
2/15/2012	3:57:43 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:57:43 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:57:44 PM	Tube furnace set to 150
2/15/2012	3:58:14 PM	Helium valve closed
2/15/2012	3:58:14 PM	H2 valve closed
2/15/2012	3:58:14 PM	BCl3 valve closed
2/15/2012	3:58:14 PM	PH3 valve closed
2/15/2012	3:58:14 PM	SiCl4 pre valve closed
2/15/2012	3:58:14 PM	SiCl4 post valve closed
2/15/2012	3:58:14 PM	Bypass valve closed
2/15/2012	3:58:14 PM	Bubbler valve closed
2/15/2012	3:58:14 PM	Main Vac valve opened
2/15/2012	3:58:14 PM	Helium MFC set to  0.000000
2/15/2012	3:58:14 PM	H2 MFC set to  0.000000
2/15/2012	3:58:14 PM	BCl3 MFC set to  0.000000
2/15/2012	3:58:14 PM	PH3 MFC set to  0.000000
2/15/2012	3:58:14 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:58:14 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:58:14 PM	Tube furnace set to 150
2/15/2012	3:58:44 PM	H2 valve closed
2/15/2012	3:58:44 PM	BCl3 valve closed
2/15/2012	3:58:44 PM	PH3 valve closed
2/15/2012	3:58:44 PM	SiCl4 pre valve closed
2/15/2012	3:58:44 PM	SiCl4 post valve closed
2/15/2012	3:58:44 PM	Bypass valve closed
2/15/2012	3:58:44 PM	Bubbler valve closed
2/15/2012	3:58:44 PM	Helium valve opened
2/15/2012	3:58:44 PM	Main Vac valve opened
2/15/2012	3:58:44 PM	Helium MFC set to  20.000000
2/15/2012	3:58:44 PM	H2 MFC set to  0.000000
2/15/2012	3:58:44 PM	BCl3 MFC set to  0.000000
2/15/2012	3:58:44 PM	PH3 MFC set to  0.000000
2/15/2012	3:58:44 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:58:44 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:58:44 PM	Tube furnace set to 150
2/15/2012	3:59:14 PM	Helium valve closed
2/15/2012	3:59:14 PM	H2 valve closed
2/15/2012	3:59:14 PM	BCl3 valve closed
2/15/2012	3:59:14 PM	PH3 valve closed
2/15/2012	3:59:14 PM	SiCl4 pre valve closed
2/15/2012	3:59:14 PM	SiCl4 post valve closed
2/15/2012	3:59:14 PM	Bypass valve closed
2/15/2012	3:59:14 PM	Bubbler valve closed
2/15/2012	3:59:14 PM	Main Vac valve opened
2/15/2012	3:59:14 PM	Helium MFC set to  0.000000
2/15/2012	3:59:14 PM	H2 MFC set to  0.000000
2/15/2012	3:59:14 PM	BCl3 MFC set to  0.000000
2/15/2012	3:59:14 PM	PH3 MFC set to  0.000000
2/15/2012	3:59:14 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:59:14 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:59:14 PM	Tube furnace set to 150
2/15/2012	3:59:44 PM	H2 valve closed
2/15/2012	3:59:44 PM	BCl3 valve closed
2/15/2012	3:59:44 PM	PH3 valve closed
2/15/2012	3:59:44 PM	SiCl4 pre valve closed
2/15/2012	3:59:44 PM	SiCl4 post valve closed
2/15/2012	3:59:44 PM	Bypass valve closed
2/15/2012	3:59:44 PM	Bubbler valve closed
2/15/2012	3:59:44 PM	Helium valve opened
2/15/2012	3:59:44 PM	Main Vac valve opened
2/15/2012	3:59:44 PM	Helium MFC set to  20.000000
2/15/2012	3:59:44 PM	H2 MFC set to  0.000000
2/15/2012	3:59:44 PM	BCl3 MFC set to  0.000000
2/15/2012	3:59:44 PM	PH3 MFC set to  0.000000
2/15/2012	3:59:44 PM	SiCl4 MFC set to  0.000000
2/15/2012	3:59:44 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	3:59:44 PM	Tube furnace set to 150
2/15/2012	4:00:14 PM	Helium valve closed
2/15/2012	4:00:14 PM	H2 valve closed
2/15/2012	4:00:14 PM	BCl3 valve closed
2/15/2012	4:00:14 PM	PH3 valve closed
2/15/2012	4:00:14 PM	SiCl4 pre valve closed
2/15/2012	4:00:14 PM	SiCl4 post valve closed
2/15/2012	4:00:14 PM	Bypass valve closed
2/15/2012	4:00:14 PM	Bubbler valve closed
2/15/2012	4:00:14 PM	Main Vac valve opened
2/15/2012	4:00:14 PM	Helium MFC set to  0.000000
2/15/2012	4:00:14 PM	H2 MFC set to  0.000000
2/15/2012	4:00:14 PM	BCl3 MFC set to  0.000000
2/15/2012	4:00:14 PM	PH3 MFC set to  0.000000
2/15/2012	4:00:14 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:00:14 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:00:15 PM	Tube furnace set to 150
2/15/2012	4:00:45 PM	H2 valve closed
2/15/2012	4:00:45 PM	BCl3 valve closed
2/15/2012	4:00:45 PM	PH3 valve closed
2/15/2012	4:00:45 PM	SiCl4 pre valve closed
2/15/2012	4:00:45 PM	SiCl4 post valve closed
2/15/2012	4:00:45 PM	Bypass valve closed
2/15/2012	4:00:45 PM	Bubbler valve closed
2/15/2012	4:00:45 PM	Helium valve opened
2/15/2012	4:00:45 PM	Main Vac valve opened
2/15/2012	4:00:45 PM	Helium MFC set to  20.000000
2/15/2012	4:00:45 PM	H2 MFC set to  0.000000
2/15/2012	4:00:45 PM	BCl3 MFC set to  0.000000
2/15/2012	4:00:45 PM	PH3 MFC set to  0.000000
2/15/2012	4:00:45 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:00:45 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:00:45 PM	Tube furnace set to 150
2/15/2012	4:01:15 PM	Helium valve closed
2/15/2012	4:01:15 PM	H2 valve closed
2/15/2012	4:01:15 PM	BCl3 valve closed
2/15/2012	4:01:15 PM	PH3 valve closed
2/15/2012	4:01:15 PM	SiCl4 pre valve closed
2/15/2012	4:01:15 PM	SiCl4 post valve closed
2/15/2012	4:01:15 PM	Bypass valve closed
2/15/2012	4:01:15 PM	Bubbler valve closed
2/15/2012	4:01:15 PM	Main Vac valve opened
2/15/2012	4:01:15 PM	Helium MFC set to  0.000000
2/15/2012	4:01:15 PM	H2 MFC set to  0.000000
2/15/2012	4:01:15 PM	BCl3 MFC set to  0.000000
2/15/2012	4:01:15 PM	PH3 MFC set to  0.000000
2/15/2012	4:01:15 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:01:15 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:01:15 PM	Tube furnace set to 150
2/15/2012	4:01:45 PM	H2 valve closed
2/15/2012	4:01:45 PM	BCl3 valve closed
2/15/2012	4:01:45 PM	PH3 valve closed
2/15/2012	4:01:45 PM	SiCl4 pre valve closed
2/15/2012	4:01:45 PM	SiCl4 post valve closed
2/15/2012	4:01:45 PM	Bypass valve closed
2/15/2012	4:01:45 PM	Bubbler valve closed
2/15/2012	4:01:45 PM	Helium valve opened
2/15/2012	4:01:45 PM	Main Vac valve opened
2/15/2012	4:01:45 PM	Helium MFC set to  20.000000
2/15/2012	4:01:45 PM	H2 MFC set to  0.000000
2/15/2012	4:01:45 PM	BCl3 MFC set to  0.000000
2/15/2012	4:01:45 PM	PH3 MFC set to  0.000000
2/15/2012	4:01:45 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:01:45 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:01:45 PM	Tube furnace set to 150
2/15/2012	4:02:15 PM	Helium valve closed
2/15/2012	4:02:15 PM	H2 valve closed
2/15/2012	4:02:15 PM	BCl3 valve closed
2/15/2012	4:02:15 PM	PH3 valve closed
2/15/2012	4:02:15 PM	SiCl4 pre valve closed
2/15/2012	4:02:15 PM	SiCl4 post valve closed
2/15/2012	4:02:15 PM	Bypass valve closed
2/15/2012	4:02:15 PM	Bubbler valve closed
2/15/2012	4:02:15 PM	Main Vac valve opened
2/15/2012	4:02:15 PM	Helium MFC set to  0.000000
2/15/2012	4:02:15 PM	H2 MFC set to  0.000000
2/15/2012	4:02:15 PM	BCl3 MFC set to  0.000000
2/15/2012	4:02:15 PM	PH3 MFC set to  0.000000
2/15/2012	4:02:15 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:02:15 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:02:15 PM	Tube furnace set to 150
2/15/2012	4:02:46 PM	H2 valve closed
2/15/2012	4:02:46 PM	BCl3 valve closed
2/15/2012	4:02:46 PM	PH3 valve closed
2/15/2012	4:02:46 PM	SiCl4 pre valve closed
2/15/2012	4:02:46 PM	SiCl4 post valve closed
2/15/2012	4:02:46 PM	Bypass valve closed
2/15/2012	4:02:46 PM	Bubbler valve closed
2/15/2012	4:02:46 PM	Helium valve opened
2/15/2012	4:02:46 PM	Main Vac valve opened
2/15/2012	4:02:46 PM	Helium MFC set to  20.000000
2/15/2012	4:02:46 PM	H2 MFC set to  0.000000
2/15/2012	4:02:46 PM	BCl3 MFC set to  0.000000
2/15/2012	4:02:46 PM	PH3 MFC set to  0.000000
2/15/2012	4:02:46 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:02:46 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:02:46 PM	Tube furnace set to 150
2/15/2012	4:03:16 PM	Helium valve closed
2/15/2012	4:03:16 PM	H2 valve closed
2/15/2012	4:03:16 PM	BCl3 valve closed
2/15/2012	4:03:16 PM	PH3 valve closed
2/15/2012	4:03:16 PM	SiCl4 pre valve closed
2/15/2012	4:03:16 PM	SiCl4 post valve closed
2/15/2012	4:03:16 PM	Bypass valve closed
2/15/2012	4:03:16 PM	Bubbler valve closed
2/15/2012	4:03:16 PM	Main Vac valve opened
2/15/2012	4:03:16 PM	Helium MFC set to  0.000000
2/15/2012	4:03:16 PM	H2 MFC set to  0.000000
2/15/2012	4:03:16 PM	BCl3 MFC set to  0.000000
2/15/2012	4:03:16 PM	PH3 MFC set to  0.000000
2/15/2012	4:03:16 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:03:16 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:03:16 PM	Tube furnace set to 150
2/15/2012	4:03:46 PM	H2 valve closed
2/15/2012	4:03:46 PM	BCl3 valve closed
2/15/2012	4:03:46 PM	PH3 valve closed
2/15/2012	4:03:46 PM	SiCl4 pre valve closed
2/15/2012	4:03:46 PM	SiCl4 post valve closed
2/15/2012	4:03:46 PM	Bypass valve closed
2/15/2012	4:03:46 PM	Bubbler valve closed
2/15/2012	4:03:46 PM	Helium valve opened
2/15/2012	4:03:46 PM	Main Vac valve opened
2/15/2012	4:03:46 PM	Helium MFC set to  20.000000
2/15/2012	4:03:46 PM	H2 MFC set to  0.000000
2/15/2012	4:03:46 PM	BCl3 MFC set to  0.000000
2/15/2012	4:03:46 PM	PH3 MFC set to  0.000000
2/15/2012	4:03:46 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:03:46 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:03:46 PM	Tube furnace set to 150
2/15/2012	4:04:16 PM	Helium valve closed
2/15/2012	4:04:16 PM	H2 valve closed
2/15/2012	4:04:16 PM	BCl3 valve closed
2/15/2012	4:04:16 PM	PH3 valve closed
2/15/2012	4:04:16 PM	SiCl4 pre valve closed
2/15/2012	4:04:16 PM	SiCl4 post valve closed
2/15/2012	4:04:16 PM	Bypass valve closed
2/15/2012	4:04:16 PM	Bubbler valve closed
2/15/2012	4:04:16 PM	Main Vac valve opened
2/15/2012	4:04:16 PM	Helium MFC set to  0.000000
2/15/2012	4:04:16 PM	H2 MFC set to  0.000000
2/15/2012	4:04:16 PM	BCl3 MFC set to  0.000000
2/15/2012	4:04:16 PM	PH3 MFC set to  0.000000
2/15/2012	4:04:16 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:04:16 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:04:16 PM	Tube furnace set to 150
2/15/2012	4:04:17 PM	Run finished at 4:04 PM
2/15/2012	4:04:46 PM	Main Vac valve closed
2/15/2012	4:04:57 PM	Main Vac valve opened
2/15/2012	4:05:05 PM	Recipe started at 4:04 PM
2/15/2012	4:05:05 PM	Helium valve closed
2/15/2012	4:05:05 PM	H2 valve closed
2/15/2012	4:05:05 PM	BCl3 valve closed
2/15/2012	4:05:05 PM	PH3 valve closed
2/15/2012	4:05:05 PM	SiCl4 pre valve closed
2/15/2012	4:05:05 PM	SiCl4 post valve closed
2/15/2012	4:05:05 PM	Bypass valve closed
2/15/2012	4:05:05 PM	Bubbler valve closed
2/15/2012	4:05:05 PM	Main Vac valve opened
2/15/2012	4:05:05 PM	Helium MFC set to  0.000000
2/15/2012	4:05:05 PM	H2 MFC set to  0.000000
2/15/2012	4:05:05 PM	BCl3 MFC set to  0.000000
2/15/2012	4:05:05 PM	PH3 MFC set to  0.000000
2/15/2012	4:05:05 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:05:05 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:05:05 PM	Tube furnace set to 150
2/15/2012	4:05:09 PM	H2 valve closed
2/15/2012	4:05:09 PM	BCl3 valve closed
2/15/2012	4:05:09 PM	PH3 valve closed
2/15/2012	4:05:09 PM	SiCl4 pre valve closed
2/15/2012	4:05:09 PM	SiCl4 post valve closed
2/15/2012	4:05:09 PM	Bypass valve closed
2/15/2012	4:05:09 PM	Bubbler valve closed
2/15/2012	4:05:09 PM	Helium valve opened
2/15/2012	4:05:09 PM	Main Vac valve opened
2/15/2012	4:05:09 PM	Helium MFC set to  20.000000
2/15/2012	4:05:09 PM	H2 MFC set to  0.000000
2/15/2012	4:05:09 PM	BCl3 MFC set to  0.000000
2/15/2012	4:05:09 PM	PH3 MFC set to  0.000000
2/15/2012	4:05:09 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:05:09 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:05:10 PM	Tube furnace set to 150
2/15/2012	4:05:40 PM	Helium valve closed
2/15/2012	4:05:40 PM	H2 valve closed
2/15/2012	4:05:40 PM	BCl3 valve closed
2/15/2012	4:05:40 PM	PH3 valve closed
2/15/2012	4:05:40 PM	SiCl4 pre valve closed
2/15/2012	4:05:40 PM	SiCl4 post valve closed
2/15/2012	4:05:40 PM	Bypass valve closed
2/15/2012	4:05:40 PM	Bubbler valve closed
2/15/2012	4:05:40 PM	Main Vac valve opened
2/15/2012	4:05:40 PM	Helium MFC set to  0.000000
2/15/2012	4:05:40 PM	H2 MFC set to  0.000000
2/15/2012	4:05:40 PM	BCl3 MFC set to  0.000000
2/15/2012	4:05:40 PM	PH3 MFC set to  0.000000
2/15/2012	4:05:40 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:05:40 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:05:40 PM	Tube furnace set to 150
2/15/2012	4:06:10 PM	H2 valve closed
2/15/2012	4:06:10 PM	BCl3 valve closed
2/15/2012	4:06:10 PM	PH3 valve closed
2/15/2012	4:06:10 PM	SiCl4 pre valve closed
2/15/2012	4:06:10 PM	SiCl4 post valve closed
2/15/2012	4:06:10 PM	Bypass valve closed
2/15/2012	4:06:10 PM	Bubbler valve closed
2/15/2012	4:06:10 PM	Helium valve opened
2/15/2012	4:06:10 PM	Main Vac valve opened
2/15/2012	4:06:10 PM	Helium MFC set to  20.000000
2/15/2012	4:06:10 PM	H2 MFC set to  0.000000
2/15/2012	4:06:10 PM	BCl3 MFC set to  0.000000
2/15/2012	4:06:10 PM	PH3 MFC set to  0.000000
2/15/2012	4:06:10 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:06:10 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:06:10 PM	Tube furnace set to 150
2/15/2012	4:06:40 PM	Helium valve closed
2/15/2012	4:06:40 PM	H2 valve closed
2/15/2012	4:06:40 PM	BCl3 valve closed
2/15/2012	4:06:40 PM	PH3 valve closed
2/15/2012	4:06:40 PM	SiCl4 pre valve closed
2/15/2012	4:06:40 PM	SiCl4 post valve closed
2/15/2012	4:06:40 PM	Bypass valve closed
2/15/2012	4:06:40 PM	Bubbler valve closed
2/15/2012	4:06:40 PM	Main Vac valve opened
2/15/2012	4:06:40 PM	Helium MFC set to  0.000000
2/15/2012	4:06:40 PM	H2 MFC set to  0.000000
2/15/2012	4:06:40 PM	BCl3 MFC set to  0.000000
2/15/2012	4:06:40 PM	PH3 MFC set to  0.000000
2/15/2012	4:06:40 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:06:40 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:06:40 PM	Tube furnace set to 150
2/15/2012	4:07:10 PM	H2 valve closed
2/15/2012	4:07:10 PM	BCl3 valve closed
2/15/2012	4:07:10 PM	PH3 valve closed
2/15/2012	4:07:10 PM	SiCl4 pre valve closed
2/15/2012	4:07:10 PM	SiCl4 post valve closed
2/15/2012	4:07:10 PM	Bypass valve closed
2/15/2012	4:07:10 PM	Bubbler valve closed
2/15/2012	4:07:10 PM	Helium valve opened
2/15/2012	4:07:10 PM	Main Vac valve opened
2/15/2012	4:07:10 PM	Helium MFC set to  20.000000
2/15/2012	4:07:10 PM	H2 MFC set to  0.000000
2/15/2012	4:07:10 PM	BCl3 MFC set to  0.000000
2/15/2012	4:07:10 PM	PH3 MFC set to  0.000000
2/15/2012	4:07:10 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:07:10 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:07:10 PM	Tube furnace set to 150
2/15/2012	4:07:40 PM	Helium valve closed
2/15/2012	4:07:40 PM	H2 valve closed
2/15/2012	4:07:40 PM	BCl3 valve closed
2/15/2012	4:07:40 PM	PH3 valve closed
2/15/2012	4:07:40 PM	SiCl4 pre valve closed
2/15/2012	4:07:40 PM	SiCl4 post valve closed
2/15/2012	4:07:40 PM	Bypass valve closed
2/15/2012	4:07:40 PM	Bubbler valve closed
2/15/2012	4:07:40 PM	Main Vac valve opened
2/15/2012	4:07:40 PM	Helium MFC set to  0.000000
2/15/2012	4:07:40 PM	H2 MFC set to  0.000000
2/15/2012	4:07:40 PM	BCl3 MFC set to  0.000000
2/15/2012	4:07:40 PM	PH3 MFC set to  0.000000
2/15/2012	4:07:40 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:07:40 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:07:41 PM	Tube furnace set to 150
2/15/2012	4:08:11 PM	H2 valve closed
2/15/2012	4:08:11 PM	BCl3 valve closed
2/15/2012	4:08:11 PM	PH3 valve closed
2/15/2012	4:08:11 PM	SiCl4 pre valve closed
2/15/2012	4:08:11 PM	SiCl4 post valve closed
2/15/2012	4:08:11 PM	Bypass valve closed
2/15/2012	4:08:11 PM	Bubbler valve closed
2/15/2012	4:08:11 PM	Helium valve opened
2/15/2012	4:08:11 PM	Main Vac valve opened
2/15/2012	4:08:11 PM	Helium MFC set to  20.000000
2/15/2012	4:08:11 PM	H2 MFC set to  0.000000
2/15/2012	4:08:11 PM	BCl3 MFC set to  0.000000
2/15/2012	4:08:11 PM	PH3 MFC set to  0.000000
2/15/2012	4:08:11 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:08:11 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:08:11 PM	Tube furnace set to 150
2/15/2012	4:08:41 PM	Helium valve closed
2/15/2012	4:08:41 PM	H2 valve closed
2/15/2012	4:08:41 PM	BCl3 valve closed
2/15/2012	4:08:41 PM	PH3 valve closed
2/15/2012	4:08:41 PM	SiCl4 pre valve closed
2/15/2012	4:08:41 PM	SiCl4 post valve closed
2/15/2012	4:08:41 PM	Bypass valve closed
2/15/2012	4:08:41 PM	Bubbler valve closed
2/15/2012	4:08:41 PM	Main Vac valve opened
2/15/2012	4:08:41 PM	Helium MFC set to  0.000000
2/15/2012	4:08:41 PM	H2 MFC set to  0.000000
2/15/2012	4:08:41 PM	BCl3 MFC set to  0.000000
2/15/2012	4:08:41 PM	PH3 MFC set to  0.000000
2/15/2012	4:08:41 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:08:41 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:08:41 PM	Tube furnace set to 150
2/15/2012	4:09:11 PM	H2 valve closed
2/15/2012	4:09:11 PM	BCl3 valve closed
2/15/2012	4:09:11 PM	PH3 valve closed
2/15/2012	4:09:11 PM	SiCl4 pre valve closed
2/15/2012	4:09:11 PM	SiCl4 post valve closed
2/15/2012	4:09:11 PM	Bypass valve closed
2/15/2012	4:09:11 PM	Bubbler valve closed
2/15/2012	4:09:11 PM	Helium valve opened
2/15/2012	4:09:11 PM	Main Vac valve opened
2/15/2012	4:09:11 PM	Helium MFC set to  20.000000
2/15/2012	4:09:11 PM	H2 MFC set to  0.000000
2/15/2012	4:09:11 PM	BCl3 MFC set to  0.000000
2/15/2012	4:09:11 PM	PH3 MFC set to  0.000000
2/15/2012	4:09:11 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:09:11 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:09:11 PM	Tube furnace set to 150
2/15/2012	4:09:41 PM	Helium valve closed
2/15/2012	4:09:41 PM	H2 valve closed
2/15/2012	4:09:41 PM	BCl3 valve closed
2/15/2012	4:09:41 PM	PH3 valve closed
2/15/2012	4:09:41 PM	SiCl4 pre valve closed
2/15/2012	4:09:41 PM	SiCl4 post valve closed
2/15/2012	4:09:41 PM	Bypass valve closed
2/15/2012	4:09:41 PM	Bubbler valve closed
2/15/2012	4:09:41 PM	Main Vac valve opened
2/15/2012	4:09:41 PM	Helium MFC set to  0.000000
2/15/2012	4:09:41 PM	H2 MFC set to  0.000000
2/15/2012	4:09:41 PM	BCl3 MFC set to  0.000000
2/15/2012	4:09:41 PM	PH3 MFC set to  0.000000
2/15/2012	4:09:41 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:09:41 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:09:41 PM	Tube furnace set to 150
2/15/2012	4:10:11 PM	H2 valve closed
2/15/2012	4:10:11 PM	BCl3 valve closed
2/15/2012	4:10:11 PM	PH3 valve closed
2/15/2012	4:10:11 PM	SiCl4 pre valve closed
2/15/2012	4:10:11 PM	SiCl4 post valve closed
2/15/2012	4:10:11 PM	Bypass valve closed
2/15/2012	4:10:11 PM	Bubbler valve closed
2/15/2012	4:10:11 PM	Helium valve opened
2/15/2012	4:10:11 PM	Main Vac valve opened
2/15/2012	4:10:11 PM	Helium MFC set to  20.000000
2/15/2012	4:10:11 PM	H2 MFC set to  0.000000
2/15/2012	4:10:11 PM	BCl3 MFC set to  0.000000
2/15/2012	4:10:11 PM	PH3 MFC set to  0.000000
2/15/2012	4:10:11 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:10:11 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:10:12 PM	Tube furnace set to 150
2/15/2012	4:10:42 PM	Helium valve closed
2/15/2012	4:10:42 PM	H2 valve closed
2/15/2012	4:10:42 PM	BCl3 valve closed
2/15/2012	4:10:42 PM	PH3 valve closed
2/15/2012	4:10:42 PM	SiCl4 pre valve closed
2/15/2012	4:10:42 PM	SiCl4 post valve closed
2/15/2012	4:10:42 PM	Bypass valve closed
2/15/2012	4:10:42 PM	Bubbler valve closed
2/15/2012	4:10:42 PM	Main Vac valve opened
2/15/2012	4:10:42 PM	Helium MFC set to  0.000000
2/15/2012	4:10:42 PM	H2 MFC set to  0.000000
2/15/2012	4:10:42 PM	BCl3 MFC set to  0.000000
2/15/2012	4:10:42 PM	PH3 MFC set to  0.000000
2/15/2012	4:10:42 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:10:42 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:10:42 PM	Tube furnace set to 150
2/15/2012	4:11:12 PM	H2 valve closed
2/15/2012	4:11:12 PM	BCl3 valve closed
2/15/2012	4:11:12 PM	PH3 valve closed
2/15/2012	4:11:12 PM	SiCl4 pre valve closed
2/15/2012	4:11:12 PM	SiCl4 post valve closed
2/15/2012	4:11:12 PM	Bypass valve closed
2/15/2012	4:11:12 PM	Bubbler valve closed
2/15/2012	4:11:12 PM	Helium valve opened
2/15/2012	4:11:12 PM	Main Vac valve opened
2/15/2012	4:11:12 PM	Helium MFC set to  20.000000
2/15/2012	4:11:12 PM	H2 MFC set to  0.000000
2/15/2012	4:11:12 PM	BCl3 MFC set to  0.000000
2/15/2012	4:11:12 PM	PH3 MFC set to  0.000000
2/15/2012	4:11:12 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:11:12 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:11:12 PM	Tube furnace set to 150
2/15/2012	4:11:42 PM	Helium valve closed
2/15/2012	4:11:42 PM	H2 valve closed
2/15/2012	4:11:42 PM	BCl3 valve closed
2/15/2012	4:11:42 PM	PH3 valve closed
2/15/2012	4:11:42 PM	SiCl4 pre valve closed
2/15/2012	4:11:42 PM	SiCl4 post valve closed
2/15/2012	4:11:42 PM	Bypass valve closed
2/15/2012	4:11:42 PM	Bubbler valve closed
2/15/2012	4:11:42 PM	Main Vac valve opened
2/15/2012	4:11:42 PM	Helium MFC set to  0.000000
2/15/2012	4:11:42 PM	H2 MFC set to  0.000000
2/15/2012	4:11:42 PM	BCl3 MFC set to  0.000000
2/15/2012	4:11:42 PM	PH3 MFC set to  0.000000
2/15/2012	4:11:42 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:11:42 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:11:42 PM	Tube furnace set to 150
2/15/2012	4:12:12 PM	H2 valve closed
2/15/2012	4:12:12 PM	BCl3 valve closed
2/15/2012	4:12:12 PM	PH3 valve closed
2/15/2012	4:12:12 PM	SiCl4 pre valve closed
2/15/2012	4:12:12 PM	SiCl4 post valve closed
2/15/2012	4:12:12 PM	Bypass valve closed
2/15/2012	4:12:12 PM	Bubbler valve closed
2/15/2012	4:12:12 PM	Helium valve opened
2/15/2012	4:12:12 PM	Main Vac valve opened
2/15/2012	4:12:12 PM	Helium MFC set to  20.000000
2/15/2012	4:12:12 PM	H2 MFC set to  0.000000
2/15/2012	4:12:12 PM	BCl3 MFC set to  0.000000
2/15/2012	4:12:12 PM	PH3 MFC set to  0.000000
2/15/2012	4:12:12 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:12:12 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:12:12 PM	Tube furnace set to 150
2/15/2012	4:12:42 PM	Helium valve closed
2/15/2012	4:12:42 PM	H2 valve closed
2/15/2012	4:12:42 PM	BCl3 valve closed
2/15/2012	4:12:42 PM	PH3 valve closed
2/15/2012	4:12:42 PM	SiCl4 pre valve closed
2/15/2012	4:12:42 PM	SiCl4 post valve closed
2/15/2012	4:12:42 PM	Bypass valve closed
2/15/2012	4:12:42 PM	Bubbler valve closed
2/15/2012	4:12:42 PM	Main Vac valve opened
2/15/2012	4:12:42 PM	Helium MFC set to  0.000000
2/15/2012	4:12:42 PM	H2 MFC set to  0.000000
2/15/2012	4:12:42 PM	BCl3 MFC set to  0.000000
2/15/2012	4:12:42 PM	PH3 MFC set to  0.000000
2/15/2012	4:12:43 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:12:43 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:12:43 PM	Tube furnace set to 150
2/15/2012	4:13:13 PM	H2 valve closed
2/15/2012	4:13:13 PM	BCl3 valve closed
2/15/2012	4:13:13 PM	PH3 valve closed
2/15/2012	4:13:13 PM	SiCl4 pre valve closed
2/15/2012	4:13:13 PM	SiCl4 post valve closed
2/15/2012	4:13:13 PM	Bypass valve closed
2/15/2012	4:13:13 PM	Bubbler valve closed
2/15/2012	4:13:13 PM	Helium valve opened
2/15/2012	4:13:13 PM	Main Vac valve opened
2/15/2012	4:13:13 PM	Helium MFC set to  20.000000
2/15/2012	4:13:13 PM	H2 MFC set to  0.000000
2/15/2012	4:13:13 PM	BCl3 MFC set to  0.000000
2/15/2012	4:13:13 PM	PH3 MFC set to  0.000000
2/15/2012	4:13:13 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:13:13 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:13:13 PM	Tube furnace set to 150
2/15/2012	4:13:43 PM	Helium valve closed
2/15/2012	4:13:43 PM	H2 valve closed
2/15/2012	4:13:43 PM	BCl3 valve closed
2/15/2012	4:13:43 PM	PH3 valve closed
2/15/2012	4:13:43 PM	SiCl4 pre valve closed
2/15/2012	4:13:43 PM	SiCl4 post valve closed
2/15/2012	4:13:43 PM	Bypass valve closed
2/15/2012	4:13:43 PM	Bubbler valve closed
2/15/2012	4:13:43 PM	Main Vac valve opened
2/15/2012	4:13:43 PM	Helium MFC set to  0.000000
2/15/2012	4:13:43 PM	H2 MFC set to  0.000000
2/15/2012	4:13:43 PM	BCl3 MFC set to  0.000000
2/15/2012	4:13:43 PM	PH3 MFC set to  0.000000
2/15/2012	4:13:43 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:13:43 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:13:43 PM	Tube furnace set to 150
2/15/2012	4:14:13 PM	H2 valve closed
2/15/2012	4:14:13 PM	BCl3 valve closed
2/15/2012	4:14:13 PM	PH3 valve closed
2/15/2012	4:14:13 PM	SiCl4 pre valve closed
2/15/2012	4:14:13 PM	SiCl4 post valve closed
2/15/2012	4:14:13 PM	Bypass valve closed
2/15/2012	4:14:13 PM	Bubbler valve closed
2/15/2012	4:14:13 PM	Helium valve opened
2/15/2012	4:14:13 PM	Main Vac valve opened
2/15/2012	4:14:13 PM	Helium MFC set to  20.000000
2/15/2012	4:14:13 PM	H2 MFC set to  0.000000
2/15/2012	4:14:13 PM	BCl3 MFC set to  0.000000
2/15/2012	4:14:13 PM	PH3 MFC set to  0.000000
2/15/2012	4:14:13 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:14:13 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:14:13 PM	Tube furnace set to 150
2/15/2012	4:14:43 PM	Helium valve closed
2/15/2012	4:14:43 PM	H2 valve closed
2/15/2012	4:14:43 PM	BCl3 valve closed
2/15/2012	4:14:43 PM	PH3 valve closed
2/15/2012	4:14:43 PM	SiCl4 pre valve closed
2/15/2012	4:14:43 PM	SiCl4 post valve closed
2/15/2012	4:14:43 PM	Bypass valve closed
2/15/2012	4:14:43 PM	Bubbler valve closed
2/15/2012	4:14:43 PM	Main Vac valve opened
2/15/2012	4:14:43 PM	Helium MFC set to  0.000000
2/15/2012	4:14:43 PM	H2 MFC set to  0.000000
2/15/2012	4:14:43 PM	BCl3 MFC set to  0.000000
2/15/2012	4:14:43 PM	PH3 MFC set to  0.000000
2/15/2012	4:14:43 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:14:43 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:14:43 PM	Tube furnace set to 150
2/15/2012	4:14:44 PM	Run finished at 4:14 PM
2/15/2012	4:15:16 PM	Main Vac valve closed
2/15/2012	4:15:35 PM	Main Vac valve opened
2/15/2012	4:16:05 PM	Recipe started at 4:16 PM
2/15/2012	4:16:05 PM	Helium valve closed
2/15/2012	4:16:05 PM	H2 valve closed
2/15/2012	4:16:05 PM	BCl3 valve closed
2/15/2012	4:16:05 PM	PH3 valve closed
2/15/2012	4:16:05 PM	SiCl4 pre valve closed
2/15/2012	4:16:05 PM	SiCl4 post valve closed
2/15/2012	4:16:05 PM	Main Vac valve closed
2/15/2012	4:16:05 PM	Bypass valve closed
2/15/2012	4:16:05 PM	Bubbler valve closed
2/15/2012	4:16:05 PM	Helium MFC set to  0.000000
2/15/2012	4:16:05 PM	H2 MFC set to  0.000000
2/15/2012	4:16:05 PM	BCl3 MFC set to  0.000000
2/15/2012	4:16:05 PM	PH3 MFC set to  0.000000
2/15/2012	4:16:05 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:16:05 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:16:05 PM	Tube furnace set to 0
2/15/2012	4:16:08 PM	Helium valve closed
2/15/2012	4:16:08 PM	BCl3 valve closed
2/15/2012	4:16:08 PM	PH3 valve closed
2/15/2012	4:16:08 PM	SiCl4 pre valve closed
2/15/2012	4:16:08 PM	SiCl4 post valve closed
2/15/2012	4:16:08 PM	Main Vac valve closed
2/15/2012	4:16:08 PM	Bypass valve closed
2/15/2012	4:16:08 PM	Bubbler valve closed
2/15/2012	4:16:08 PM	H2 valve opened
2/15/2012	4:16:08 PM	Helium MFC set to  0.000000
2/15/2012	4:16:08 PM	H2 MFC set to  500.000000
2/15/2012	4:16:08 PM	BCl3 MFC set to  0.000000
2/15/2012	4:16:08 PM	PH3 MFC set to  0.000000
2/15/2012	4:16:08 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:16:08 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:16:08 PM	Tube furnace set to 0
2/15/2012	4:17:12 PM	Helium valve closed
2/15/2012	4:17:12 PM	BCl3 valve closed
2/15/2012	4:17:12 PM	PH3 valve closed
2/15/2012	4:17:12 PM	SiCl4 pre valve closed
2/15/2012	4:17:12 PM	SiCl4 post valve closed
2/15/2012	4:17:12 PM	Main Vac valve closed
2/15/2012	4:17:12 PM	Bypass valve closed
2/15/2012	4:17:12 PM	H2 valve opened
2/15/2012	4:17:12 PM	Bubbler valve opened
2/15/2012	4:17:12 PM	Helium MFC set to  0.000000
2/15/2012	4:17:12 PM	H2 MFC set to  500.000000
2/15/2012	4:17:12 PM	BCl3 MFC set to  0.000000
2/15/2012	4:17:12 PM	PH3 MFC set to  0.000000
2/15/2012	4:17:12 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:17:12 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:17:12 PM	Tube furnace set to 0
2/15/2012	4:17:13 PM	Helium valve closed
2/15/2012	4:17:13 PM	BCl3 valve closed
2/15/2012	4:17:13 PM	PH3 valve closed
2/15/2012	4:17:13 PM	SiCl4 pre valve closed
2/15/2012	4:17:13 PM	SiCl4 post valve closed
2/15/2012	4:17:13 PM	Main Vac valve closed
2/15/2012	4:17:13 PM	Bypass valve closed
2/15/2012	4:17:13 PM	H2 valve opened
2/15/2012	4:17:13 PM	Bubbler valve opened
2/15/2012	4:17:13 PM	Helium MFC set to  0.000000
2/15/2012	4:17:13 PM	H2 MFC set to  450.000000
2/15/2012	4:17:13 PM	BCl3 MFC set to  0.000000
2/15/2012	4:17:13 PM	PH3 MFC set to  0.000000
2/15/2012	4:17:13 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:17:13 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:17:13 PM	Tube furnace set to 1000
2/15/2012	4:42:13 PM	Helium valve closed
2/15/2012	4:42:13 PM	PH3 valve closed
2/15/2012	4:42:13 PM	Main Vac valve closed
2/15/2012	4:42:13 PM	Bypass valve closed
2/15/2012	4:42:13 PM	H2 valve opened
2/15/2012	4:42:13 PM	BCl3 valve opened
2/15/2012	4:42:13 PM	SiCl4 pre valve opened
2/15/2012	4:42:13 PM	SiCl4 post valve opened
2/15/2012	4:42:13 PM	Bubbler valve opened
2/15/2012	4:42:13 PM	Helium MFC set to  0.000000
2/15/2012	4:42:13 PM	H2 MFC set to  450.000000
2/15/2012	4:42:13 PM	BCl3 MFC set to  1.500000
2/15/2012	4:42:13 PM	PH3 MFC set to  0.000000
2/15/2012	4:42:13 PM	SiCl4 MFC set to  50.000000
2/15/2012	4:42:13 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:42:13 PM	Tube furnace set to 1000
2/15/2012	4:47:13 PM	Helium valve closed
2/15/2012	4:47:13 PM	BCl3 valve closed
2/15/2012	4:47:13 PM	PH3 valve closed
2/15/2012	4:47:13 PM	SiCl4 pre valve closed
2/15/2012	4:47:13 PM	SiCl4 post valve closed
2/15/2012	4:47:13 PM	Main Vac valve closed
2/15/2012	4:47:13 PM	Bypass valve closed
2/15/2012	4:47:13 PM	H2 valve opened
2/15/2012	4:47:13 PM	Bubbler valve opened
2/15/2012	4:47:13 PM	Helium MFC set to  0.000000
2/15/2012	4:47:13 PM	H2 MFC set to  500.000000
2/15/2012	4:47:13 PM	BCl3 MFC set to  0.000000
2/15/2012	4:47:13 PM	PH3 MFC set to  0.000000
2/15/2012	4:47:13 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:47:13 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:47:14 PM	Tube furnace set to 750
2/15/2012	4:52:14 PM	H2 valve closed
2/15/2012	4:52:14 PM	BCl3 valve closed
2/15/2012	4:52:14 PM	PH3 valve closed
2/15/2012	4:52:14 PM	SiCl4 pre valve closed
2/15/2012	4:52:14 PM	SiCl4 post valve closed
2/15/2012	4:52:14 PM	Main Vac valve closed
2/15/2012	4:52:14 PM	Bypass valve closed
2/15/2012	4:52:14 PM	Helium valve opened
2/15/2012	4:52:14 PM	Bubbler valve opened
2/15/2012	4:52:14 PM	Helium MFC set to  500.000000
2/15/2012	4:52:14 PM	H2 MFC set to  0.000000
2/15/2012	4:52:14 PM	BCl3 MFC set to  0.000000
2/15/2012	4:52:14 PM	PH3 MFC set to  0.000000
2/15/2012	4:52:14 PM	SiCl4 MFC set to  0.000000
2/15/2012	4:52:14 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	4:52:14 PM	Tube furnace set to 0
2/15/2012	5:12:14 PM	Helium valve closed
2/15/2012	5:12:14 PM	H2 valve closed
2/15/2012	5:12:14 PM	BCl3 valve closed
2/15/2012	5:12:14 PM	PH3 valve closed
2/15/2012	5:12:14 PM	SiCl4 pre valve closed
2/15/2012	5:12:14 PM	SiCl4 post valve closed
2/15/2012	5:12:14 PM	Main Vac valve closed
2/15/2012	5:12:14 PM	Bypass valve closed
2/15/2012	5:12:14 PM	Bubbler valve closed
2/15/2012	5:12:14 PM	Helium MFC set to  0.000000
2/15/2012	5:12:14 PM	H2 MFC set to  0.000000
2/15/2012	5:12:14 PM	BCl3 MFC set to  0.000000
2/15/2012	5:12:14 PM	PH3 MFC set to  0.000000
2/15/2012	5:12:14 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:12:14 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:12:14 PM	Tube furnace set to 0
2/15/2012	5:12:15 PM	Run finished at 5:12 PM
2/15/2012	5:12:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2012	5:12:57 PM	Recipe started at 5:12 PM
2/15/2012	5:12:57 PM	Helium valve closed
2/15/2012	5:12:57 PM	H2 valve closed
2/15/2012	5:12:57 PM	BCl3 valve closed
2/15/2012	5:12:57 PM	PH3 valve closed
2/15/2012	5:12:57 PM	SiCl4 pre valve closed
2/15/2012	5:12:57 PM	SiCl4 post valve closed
2/15/2012	5:12:57 PM	Main Vac valve closed
2/15/2012	5:12:57 PM	Bypass valve closed
2/15/2012	5:12:57 PM	Bubbler valve closed
2/15/2012	5:12:57 PM	Helium MFC set to  0.000000
2/15/2012	5:12:57 PM	H2 MFC set to  0.000000
2/15/2012	5:12:57 PM	BCl3 MFC set to  0.000000
2/15/2012	5:12:57 PM	PH3 MFC set to  0.000000
2/15/2012	5:12:57 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:12:57 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:12:57 PM	Tube furnace set to 0
2/15/2012	5:13:00 PM	H2 valve closed
2/15/2012	5:13:00 PM	BCl3 valve closed
2/15/2012	5:13:00 PM	PH3 valve closed
2/15/2012	5:13:00 PM	SiCl4 pre valve closed
2/15/2012	5:13:00 PM	SiCl4 post valve closed
2/15/2012	5:13:00 PM	Main Vac valve closed
2/15/2012	5:13:00 PM	Bypass valve closed
2/15/2012	5:13:00 PM	Bubbler valve closed
2/15/2012	5:13:00 PM	Helium valve opened
2/15/2012	5:13:00 PM	Helium MFC set to  500.000000
2/15/2012	5:13:00 PM	H2 MFC set to  0.000000
2/15/2012	5:13:00 PM	BCl3 MFC set to  0.000000
2/15/2012	5:13:00 PM	PH3 MFC set to  0.000000
2/15/2012	5:13:00 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:13:00 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:13:00 PM	Tube furnace set to 0
2/15/2012	5:13:00 PM	Helium valve closed
2/15/2012	5:13:00 PM	H2 valve closed
2/15/2012	5:13:00 PM	BCl3 valve closed
2/15/2012	5:13:00 PM	PH3 valve closed
2/15/2012	5:13:00 PM	SiCl4 pre valve closed
2/15/2012	5:13:00 PM	SiCl4 post valve closed
2/15/2012	5:13:00 PM	Main Vac valve closed
2/15/2012	5:13:00 PM	Bypass valve closed
2/15/2012	5:13:00 PM	Bubbler valve closed
2/15/2012	5:13:00 PM	Helium MFC set to  0.000000
2/15/2012	5:13:00 PM	H2 MFC set to  0.000000
2/15/2012	5:13:00 PM	BCl3 MFC set to  0.000000
2/15/2012	5:13:01 PM	PH3 MFC set to  0.000000
2/15/2012	5:13:01 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:13:01 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:13:01 PM	Tube furnace set to 0
2/15/2012	5:13:02 PM	Run finished at 5:13 PM
2/15/2012	5:13:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2012	5:16:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2012	5:16:19 PM	Recipe started at 5:16 PM
2/15/2012	5:16:19 PM	Helium valve closed
2/15/2012	5:16:19 PM	H2 valve closed
2/15/2012	5:16:19 PM	BCl3 valve closed
2/15/2012	5:16:19 PM	PH3 valve closed
2/15/2012	5:16:19 PM	SiCl4 pre valve closed
2/15/2012	5:16:19 PM	SiCl4 post valve closed
2/15/2012	5:16:19 PM	Main Vac valve closed
2/15/2012	5:16:19 PM	Bubbler valve closed
2/15/2012	5:16:19 PM	Bypass valve opened
2/15/2012	5:16:19 PM	Helium MFC set to  0.000000
2/15/2012	5:16:19 PM	H2 MFC set to  0.000000
2/15/2012	5:16:19 PM	BCl3 MFC set to  0.000000
2/15/2012	5:16:19 PM	PH3 MFC set to  0.000000
2/15/2012	5:16:19 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:16:19 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:16:20 PM	Tube furnace set to 0
2/15/2012	5:17:18 PM	Helium valve closed
2/15/2012	5:17:18 PM	H2 valve closed
2/15/2012	5:17:18 PM	BCl3 valve closed
2/15/2012	5:17:18 PM	PH3 valve closed
2/15/2012	5:17:18 PM	SiCl4 pre valve closed
2/15/2012	5:17:18 PM	SiCl4 post valve closed
2/15/2012	5:17:18 PM	Main Vac valve closed
2/15/2012	5:17:18 PM	Bubbler valve closed
2/15/2012	5:17:18 PM	Bypass valve opened
2/15/2012	5:17:18 PM	Helium MFC set to  0.000000
2/15/2012	5:17:18 PM	H2 MFC set to  0.000000
2/15/2012	5:17:18 PM	BCl3 MFC set to  0.000000
2/15/2012	5:17:18 PM	PH3 MFC set to  0.000000
2/15/2012	5:17:18 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:17:18 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:17:18 PM	Tube furnace set to 0
2/15/2012	5:18:18 PM	Helium valve closed
2/15/2012	5:18:18 PM	H2 valve closed
2/15/2012	5:18:18 PM	BCl3 valve closed
2/15/2012	5:18:18 PM	PH3 valve closed
2/15/2012	5:18:18 PM	SiCl4 pre valve closed
2/15/2012	5:18:18 PM	SiCl4 post valve closed
2/15/2012	5:18:18 PM	Bypass valve closed
2/15/2012	5:18:18 PM	Bubbler valve closed
2/15/2012	5:18:18 PM	Main Vac valve opened
2/15/2012	5:18:18 PM	Helium MFC set to  0.000000
2/15/2012	5:18:18 PM	H2 MFC set to  0.000000
2/15/2012	5:18:18 PM	BCl3 MFC set to  0.000000
2/15/2012	5:18:18 PM	PH3 MFC set to  0.000000
2/15/2012	5:18:18 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:18:18 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:18:18 PM	Tube furnace set to 0
2/15/2012	5:18:19 PM	Run finished at 5:18 PM
2/15/2012	5:18:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2012	5:29:10 PM	Recipe started at 5:29 PM
2/15/2012	5:29:10 PM	Helium valve closed
2/15/2012	5:29:10 PM	H2 valve closed
2/15/2012	5:29:10 PM	BCl3 valve closed
2/15/2012	5:29:10 PM	PH3 valve closed
2/15/2012	5:29:10 PM	SiCl4 pre valve closed
2/15/2012	5:29:10 PM	SiCl4 post valve closed
2/15/2012	5:29:10 PM	Bypass valve closed
2/15/2012	5:29:10 PM	Bubbler valve closed
2/15/2012	5:29:10 PM	Main Vac valve opened
2/15/2012	5:29:10 PM	Helium MFC set to  0.000000
2/15/2012	5:29:10 PM	H2 MFC set to  0.000000
2/15/2012	5:29:10 PM	BCl3 MFC set to  0.000000
2/15/2012	5:29:10 PM	PH3 MFC set to  0.000000
2/15/2012	5:29:10 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:29:10 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:29:10 PM	Tube furnace set to 150
2/15/2012	5:29:40 PM	H2 valve closed
2/15/2012	5:29:40 PM	BCl3 valve closed
2/15/2012	5:29:40 PM	PH3 valve closed
2/15/2012	5:29:40 PM	SiCl4 pre valve closed
2/15/2012	5:29:40 PM	SiCl4 post valve closed
2/15/2012	5:29:40 PM	Bypass valve closed
2/15/2012	5:29:40 PM	Bubbler valve closed
2/15/2012	5:29:40 PM	Helium valve opened
2/15/2012	5:29:40 PM	Main Vac valve opened
2/15/2012	5:29:40 PM	Helium MFC set to  20.000000
2/15/2012	5:29:40 PM	H2 MFC set to  0.000000
2/15/2012	5:29:40 PM	BCl3 MFC set to  0.000000
2/15/2012	5:29:40 PM	PH3 MFC set to  0.000000
2/15/2012	5:29:40 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:29:40 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:29:40 PM	Tube furnace set to 150
2/15/2012	5:30:11 PM	Helium valve closed
2/15/2012	5:30:11 PM	H2 valve closed
2/15/2012	5:30:11 PM	BCl3 valve closed
2/15/2012	5:30:11 PM	PH3 valve closed
2/15/2012	5:30:11 PM	SiCl4 pre valve closed
2/15/2012	5:30:11 PM	SiCl4 post valve closed
2/15/2012	5:30:11 PM	Bypass valve closed
2/15/2012	5:30:11 PM	Bubbler valve closed
2/15/2012	5:30:11 PM	Main Vac valve opened
2/15/2012	5:30:11 PM	Helium MFC set to  0.000000
2/15/2012	5:30:11 PM	H2 MFC set to  0.000000
2/15/2012	5:30:11 PM	BCl3 MFC set to  0.000000
2/15/2012	5:30:11 PM	PH3 MFC set to  0.000000
2/15/2012	5:30:11 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:30:11 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:30:11 PM	Tube furnace set to 150
2/15/2012	5:30:41 PM	H2 valve closed
2/15/2012	5:30:41 PM	BCl3 valve closed
2/15/2012	5:30:41 PM	PH3 valve closed
2/15/2012	5:30:41 PM	SiCl4 pre valve closed
2/15/2012	5:30:41 PM	SiCl4 post valve closed
2/15/2012	5:30:41 PM	Bypass valve closed
2/15/2012	5:30:41 PM	Bubbler valve closed
2/15/2012	5:30:41 PM	Helium valve opened
2/15/2012	5:30:41 PM	Main Vac valve opened
2/15/2012	5:30:41 PM	Helium MFC set to  20.000000
2/15/2012	5:30:41 PM	H2 MFC set to  0.000000
2/15/2012	5:30:41 PM	BCl3 MFC set to  0.000000
2/15/2012	5:30:41 PM	PH3 MFC set to  0.000000
2/15/2012	5:30:41 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:30:41 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:30:41 PM	Tube furnace set to 150
2/15/2012	5:31:11 PM	Helium valve closed
2/15/2012	5:31:11 PM	H2 valve closed
2/15/2012	5:31:11 PM	BCl3 valve closed
2/15/2012	5:31:11 PM	PH3 valve closed
2/15/2012	5:31:11 PM	SiCl4 pre valve closed
2/15/2012	5:31:11 PM	SiCl4 post valve closed
2/15/2012	5:31:11 PM	Bypass valve closed
2/15/2012	5:31:11 PM	Bubbler valve closed
2/15/2012	5:31:11 PM	Main Vac valve opened
2/15/2012	5:31:11 PM	Helium MFC set to  0.000000
2/15/2012	5:31:11 PM	H2 MFC set to  0.000000
2/15/2012	5:31:11 PM	BCl3 MFC set to  0.000000
2/15/2012	5:31:11 PM	PH3 MFC set to  0.000000
2/15/2012	5:31:11 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:31:11 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:31:11 PM	Tube furnace set to 150
2/15/2012	5:31:41 PM	H2 valve closed
2/15/2012	5:31:41 PM	BCl3 valve closed
2/15/2012	5:31:41 PM	PH3 valve closed
2/15/2012	5:31:41 PM	SiCl4 pre valve closed
2/15/2012	5:31:41 PM	SiCl4 post valve closed
2/15/2012	5:31:41 PM	Bypass valve closed
2/15/2012	5:31:41 PM	Bubbler valve closed
2/15/2012	5:31:41 PM	Helium valve opened
2/15/2012	5:31:41 PM	Main Vac valve opened
2/15/2012	5:31:41 PM	Helium MFC set to  20.000000
2/15/2012	5:31:41 PM	H2 MFC set to  0.000000
2/15/2012	5:31:41 PM	BCl3 MFC set to  0.000000
2/15/2012	5:31:41 PM	PH3 MFC set to  0.000000
2/15/2012	5:31:41 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:31:41 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:31:41 PM	Tube furnace set to 150
2/15/2012	5:32:11 PM	Helium valve closed
2/15/2012	5:32:11 PM	H2 valve closed
2/15/2012	5:32:11 PM	BCl3 valve closed
2/15/2012	5:32:11 PM	PH3 valve closed
2/15/2012	5:32:11 PM	SiCl4 pre valve closed
2/15/2012	5:32:11 PM	SiCl4 post valve closed
2/15/2012	5:32:11 PM	Bypass valve closed
2/15/2012	5:32:11 PM	Bubbler valve closed
2/15/2012	5:32:11 PM	Main Vac valve opened
2/15/2012	5:32:11 PM	Helium MFC set to  0.000000
2/15/2012	5:32:11 PM	H2 MFC set to  0.000000
2/15/2012	5:32:11 PM	BCl3 MFC set to  0.000000
2/15/2012	5:32:11 PM	PH3 MFC set to  0.000000
2/15/2012	5:32:11 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:32:11 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:32:12 PM	Tube furnace set to 150
2/15/2012	5:32:42 PM	H2 valve closed
2/15/2012	5:32:42 PM	BCl3 valve closed
2/15/2012	5:32:42 PM	PH3 valve closed
2/15/2012	5:32:42 PM	SiCl4 pre valve closed
2/15/2012	5:32:42 PM	SiCl4 post valve closed
2/15/2012	5:32:42 PM	Bypass valve closed
2/15/2012	5:32:42 PM	Bubbler valve closed
2/15/2012	5:32:42 PM	Helium valve opened
2/15/2012	5:32:42 PM	Main Vac valve opened
2/15/2012	5:32:42 PM	Helium MFC set to  20.000000
2/15/2012	5:32:42 PM	H2 MFC set to  0.000000
2/15/2012	5:32:42 PM	BCl3 MFC set to  0.000000
2/15/2012	5:32:42 PM	PH3 MFC set to  0.000000
2/15/2012	5:32:42 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:32:42 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:32:42 PM	Tube furnace set to 150
2/15/2012	5:33:12 PM	Helium valve closed
2/15/2012	5:33:12 PM	H2 valve closed
2/15/2012	5:33:12 PM	BCl3 valve closed
2/15/2012	5:33:12 PM	PH3 valve closed
2/15/2012	5:33:12 PM	SiCl4 pre valve closed
2/15/2012	5:33:12 PM	SiCl4 post valve closed
2/15/2012	5:33:12 PM	Bypass valve closed
2/15/2012	5:33:12 PM	Bubbler valve closed
2/15/2012	5:33:12 PM	Main Vac valve opened
2/15/2012	5:33:12 PM	Helium MFC set to  0.000000
2/15/2012	5:33:12 PM	H2 MFC set to  0.000000
2/15/2012	5:33:12 PM	BCl3 MFC set to  0.000000
2/15/2012	5:33:12 PM	PH3 MFC set to  0.000000
2/15/2012	5:33:12 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:33:12 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:33:12 PM	Tube furnace set to 150
2/15/2012	5:33:42 PM	H2 valve closed
2/15/2012	5:33:42 PM	BCl3 valve closed
2/15/2012	5:33:42 PM	PH3 valve closed
2/15/2012	5:33:42 PM	SiCl4 pre valve closed
2/15/2012	5:33:42 PM	SiCl4 post valve closed
2/15/2012	5:33:42 PM	Bypass valve closed
2/15/2012	5:33:42 PM	Bubbler valve closed
2/15/2012	5:33:42 PM	Helium valve opened
2/15/2012	5:33:42 PM	Main Vac valve opened
2/15/2012	5:33:42 PM	Helium MFC set to  20.000000
2/15/2012	5:33:42 PM	H2 MFC set to  0.000000
2/15/2012	5:33:42 PM	BCl3 MFC set to  0.000000
2/15/2012	5:33:42 PM	PH3 MFC set to  0.000000
2/15/2012	5:33:42 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:33:42 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:33:42 PM	Tube furnace set to 150
2/15/2012	5:34:12 PM	Helium valve closed
2/15/2012	5:34:12 PM	H2 valve closed
2/15/2012	5:34:12 PM	BCl3 valve closed
2/15/2012	5:34:12 PM	PH3 valve closed
2/15/2012	5:34:12 PM	SiCl4 pre valve closed
2/15/2012	5:34:12 PM	SiCl4 post valve closed
2/15/2012	5:34:12 PM	Bypass valve closed
2/15/2012	5:34:12 PM	Bubbler valve closed
2/15/2012	5:34:12 PM	Main Vac valve opened
2/15/2012	5:34:12 PM	Helium MFC set to  0.000000
2/15/2012	5:34:12 PM	H2 MFC set to  0.000000
2/15/2012	5:34:12 PM	BCl3 MFC set to  0.000000
2/15/2012	5:34:12 PM	PH3 MFC set to  0.000000
2/15/2012	5:34:12 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:34:12 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:34:12 PM	Tube furnace set to 150
2/15/2012	5:34:42 PM	H2 valve closed
2/15/2012	5:34:42 PM	BCl3 valve closed
2/15/2012	5:34:42 PM	PH3 valve closed
2/15/2012	5:34:42 PM	SiCl4 pre valve closed
2/15/2012	5:34:42 PM	SiCl4 post valve closed
2/15/2012	5:34:42 PM	Bypass valve closed
2/15/2012	5:34:42 PM	Bubbler valve closed
2/15/2012	5:34:42 PM	Helium valve opened
2/15/2012	5:34:42 PM	Main Vac valve opened
2/15/2012	5:34:42 PM	Helium MFC set to  20.000000
2/15/2012	5:34:42 PM	H2 MFC set to  0.000000
2/15/2012	5:34:42 PM	BCl3 MFC set to  0.000000
2/15/2012	5:34:42 PM	PH3 MFC set to  0.000000
2/15/2012	5:34:42 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:34:42 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:34:43 PM	Tube furnace set to 150
2/15/2012	5:35:13 PM	Helium valve closed
2/15/2012	5:35:13 PM	H2 valve closed
2/15/2012	5:35:13 PM	BCl3 valve closed
2/15/2012	5:35:13 PM	PH3 valve closed
2/15/2012	5:35:13 PM	SiCl4 pre valve closed
2/15/2012	5:35:13 PM	SiCl4 post valve closed
2/15/2012	5:35:13 PM	Bypass valve closed
2/15/2012	5:35:13 PM	Bubbler valve closed
2/15/2012	5:35:13 PM	Main Vac valve opened
2/15/2012	5:35:13 PM	Helium MFC set to  0.000000
2/15/2012	5:35:13 PM	H2 MFC set to  0.000000
2/15/2012	5:35:13 PM	BCl3 MFC set to  0.000000
2/15/2012	5:35:13 PM	PH3 MFC set to  0.000000
2/15/2012	5:35:13 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:35:13 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:35:13 PM	Tube furnace set to 150
2/15/2012	5:35:43 PM	H2 valve closed
2/15/2012	5:35:43 PM	BCl3 valve closed
2/15/2012	5:35:43 PM	PH3 valve closed
2/15/2012	5:35:43 PM	SiCl4 pre valve closed
2/15/2012	5:35:43 PM	SiCl4 post valve closed
2/15/2012	5:35:43 PM	Bypass valve closed
2/15/2012	5:35:43 PM	Bubbler valve closed
2/15/2012	5:35:43 PM	Helium valve opened
2/15/2012	5:35:43 PM	Main Vac valve opened
2/15/2012	5:35:43 PM	Helium MFC set to  20.000000
2/15/2012	5:35:43 PM	H2 MFC set to  0.000000
2/15/2012	5:35:43 PM	BCl3 MFC set to  0.000000
2/15/2012	5:35:43 PM	PH3 MFC set to  0.000000
2/15/2012	5:35:43 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:35:43 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:35:43 PM	Tube furnace set to 150
2/15/2012	5:36:13 PM	Helium valve closed
2/15/2012	5:36:13 PM	H2 valve closed
2/15/2012	5:36:13 PM	BCl3 valve closed
2/15/2012	5:36:13 PM	PH3 valve closed
2/15/2012	5:36:13 PM	SiCl4 pre valve closed
2/15/2012	5:36:13 PM	SiCl4 post valve closed
2/15/2012	5:36:13 PM	Bypass valve closed
2/15/2012	5:36:13 PM	Bubbler valve closed
2/15/2012	5:36:13 PM	Main Vac valve opened
2/15/2012	5:36:13 PM	Helium MFC set to  0.000000
2/15/2012	5:36:13 PM	H2 MFC set to  0.000000
2/15/2012	5:36:13 PM	BCl3 MFC set to  0.000000
2/15/2012	5:36:13 PM	PH3 MFC set to  0.000000
2/15/2012	5:36:13 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:36:13 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:36:13 PM	Tube furnace set to 150
2/15/2012	5:36:43 PM	H2 valve closed
2/15/2012	5:36:43 PM	BCl3 valve closed
2/15/2012	5:36:43 PM	PH3 valve closed
2/15/2012	5:36:43 PM	SiCl4 pre valve closed
2/15/2012	5:36:43 PM	SiCl4 post valve closed
2/15/2012	5:36:43 PM	Bypass valve closed
2/15/2012	5:36:43 PM	Bubbler valve closed
2/15/2012	5:36:43 PM	Helium valve opened
2/15/2012	5:36:43 PM	Main Vac valve opened
2/15/2012	5:36:43 PM	Helium MFC set to  20.000000
2/15/2012	5:36:43 PM	H2 MFC set to  0.000000
2/15/2012	5:36:43 PM	BCl3 MFC set to  0.000000
2/15/2012	5:36:43 PM	PH3 MFC set to  0.000000
2/15/2012	5:36:43 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:36:43 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:36:43 PM	Tube furnace set to 150
2/15/2012	5:37:13 PM	Helium valve closed
2/15/2012	5:37:13 PM	H2 valve closed
2/15/2012	5:37:13 PM	BCl3 valve closed
2/15/2012	5:37:13 PM	PH3 valve closed
2/15/2012	5:37:13 PM	SiCl4 pre valve closed
2/15/2012	5:37:13 PM	SiCl4 post valve closed
2/15/2012	5:37:13 PM	Bypass valve closed
2/15/2012	5:37:13 PM	Bubbler valve closed
2/15/2012	5:37:13 PM	Main Vac valve opened
2/15/2012	5:37:13 PM	Helium MFC set to  0.000000
2/15/2012	5:37:13 PM	H2 MFC set to  0.000000
2/15/2012	5:37:13 PM	BCl3 MFC set to  0.000000
2/15/2012	5:37:13 PM	PH3 MFC set to  0.000000
2/15/2012	5:37:13 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:37:13 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:37:14 PM	Tube furnace set to 150
2/15/2012	5:37:44 PM	H2 valve closed
2/15/2012	5:37:44 PM	BCl3 valve closed
2/15/2012	5:37:44 PM	PH3 valve closed
2/15/2012	5:37:44 PM	SiCl4 pre valve closed
2/15/2012	5:37:44 PM	SiCl4 post valve closed
2/15/2012	5:37:44 PM	Bypass valve closed
2/15/2012	5:37:44 PM	Bubbler valve closed
2/15/2012	5:37:44 PM	Helium valve opened
2/15/2012	5:37:44 PM	Main Vac valve opened
2/15/2012	5:37:44 PM	Helium MFC set to  20.000000
2/15/2012	5:37:44 PM	H2 MFC set to  0.000000
2/15/2012	5:37:44 PM	BCl3 MFC set to  0.000000
2/15/2012	5:37:44 PM	PH3 MFC set to  0.000000
2/15/2012	5:37:44 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:37:44 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:37:44 PM	Tube furnace set to 150
2/15/2012	5:38:14 PM	Helium valve closed
2/15/2012	5:38:14 PM	H2 valve closed
2/15/2012	5:38:14 PM	BCl3 valve closed
2/15/2012	5:38:14 PM	PH3 valve closed
2/15/2012	5:38:14 PM	SiCl4 pre valve closed
2/15/2012	5:38:14 PM	SiCl4 post valve closed
2/15/2012	5:38:14 PM	Bypass valve closed
2/15/2012	5:38:14 PM	Bubbler valve closed
2/15/2012	5:38:14 PM	Main Vac valve opened
2/15/2012	5:38:14 PM	Helium MFC set to  0.000000
2/15/2012	5:38:14 PM	H2 MFC set to  0.000000
2/15/2012	5:38:14 PM	BCl3 MFC set to  0.000000
2/15/2012	5:38:14 PM	PH3 MFC set to  0.000000
2/15/2012	5:38:14 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:38:14 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:38:14 PM	Tube furnace set to 150
2/15/2012	5:38:44 PM	H2 valve closed
2/15/2012	5:38:44 PM	BCl3 valve closed
2/15/2012	5:38:44 PM	PH3 valve closed
2/15/2012	5:38:44 PM	SiCl4 pre valve closed
2/15/2012	5:38:44 PM	SiCl4 post valve closed
2/15/2012	5:38:44 PM	Bypass valve closed
2/15/2012	5:38:44 PM	Bubbler valve closed
2/15/2012	5:38:44 PM	Helium valve opened
2/15/2012	5:38:44 PM	Main Vac valve opened
2/15/2012	5:38:44 PM	Helium MFC set to  20.000000
2/15/2012	5:38:44 PM	H2 MFC set to  0.000000
2/15/2012	5:38:44 PM	BCl3 MFC set to  0.000000
2/15/2012	5:38:44 PM	PH3 MFC set to  0.000000
2/15/2012	5:38:44 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:38:44 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:38:44 PM	Tube furnace set to 150
2/15/2012	5:39:14 PM	Helium valve closed
2/15/2012	5:39:14 PM	H2 valve closed
2/15/2012	5:39:14 PM	BCl3 valve closed
2/15/2012	5:39:14 PM	PH3 valve closed
2/15/2012	5:39:14 PM	SiCl4 pre valve closed
2/15/2012	5:39:14 PM	SiCl4 post valve closed
2/15/2012	5:39:14 PM	Bypass valve closed
2/15/2012	5:39:14 PM	Bubbler valve closed
2/15/2012	5:39:14 PM	Main Vac valve opened
2/15/2012	5:39:14 PM	Helium MFC set to  0.000000
2/15/2012	5:39:14 PM	H2 MFC set to  0.000000
2/15/2012	5:39:14 PM	BCl3 MFC set to  0.000000
2/15/2012	5:39:14 PM	PH3 MFC set to  0.000000
2/15/2012	5:39:14 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:39:14 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:39:14 PM	Tube furnace set to 150
2/15/2012	5:39:15 PM	Run finished at 5:39 PM
2/15/2012	5:41:30 PM	Recipe started at 5:41 PM
2/15/2012	5:41:30 PM	Helium valve closed
2/15/2012	5:41:30 PM	H2 valve closed
2/15/2012	5:41:30 PM	BCl3 valve closed
2/15/2012	5:41:30 PM	PH3 valve closed
2/15/2012	5:41:30 PM	SiCl4 pre valve closed
2/15/2012	5:41:30 PM	SiCl4 post valve closed
2/15/2012	5:41:30 PM	Bypass valve closed
2/15/2012	5:41:30 PM	Bubbler valve closed
2/15/2012	5:41:30 PM	Main Vac valve opened
2/15/2012	5:41:30 PM	Helium MFC set to  0.000000
2/15/2012	5:41:30 PM	H2 MFC set to  0.000000
2/15/2012	5:41:30 PM	BCl3 MFC set to  0.000000
2/15/2012	5:41:30 PM	PH3 MFC set to  0.000000
2/15/2012	5:41:30 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:41:30 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:41:30 PM	Tube furnace set to 150
2/15/2012	5:42:00 PM	H2 valve closed
2/15/2012	5:42:00 PM	BCl3 valve closed
2/15/2012	5:42:00 PM	PH3 valve closed
2/15/2012	5:42:01 PM	SiCl4 pre valve closed
2/15/2012	5:42:01 PM	SiCl4 post valve closed
2/15/2012	5:42:01 PM	Bypass valve closed
2/15/2012	5:42:01 PM	Bubbler valve closed
2/15/2012	5:42:01 PM	Helium valve opened
2/15/2012	5:42:01 PM	Main Vac valve opened
2/15/2012	5:42:01 PM	Helium MFC set to  20.000000
2/15/2012	5:42:01 PM	H2 MFC set to  0.000000
2/15/2012	5:42:01 PM	BCl3 MFC set to  0.000000
2/15/2012	5:42:01 PM	PH3 MFC set to  0.000000
2/15/2012	5:42:01 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:42:01 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:42:01 PM	Tube furnace set to 150
2/15/2012	5:42:31 PM	Helium valve closed
2/15/2012	5:42:31 PM	H2 valve closed
2/15/2012	5:42:31 PM	BCl3 valve closed
2/15/2012	5:42:31 PM	PH3 valve closed
2/15/2012	5:42:31 PM	SiCl4 pre valve closed
2/15/2012	5:42:31 PM	SiCl4 post valve closed
2/15/2012	5:42:31 PM	Bypass valve closed
2/15/2012	5:42:31 PM	Bubbler valve closed
2/15/2012	5:42:31 PM	Main Vac valve opened
2/15/2012	5:42:31 PM	Helium MFC set to  0.000000
2/15/2012	5:42:31 PM	H2 MFC set to  0.000000
2/15/2012	5:42:31 PM	BCl3 MFC set to  0.000000
2/15/2012	5:42:31 PM	PH3 MFC set to  0.000000
2/15/2012	5:42:31 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:42:31 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:42:31 PM	Tube furnace set to 150
2/15/2012	5:43:01 PM	H2 valve closed
2/15/2012	5:43:01 PM	BCl3 valve closed
2/15/2012	5:43:01 PM	PH3 valve closed
2/15/2012	5:43:01 PM	SiCl4 pre valve closed
2/15/2012	5:43:01 PM	SiCl4 post valve closed
2/15/2012	5:43:01 PM	Bypass valve closed
2/15/2012	5:43:01 PM	Bubbler valve closed
2/15/2012	5:43:01 PM	Helium valve opened
2/15/2012	5:43:01 PM	Main Vac valve opened
2/15/2012	5:43:01 PM	Helium MFC set to  20.000000
2/15/2012	5:43:01 PM	H2 MFC set to  0.000000
2/15/2012	5:43:01 PM	BCl3 MFC set to  0.000000
2/15/2012	5:43:01 PM	PH3 MFC set to  0.000000
2/15/2012	5:43:01 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:43:01 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:43:01 PM	Tube furnace set to 150
2/15/2012	5:43:31 PM	Helium valve closed
2/15/2012	5:43:31 PM	H2 valve closed
2/15/2012	5:43:31 PM	BCl3 valve closed
2/15/2012	5:43:31 PM	PH3 valve closed
2/15/2012	5:43:31 PM	SiCl4 pre valve closed
2/15/2012	5:43:31 PM	SiCl4 post valve closed
2/15/2012	5:43:31 PM	Bypass valve closed
2/15/2012	5:43:31 PM	Bubbler valve closed
2/15/2012	5:43:31 PM	Main Vac valve opened
2/15/2012	5:43:31 PM	Helium MFC set to  0.000000
2/15/2012	5:43:31 PM	H2 MFC set to  0.000000
2/15/2012	5:43:31 PM	BCl3 MFC set to  0.000000
2/15/2012	5:43:31 PM	PH3 MFC set to  0.000000
2/15/2012	5:43:31 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:43:31 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:43:31 PM	Tube furnace set to 150
2/15/2012	5:44:01 PM	H2 valve closed
2/15/2012	5:44:01 PM	BCl3 valve closed
2/15/2012	5:44:01 PM	PH3 valve closed
2/15/2012	5:44:01 PM	SiCl4 pre valve closed
2/15/2012	5:44:01 PM	SiCl4 post valve closed
2/15/2012	5:44:01 PM	Bypass valve closed
2/15/2012	5:44:01 PM	Bubbler valve closed
2/15/2012	5:44:01 PM	Helium valve opened
2/15/2012	5:44:01 PM	Main Vac valve opened
2/15/2012	5:44:01 PM	Helium MFC set to  20.000000
2/15/2012	5:44:01 PM	H2 MFC set to  0.000000
2/15/2012	5:44:01 PM	BCl3 MFC set to  0.000000
2/15/2012	5:44:01 PM	PH3 MFC set to  0.000000
2/15/2012	5:44:01 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:44:01 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:44:01 PM	Tube furnace set to 150
2/15/2012	5:44:32 PM	Helium valve closed
2/15/2012	5:44:32 PM	H2 valve closed
2/15/2012	5:44:32 PM	BCl3 valve closed
2/15/2012	5:44:32 PM	PH3 valve closed
2/15/2012	5:44:32 PM	SiCl4 pre valve closed
2/15/2012	5:44:32 PM	SiCl4 post valve closed
2/15/2012	5:44:32 PM	Bypass valve closed
2/15/2012	5:44:32 PM	Bubbler valve closed
2/15/2012	5:44:32 PM	Main Vac valve opened
2/15/2012	5:44:32 PM	Helium MFC set to  0.000000
2/15/2012	5:44:32 PM	H2 MFC set to  0.000000
2/15/2012	5:44:32 PM	BCl3 MFC set to  0.000000
2/15/2012	5:44:32 PM	PH3 MFC set to  0.000000
2/15/2012	5:44:32 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:44:32 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:44:32 PM	Tube furnace set to 150
2/15/2012	5:45:02 PM	H2 valve closed
2/15/2012	5:45:02 PM	BCl3 valve closed
2/15/2012	5:45:02 PM	PH3 valve closed
2/15/2012	5:45:02 PM	SiCl4 pre valve closed
2/15/2012	5:45:02 PM	SiCl4 post valve closed
2/15/2012	5:45:02 PM	Bypass valve closed
2/15/2012	5:45:02 PM	Bubbler valve closed
2/15/2012	5:45:02 PM	Helium valve opened
2/15/2012	5:45:02 PM	Main Vac valve opened
2/15/2012	5:45:02 PM	Helium MFC set to  20.000000
2/15/2012	5:45:02 PM	H2 MFC set to  0.000000
2/15/2012	5:45:02 PM	BCl3 MFC set to  0.000000
2/15/2012	5:45:02 PM	PH3 MFC set to  0.000000
2/15/2012	5:45:02 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:45:02 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:45:02 PM	Tube furnace set to 150
2/15/2012	5:45:32 PM	Helium valve closed
2/15/2012	5:45:32 PM	H2 valve closed
2/15/2012	5:45:32 PM	BCl3 valve closed
2/15/2012	5:45:32 PM	PH3 valve closed
2/15/2012	5:45:32 PM	SiCl4 pre valve closed
2/15/2012	5:45:32 PM	SiCl4 post valve closed
2/15/2012	5:45:32 PM	Bypass valve closed
2/15/2012	5:45:32 PM	Bubbler valve closed
2/15/2012	5:45:32 PM	Main Vac valve opened
2/15/2012	5:45:32 PM	Helium MFC set to  0.000000
2/15/2012	5:45:32 PM	H2 MFC set to  0.000000
2/15/2012	5:45:32 PM	BCl3 MFC set to  0.000000
2/15/2012	5:45:32 PM	PH3 MFC set to  0.000000
2/15/2012	5:45:32 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:45:32 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:45:32 PM	Tube furnace set to 150
2/15/2012	5:46:02 PM	H2 valve closed
2/15/2012	5:46:02 PM	BCl3 valve closed
2/15/2012	5:46:02 PM	PH3 valve closed
2/15/2012	5:46:02 PM	SiCl4 pre valve closed
2/15/2012	5:46:02 PM	SiCl4 post valve closed
2/15/2012	5:46:02 PM	Bypass valve closed
2/15/2012	5:46:02 PM	Bubbler valve closed
2/15/2012	5:46:02 PM	Helium valve opened
2/15/2012	5:46:02 PM	Main Vac valve opened
2/15/2012	5:46:02 PM	Helium MFC set to  20.000000
2/15/2012	5:46:02 PM	H2 MFC set to  0.000000
2/15/2012	5:46:02 PM	BCl3 MFC set to  0.000000
2/15/2012	5:46:02 PM	PH3 MFC set to  0.000000
2/15/2012	5:46:02 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:46:02 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:46:02 PM	Tube furnace set to 150
2/15/2012	5:46:32 PM	Helium valve closed
2/15/2012	5:46:32 PM	H2 valve closed
2/15/2012	5:46:32 PM	BCl3 valve closed
2/15/2012	5:46:32 PM	PH3 valve closed
2/15/2012	5:46:32 PM	SiCl4 pre valve closed
2/15/2012	5:46:32 PM	SiCl4 post valve closed
2/15/2012	5:46:32 PM	Bypass valve closed
2/15/2012	5:46:32 PM	Bubbler valve closed
2/15/2012	5:46:32 PM	Main Vac valve opened
2/15/2012	5:46:32 PM	Helium MFC set to  0.000000
2/15/2012	5:46:32 PM	H2 MFC set to  0.000000
2/15/2012	5:46:32 PM	BCl3 MFC set to  0.000000
2/15/2012	5:46:32 PM	PH3 MFC set to  0.000000
2/15/2012	5:46:32 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:46:32 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:46:33 PM	Tube furnace set to 150
2/15/2012	5:47:03 PM	H2 valve closed
2/15/2012	5:47:03 PM	BCl3 valve closed
2/15/2012	5:47:03 PM	PH3 valve closed
2/15/2012	5:47:03 PM	SiCl4 pre valve closed
2/15/2012	5:47:03 PM	SiCl4 post valve closed
2/15/2012	5:47:03 PM	Bypass valve closed
2/15/2012	5:47:03 PM	Bubbler valve closed
2/15/2012	5:47:03 PM	Helium valve opened
2/15/2012	5:47:03 PM	Main Vac valve opened
2/15/2012	5:47:03 PM	Helium MFC set to  20.000000
2/15/2012	5:47:03 PM	H2 MFC set to  0.000000
2/15/2012	5:47:03 PM	BCl3 MFC set to  0.000000
2/15/2012	5:47:03 PM	PH3 MFC set to  0.000000
2/15/2012	5:47:03 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:47:03 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:47:03 PM	Tube furnace set to 150
2/15/2012	5:47:33 PM	Helium valve closed
2/15/2012	5:47:33 PM	H2 valve closed
2/15/2012	5:47:33 PM	BCl3 valve closed
2/15/2012	5:47:33 PM	PH3 valve closed
2/15/2012	5:47:33 PM	SiCl4 pre valve closed
2/15/2012	5:47:33 PM	SiCl4 post valve closed
2/15/2012	5:47:33 PM	Bypass valve closed
2/15/2012	5:47:33 PM	Bubbler valve closed
2/15/2012	5:47:33 PM	Main Vac valve opened
2/15/2012	5:47:33 PM	Helium MFC set to  0.000000
2/15/2012	5:47:33 PM	H2 MFC set to  0.000000
2/15/2012	5:47:33 PM	BCl3 MFC set to  0.000000
2/15/2012	5:47:33 PM	PH3 MFC set to  0.000000
2/15/2012	5:47:33 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:47:33 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:47:33 PM	Tube furnace set to 150
2/15/2012	5:48:03 PM	H2 valve closed
2/15/2012	5:48:03 PM	BCl3 valve closed
2/15/2012	5:48:03 PM	PH3 valve closed
2/15/2012	5:48:03 PM	SiCl4 pre valve closed
2/15/2012	5:48:03 PM	SiCl4 post valve closed
2/15/2012	5:48:03 PM	Bypass valve closed
2/15/2012	5:48:03 PM	Bubbler valve closed
2/15/2012	5:48:03 PM	Helium valve opened
2/15/2012	5:48:03 PM	Main Vac valve opened
2/15/2012	5:48:03 PM	Helium MFC set to  20.000000
2/15/2012	5:48:03 PM	H2 MFC set to  0.000000
2/15/2012	5:48:03 PM	BCl3 MFC set to  0.000000
2/15/2012	5:48:03 PM	PH3 MFC set to  0.000000
2/15/2012	5:48:03 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:48:03 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:48:03 PM	Tube furnace set to 150
2/15/2012	5:48:33 PM	Helium valve closed
2/15/2012	5:48:33 PM	H2 valve closed
2/15/2012	5:48:33 PM	BCl3 valve closed
2/15/2012	5:48:33 PM	PH3 valve closed
2/15/2012	5:48:33 PM	SiCl4 pre valve closed
2/15/2012	5:48:33 PM	SiCl4 post valve closed
2/15/2012	5:48:33 PM	Bypass valve closed
2/15/2012	5:48:33 PM	Bubbler valve closed
2/15/2012	5:48:33 PM	Main Vac valve opened
2/15/2012	5:48:33 PM	Helium MFC set to  0.000000
2/15/2012	5:48:33 PM	H2 MFC set to  0.000000
2/15/2012	5:48:33 PM	BCl3 MFC set to  0.000000
2/15/2012	5:48:33 PM	PH3 MFC set to  0.000000
2/15/2012	5:48:33 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:48:33 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:48:33 PM	Tube furnace set to 150
2/15/2012	5:49:03 PM	H2 valve closed
2/15/2012	5:49:03 PM	BCl3 valve closed
2/15/2012	5:49:03 PM	PH3 valve closed
2/15/2012	5:49:03 PM	SiCl4 pre valve closed
2/15/2012	5:49:03 PM	SiCl4 post valve closed
2/15/2012	5:49:03 PM	Bypass valve closed
2/15/2012	5:49:03 PM	Bubbler valve closed
2/15/2012	5:49:03 PM	Helium valve opened
2/15/2012	5:49:03 PM	Main Vac valve opened
2/15/2012	5:49:03 PM	Helium MFC set to  20.000000
2/15/2012	5:49:03 PM	H2 MFC set to  0.000000
2/15/2012	5:49:03 PM	BCl3 MFC set to  0.000000
2/15/2012	5:49:03 PM	PH3 MFC set to  0.000000
2/15/2012	5:49:03 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:49:03 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:49:04 PM	Tube furnace set to 150
2/15/2012	5:49:34 PM	Helium valve closed
2/15/2012	5:49:34 PM	H2 valve closed
2/15/2012	5:49:34 PM	BCl3 valve closed
2/15/2012	5:49:34 PM	PH3 valve closed
2/15/2012	5:49:34 PM	SiCl4 pre valve closed
2/15/2012	5:49:34 PM	SiCl4 post valve closed
2/15/2012	5:49:34 PM	Bypass valve closed
2/15/2012	5:49:34 PM	Bubbler valve closed
2/15/2012	5:49:34 PM	Main Vac valve opened
2/15/2012	5:49:34 PM	Helium MFC set to  0.000000
2/15/2012	5:49:34 PM	H2 MFC set to  0.000000
2/15/2012	5:49:34 PM	BCl3 MFC set to  0.000000
2/15/2012	5:49:34 PM	PH3 MFC set to  0.000000
2/15/2012	5:49:34 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:49:34 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:49:34 PM	Tube furnace set to 150
2/15/2012	5:50:04 PM	H2 valve closed
2/15/2012	5:50:04 PM	BCl3 valve closed
2/15/2012	5:50:04 PM	PH3 valve closed
2/15/2012	5:50:04 PM	SiCl4 pre valve closed
2/15/2012	5:50:04 PM	SiCl4 post valve closed
2/15/2012	5:50:04 PM	Bypass valve closed
2/15/2012	5:50:04 PM	Bubbler valve closed
2/15/2012	5:50:04 PM	Helium valve opened
2/15/2012	5:50:04 PM	Main Vac valve opened
2/15/2012	5:50:04 PM	Helium MFC set to  20.000000
2/15/2012	5:50:04 PM	H2 MFC set to  0.000000
2/15/2012	5:50:04 PM	BCl3 MFC set to  0.000000
2/15/2012	5:50:04 PM	PH3 MFC set to  0.000000
2/15/2012	5:50:04 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:50:04 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:50:04 PM	Tube furnace set to 150
2/15/2012	5:50:34 PM	Helium valve closed
2/15/2012	5:50:34 PM	H2 valve closed
2/15/2012	5:50:34 PM	BCl3 valve closed
2/15/2012	5:50:34 PM	PH3 valve closed
2/15/2012	5:50:34 PM	SiCl4 pre valve closed
2/15/2012	5:50:34 PM	SiCl4 post valve closed
2/15/2012	5:50:34 PM	Bypass valve closed
2/15/2012	5:50:34 PM	Bubbler valve closed
2/15/2012	5:50:34 PM	Main Vac valve opened
2/15/2012	5:50:34 PM	Helium MFC set to  0.000000
2/15/2012	5:50:34 PM	H2 MFC set to  0.000000
2/15/2012	5:50:34 PM	BCl3 MFC set to  0.000000
2/15/2012	5:50:34 PM	PH3 MFC set to  0.000000
2/15/2012	5:50:34 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:50:34 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:50:34 PM	Tube furnace set to 150
2/15/2012	5:51:04 PM	H2 valve closed
2/15/2012	5:51:04 PM	BCl3 valve closed
2/15/2012	5:51:04 PM	PH3 valve closed
2/15/2012	5:51:04 PM	SiCl4 pre valve closed
2/15/2012	5:51:04 PM	SiCl4 post valve closed
2/15/2012	5:51:04 PM	Bypass valve closed
2/15/2012	5:51:04 PM	Bubbler valve closed
2/15/2012	5:51:04 PM	Helium valve opened
2/15/2012	5:51:04 PM	Main Vac valve opened
2/15/2012	5:51:04 PM	Helium MFC set to  20.000000
2/15/2012	5:51:04 PM	H2 MFC set to  0.000000
2/15/2012	5:51:04 PM	BCl3 MFC set to  0.000000
2/15/2012	5:51:04 PM	PH3 MFC set to  0.000000
2/15/2012	5:51:04 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:51:04 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:51:04 PM	Tube furnace set to 150
2/15/2012	5:51:34 PM	Helium valve closed
2/15/2012	5:51:34 PM	H2 valve closed
2/15/2012	5:51:34 PM	BCl3 valve closed
2/15/2012	5:51:34 PM	PH3 valve closed
2/15/2012	5:51:34 PM	SiCl4 pre valve closed
2/15/2012	5:51:34 PM	SiCl4 post valve closed
2/15/2012	5:51:34 PM	Bypass valve closed
2/15/2012	5:51:34 PM	Bubbler valve closed
2/15/2012	5:51:34 PM	Main Vac valve opened
2/15/2012	5:51:34 PM	Helium MFC set to  0.000000
2/15/2012	5:51:34 PM	H2 MFC set to  0.000000
2/15/2012	5:51:34 PM	BCl3 MFC set to  0.000000
2/15/2012	5:51:34 PM	PH3 MFC set to  0.000000
2/15/2012	5:51:34 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:51:34 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:51:35 PM	Tube furnace set to 150
2/15/2012	5:51:36 PM	Run finished at 5:51 PM
2/15/2012	5:51:57 PM	Main Vac valve closed
2/15/2012	5:52:16 PM	Main Vac valve opened
2/15/2012	5:52:47 PM	Recipe started at 5:52 PM
2/15/2012	5:52:47 PM	Helium valve closed
2/15/2012	5:52:47 PM	H2 valve closed
2/15/2012	5:52:47 PM	BCl3 valve closed
2/15/2012	5:52:47 PM	PH3 valve closed
2/15/2012	5:52:47 PM	SiCl4 pre valve closed
2/15/2012	5:52:47 PM	SiCl4 post valve closed
2/15/2012	5:52:47 PM	Bypass valve closed
2/15/2012	5:52:47 PM	Bubbler valve closed
2/15/2012	5:52:47 PM	Main Vac valve opened
2/15/2012	5:52:47 PM	Helium MFC set to  0.000000
2/15/2012	5:52:47 PM	H2 MFC set to  0.000000
2/15/2012	5:52:47 PM	BCl3 MFC set to  0.000000
2/15/2012	5:52:47 PM	PH3 MFC set to  0.000000
2/15/2012	5:52:47 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:52:47 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:52:47 PM	Tube furnace set to 150
2/15/2012	5:52:49 PM	H2 valve closed
2/15/2012	5:52:49 PM	BCl3 valve closed
2/15/2012	5:52:49 PM	PH3 valve closed
2/15/2012	5:52:49 PM	SiCl4 pre valve closed
2/15/2012	5:52:49 PM	SiCl4 post valve closed
2/15/2012	5:52:49 PM	Bypass valve closed
2/15/2012	5:52:49 PM	Bubbler valve closed
2/15/2012	5:52:49 PM	Helium valve opened
2/15/2012	5:52:49 PM	Main Vac valve opened
2/15/2012	5:52:49 PM	Helium MFC set to  20.000000
2/15/2012	5:52:49 PM	H2 MFC set to  0.000000
2/15/2012	5:52:49 PM	BCl3 MFC set to  0.000000
2/15/2012	5:52:49 PM	PH3 MFC set to  0.000000
2/15/2012	5:52:49 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:52:49 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:52:49 PM	Tube furnace set to 150
2/15/2012	5:53:19 PM	Helium valve closed
2/15/2012	5:53:19 PM	H2 valve closed
2/15/2012	5:53:19 PM	BCl3 valve closed
2/15/2012	5:53:19 PM	PH3 valve closed
2/15/2012	5:53:19 PM	SiCl4 pre valve closed
2/15/2012	5:53:19 PM	SiCl4 post valve closed
2/15/2012	5:53:19 PM	Bypass valve closed
2/15/2012	5:53:19 PM	Bubbler valve closed
2/15/2012	5:53:19 PM	Main Vac valve opened
2/15/2012	5:53:19 PM	Helium MFC set to  0.000000
2/15/2012	5:53:19 PM	H2 MFC set to  0.000000
2/15/2012	5:53:19 PM	BCl3 MFC set to  0.000000
2/15/2012	5:53:19 PM	PH3 MFC set to  0.000000
2/15/2012	5:53:19 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:53:19 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:53:19 PM	Tube furnace set to 150
2/15/2012	5:53:49 PM	H2 valve closed
2/15/2012	5:53:49 PM	BCl3 valve closed
2/15/2012	5:53:49 PM	PH3 valve closed
2/15/2012	5:53:49 PM	SiCl4 pre valve closed
2/15/2012	5:53:49 PM	SiCl4 post valve closed
2/15/2012	5:53:49 PM	Bypass valve closed
2/15/2012	5:53:49 PM	Bubbler valve closed
2/15/2012	5:53:49 PM	Helium valve opened
2/15/2012	5:53:49 PM	Main Vac valve opened
2/15/2012	5:53:49 PM	Helium MFC set to  20.000000
2/15/2012	5:53:49 PM	H2 MFC set to  0.000000
2/15/2012	5:53:49 PM	BCl3 MFC set to  0.000000
2/15/2012	5:53:49 PM	PH3 MFC set to  0.000000
2/15/2012	5:53:49 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:53:49 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:53:49 PM	Tube furnace set to 150
2/15/2012	5:54:19 PM	Helium valve closed
2/15/2012	5:54:19 PM	H2 valve closed
2/15/2012	5:54:19 PM	BCl3 valve closed
2/15/2012	5:54:19 PM	PH3 valve closed
2/15/2012	5:54:19 PM	SiCl4 pre valve closed
2/15/2012	5:54:19 PM	SiCl4 post valve closed
2/15/2012	5:54:19 PM	Bypass valve closed
2/15/2012	5:54:19 PM	Bubbler valve closed
2/15/2012	5:54:19 PM	Main Vac valve opened
2/15/2012	5:54:19 PM	Helium MFC set to  0.000000
2/15/2012	5:54:19 PM	H2 MFC set to  0.000000
2/15/2012	5:54:19 PM	BCl3 MFC set to  0.000000
2/15/2012	5:54:19 PM	PH3 MFC set to  0.000000
2/15/2012	5:54:19 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:54:19 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:54:20 PM	Tube furnace set to 150
2/15/2012	5:54:50 PM	H2 valve closed
2/15/2012	5:54:50 PM	BCl3 valve closed
2/15/2012	5:54:50 PM	PH3 valve closed
2/15/2012	5:54:50 PM	SiCl4 pre valve closed
2/15/2012	5:54:50 PM	SiCl4 post valve closed
2/15/2012	5:54:50 PM	Bypass valve closed
2/15/2012	5:54:50 PM	Bubbler valve closed
2/15/2012	5:54:50 PM	Helium valve opened
2/15/2012	5:54:50 PM	Main Vac valve opened
2/15/2012	5:54:50 PM	Helium MFC set to  20.000000
2/15/2012	5:54:50 PM	H2 MFC set to  0.000000
2/15/2012	5:54:50 PM	BCl3 MFC set to  0.000000
2/15/2012	5:54:50 PM	PH3 MFC set to  0.000000
2/15/2012	5:54:50 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:54:50 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:54:50 PM	Tube furnace set to 150
2/15/2012	5:55:20 PM	Helium valve closed
2/15/2012	5:55:20 PM	H2 valve closed
2/15/2012	5:55:20 PM	BCl3 valve closed
2/15/2012	5:55:20 PM	PH3 valve closed
2/15/2012	5:55:20 PM	SiCl4 pre valve closed
2/15/2012	5:55:20 PM	SiCl4 post valve closed
2/15/2012	5:55:20 PM	Bypass valve closed
2/15/2012	5:55:20 PM	Bubbler valve closed
2/15/2012	5:55:20 PM	Main Vac valve opened
2/15/2012	5:55:20 PM	Helium MFC set to  0.000000
2/15/2012	5:55:20 PM	H2 MFC set to  0.000000
2/15/2012	5:55:20 PM	BCl3 MFC set to  0.000000
2/15/2012	5:55:20 PM	PH3 MFC set to  0.000000
2/15/2012	5:55:20 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:55:20 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:55:20 PM	Tube furnace set to 150
2/15/2012	5:55:50 PM	H2 valve closed
2/15/2012	5:55:50 PM	BCl3 valve closed
2/15/2012	5:55:50 PM	PH3 valve closed
2/15/2012	5:55:50 PM	SiCl4 pre valve closed
2/15/2012	5:55:50 PM	SiCl4 post valve closed
2/15/2012	5:55:50 PM	Bypass valve closed
2/15/2012	5:55:50 PM	Bubbler valve closed
2/15/2012	5:55:50 PM	Helium valve opened
2/15/2012	5:55:50 PM	Main Vac valve opened
2/15/2012	5:55:50 PM	Helium MFC set to  20.000000
2/15/2012	5:55:50 PM	H2 MFC set to  0.000000
2/15/2012	5:55:50 PM	BCl3 MFC set to  0.000000
2/15/2012	5:55:50 PM	PH3 MFC set to  0.000000
2/15/2012	5:55:50 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:55:50 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:55:50 PM	Tube furnace set to 150
2/15/2012	5:56:20 PM	Helium valve closed
2/15/2012	5:56:20 PM	H2 valve closed
2/15/2012	5:56:20 PM	BCl3 valve closed
2/15/2012	5:56:20 PM	PH3 valve closed
2/15/2012	5:56:20 PM	SiCl4 pre valve closed
2/15/2012	5:56:20 PM	SiCl4 post valve closed
2/15/2012	5:56:20 PM	Bypass valve closed
2/15/2012	5:56:20 PM	Bubbler valve closed
2/15/2012	5:56:20 PM	Main Vac valve opened
2/15/2012	5:56:20 PM	Helium MFC set to  0.000000
2/15/2012	5:56:20 PM	H2 MFC set to  0.000000
2/15/2012	5:56:20 PM	BCl3 MFC set to  0.000000
2/15/2012	5:56:20 PM	PH3 MFC set to  0.000000
2/15/2012	5:56:20 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:56:20 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:56:20 PM	Tube furnace set to 150
2/15/2012	5:56:50 PM	H2 valve closed
2/15/2012	5:56:50 PM	BCl3 valve closed
2/15/2012	5:56:50 PM	PH3 valve closed
2/15/2012	5:56:50 PM	SiCl4 pre valve closed
2/15/2012	5:56:50 PM	SiCl4 post valve closed
2/15/2012	5:56:50 PM	Bypass valve closed
2/15/2012	5:56:50 PM	Bubbler valve closed
2/15/2012	5:56:50 PM	Helium valve opened
2/15/2012	5:56:50 PM	Main Vac valve opened
2/15/2012	5:56:50 PM	Helium MFC set to  20.000000
2/15/2012	5:56:50 PM	H2 MFC set to  0.000000
2/15/2012	5:56:50 PM	BCl3 MFC set to  0.000000
2/15/2012	5:56:50 PM	PH3 MFC set to  0.000000
2/15/2012	5:56:50 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:56:50 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:56:51 PM	Tube furnace set to 150
2/15/2012	5:57:21 PM	Helium valve closed
2/15/2012	5:57:21 PM	H2 valve closed
2/15/2012	5:57:21 PM	BCl3 valve closed
2/15/2012	5:57:21 PM	PH3 valve closed
2/15/2012	5:57:21 PM	SiCl4 pre valve closed
2/15/2012	5:57:21 PM	SiCl4 post valve closed
2/15/2012	5:57:21 PM	Bypass valve closed
2/15/2012	5:57:21 PM	Bubbler valve closed
2/15/2012	5:57:21 PM	Main Vac valve opened
2/15/2012	5:57:21 PM	Helium MFC set to  0.000000
2/15/2012	5:57:21 PM	H2 MFC set to  0.000000
2/15/2012	5:57:21 PM	BCl3 MFC set to  0.000000
2/15/2012	5:57:21 PM	PH3 MFC set to  0.000000
2/15/2012	5:57:21 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:57:21 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:57:21 PM	Tube furnace set to 150
2/15/2012	5:57:41 PM	Run aborted at 5:57 PM
2/15/2012	5:57:41 PM	Helium valve closed
2/15/2012	5:57:41 PM	H2 valve closed
2/15/2012	5:57:41 PM	BCl3 valve closed
2/15/2012	5:57:41 PM	PH3 valve closed
2/15/2012	5:57:41 PM	SiCl4 pre valve closed
2/15/2012	5:57:41 PM	SiCl4 post valve closed
2/15/2012	5:57:41 PM	Bypass valve closed
2/15/2012	5:57:41 PM	Main Vac valve closed
2/15/2012	5:57:41 PM	Bubbler valve closed
2/15/2012	5:57:41 PM	Helium MFC set to  0.000000
2/15/2012	5:57:41 PM	H2 MFC set to  0.000000
2/15/2012	5:57:41 PM	BCl3 MFC set to  0.000000
2/15/2012	5:57:41 PM	PH3 MFC set to  0.000000
2/15/2012	5:57:41 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:57:41 PM	Tube furnace set to 0
2/15/2012	5:57:43 PM	Main Vac valve opened
2/15/2012	5:57:50 PM	Main Vac valve closed
2/15/2012	5:58:10 PM	Main Vac valve opened
2/15/2012	5:58:41 PM	Recipe started at 5:58 PM
2/15/2012	5:58:41 PM	Helium valve closed
2/15/2012	5:58:41 PM	H2 valve closed
2/15/2012	5:58:41 PM	BCl3 valve closed
2/15/2012	5:58:41 PM	PH3 valve closed
2/15/2012	5:58:41 PM	SiCl4 pre valve closed
2/15/2012	5:58:41 PM	SiCl4 post valve closed
2/15/2012	5:58:41 PM	Main Vac valve closed
2/15/2012	5:58:41 PM	Bypass valve closed
2/15/2012	5:58:41 PM	Bubbler valve closed
2/15/2012	5:58:41 PM	Helium MFC set to  0.000000
2/15/2012	5:58:41 PM	H2 MFC set to  0.000000
2/15/2012	5:58:41 PM	BCl3 MFC set to  0.000000
2/15/2012	5:58:41 PM	PH3 MFC set to  0.000000
2/15/2012	5:58:41 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:58:41 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:58:41 PM	Tube furnace set to 0
2/15/2012	5:58:44 PM	Helium valve closed
2/15/2012	5:58:44 PM	BCl3 valve closed
2/15/2012	5:58:44 PM	PH3 valve closed
2/15/2012	5:58:44 PM	SiCl4 pre valve closed
2/15/2012	5:58:44 PM	SiCl4 post valve closed
2/15/2012	5:58:44 PM	Main Vac valve closed
2/15/2012	5:58:44 PM	Bypass valve closed
2/15/2012	5:58:44 PM	Bubbler valve closed
2/15/2012	5:58:44 PM	H2 valve opened
2/15/2012	5:58:44 PM	Helium MFC set to  0.000000
2/15/2012	5:58:44 PM	H2 MFC set to  500.000000
2/15/2012	5:58:44 PM	BCl3 MFC set to  0.000000
2/15/2012	5:58:44 PM	PH3 MFC set to  0.000000
2/15/2012	5:58:44 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:58:44 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:58:44 PM	Tube furnace set to 0
2/15/2012	5:59:46 PM	Helium valve closed
2/15/2012	5:59:46 PM	BCl3 valve closed
2/15/2012	5:59:46 PM	PH3 valve closed
2/15/2012	5:59:46 PM	SiCl4 pre valve closed
2/15/2012	5:59:46 PM	SiCl4 post valve closed
2/15/2012	5:59:46 PM	Main Vac valve closed
2/15/2012	5:59:46 PM	Bypass valve closed
2/15/2012	5:59:46 PM	H2 valve opened
2/15/2012	5:59:46 PM	Bubbler valve opened
2/15/2012	5:59:46 PM	Helium MFC set to  0.000000
2/15/2012	5:59:46 PM	H2 MFC set to  500.000000
2/15/2012	5:59:46 PM	BCl3 MFC set to  0.000000
2/15/2012	5:59:46 PM	PH3 MFC set to  0.000000
2/15/2012	5:59:46 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:59:46 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:59:46 PM	Tube furnace set to 0
2/15/2012	5:59:47 PM	Helium valve closed
2/15/2012	5:59:47 PM	BCl3 valve closed
2/15/2012	5:59:47 PM	PH3 valve closed
2/15/2012	5:59:47 PM	SiCl4 pre valve closed
2/15/2012	5:59:47 PM	SiCl4 post valve closed
2/15/2012	5:59:47 PM	Main Vac valve closed
2/15/2012	5:59:47 PM	Bypass valve closed
2/15/2012	5:59:47 PM	H2 valve opened
2/15/2012	5:59:47 PM	Bubbler valve opened
2/15/2012	5:59:47 PM	Helium MFC set to  0.000000
2/15/2012	5:59:47 PM	H2 MFC set to  450.000000
2/15/2012	5:59:47 PM	BCl3 MFC set to  0.000000
2/15/2012	5:59:47 PM	PH3 MFC set to  0.000000
2/15/2012	5:59:47 PM	SiCl4 MFC set to  0.000000
2/15/2012	5:59:47 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	5:59:47 PM	Tube furnace set to 1000
2/15/2012	6:24:47 PM	Helium valve closed
2/15/2012	6:24:47 PM	PH3 valve closed
2/15/2012	6:24:47 PM	Main Vac valve closed
2/15/2012	6:24:47 PM	Bypass valve closed
2/15/2012	6:24:47 PM	H2 valve opened
2/15/2012	6:24:47 PM	BCl3 valve opened
2/15/2012	6:24:47 PM	SiCl4 pre valve opened
2/15/2012	6:24:47 PM	SiCl4 post valve opened
2/15/2012	6:24:47 PM	Bubbler valve opened
2/15/2012	6:24:47 PM	Helium MFC set to  0.000000
2/15/2012	6:24:47 PM	H2 MFC set to  450.000000
2/15/2012	6:24:47 PM	BCl3 MFC set to  1.500000
2/15/2012	6:24:47 PM	PH3 MFC set to  0.000000
2/15/2012	6:24:47 PM	SiCl4 MFC set to  50.000000
2/15/2012	6:24:47 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	6:24:48 PM	Tube furnace set to 1000
2/15/2012	6:29:48 PM	Helium valve closed
2/15/2012	6:29:48 PM	BCl3 valve closed
2/15/2012	6:29:48 PM	PH3 valve closed
2/15/2012	6:29:48 PM	SiCl4 pre valve closed
2/15/2012	6:29:48 PM	SiCl4 post valve closed
2/15/2012	6:29:48 PM	Main Vac valve closed
2/15/2012	6:29:48 PM	Bypass valve closed
2/15/2012	6:29:48 PM	H2 valve opened
2/15/2012	6:29:48 PM	Bubbler valve opened
2/15/2012	6:29:48 PM	Helium MFC set to  0.000000
2/15/2012	6:29:48 PM	H2 MFC set to  500.000000
2/15/2012	6:29:48 PM	BCl3 MFC set to  0.000000
2/15/2012	6:29:48 PM	PH3 MFC set to  0.000000
2/15/2012	6:29:48 PM	SiCl4 MFC set to  0.000000
2/15/2012	6:29:48 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	6:29:48 PM	Tube furnace set to 750
2/15/2012	6:34:48 PM	H2 valve closed
2/15/2012	6:34:48 PM	BCl3 valve closed
2/15/2012	6:34:48 PM	PH3 valve closed
2/15/2012	6:34:48 PM	SiCl4 pre valve closed
2/15/2012	6:34:48 PM	SiCl4 post valve closed
2/15/2012	6:34:48 PM	Main Vac valve closed
2/15/2012	6:34:48 PM	Bypass valve closed
2/15/2012	6:34:48 PM	Helium valve opened
2/15/2012	6:34:48 PM	Bubbler valve opened
2/15/2012	6:34:48 PM	Helium MFC set to  500.000000
2/15/2012	6:34:48 PM	H2 MFC set to  0.000000
2/15/2012	6:34:48 PM	BCl3 MFC set to  0.000000
2/15/2012	6:34:48 PM	PH3 MFC set to  0.000000
2/15/2012	6:34:48 PM	SiCl4 MFC set to  0.000000
2/15/2012	6:34:48 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	6:34:48 PM	Tube furnace set to 0
2/15/2012	6:54:48 PM	Helium valve closed
2/15/2012	6:54:48 PM	H2 valve closed
2/15/2012	6:54:48 PM	BCl3 valve closed
2/15/2012	6:54:48 PM	PH3 valve closed
2/15/2012	6:54:48 PM	SiCl4 pre valve closed
2/15/2012	6:54:48 PM	SiCl4 post valve closed
2/15/2012	6:54:48 PM	Main Vac valve closed
2/15/2012	6:54:48 PM	Bypass valve closed
2/15/2012	6:54:48 PM	Bubbler valve closed
2/15/2012	6:54:48 PM	Helium MFC set to  0.000000
2/15/2012	6:54:48 PM	H2 MFC set to  0.000000
2/15/2012	6:54:48 PM	BCl3 MFC set to  0.000000
2/15/2012	6:54:48 PM	PH3 MFC set to  0.000000
2/15/2012	6:54:48 PM	SiCl4 MFC set to  0.000000
2/15/2012	6:54:48 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	6:54:48 PM	Tube furnace set to 0
2/15/2012	6:54:49 PM	Run finished at 6:54 PM
2/15/2012	7:14:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2012	7:14:14 PM	Recipe started at 7:14 PM
2/15/2012	7:14:14 PM	Helium valve closed
2/15/2012	7:14:14 PM	H2 valve closed
2/15/2012	7:14:14 PM	BCl3 valve closed
2/15/2012	7:14:14 PM	PH3 valve closed
2/15/2012	7:14:14 PM	SiCl4 pre valve closed
2/15/2012	7:14:14 PM	SiCl4 post valve closed
2/15/2012	7:14:14 PM	Main Vac valve closed
2/15/2012	7:14:14 PM	Bypass valve closed
2/15/2012	7:14:14 PM	Bubbler valve closed
2/15/2012	7:14:14 PM	Helium MFC set to  0.000000
2/15/2012	7:14:14 PM	H2 MFC set to  0.000000
2/15/2012	7:14:14 PM	BCl3 MFC set to  0.000000
2/15/2012	7:14:14 PM	PH3 MFC set to  0.000000
2/15/2012	7:14:14 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:14:14 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:14:14 PM	Tube furnace set to 0
2/15/2012	7:14:17 PM	H2 valve closed
2/15/2012	7:14:17 PM	BCl3 valve closed
2/15/2012	7:14:17 PM	PH3 valve closed
2/15/2012	7:14:17 PM	SiCl4 pre valve closed
2/15/2012	7:14:17 PM	SiCl4 post valve closed
2/15/2012	7:14:17 PM	Main Vac valve closed
2/15/2012	7:14:17 PM	Bypass valve closed
2/15/2012	7:14:17 PM	Bubbler valve closed
2/15/2012	7:14:17 PM	Helium valve opened
2/15/2012	7:14:17 PM	Helium MFC set to  500.000000
2/15/2012	7:14:17 PM	H2 MFC set to  0.000000
2/15/2012	7:14:17 PM	BCl3 MFC set to  0.000000
2/15/2012	7:14:17 PM	PH3 MFC set to  0.000000
2/15/2012	7:14:17 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:14:17 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:14:17 PM	Tube furnace set to 0
2/15/2012	7:14:21 PM	Helium valve closed
2/15/2012	7:14:21 PM	H2 valve closed
2/15/2012	7:14:21 PM	BCl3 valve closed
2/15/2012	7:14:21 PM	PH3 valve closed
2/15/2012	7:14:21 PM	SiCl4 pre valve closed
2/15/2012	7:14:21 PM	SiCl4 post valve closed
2/15/2012	7:14:21 PM	Main Vac valve closed
2/15/2012	7:14:21 PM	Bypass valve closed
2/15/2012	7:14:21 PM	Bubbler valve closed
2/15/2012	7:14:21 PM	Helium MFC set to  0.000000
2/15/2012	7:14:21 PM	H2 MFC set to  0.000000
2/15/2012	7:14:21 PM	BCl3 MFC set to  0.000000
2/15/2012	7:14:21 PM	PH3 MFC set to  0.000000
2/15/2012	7:14:22 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:14:22 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:14:22 PM	Tube furnace set to 0
2/15/2012	7:14:23 PM	Run finished at 7:14 PM
2/15/2012	7:14:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2012	7:18:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2012	7:18:59 PM	Recipe started at 7:18 PM
2/15/2012	7:18:59 PM	Helium valve closed
2/15/2012	7:18:59 PM	H2 valve closed
2/15/2012	7:18:59 PM	BCl3 valve closed
2/15/2012	7:18:59 PM	PH3 valve closed
2/15/2012	7:18:59 PM	SiCl4 pre valve closed
2/15/2012	7:18:59 PM	SiCl4 post valve closed
2/15/2012	7:18:59 PM	Main Vac valve closed
2/15/2012	7:18:59 PM	Bubbler valve closed
2/15/2012	7:18:59 PM	Bypass valve opened
2/15/2012	7:18:59 PM	Helium MFC set to  0.000000
2/15/2012	7:18:59 PM	H2 MFC set to  0.000000
2/15/2012	7:18:59 PM	BCl3 MFC set to  0.000000
2/15/2012	7:18:59 PM	PH3 MFC set to  0.000000
2/15/2012	7:18:59 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:18:59 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:18:59 PM	Tube furnace set to 0
2/15/2012	7:19:59 PM	Helium valve closed
2/15/2012	7:19:59 PM	H2 valve closed
2/15/2012	7:19:59 PM	BCl3 valve closed
2/15/2012	7:19:59 PM	PH3 valve closed
2/15/2012	7:19:59 PM	SiCl4 pre valve closed
2/15/2012	7:19:59 PM	SiCl4 post valve closed
2/15/2012	7:19:59 PM	Main Vac valve closed
2/15/2012	7:19:59 PM	Bubbler valve closed
2/15/2012	7:19:59 PM	Bypass valve opened
2/15/2012	7:19:59 PM	Helium MFC set to  0.000000
2/15/2012	7:19:59 PM	H2 MFC set to  0.000000
2/15/2012	7:19:59 PM	BCl3 MFC set to  0.000000
2/15/2012	7:19:59 PM	PH3 MFC set to  0.000000
2/15/2012	7:19:59 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:19:59 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:19:59 PM	Tube furnace set to 0
2/15/2012	7:20:59 PM	Helium valve closed
2/15/2012	7:20:59 PM	H2 valve closed
2/15/2012	7:20:59 PM	BCl3 valve closed
2/15/2012	7:20:59 PM	PH3 valve closed
2/15/2012	7:20:59 PM	SiCl4 pre valve closed
2/15/2012	7:20:59 PM	SiCl4 post valve closed
2/15/2012	7:20:59 PM	Bypass valve closed
2/15/2012	7:20:59 PM	Bubbler valve closed
2/15/2012	7:20:59 PM	Main Vac valve opened
2/15/2012	7:20:59 PM	Helium MFC set to  0.000000
2/15/2012	7:20:59 PM	H2 MFC set to  0.000000
2/15/2012	7:20:59 PM	BCl3 MFC set to  0.000000
2/15/2012	7:20:59 PM	PH3 MFC set to  0.000000
2/15/2012	7:20:59 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:20:59 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:20:59 PM	Tube furnace set to 0
2/15/2012	7:21:00 PM	Run finished at 7:21 PM
2/15/2012	7:21:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2012	7:23:06 PM	Recipe started at 7:23 PM
2/15/2012	7:23:06 PM	Helium valve closed
2/15/2012	7:23:06 PM	H2 valve closed
2/15/2012	7:23:06 PM	BCl3 valve closed
2/15/2012	7:23:06 PM	PH3 valve closed
2/15/2012	7:23:06 PM	SiCl4 pre valve closed
2/15/2012	7:23:06 PM	SiCl4 post valve closed
2/15/2012	7:23:06 PM	Bypass valve closed
2/15/2012	7:23:06 PM	Bubbler valve closed
2/15/2012	7:23:06 PM	Main Vac valve opened
2/15/2012	7:23:06 PM	Helium MFC set to  0.000000
2/15/2012	7:23:06 PM	H2 MFC set to  0.000000
2/15/2012	7:23:06 PM	BCl3 MFC set to  0.000000
2/15/2012	7:23:06 PM	PH3 MFC set to  0.000000
2/15/2012	7:23:06 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:23:06 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:23:06 PM	Tube furnace set to 150
2/15/2012	7:53:06 PM	H2 valve closed
2/15/2012	7:53:06 PM	BCl3 valve closed
2/15/2012	7:53:06 PM	PH3 valve closed
2/15/2012	7:53:06 PM	SiCl4 pre valve closed
2/15/2012	7:53:06 PM	SiCl4 post valve closed
2/15/2012	7:53:06 PM	Bypass valve closed
2/15/2012	7:53:06 PM	Bubbler valve closed
2/15/2012	7:53:06 PM	Helium valve opened
2/15/2012	7:53:06 PM	Main Vac valve opened
2/15/2012	7:53:06 PM	Helium MFC set to  20.000000
2/15/2012	7:53:06 PM	H2 MFC set to  0.000000
2/15/2012	7:53:06 PM	BCl3 MFC set to  0.000000
2/15/2012	7:53:06 PM	PH3 MFC set to  0.000000
2/15/2012	7:53:06 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:53:06 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:53:06 PM	Tube furnace set to 150
2/15/2012	7:53:36 PM	Helium valve closed
2/15/2012	7:53:36 PM	H2 valve closed
2/15/2012	7:53:36 PM	BCl3 valve closed
2/15/2012	7:53:36 PM	PH3 valve closed
2/15/2012	7:53:36 PM	SiCl4 pre valve closed
2/15/2012	7:53:36 PM	SiCl4 post valve closed
2/15/2012	7:53:36 PM	Bypass valve closed
2/15/2012	7:53:36 PM	Bubbler valve closed
2/15/2012	7:53:36 PM	Main Vac valve opened
2/15/2012	7:53:36 PM	Helium MFC set to  0.000000
2/15/2012	7:53:36 PM	H2 MFC set to  0.000000
2/15/2012	7:53:36 PM	BCl3 MFC set to  0.000000
2/15/2012	7:53:36 PM	PH3 MFC set to  0.000000
2/15/2012	7:53:36 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:53:36 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:53:36 PM	Tube furnace set to 150
2/15/2012	7:54:06 PM	H2 valve closed
2/15/2012	7:54:06 PM	BCl3 valve closed
2/15/2012	7:54:06 PM	PH3 valve closed
2/15/2012	7:54:06 PM	SiCl4 pre valve closed
2/15/2012	7:54:06 PM	SiCl4 post valve closed
2/15/2012	7:54:06 PM	Bypass valve closed
2/15/2012	7:54:06 PM	Bubbler valve closed
2/15/2012	7:54:06 PM	Helium valve opened
2/15/2012	7:54:06 PM	Main Vac valve opened
2/15/2012	7:54:06 PM	Helium MFC set to  20.000000
2/15/2012	7:54:06 PM	H2 MFC set to  0.000000
2/15/2012	7:54:06 PM	BCl3 MFC set to  0.000000
2/15/2012	7:54:06 PM	PH3 MFC set to  0.000000
2/15/2012	7:54:06 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:54:06 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:54:07 PM	Tube furnace set to 150
2/15/2012	7:54:37 PM	Helium valve closed
2/15/2012	7:54:37 PM	H2 valve closed
2/15/2012	7:54:37 PM	BCl3 valve closed
2/15/2012	7:54:37 PM	PH3 valve closed
2/15/2012	7:54:37 PM	SiCl4 pre valve closed
2/15/2012	7:54:37 PM	SiCl4 post valve closed
2/15/2012	7:54:37 PM	Bypass valve closed
2/15/2012	7:54:37 PM	Bubbler valve closed
2/15/2012	7:54:37 PM	Main Vac valve opened
2/15/2012	7:54:37 PM	Helium MFC set to  0.000000
2/15/2012	7:54:37 PM	H2 MFC set to  0.000000
2/15/2012	7:54:37 PM	BCl3 MFC set to  0.000000
2/15/2012	7:54:37 PM	PH3 MFC set to  0.000000
2/15/2012	7:54:37 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:54:37 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:54:37 PM	Tube furnace set to 150
2/15/2012	7:55:07 PM	H2 valve closed
2/15/2012	7:55:07 PM	BCl3 valve closed
2/15/2012	7:55:07 PM	PH3 valve closed
2/15/2012	7:55:07 PM	SiCl4 pre valve closed
2/15/2012	7:55:07 PM	SiCl4 post valve closed
2/15/2012	7:55:07 PM	Bypass valve closed
2/15/2012	7:55:07 PM	Bubbler valve closed
2/15/2012	7:55:07 PM	Helium valve opened
2/15/2012	7:55:07 PM	Main Vac valve opened
2/15/2012	7:55:07 PM	Helium MFC set to  20.000000
2/15/2012	7:55:07 PM	H2 MFC set to  0.000000
2/15/2012	7:55:07 PM	BCl3 MFC set to  0.000000
2/15/2012	7:55:07 PM	PH3 MFC set to  0.000000
2/15/2012	7:55:07 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:55:07 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:55:07 PM	Tube furnace set to 150
2/15/2012	7:55:37 PM	Helium valve closed
2/15/2012	7:55:37 PM	H2 valve closed
2/15/2012	7:55:37 PM	BCl3 valve closed
2/15/2012	7:55:37 PM	PH3 valve closed
2/15/2012	7:55:37 PM	SiCl4 pre valve closed
2/15/2012	7:55:37 PM	SiCl4 post valve closed
2/15/2012	7:55:37 PM	Bypass valve closed
2/15/2012	7:55:37 PM	Bubbler valve closed
2/15/2012	7:55:37 PM	Main Vac valve opened
2/15/2012	7:55:37 PM	Helium MFC set to  0.000000
2/15/2012	7:55:37 PM	H2 MFC set to  0.000000
2/15/2012	7:55:37 PM	BCl3 MFC set to  0.000000
2/15/2012	7:55:37 PM	PH3 MFC set to  0.000000
2/15/2012	7:55:37 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:55:37 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:55:37 PM	Tube furnace set to 150
2/15/2012	7:56:07 PM	H2 valve closed
2/15/2012	7:56:07 PM	BCl3 valve closed
2/15/2012	7:56:07 PM	PH3 valve closed
2/15/2012	7:56:07 PM	SiCl4 pre valve closed
2/15/2012	7:56:07 PM	SiCl4 post valve closed
2/15/2012	7:56:07 PM	Bypass valve closed
2/15/2012	7:56:07 PM	Bubbler valve closed
2/15/2012	7:56:07 PM	Helium valve opened
2/15/2012	7:56:07 PM	Main Vac valve opened
2/15/2012	7:56:07 PM	Helium MFC set to  20.000000
2/15/2012	7:56:07 PM	H2 MFC set to  0.000000
2/15/2012	7:56:07 PM	BCl3 MFC set to  0.000000
2/15/2012	7:56:07 PM	PH3 MFC set to  0.000000
2/15/2012	7:56:07 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:56:07 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:56:07 PM	Tube furnace set to 150
2/15/2012	7:56:38 PM	Helium valve closed
2/15/2012	7:56:38 PM	H2 valve closed
2/15/2012	7:56:38 PM	BCl3 valve closed
2/15/2012	7:56:38 PM	PH3 valve closed
2/15/2012	7:56:38 PM	SiCl4 pre valve closed
2/15/2012	7:56:38 PM	SiCl4 post valve closed
2/15/2012	7:56:38 PM	Bypass valve closed
2/15/2012	7:56:38 PM	Bubbler valve closed
2/15/2012	7:56:38 PM	Main Vac valve opened
2/15/2012	7:56:38 PM	Helium MFC set to  0.000000
2/15/2012	7:56:38 PM	H2 MFC set to  0.000000
2/15/2012	7:56:38 PM	BCl3 MFC set to  0.000000
2/15/2012	7:56:38 PM	PH3 MFC set to  0.000000
2/15/2012	7:56:38 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:56:38 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:56:38 PM	Tube furnace set to 150
2/15/2012	7:57:08 PM	H2 valve closed
2/15/2012	7:57:08 PM	BCl3 valve closed
2/15/2012	7:57:08 PM	PH3 valve closed
2/15/2012	7:57:08 PM	SiCl4 pre valve closed
2/15/2012	7:57:08 PM	SiCl4 post valve closed
2/15/2012	7:57:08 PM	Bypass valve closed
2/15/2012	7:57:08 PM	Bubbler valve closed
2/15/2012	7:57:08 PM	Helium valve opened
2/15/2012	7:57:08 PM	Main Vac valve opened
2/15/2012	7:57:08 PM	Helium MFC set to  20.000000
2/15/2012	7:57:08 PM	H2 MFC set to  0.000000
2/15/2012	7:57:08 PM	BCl3 MFC set to  0.000000
2/15/2012	7:57:08 PM	PH3 MFC set to  0.000000
2/15/2012	7:57:08 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:57:08 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:57:08 PM	Tube furnace set to 150
2/15/2012	7:57:38 PM	Helium valve closed
2/15/2012	7:57:38 PM	H2 valve closed
2/15/2012	7:57:38 PM	BCl3 valve closed
2/15/2012	7:57:38 PM	PH3 valve closed
2/15/2012	7:57:38 PM	SiCl4 pre valve closed
2/15/2012	7:57:38 PM	SiCl4 post valve closed
2/15/2012	7:57:38 PM	Bypass valve closed
2/15/2012	7:57:38 PM	Bubbler valve closed
2/15/2012	7:57:38 PM	Main Vac valve opened
2/15/2012	7:57:38 PM	Helium MFC set to  0.000000
2/15/2012	7:57:38 PM	H2 MFC set to  0.000000
2/15/2012	7:57:38 PM	BCl3 MFC set to  0.000000
2/15/2012	7:57:38 PM	PH3 MFC set to  0.000000
2/15/2012	7:57:38 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:57:38 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:57:38 PM	Tube furnace set to 150
2/15/2012	7:58:08 PM	H2 valve closed
2/15/2012	7:58:08 PM	BCl3 valve closed
2/15/2012	7:58:08 PM	PH3 valve closed
2/15/2012	7:58:08 PM	SiCl4 pre valve closed
2/15/2012	7:58:08 PM	SiCl4 post valve closed
2/15/2012	7:58:08 PM	Bypass valve closed
2/15/2012	7:58:08 PM	Bubbler valve closed
2/15/2012	7:58:08 PM	Helium valve opened
2/15/2012	7:58:08 PM	Main Vac valve opened
2/15/2012	7:58:08 PM	Helium MFC set to  20.000000
2/15/2012	7:58:08 PM	H2 MFC set to  0.000000
2/15/2012	7:58:08 PM	BCl3 MFC set to  0.000000
2/15/2012	7:58:08 PM	PH3 MFC set to  0.000000
2/15/2012	7:58:08 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:58:08 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:58:08 PM	Tube furnace set to 150
2/15/2012	7:58:38 PM	Helium valve closed
2/15/2012	7:58:38 PM	H2 valve closed
2/15/2012	7:58:38 PM	BCl3 valve closed
2/15/2012	7:58:38 PM	PH3 valve closed
2/15/2012	7:58:38 PM	SiCl4 pre valve closed
2/15/2012	7:58:38 PM	SiCl4 post valve closed
2/15/2012	7:58:38 PM	Bypass valve closed
2/15/2012	7:58:38 PM	Bubbler valve closed
2/15/2012	7:58:38 PM	Main Vac valve opened
2/15/2012	7:58:38 PM	Helium MFC set to  0.000000
2/15/2012	7:58:38 PM	H2 MFC set to  0.000000
2/15/2012	7:58:38 PM	BCl3 MFC set to  0.000000
2/15/2012	7:58:38 PM	PH3 MFC set to  0.000000
2/15/2012	7:58:38 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:58:38 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:58:38 PM	Tube furnace set to 150
2/15/2012	7:59:09 PM	H2 valve closed
2/15/2012	7:59:09 PM	BCl3 valve closed
2/15/2012	7:59:09 PM	PH3 valve closed
2/15/2012	7:59:09 PM	SiCl4 pre valve closed
2/15/2012	7:59:09 PM	SiCl4 post valve closed
2/15/2012	7:59:09 PM	Bypass valve closed
2/15/2012	7:59:09 PM	Bubbler valve closed
2/15/2012	7:59:09 PM	Helium valve opened
2/15/2012	7:59:09 PM	Main Vac valve opened
2/15/2012	7:59:09 PM	Helium MFC set to  20.000000
2/15/2012	7:59:09 PM	H2 MFC set to  0.000000
2/15/2012	7:59:09 PM	BCl3 MFC set to  0.000000
2/15/2012	7:59:09 PM	PH3 MFC set to  0.000000
2/15/2012	7:59:09 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:59:09 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:59:09 PM	Tube furnace set to 150
2/15/2012	7:59:39 PM	Helium valve closed
2/15/2012	7:59:39 PM	H2 valve closed
2/15/2012	7:59:39 PM	BCl3 valve closed
2/15/2012	7:59:39 PM	PH3 valve closed
2/15/2012	7:59:39 PM	SiCl4 pre valve closed
2/15/2012	7:59:39 PM	SiCl4 post valve closed
2/15/2012	7:59:39 PM	Bypass valve closed
2/15/2012	7:59:39 PM	Bubbler valve closed
2/15/2012	7:59:39 PM	Main Vac valve opened
2/15/2012	7:59:39 PM	Helium MFC set to  0.000000
2/15/2012	7:59:39 PM	H2 MFC set to  0.000000
2/15/2012	7:59:39 PM	BCl3 MFC set to  0.000000
2/15/2012	7:59:39 PM	PH3 MFC set to  0.000000
2/15/2012	7:59:39 PM	SiCl4 MFC set to  0.000000
2/15/2012	7:59:39 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	7:59:39 PM	Tube furnace set to 150
2/15/2012	8:00:09 PM	H2 valve closed
2/15/2012	8:00:09 PM	BCl3 valve closed
2/15/2012	8:00:09 PM	PH3 valve closed
2/15/2012	8:00:09 PM	SiCl4 pre valve closed
2/15/2012	8:00:09 PM	SiCl4 post valve closed
2/15/2012	8:00:09 PM	Bypass valve closed
2/15/2012	8:00:09 PM	Bubbler valve closed
2/15/2012	8:00:09 PM	Helium valve opened
2/15/2012	8:00:09 PM	Main Vac valve opened
2/15/2012	8:00:09 PM	Helium MFC set to  20.000000
2/15/2012	8:00:09 PM	H2 MFC set to  0.000000
2/15/2012	8:00:09 PM	BCl3 MFC set to  0.000000
2/15/2012	8:00:09 PM	PH3 MFC set to  0.000000
2/15/2012	8:00:09 PM	SiCl4 MFC set to  0.000000
2/15/2012	8:00:09 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	8:00:09 PM	Tube furnace set to 150
2/15/2012	8:00:39 PM	Helium valve closed
2/15/2012	8:00:39 PM	H2 valve closed
2/15/2012	8:00:39 PM	BCl3 valve closed
2/15/2012	8:00:39 PM	PH3 valve closed
2/15/2012	8:00:39 PM	SiCl4 pre valve closed
2/15/2012	8:00:39 PM	SiCl4 post valve closed
2/15/2012	8:00:39 PM	Bypass valve closed
2/15/2012	8:00:39 PM	Bubbler valve closed
2/15/2012	8:00:39 PM	Main Vac valve opened
2/15/2012	8:00:39 PM	Helium MFC set to  0.000000
2/15/2012	8:00:39 PM	H2 MFC set to  0.000000
2/15/2012	8:00:39 PM	BCl3 MFC set to  0.000000
2/15/2012	8:00:39 PM	PH3 MFC set to  0.000000
2/15/2012	8:00:39 PM	SiCl4 MFC set to  0.000000
2/15/2012	8:00:39 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	8:00:39 PM	Tube furnace set to 150
2/15/2012	8:01:09 PM	H2 valve closed
2/15/2012	8:01:09 PM	BCl3 valve closed
2/15/2012	8:01:09 PM	PH3 valve closed
2/15/2012	8:01:09 PM	SiCl4 pre valve closed
2/15/2012	8:01:09 PM	SiCl4 post valve closed
2/15/2012	8:01:09 PM	Bypass valve closed
2/15/2012	8:01:09 PM	Bubbler valve closed
2/15/2012	8:01:09 PM	Helium valve opened
2/15/2012	8:01:09 PM	Main Vac valve opened
2/15/2012	8:01:09 PM	Helium MFC set to  20.000000
2/15/2012	8:01:09 PM	H2 MFC set to  0.000000
2/15/2012	8:01:09 PM	BCl3 MFC set to  0.000000
2/15/2012	8:01:09 PM	PH3 MFC set to  0.000000
2/15/2012	8:01:09 PM	SiCl4 MFC set to  0.000000
2/15/2012	8:01:09 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	8:01:10 PM	Tube furnace set to 150
2/15/2012	8:01:40 PM	Helium valve closed
2/15/2012	8:01:40 PM	H2 valve closed
2/15/2012	8:01:40 PM	BCl3 valve closed
2/15/2012	8:01:40 PM	PH3 valve closed
2/15/2012	8:01:40 PM	SiCl4 pre valve closed
2/15/2012	8:01:40 PM	SiCl4 post valve closed
2/15/2012	8:01:40 PM	Bypass valve closed
2/15/2012	8:01:40 PM	Bubbler valve closed
2/15/2012	8:01:40 PM	Main Vac valve opened
2/15/2012	8:01:40 PM	Helium MFC set to  0.000000
2/15/2012	8:01:40 PM	H2 MFC set to  0.000000
2/15/2012	8:01:40 PM	BCl3 MFC set to  0.000000
2/15/2012	8:01:40 PM	PH3 MFC set to  0.000000
2/15/2012	8:01:40 PM	SiCl4 MFC set to  0.000000
2/15/2012	8:01:40 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	8:01:40 PM	Tube furnace set to 150
2/15/2012	8:02:10 PM	H2 valve closed
2/15/2012	8:02:10 PM	BCl3 valve closed
2/15/2012	8:02:10 PM	PH3 valve closed
2/15/2012	8:02:10 PM	SiCl4 pre valve closed
2/15/2012	8:02:10 PM	SiCl4 post valve closed
2/15/2012	8:02:10 PM	Bypass valve closed
2/15/2012	8:02:10 PM	Bubbler valve closed
2/15/2012	8:02:10 PM	Helium valve opened
2/15/2012	8:02:10 PM	Main Vac valve opened
2/15/2012	8:02:10 PM	Helium MFC set to  20.000000
2/15/2012	8:02:10 PM	H2 MFC set to  0.000000
2/15/2012	8:02:10 PM	BCl3 MFC set to  0.000000
2/15/2012	8:02:10 PM	PH3 MFC set to  0.000000
2/15/2012	8:02:10 PM	SiCl4 MFC set to  0.000000
2/15/2012	8:02:10 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	8:02:10 PM	Tube furnace set to 150
2/15/2012	8:02:40 PM	Helium valve closed
2/15/2012	8:02:40 PM	H2 valve closed
2/15/2012	8:02:40 PM	BCl3 valve closed
2/15/2012	8:02:40 PM	PH3 valve closed
2/15/2012	8:02:40 PM	SiCl4 pre valve closed
2/15/2012	8:02:40 PM	SiCl4 post valve closed
2/15/2012	8:02:40 PM	Bypass valve closed
2/15/2012	8:02:40 PM	Bubbler valve closed
2/15/2012	8:02:40 PM	Main Vac valve opened
2/15/2012	8:02:40 PM	Helium MFC set to  0.000000
2/15/2012	8:02:40 PM	H2 MFC set to  0.000000
2/15/2012	8:02:40 PM	BCl3 MFC set to  0.000000
2/15/2012	8:02:40 PM	PH3 MFC set to  0.000000
2/15/2012	8:02:40 PM	SiCl4 MFC set to  0.000000
2/15/2012	8:02:40 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	8:02:40 PM	Tube furnace set to 150
2/15/2012	8:02:41 PM	Run finished at 8:02 PM
2/15/2012	9:36:41 PM	Main Vac valve closed
2/15/2012	9:37:02 PM	Main Vac valve opened
2/15/2012	9:38:07 PM	Recipe started at 9:38 PM
2/15/2012	9:38:07 PM	Helium valve closed
2/15/2012	9:38:07 PM	H2 valve closed
2/15/2012	9:38:07 PM	BCl3 valve closed
2/15/2012	9:38:07 PM	PH3 valve closed
2/15/2012	9:38:07 PM	SiCl4 pre valve closed
2/15/2012	9:38:07 PM	SiCl4 post valve closed
2/15/2012	9:38:07 PM	Main Vac valve closed
2/15/2012	9:38:07 PM	Bypass valve closed
2/15/2012	9:38:07 PM	Bubbler valve closed
2/15/2012	9:38:07 PM	Helium MFC set to  0.000000
2/15/2012	9:38:07 PM	H2 MFC set to  0.000000
2/15/2012	9:38:07 PM	BCl3 MFC set to  0.000000
2/15/2012	9:38:07 PM	PH3 MFC set to  0.000000
2/15/2012	9:38:07 PM	SiCl4 MFC set to  0.000000
2/15/2012	9:38:07 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:38:07 PM	Tube furnace set to 0
2/15/2012	9:38:11 PM	Helium valve closed
2/15/2012	9:38:11 PM	BCl3 valve closed
2/15/2012	9:38:11 PM	PH3 valve closed
2/15/2012	9:38:11 PM	SiCl4 pre valve closed
2/15/2012	9:38:11 PM	SiCl4 post valve closed
2/15/2012	9:38:11 PM	Main Vac valve closed
2/15/2012	9:38:11 PM	Bypass valve closed
2/15/2012	9:38:11 PM	Bubbler valve closed
2/15/2012	9:38:11 PM	H2 valve opened
2/15/2012	9:38:11 PM	Helium MFC set to  0.000000
2/15/2012	9:38:11 PM	H2 MFC set to  500.000000
2/15/2012	9:38:11 PM	BCl3 MFC set to  0.000000
2/15/2012	9:38:11 PM	PH3 MFC set to  0.000000
2/15/2012	9:38:11 PM	SiCl4 MFC set to  0.000000
2/15/2012	9:38:11 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:38:11 PM	Tube furnace set to 0
2/15/2012	9:39:15 PM	Helium valve closed
2/15/2012	9:39:15 PM	BCl3 valve closed
2/15/2012	9:39:15 PM	PH3 valve closed
2/15/2012	9:39:15 PM	SiCl4 pre valve closed
2/15/2012	9:39:15 PM	SiCl4 post valve closed
2/15/2012	9:39:15 PM	Main Vac valve closed
2/15/2012	9:39:15 PM	Bypass valve closed
2/15/2012	9:39:15 PM	H2 valve opened
2/15/2012	9:39:15 PM	Bubbler valve opened
2/15/2012	9:39:15 PM	Helium MFC set to  0.000000
2/15/2012	9:39:15 PM	H2 MFC set to  500.000000
2/15/2012	9:39:15 PM	BCl3 MFC set to  0.000000
2/15/2012	9:39:15 PM	PH3 MFC set to  0.000000
2/15/2012	9:39:15 PM	SiCl4 MFC set to  0.000000
2/15/2012	9:39:15 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:39:15 PM	Tube furnace set to 0
2/15/2012	9:39:16 PM	Helium valve closed
2/15/2012	9:39:16 PM	BCl3 valve closed
2/15/2012	9:39:16 PM	PH3 valve closed
2/15/2012	9:39:16 PM	SiCl4 pre valve closed
2/15/2012	9:39:16 PM	SiCl4 post valve closed
2/15/2012	9:39:16 PM	Main Vac valve closed
2/15/2012	9:39:16 PM	Bypass valve closed
2/15/2012	9:39:16 PM	H2 valve opened
2/15/2012	9:39:16 PM	Bubbler valve opened
2/15/2012	9:39:16 PM	Helium MFC set to  0.000000
2/15/2012	9:39:16 PM	H2 MFC set to  450.000000
2/15/2012	9:39:16 PM	BCl3 MFC set to  0.000000
2/15/2012	9:39:16 PM	PH3 MFC set to  0.000000
2/15/2012	9:39:16 PM	SiCl4 MFC set to  0.000000
2/15/2012	9:39:16 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	9:39:16 PM	Tube furnace set to 1000
2/15/2012	10:04:16 PM	Helium valve closed
2/15/2012	10:04:16 PM	PH3 valve closed
2/15/2012	10:04:16 PM	Main Vac valve closed
2/15/2012	10:04:16 PM	Bypass valve closed
2/15/2012	10:04:16 PM	H2 valve opened
2/15/2012	10:04:16 PM	BCl3 valve opened
2/15/2012	10:04:16 PM	SiCl4 pre valve opened
2/15/2012	10:04:16 PM	SiCl4 post valve opened
2/15/2012	10:04:16 PM	Bubbler valve opened
2/15/2012	10:04:16 PM	Helium MFC set to  0.000000
2/15/2012	10:04:16 PM	H2 MFC set to  450.000000
2/15/2012	10:04:16 PM	BCl3 MFC set to  1.500000
2/15/2012	10:04:16 PM	PH3 MFC set to  0.000000
2/15/2012	10:04:16 PM	SiCl4 MFC set to  50.000000
2/15/2012	10:04:16 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:04:16 PM	Tube furnace set to 1000
2/15/2012	10:09:16 PM	Helium valve closed
2/15/2012	10:09:16 PM	BCl3 valve closed
2/15/2012	10:09:16 PM	PH3 valve closed
2/15/2012	10:09:16 PM	SiCl4 pre valve closed
2/15/2012	10:09:16 PM	SiCl4 post valve closed
2/15/2012	10:09:16 PM	Main Vac valve closed
2/15/2012	10:09:16 PM	Bypass valve closed
2/15/2012	10:09:16 PM	H2 valve opened
2/15/2012	10:09:16 PM	Bubbler valve opened
2/15/2012	10:09:16 PM	Helium MFC set to  0.000000
2/15/2012	10:09:16 PM	H2 MFC set to  500.000000
2/15/2012	10:09:16 PM	BCl3 MFC set to  0.000000
2/15/2012	10:09:16 PM	PH3 MFC set to  0.000000
2/15/2012	10:09:16 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:09:16 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:09:16 PM	Tube furnace set to 750
2/15/2012	10:14:16 PM	H2 valve closed
2/15/2012	10:14:16 PM	BCl3 valve closed
2/15/2012	10:14:16 PM	PH3 valve closed
2/15/2012	10:14:17 PM	SiCl4 pre valve closed
2/15/2012	10:14:17 PM	SiCl4 post valve closed
2/15/2012	10:14:17 PM	Main Vac valve closed
2/15/2012	10:14:17 PM	Bypass valve closed
2/15/2012	10:14:17 PM	Helium valve opened
2/15/2012	10:14:17 PM	Bubbler valve opened
2/15/2012	10:14:17 PM	Helium MFC set to  500.000000
2/15/2012	10:14:17 PM	H2 MFC set to  0.000000
2/15/2012	10:14:17 PM	BCl3 MFC set to  0.000000
2/15/2012	10:14:17 PM	PH3 MFC set to  0.000000
2/15/2012	10:14:17 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:14:17 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:14:17 PM	Tube furnace set to 0
2/15/2012	10:25:07 PM	Helium valve closed
2/15/2012	10:25:07 PM	H2 valve closed
2/15/2012	10:25:07 PM	BCl3 valve closed
2/15/2012	10:25:07 PM	PH3 valve closed
2/15/2012	10:25:07 PM	SiCl4 pre valve closed
2/15/2012	10:25:07 PM	SiCl4 post valve closed
2/15/2012	10:25:07 PM	Main Vac valve closed
2/15/2012	10:25:07 PM	Bypass valve closed
2/15/2012	10:25:07 PM	Bubbler valve closed
2/15/2012	10:25:07 PM	Helium MFC set to  0.000000
2/15/2012	10:25:07 PM	H2 MFC set to  0.000000
2/15/2012	10:25:07 PM	BCl3 MFC set to  0.000000
2/15/2012	10:25:07 PM	PH3 MFC set to  0.000000
2/15/2012	10:25:07 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:25:07 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:25:07 PM	Tube furnace set to 0
2/15/2012	10:25:08 PM	Run finished at 10:25 PM
2/15/2012	10:25:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2012	10:25:12 PM	Recipe started at 10:25 PM
2/15/2012	10:25:12 PM	Helium valve closed
2/15/2012	10:25:12 PM	H2 valve closed
2/15/2012	10:25:12 PM	BCl3 valve closed
2/15/2012	10:25:12 PM	PH3 valve closed
2/15/2012	10:25:12 PM	SiCl4 pre valve closed
2/15/2012	10:25:12 PM	SiCl4 post valve closed
2/15/2012	10:25:12 PM	Main Vac valve closed
2/15/2012	10:25:12 PM	Bypass valve closed
2/15/2012	10:25:12 PM	Bubbler valve closed
2/15/2012	10:25:12 PM	Helium MFC set to  0.000000
2/15/2012	10:25:12 PM	H2 MFC set to  0.000000
2/15/2012	10:25:12 PM	BCl3 MFC set to  0.000000
2/15/2012	10:25:12 PM	PH3 MFC set to  0.000000
2/15/2012	10:25:12 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:25:12 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:25:12 PM	Tube furnace set to 0
2/15/2012	10:25:15 PM	H2 valve closed
2/15/2012	10:25:15 PM	BCl3 valve closed
2/15/2012	10:25:15 PM	PH3 valve closed
2/15/2012	10:25:15 PM	SiCl4 pre valve closed
2/15/2012	10:25:15 PM	SiCl4 post valve closed
2/15/2012	10:25:15 PM	Main Vac valve closed
2/15/2012	10:25:15 PM	Bypass valve closed
2/15/2012	10:25:15 PM	Bubbler valve closed
2/15/2012	10:25:15 PM	Helium valve opened
2/15/2012	10:25:15 PM	Helium MFC set to  500.000000
2/15/2012	10:25:15 PM	H2 MFC set to  0.000000
2/15/2012	10:25:15 PM	BCl3 MFC set to  0.000000
2/15/2012	10:25:15 PM	PH3 MFC set to  0.000000
2/15/2012	10:25:15 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:25:15 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:25:15 PM	Tube furnace set to 0
2/15/2012	10:25:15 PM	Helium valve closed
2/15/2012	10:25:15 PM	H2 valve closed
2/15/2012	10:25:15 PM	BCl3 valve closed
2/15/2012	10:25:15 PM	PH3 valve closed
2/15/2012	10:25:15 PM	SiCl4 pre valve closed
2/15/2012	10:25:15 PM	SiCl4 post valve closed
2/15/2012	10:25:15 PM	Main Vac valve closed
2/15/2012	10:25:15 PM	Bypass valve closed
2/15/2012	10:25:15 PM	Bubbler valve closed
2/15/2012	10:25:15 PM	Helium MFC set to  0.000000
2/15/2012	10:25:15 PM	H2 MFC set to  0.000000
2/15/2012	10:25:15 PM	BCl3 MFC set to  0.000000
2/15/2012	10:25:15 PM	PH3 MFC set to  0.000000
2/15/2012	10:25:15 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:25:15 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:25:15 PM	Tube furnace set to 0
2/15/2012	10:25:16 PM	Run finished at 10:25 PM
2/15/2012	10:25:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/15/2012	10:28:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2012	10:28:31 PM	Recipe started at 10:28 PM
2/15/2012	10:28:31 PM	Helium valve closed
2/15/2012	10:28:31 PM	H2 valve closed
2/15/2012	10:28:31 PM	BCl3 valve closed
2/15/2012	10:28:31 PM	PH3 valve closed
2/15/2012	10:28:31 PM	SiCl4 pre valve closed
2/15/2012	10:28:31 PM	SiCl4 post valve closed
2/15/2012	10:28:31 PM	Main Vac valve closed
2/15/2012	10:28:31 PM	Bubbler valve closed
2/15/2012	10:28:31 PM	Bypass valve opened
2/15/2012	10:28:31 PM	Helium MFC set to  0.000000
2/15/2012	10:28:31 PM	H2 MFC set to  0.000000
2/15/2012	10:28:31 PM	BCl3 MFC set to  0.000000
2/15/2012	10:28:31 PM	PH3 MFC set to  0.000000
2/15/2012	10:28:31 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:28:31 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:28:31 PM	Tube furnace set to 0
2/15/2012	10:29:27 PM	Helium valve closed
2/15/2012	10:29:27 PM	H2 valve closed
2/15/2012	10:29:27 PM	BCl3 valve closed
2/15/2012	10:29:27 PM	PH3 valve closed
2/15/2012	10:29:27 PM	SiCl4 pre valve closed
2/15/2012	10:29:27 PM	SiCl4 post valve closed
2/15/2012	10:29:27 PM	Main Vac valve closed
2/15/2012	10:29:27 PM	Bubbler valve closed
2/15/2012	10:29:27 PM	Bypass valve opened
2/15/2012	10:29:27 PM	Helium MFC set to  0.000000
2/15/2012	10:29:27 PM	H2 MFC set to  0.000000
2/15/2012	10:29:27 PM	BCl3 MFC set to  0.000000
2/15/2012	10:29:27 PM	PH3 MFC set to  0.000000
2/15/2012	10:29:27 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:29:27 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:29:27 PM	Tube furnace set to 0
2/15/2012	10:30:27 PM	Helium valve closed
2/15/2012	10:30:27 PM	H2 valve closed
2/15/2012	10:30:27 PM	BCl3 valve closed
2/15/2012	10:30:27 PM	PH3 valve closed
2/15/2012	10:30:27 PM	SiCl4 pre valve closed
2/15/2012	10:30:27 PM	SiCl4 post valve closed
2/15/2012	10:30:27 PM	Bypass valve closed
2/15/2012	10:30:27 PM	Bubbler valve closed
2/15/2012	10:30:27 PM	Main Vac valve opened
2/15/2012	10:30:27 PM	Helium MFC set to  0.000000
2/15/2012	10:30:27 PM	H2 MFC set to  0.000000
2/15/2012	10:30:27 PM	BCl3 MFC set to  0.000000
2/15/2012	10:30:27 PM	PH3 MFC set to  0.000000
2/15/2012	10:30:27 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:30:27 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:30:27 PM	Tube furnace set to 0
2/15/2012	10:30:28 PM	Run finished at 10:30 PM
2/15/2012	10:30:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/15/2012	10:32:41 PM	Recipe started at 10:32 PM
2/15/2012	10:32:41 PM	Helium valve closed
2/15/2012	10:32:41 PM	H2 valve closed
2/15/2012	10:32:41 PM	BCl3 valve closed
2/15/2012	10:32:41 PM	PH3 valve closed
2/15/2012	10:32:41 PM	SiCl4 pre valve closed
2/15/2012	10:32:41 PM	SiCl4 post valve closed
2/15/2012	10:32:41 PM	Bypass valve closed
2/15/2012	10:32:41 PM	Bubbler valve closed
2/15/2012	10:32:41 PM	Main Vac valve opened
2/15/2012	10:32:41 PM	Helium MFC set to  0.000000
2/15/2012	10:32:41 PM	H2 MFC set to  0.000000
2/15/2012	10:32:41 PM	BCl3 MFC set to  0.000000
2/15/2012	10:32:41 PM	PH3 MFC set to  0.000000
2/15/2012	10:32:41 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:32:41 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:32:41 PM	Tube furnace set to 150
2/15/2012	10:47:41 PM	H2 valve closed
2/15/2012	10:47:41 PM	BCl3 valve closed
2/15/2012	10:47:41 PM	PH3 valve closed
2/15/2012	10:47:41 PM	SiCl4 pre valve closed
2/15/2012	10:47:41 PM	SiCl4 post valve closed
2/15/2012	10:47:41 PM	Bypass valve closed
2/15/2012	10:47:41 PM	Bubbler valve closed
2/15/2012	10:47:41 PM	Helium valve opened
2/15/2012	10:47:41 PM	Main Vac valve opened
2/15/2012	10:47:41 PM	Helium MFC set to  20.000000
2/15/2012	10:47:41 PM	H2 MFC set to  0.000000
2/15/2012	10:47:41 PM	BCl3 MFC set to  0.000000
2/15/2012	10:47:41 PM	PH3 MFC set to  0.000000
2/15/2012	10:47:41 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:47:41 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:47:41 PM	Tube furnace set to 150
2/15/2012	10:48:11 PM	Helium valve closed
2/15/2012	10:48:11 PM	H2 valve closed
2/15/2012	10:48:11 PM	BCl3 valve closed
2/15/2012	10:48:11 PM	PH3 valve closed
2/15/2012	10:48:11 PM	SiCl4 pre valve closed
2/15/2012	10:48:11 PM	SiCl4 post valve closed
2/15/2012	10:48:11 PM	Bypass valve closed
2/15/2012	10:48:11 PM	Bubbler valve closed
2/15/2012	10:48:11 PM	Main Vac valve opened
2/15/2012	10:48:11 PM	Helium MFC set to  0.000000
2/15/2012	10:48:11 PM	H2 MFC set to  0.000000
2/15/2012	10:48:11 PM	BCl3 MFC set to  0.000000
2/15/2012	10:48:11 PM	PH3 MFC set to  0.000000
2/15/2012	10:48:11 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:48:11 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:48:11 PM	Tube furnace set to 150
2/15/2012	10:48:41 PM	H2 valve closed
2/15/2012	10:48:41 PM	BCl3 valve closed
2/15/2012	10:48:41 PM	PH3 valve closed
2/15/2012	10:48:41 PM	SiCl4 pre valve closed
2/15/2012	10:48:41 PM	SiCl4 post valve closed
2/15/2012	10:48:41 PM	Bypass valve closed
2/15/2012	10:48:41 PM	Bubbler valve closed
2/15/2012	10:48:41 PM	Helium valve opened
2/15/2012	10:48:41 PM	Main Vac valve opened
2/15/2012	10:48:41 PM	Helium MFC set to  20.000000
2/15/2012	10:48:41 PM	H2 MFC set to  0.000000
2/15/2012	10:48:41 PM	BCl3 MFC set to  0.000000
2/15/2012	10:48:41 PM	PH3 MFC set to  0.000000
2/15/2012	10:48:41 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:48:41 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:48:42 PM	Tube furnace set to 150
2/15/2012	10:49:12 PM	Helium valve closed
2/15/2012	10:49:12 PM	H2 valve closed
2/15/2012	10:49:12 PM	BCl3 valve closed
2/15/2012	10:49:12 PM	PH3 valve closed
2/15/2012	10:49:12 PM	SiCl4 pre valve closed
2/15/2012	10:49:12 PM	SiCl4 post valve closed
2/15/2012	10:49:12 PM	Bypass valve closed
2/15/2012	10:49:12 PM	Bubbler valve closed
2/15/2012	10:49:12 PM	Main Vac valve opened
2/15/2012	10:49:12 PM	Helium MFC set to  0.000000
2/15/2012	10:49:12 PM	H2 MFC set to  0.000000
2/15/2012	10:49:12 PM	BCl3 MFC set to  0.000000
2/15/2012	10:49:12 PM	PH3 MFC set to  0.000000
2/15/2012	10:49:12 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:49:12 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:49:12 PM	Tube furnace set to 150
2/15/2012	10:49:42 PM	H2 valve closed
2/15/2012	10:49:42 PM	BCl3 valve closed
2/15/2012	10:49:42 PM	PH3 valve closed
2/15/2012	10:49:42 PM	SiCl4 pre valve closed
2/15/2012	10:49:42 PM	SiCl4 post valve closed
2/15/2012	10:49:42 PM	Bypass valve closed
2/15/2012	10:49:42 PM	Bubbler valve closed
2/15/2012	10:49:42 PM	Helium valve opened
2/15/2012	10:49:42 PM	Main Vac valve opened
2/15/2012	10:49:42 PM	Helium MFC set to  20.000000
2/15/2012	10:49:42 PM	H2 MFC set to  0.000000
2/15/2012	10:49:42 PM	BCl3 MFC set to  0.000000
2/15/2012	10:49:42 PM	PH3 MFC set to  0.000000
2/15/2012	10:49:42 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:49:42 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:49:42 PM	Tube furnace set to 150
2/15/2012	10:50:12 PM	Helium valve closed
2/15/2012	10:50:12 PM	H2 valve closed
2/15/2012	10:50:12 PM	BCl3 valve closed
2/15/2012	10:50:12 PM	PH3 valve closed
2/15/2012	10:50:12 PM	SiCl4 pre valve closed
2/15/2012	10:50:12 PM	SiCl4 post valve closed
2/15/2012	10:50:12 PM	Bypass valve closed
2/15/2012	10:50:12 PM	Bubbler valve closed
2/15/2012	10:50:12 PM	Main Vac valve opened
2/15/2012	10:50:12 PM	Helium MFC set to  0.000000
2/15/2012	10:50:12 PM	H2 MFC set to  0.000000
2/15/2012	10:50:12 PM	BCl3 MFC set to  0.000000
2/15/2012	10:50:12 PM	PH3 MFC set to  0.000000
2/15/2012	10:50:12 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:50:12 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:50:12 PM	Tube furnace set to 150
2/15/2012	10:50:42 PM	H2 valve closed
2/15/2012	10:50:42 PM	BCl3 valve closed
2/15/2012	10:50:42 PM	PH3 valve closed
2/15/2012	10:50:42 PM	SiCl4 pre valve closed
2/15/2012	10:50:42 PM	SiCl4 post valve closed
2/15/2012	10:50:42 PM	Bypass valve closed
2/15/2012	10:50:42 PM	Bubbler valve closed
2/15/2012	10:50:42 PM	Helium valve opened
2/15/2012	10:50:42 PM	Main Vac valve opened
2/15/2012	10:50:42 PM	Helium MFC set to  20.000000
2/15/2012	10:50:42 PM	H2 MFC set to  0.000000
2/15/2012	10:50:42 PM	BCl3 MFC set to  0.000000
2/15/2012	10:50:42 PM	PH3 MFC set to  0.000000
2/15/2012	10:50:42 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:50:42 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:50:42 PM	Tube furnace set to 150
2/15/2012	10:51:12 PM	Helium valve closed
2/15/2012	10:51:12 PM	H2 valve closed
2/15/2012	10:51:12 PM	BCl3 valve closed
2/15/2012	10:51:12 PM	PH3 valve closed
2/15/2012	10:51:12 PM	SiCl4 pre valve closed
2/15/2012	10:51:12 PM	SiCl4 post valve closed
2/15/2012	10:51:12 PM	Bypass valve closed
2/15/2012	10:51:12 PM	Bubbler valve closed
2/15/2012	10:51:12 PM	Main Vac valve opened
2/15/2012	10:51:12 PM	Helium MFC set to  0.000000
2/15/2012	10:51:12 PM	H2 MFC set to  0.000000
2/15/2012	10:51:12 PM	BCl3 MFC set to  0.000000
2/15/2012	10:51:12 PM	PH3 MFC set to  0.000000
2/15/2012	10:51:12 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:51:12 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:51:13 PM	Tube furnace set to 150
2/15/2012	10:51:43 PM	H2 valve closed
2/15/2012	10:51:43 PM	BCl3 valve closed
2/15/2012	10:51:43 PM	PH3 valve closed
2/15/2012	10:51:43 PM	SiCl4 pre valve closed
2/15/2012	10:51:43 PM	SiCl4 post valve closed
2/15/2012	10:51:43 PM	Bypass valve closed
2/15/2012	10:51:43 PM	Bubbler valve closed
2/15/2012	10:51:43 PM	Helium valve opened
2/15/2012	10:51:43 PM	Main Vac valve opened
2/15/2012	10:51:43 PM	Helium MFC set to  20.000000
2/15/2012	10:51:43 PM	H2 MFC set to  0.000000
2/15/2012	10:51:43 PM	BCl3 MFC set to  0.000000
2/15/2012	10:51:43 PM	PH3 MFC set to  0.000000
2/15/2012	10:51:43 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:51:43 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:51:43 PM	Tube furnace set to 150
2/15/2012	10:52:13 PM	Helium valve closed
2/15/2012	10:52:13 PM	H2 valve closed
2/15/2012	10:52:13 PM	BCl3 valve closed
2/15/2012	10:52:13 PM	PH3 valve closed
2/15/2012	10:52:13 PM	SiCl4 pre valve closed
2/15/2012	10:52:13 PM	SiCl4 post valve closed
2/15/2012	10:52:13 PM	Bypass valve closed
2/15/2012	10:52:13 PM	Bubbler valve closed
2/15/2012	10:52:13 PM	Main Vac valve opened
2/15/2012	10:52:13 PM	Helium MFC set to  0.000000
2/15/2012	10:52:13 PM	H2 MFC set to  0.000000
2/15/2012	10:52:13 PM	BCl3 MFC set to  0.000000
2/15/2012	10:52:13 PM	PH3 MFC set to  0.000000
2/15/2012	10:52:13 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:52:13 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:52:13 PM	Tube furnace set to 150
2/15/2012	10:52:43 PM	H2 valve closed
2/15/2012	10:52:43 PM	BCl3 valve closed
2/15/2012	10:52:43 PM	PH3 valve closed
2/15/2012	10:52:43 PM	SiCl4 pre valve closed
2/15/2012	10:52:43 PM	SiCl4 post valve closed
2/15/2012	10:52:43 PM	Bypass valve closed
2/15/2012	10:52:43 PM	Bubbler valve closed
2/15/2012	10:52:43 PM	Helium valve opened
2/15/2012	10:52:43 PM	Main Vac valve opened
2/15/2012	10:52:43 PM	Helium MFC set to  20.000000
2/15/2012	10:52:43 PM	H2 MFC set to  0.000000
2/15/2012	10:52:43 PM	BCl3 MFC set to  0.000000
2/15/2012	10:52:43 PM	PH3 MFC set to  0.000000
2/15/2012	10:52:43 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:52:43 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:52:43 PM	Tube furnace set to 150
2/15/2012	10:53:13 PM	Helium valve closed
2/15/2012	10:53:13 PM	H2 valve closed
2/15/2012	10:53:13 PM	BCl3 valve closed
2/15/2012	10:53:13 PM	PH3 valve closed
2/15/2012	10:53:13 PM	SiCl4 pre valve closed
2/15/2012	10:53:13 PM	SiCl4 post valve closed
2/15/2012	10:53:13 PM	Bypass valve closed
2/15/2012	10:53:13 PM	Bubbler valve closed
2/15/2012	10:53:13 PM	Main Vac valve opened
2/15/2012	10:53:13 PM	Helium MFC set to  0.000000
2/15/2012	10:53:13 PM	H2 MFC set to  0.000000
2/15/2012	10:53:13 PM	BCl3 MFC set to  0.000000
2/15/2012	10:53:13 PM	PH3 MFC set to  0.000000
2/15/2012	10:53:13 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:53:13 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:53:13 PM	Tube furnace set to 150
2/15/2012	10:53:43 PM	H2 valve closed
2/15/2012	10:53:43 PM	BCl3 valve closed
2/15/2012	10:53:43 PM	PH3 valve closed
2/15/2012	10:53:43 PM	SiCl4 pre valve closed
2/15/2012	10:53:43 PM	SiCl4 post valve closed
2/15/2012	10:53:43 PM	Bypass valve closed
2/15/2012	10:53:43 PM	Bubbler valve closed
2/15/2012	10:53:43 PM	Helium valve opened
2/15/2012	10:53:43 PM	Main Vac valve opened
2/15/2012	10:53:43 PM	Helium MFC set to  20.000000
2/15/2012	10:53:43 PM	H2 MFC set to  0.000000
2/15/2012	10:53:43 PM	BCl3 MFC set to  0.000000
2/15/2012	10:53:43 PM	PH3 MFC set to  0.000000
2/15/2012	10:53:43 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:53:43 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:53:44 PM	Tube furnace set to 150
2/15/2012	10:54:14 PM	Helium valve closed
2/15/2012	10:54:14 PM	H2 valve closed
2/15/2012	10:54:14 PM	BCl3 valve closed
2/15/2012	10:54:14 PM	PH3 valve closed
2/15/2012	10:54:14 PM	SiCl4 pre valve closed
2/15/2012	10:54:14 PM	SiCl4 post valve closed
2/15/2012	10:54:14 PM	Bypass valve closed
2/15/2012	10:54:14 PM	Bubbler valve closed
2/15/2012	10:54:14 PM	Main Vac valve opened
2/15/2012	10:54:14 PM	Helium MFC set to  0.000000
2/15/2012	10:54:14 PM	H2 MFC set to  0.000000
2/15/2012	10:54:14 PM	BCl3 MFC set to  0.000000
2/15/2012	10:54:14 PM	PH3 MFC set to  0.000000
2/15/2012	10:54:14 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:54:14 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:54:14 PM	Tube furnace set to 150
2/15/2012	10:54:44 PM	H2 valve closed
2/15/2012	10:54:44 PM	BCl3 valve closed
2/15/2012	10:54:44 PM	PH3 valve closed
2/15/2012	10:54:44 PM	SiCl4 pre valve closed
2/15/2012	10:54:44 PM	SiCl4 post valve closed
2/15/2012	10:54:44 PM	Bypass valve closed
2/15/2012	10:54:44 PM	Bubbler valve closed
2/15/2012	10:54:44 PM	Helium valve opened
2/15/2012	10:54:44 PM	Main Vac valve opened
2/15/2012	10:54:44 PM	Helium MFC set to  20.000000
2/15/2012	10:54:44 PM	H2 MFC set to  0.000000
2/15/2012	10:54:44 PM	BCl3 MFC set to  0.000000
2/15/2012	10:54:44 PM	PH3 MFC set to  0.000000
2/15/2012	10:54:44 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:54:44 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:54:44 PM	Tube furnace set to 150
2/15/2012	10:55:14 PM	Helium valve closed
2/15/2012	10:55:14 PM	H2 valve closed
2/15/2012	10:55:14 PM	BCl3 valve closed
2/15/2012	10:55:14 PM	PH3 valve closed
2/15/2012	10:55:14 PM	SiCl4 pre valve closed
2/15/2012	10:55:14 PM	SiCl4 post valve closed
2/15/2012	10:55:14 PM	Bypass valve closed
2/15/2012	10:55:14 PM	Bubbler valve closed
2/15/2012	10:55:14 PM	Main Vac valve opened
2/15/2012	10:55:14 PM	Helium MFC set to  0.000000
2/15/2012	10:55:14 PM	H2 MFC set to  0.000000
2/15/2012	10:55:14 PM	BCl3 MFC set to  0.000000
2/15/2012	10:55:14 PM	PH3 MFC set to  0.000000
2/15/2012	10:55:14 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:55:14 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:55:14 PM	Tube furnace set to 150
2/15/2012	10:55:44 PM	H2 valve closed
2/15/2012	10:55:44 PM	BCl3 valve closed
2/15/2012	10:55:44 PM	PH3 valve closed
2/15/2012	10:55:44 PM	SiCl4 pre valve closed
2/15/2012	10:55:44 PM	SiCl4 post valve closed
2/15/2012	10:55:44 PM	Bypass valve closed
2/15/2012	10:55:44 PM	Bubbler valve closed
2/15/2012	10:55:44 PM	Helium valve opened
2/15/2012	10:55:44 PM	Main Vac valve opened
2/15/2012	10:55:44 PM	Helium MFC set to  20.000000
2/15/2012	10:55:44 PM	H2 MFC set to  0.000000
2/15/2012	10:55:44 PM	BCl3 MFC set to  0.000000
2/15/2012	10:55:44 PM	PH3 MFC set to  0.000000
2/15/2012	10:55:44 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:55:44 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:55:44 PM	Tube furnace set to 150
2/15/2012	10:56:15 PM	Helium valve closed
2/15/2012	10:56:15 PM	H2 valve closed
2/15/2012	10:56:15 PM	BCl3 valve closed
2/15/2012	10:56:15 PM	PH3 valve closed
2/15/2012	10:56:15 PM	SiCl4 pre valve closed
2/15/2012	10:56:15 PM	SiCl4 post valve closed
2/15/2012	10:56:15 PM	Bypass valve closed
2/15/2012	10:56:15 PM	Bubbler valve closed
2/15/2012	10:56:15 PM	Main Vac valve opened
2/15/2012	10:56:15 PM	Helium MFC set to  0.000000
2/15/2012	10:56:15 PM	H2 MFC set to  0.000000
2/15/2012	10:56:15 PM	BCl3 MFC set to  0.000000
2/15/2012	10:56:15 PM	PH3 MFC set to  0.000000
2/15/2012	10:56:15 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:56:15 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:56:15 PM	Tube furnace set to 150
2/15/2012	10:56:45 PM	H2 valve closed
2/15/2012	10:56:45 PM	BCl3 valve closed
2/15/2012	10:56:45 PM	PH3 valve closed
2/15/2012	10:56:45 PM	SiCl4 pre valve closed
2/15/2012	10:56:45 PM	SiCl4 post valve closed
2/15/2012	10:56:45 PM	Bypass valve closed
2/15/2012	10:56:45 PM	Bubbler valve closed
2/15/2012	10:56:45 PM	Helium valve opened
2/15/2012	10:56:45 PM	Main Vac valve opened
2/15/2012	10:56:45 PM	Helium MFC set to  20.000000
2/15/2012	10:56:45 PM	H2 MFC set to  0.000000
2/15/2012	10:56:45 PM	BCl3 MFC set to  0.000000
2/15/2012	10:56:45 PM	PH3 MFC set to  0.000000
2/15/2012	10:56:45 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:56:45 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:56:45 PM	Tube furnace set to 150
2/15/2012	10:57:15 PM	Helium valve closed
2/15/2012	10:57:15 PM	H2 valve closed
2/15/2012	10:57:15 PM	BCl3 valve closed
2/15/2012	10:57:15 PM	PH3 valve closed
2/15/2012	10:57:15 PM	SiCl4 pre valve closed
2/15/2012	10:57:15 PM	SiCl4 post valve closed
2/15/2012	10:57:15 PM	Bypass valve closed
2/15/2012	10:57:15 PM	Bubbler valve closed
2/15/2012	10:57:15 PM	Main Vac valve opened
2/15/2012	10:57:15 PM	Helium MFC set to  0.000000
2/15/2012	10:57:15 PM	H2 MFC set to  0.000000
2/15/2012	10:57:15 PM	BCl3 MFC set to  0.000000
2/15/2012	10:57:15 PM	PH3 MFC set to  0.000000
2/15/2012	10:57:15 PM	SiCl4 MFC set to  0.000000
2/15/2012	10:57:15 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	10:57:15 PM	Tube furnace set to 150
2/15/2012	10:57:16 PM	Run finished at 10:57 PM
2/15/2012	11:04:36 PM	Main Vac valve closed
2/15/2012	11:04:44 PM	Main Vac valve opened
2/15/2012	11:05:08 PM	Recipe started at 11:05 PM
2/15/2012	11:05:08 PM	Helium valve closed
2/15/2012	11:05:08 PM	H2 valve closed
2/15/2012	11:05:08 PM	BCl3 valve closed
2/15/2012	11:05:08 PM	PH3 valve closed
2/15/2012	11:05:08 PM	SiCl4 pre valve closed
2/15/2012	11:05:08 PM	SiCl4 post valve closed
2/15/2012	11:05:08 PM	Bypass valve closed
2/15/2012	11:05:08 PM	Bubbler valve closed
2/15/2012	11:05:08 PM	Main Vac valve opened
2/15/2012	11:05:08 PM	Helium MFC set to  0.000000
2/15/2012	11:05:08 PM	H2 MFC set to  0.000000
2/15/2012	11:05:08 PM	BCl3 MFC set to  0.000000
2/15/2012	11:05:08 PM	PH3 MFC set to  0.000000
2/15/2012	11:05:08 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:05:08 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:05:08 PM	Tube furnace set to 150
2/15/2012	11:05:38 PM	H2 valve closed
2/15/2012	11:05:38 PM	BCl3 valve closed
2/15/2012	11:05:38 PM	PH3 valve closed
2/15/2012	11:05:38 PM	SiCl4 pre valve closed
2/15/2012	11:05:38 PM	SiCl4 post valve closed
2/15/2012	11:05:38 PM	Bypass valve closed
2/15/2012	11:05:38 PM	Bubbler valve closed
2/15/2012	11:05:38 PM	Helium valve opened
2/15/2012	11:05:38 PM	Main Vac valve opened
2/15/2012	11:05:38 PM	Helium MFC set to  20.000000
2/15/2012	11:05:38 PM	H2 MFC set to  0.000000
2/15/2012	11:05:38 PM	BCl3 MFC set to  0.000000
2/15/2012	11:05:38 PM	PH3 MFC set to  0.000000
2/15/2012	11:05:38 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:05:38 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:05:38 PM	Tube furnace set to 150
2/15/2012	11:06:08 PM	Helium valve closed
2/15/2012	11:06:08 PM	H2 valve closed
2/15/2012	11:06:08 PM	BCl3 valve closed
2/15/2012	11:06:08 PM	PH3 valve closed
2/15/2012	11:06:08 PM	SiCl4 pre valve closed
2/15/2012	11:06:08 PM	SiCl4 post valve closed
2/15/2012	11:06:08 PM	Bypass valve closed
2/15/2012	11:06:08 PM	Bubbler valve closed
2/15/2012	11:06:08 PM	Main Vac valve opened
2/15/2012	11:06:08 PM	Helium MFC set to  0.000000
2/15/2012	11:06:08 PM	H2 MFC set to  0.000000
2/15/2012	11:06:08 PM	BCl3 MFC set to  0.000000
2/15/2012	11:06:08 PM	PH3 MFC set to  0.000000
2/15/2012	11:06:08 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:06:08 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:06:08 PM	Tube furnace set to 150
2/15/2012	11:06:38 PM	H2 valve closed
2/15/2012	11:06:38 PM	BCl3 valve closed
2/15/2012	11:06:38 PM	PH3 valve closed
2/15/2012	11:06:38 PM	SiCl4 pre valve closed
2/15/2012	11:06:38 PM	SiCl4 post valve closed
2/15/2012	11:06:38 PM	Bypass valve closed
2/15/2012	11:06:38 PM	Bubbler valve closed
2/15/2012	11:06:38 PM	Helium valve opened
2/15/2012	11:06:38 PM	Main Vac valve opened
2/15/2012	11:06:38 PM	Helium MFC set to  20.000000
2/15/2012	11:06:38 PM	H2 MFC set to  0.000000
2/15/2012	11:06:38 PM	BCl3 MFC set to  0.000000
2/15/2012	11:06:38 PM	PH3 MFC set to  0.000000
2/15/2012	11:06:38 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:06:38 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:06:39 PM	Tube furnace set to 150
2/15/2012	11:07:09 PM	Helium valve closed
2/15/2012	11:07:09 PM	H2 valve closed
2/15/2012	11:07:09 PM	BCl3 valve closed
2/15/2012	11:07:09 PM	PH3 valve closed
2/15/2012	11:07:09 PM	SiCl4 pre valve closed
2/15/2012	11:07:09 PM	SiCl4 post valve closed
2/15/2012	11:07:09 PM	Bypass valve closed
2/15/2012	11:07:09 PM	Bubbler valve closed
2/15/2012	11:07:09 PM	Main Vac valve opened
2/15/2012	11:07:09 PM	Helium MFC set to  0.000000
2/15/2012	11:07:09 PM	H2 MFC set to  0.000000
2/15/2012	11:07:09 PM	BCl3 MFC set to  0.000000
2/15/2012	11:07:09 PM	PH3 MFC set to  0.000000
2/15/2012	11:07:09 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:07:09 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:07:09 PM	Tube furnace set to 150
2/15/2012	11:07:39 PM	H2 valve closed
2/15/2012	11:07:39 PM	BCl3 valve closed
2/15/2012	11:07:39 PM	PH3 valve closed
2/15/2012	11:07:39 PM	SiCl4 pre valve closed
2/15/2012	11:07:39 PM	SiCl4 post valve closed
2/15/2012	11:07:39 PM	Bypass valve closed
2/15/2012	11:07:39 PM	Bubbler valve closed
2/15/2012	11:07:39 PM	Helium valve opened
2/15/2012	11:07:39 PM	Main Vac valve opened
2/15/2012	11:07:39 PM	Helium MFC set to  20.000000
2/15/2012	11:07:39 PM	H2 MFC set to  0.000000
2/15/2012	11:07:39 PM	BCl3 MFC set to  0.000000
2/15/2012	11:07:39 PM	PH3 MFC set to  0.000000
2/15/2012	11:07:39 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:07:39 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:07:39 PM	Tube furnace set to 150
2/15/2012	11:08:09 PM	Helium valve closed
2/15/2012	11:08:09 PM	H2 valve closed
2/15/2012	11:08:09 PM	BCl3 valve closed
2/15/2012	11:08:09 PM	PH3 valve closed
2/15/2012	11:08:09 PM	SiCl4 pre valve closed
2/15/2012	11:08:09 PM	SiCl4 post valve closed
2/15/2012	11:08:09 PM	Bypass valve closed
2/15/2012	11:08:09 PM	Bubbler valve closed
2/15/2012	11:08:09 PM	Main Vac valve opened
2/15/2012	11:08:09 PM	Helium MFC set to  0.000000
2/15/2012	11:08:09 PM	H2 MFC set to  0.000000
2/15/2012	11:08:09 PM	BCl3 MFC set to  0.000000
2/15/2012	11:08:09 PM	PH3 MFC set to  0.000000
2/15/2012	11:08:09 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:08:09 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:08:09 PM	Tube furnace set to 150
2/15/2012	11:08:39 PM	H2 valve closed
2/15/2012	11:08:39 PM	BCl3 valve closed
2/15/2012	11:08:39 PM	PH3 valve closed
2/15/2012	11:08:39 PM	SiCl4 pre valve closed
2/15/2012	11:08:39 PM	SiCl4 post valve closed
2/15/2012	11:08:39 PM	Bypass valve closed
2/15/2012	11:08:39 PM	Bubbler valve closed
2/15/2012	11:08:39 PM	Helium valve opened
2/15/2012	11:08:39 PM	Main Vac valve opened
2/15/2012	11:08:39 PM	Helium MFC set to  20.000000
2/15/2012	11:08:39 PM	H2 MFC set to  0.000000
2/15/2012	11:08:39 PM	BCl3 MFC set to  0.000000
2/15/2012	11:08:39 PM	PH3 MFC set to  0.000000
2/15/2012	11:08:39 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:08:39 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:08:39 PM	Tube furnace set to 150
2/15/2012	11:09:09 PM	Helium valve closed
2/15/2012	11:09:09 PM	H2 valve closed
2/15/2012	11:09:09 PM	BCl3 valve closed
2/15/2012	11:09:09 PM	PH3 valve closed
2/15/2012	11:09:09 PM	SiCl4 pre valve closed
2/15/2012	11:09:09 PM	SiCl4 post valve closed
2/15/2012	11:09:09 PM	Bypass valve closed
2/15/2012	11:09:09 PM	Bubbler valve closed
2/15/2012	11:09:09 PM	Main Vac valve opened
2/15/2012	11:09:09 PM	Helium MFC set to  0.000000
2/15/2012	11:09:09 PM	H2 MFC set to  0.000000
2/15/2012	11:09:09 PM	BCl3 MFC set to  0.000000
2/15/2012	11:09:09 PM	PH3 MFC set to  0.000000
2/15/2012	11:09:09 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:09:10 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:09:10 PM	Tube furnace set to 150
2/15/2012	11:09:40 PM	H2 valve closed
2/15/2012	11:09:40 PM	BCl3 valve closed
2/15/2012	11:09:40 PM	PH3 valve closed
2/15/2012	11:09:40 PM	SiCl4 pre valve closed
2/15/2012	11:09:40 PM	SiCl4 post valve closed
2/15/2012	11:09:40 PM	Bypass valve closed
2/15/2012	11:09:40 PM	Bubbler valve closed
2/15/2012	11:09:40 PM	Helium valve opened
2/15/2012	11:09:40 PM	Main Vac valve opened
2/15/2012	11:09:40 PM	Helium MFC set to  20.000000
2/15/2012	11:09:40 PM	H2 MFC set to  0.000000
2/15/2012	11:09:40 PM	BCl3 MFC set to  0.000000
2/15/2012	11:09:40 PM	PH3 MFC set to  0.000000
2/15/2012	11:09:40 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:09:40 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:09:40 PM	Tube furnace set to 150
2/15/2012	11:10:10 PM	Helium valve closed
2/15/2012	11:10:10 PM	H2 valve closed
2/15/2012	11:10:10 PM	BCl3 valve closed
2/15/2012	11:10:10 PM	PH3 valve closed
2/15/2012	11:10:10 PM	SiCl4 pre valve closed
2/15/2012	11:10:10 PM	SiCl4 post valve closed
2/15/2012	11:10:10 PM	Bypass valve closed
2/15/2012	11:10:10 PM	Bubbler valve closed
2/15/2012	11:10:10 PM	Main Vac valve opened
2/15/2012	11:10:10 PM	Helium MFC set to  0.000000
2/15/2012	11:10:10 PM	H2 MFC set to  0.000000
2/15/2012	11:10:10 PM	BCl3 MFC set to  0.000000
2/15/2012	11:10:10 PM	PH3 MFC set to  0.000000
2/15/2012	11:10:10 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:10:10 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:10:10 PM	Tube furnace set to 150
2/15/2012	11:10:40 PM	H2 valve closed
2/15/2012	11:10:40 PM	BCl3 valve closed
2/15/2012	11:10:40 PM	PH3 valve closed
2/15/2012	11:10:40 PM	SiCl4 pre valve closed
2/15/2012	11:10:40 PM	SiCl4 post valve closed
2/15/2012	11:10:40 PM	Bypass valve closed
2/15/2012	11:10:40 PM	Bubbler valve closed
2/15/2012	11:10:40 PM	Helium valve opened
2/15/2012	11:10:40 PM	Main Vac valve opened
2/15/2012	11:10:40 PM	Helium MFC set to  20.000000
2/15/2012	11:10:40 PM	H2 MFC set to  0.000000
2/15/2012	11:10:40 PM	BCl3 MFC set to  0.000000
2/15/2012	11:10:40 PM	PH3 MFC set to  0.000000
2/15/2012	11:10:40 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:10:40 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:10:40 PM	Tube furnace set to 150
2/15/2012	11:11:10 PM	Helium valve closed
2/15/2012	11:11:10 PM	H2 valve closed
2/15/2012	11:11:10 PM	BCl3 valve closed
2/15/2012	11:11:10 PM	PH3 valve closed
2/15/2012	11:11:10 PM	SiCl4 pre valve closed
2/15/2012	11:11:10 PM	SiCl4 post valve closed
2/15/2012	11:11:10 PM	Bypass valve closed
2/15/2012	11:11:10 PM	Bubbler valve closed
2/15/2012	11:11:10 PM	Main Vac valve opened
2/15/2012	11:11:10 PM	Helium MFC set to  0.000000
2/15/2012	11:11:10 PM	H2 MFC set to  0.000000
2/15/2012	11:11:10 PM	BCl3 MFC set to  0.000000
2/15/2012	11:11:10 PM	PH3 MFC set to  0.000000
2/15/2012	11:11:10 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:11:10 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:11:10 PM	Tube furnace set to 150
2/15/2012	11:11:40 PM	H2 valve closed
2/15/2012	11:11:40 PM	BCl3 valve closed
2/15/2012	11:11:40 PM	PH3 valve closed
2/15/2012	11:11:40 PM	SiCl4 pre valve closed
2/15/2012	11:11:40 PM	SiCl4 post valve closed
2/15/2012	11:11:41 PM	Bypass valve closed
2/15/2012	11:11:41 PM	Bubbler valve closed
2/15/2012	11:11:41 PM	Helium valve opened
2/15/2012	11:11:41 PM	Main Vac valve opened
2/15/2012	11:11:41 PM	Helium MFC set to  20.000000
2/15/2012	11:11:41 PM	H2 MFC set to  0.000000
2/15/2012	11:11:41 PM	BCl3 MFC set to  0.000000
2/15/2012	11:11:41 PM	PH3 MFC set to  0.000000
2/15/2012	11:11:41 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:11:41 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:11:41 PM	Tube furnace set to 150
2/15/2012	11:12:11 PM	Helium valve closed
2/15/2012	11:12:11 PM	H2 valve closed
2/15/2012	11:12:11 PM	BCl3 valve closed
2/15/2012	11:12:11 PM	PH3 valve closed
2/15/2012	11:12:11 PM	SiCl4 pre valve closed
2/15/2012	11:12:11 PM	SiCl4 post valve closed
2/15/2012	11:12:11 PM	Bypass valve closed
2/15/2012	11:12:11 PM	Bubbler valve closed
2/15/2012	11:12:11 PM	Main Vac valve opened
2/15/2012	11:12:11 PM	Helium MFC set to  0.000000
2/15/2012	11:12:11 PM	H2 MFC set to  0.000000
2/15/2012	11:12:11 PM	BCl3 MFC set to  0.000000
2/15/2012	11:12:11 PM	PH3 MFC set to  0.000000
2/15/2012	11:12:11 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:12:11 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:12:11 PM	Tube furnace set to 150
2/15/2012	11:12:41 PM	H2 valve closed
2/15/2012	11:12:41 PM	BCl3 valve closed
2/15/2012	11:12:41 PM	PH3 valve closed
2/15/2012	11:12:41 PM	SiCl4 pre valve closed
2/15/2012	11:12:41 PM	SiCl4 post valve closed
2/15/2012	11:12:41 PM	Bypass valve closed
2/15/2012	11:12:41 PM	Bubbler valve closed
2/15/2012	11:12:41 PM	Helium valve opened
2/15/2012	11:12:41 PM	Main Vac valve opened
2/15/2012	11:12:41 PM	Helium MFC set to  20.000000
2/15/2012	11:12:41 PM	H2 MFC set to  0.000000
2/15/2012	11:12:41 PM	BCl3 MFC set to  0.000000
2/15/2012	11:12:41 PM	PH3 MFC set to  0.000000
2/15/2012	11:12:41 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:12:41 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:12:41 PM	Tube furnace set to 150
2/15/2012	11:13:11 PM	Helium valve closed
2/15/2012	11:13:11 PM	H2 valve closed
2/15/2012	11:13:11 PM	BCl3 valve closed
2/15/2012	11:13:11 PM	PH3 valve closed
2/15/2012	11:13:11 PM	SiCl4 pre valve closed
2/15/2012	11:13:11 PM	SiCl4 post valve closed
2/15/2012	11:13:11 PM	Bypass valve closed
2/15/2012	11:13:11 PM	Bubbler valve closed
2/15/2012	11:13:11 PM	Main Vac valve opened
2/15/2012	11:13:11 PM	Helium MFC set to  0.000000
2/15/2012	11:13:11 PM	H2 MFC set to  0.000000
2/15/2012	11:13:11 PM	BCl3 MFC set to  0.000000
2/15/2012	11:13:11 PM	PH3 MFC set to  0.000000
2/15/2012	11:13:11 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:13:11 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:13:11 PM	Tube furnace set to 150
2/15/2012	11:13:41 PM	H2 valve closed
2/15/2012	11:13:41 PM	BCl3 valve closed
2/15/2012	11:13:41 PM	PH3 valve closed
2/15/2012	11:13:41 PM	SiCl4 pre valve closed
2/15/2012	11:13:41 PM	SiCl4 post valve closed
2/15/2012	11:13:41 PM	Bypass valve closed
2/15/2012	11:13:41 PM	Bubbler valve closed
2/15/2012	11:13:41 PM	Helium valve opened
2/15/2012	11:13:41 PM	Main Vac valve opened
2/15/2012	11:13:41 PM	Helium MFC set to  20.000000
2/15/2012	11:13:41 PM	H2 MFC set to  0.000000
2/15/2012	11:13:41 PM	BCl3 MFC set to  0.000000
2/15/2012	11:13:41 PM	PH3 MFC set to  0.000000
2/15/2012	11:13:41 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:13:41 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:13:41 PM	Tube furnace set to 150
2/15/2012	11:14:12 PM	Helium valve closed
2/15/2012	11:14:12 PM	H2 valve closed
2/15/2012	11:14:12 PM	BCl3 valve closed
2/15/2012	11:14:12 PM	PH3 valve closed
2/15/2012	11:14:12 PM	SiCl4 pre valve closed
2/15/2012	11:14:12 PM	SiCl4 post valve closed
2/15/2012	11:14:12 PM	Bypass valve closed
2/15/2012	11:14:12 PM	Bubbler valve closed
2/15/2012	11:14:12 PM	Main Vac valve opened
2/15/2012	11:14:12 PM	Helium MFC set to  0.000000
2/15/2012	11:14:12 PM	H2 MFC set to  0.000000
2/15/2012	11:14:12 PM	BCl3 MFC set to  0.000000
2/15/2012	11:14:12 PM	PH3 MFC set to  0.000000
2/15/2012	11:14:12 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:14:12 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:14:12 PM	Tube furnace set to 150
2/15/2012	11:14:42 PM	H2 valve closed
2/15/2012	11:14:42 PM	BCl3 valve closed
2/15/2012	11:14:42 PM	PH3 valve closed
2/15/2012	11:14:42 PM	SiCl4 pre valve closed
2/15/2012	11:14:42 PM	SiCl4 post valve closed
2/15/2012	11:14:42 PM	Bypass valve closed
2/15/2012	11:14:42 PM	Bubbler valve closed
2/15/2012	11:14:42 PM	Helium valve opened
2/15/2012	11:14:42 PM	Main Vac valve opened
2/15/2012	11:14:42 PM	Helium MFC set to  20.000000
2/15/2012	11:14:42 PM	H2 MFC set to  0.000000
2/15/2012	11:14:42 PM	BCl3 MFC set to  0.000000
2/15/2012	11:14:42 PM	PH3 MFC set to  0.000000
2/15/2012	11:14:42 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:14:42 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:14:42 PM	Tube furnace set to 150
2/15/2012	11:15:12 PM	Helium valve closed
2/15/2012	11:15:12 PM	H2 valve closed
2/15/2012	11:15:12 PM	BCl3 valve closed
2/15/2012	11:15:12 PM	PH3 valve closed
2/15/2012	11:15:12 PM	SiCl4 pre valve closed
2/15/2012	11:15:12 PM	SiCl4 post valve closed
2/15/2012	11:15:12 PM	Bypass valve closed
2/15/2012	11:15:12 PM	Bubbler valve closed
2/15/2012	11:15:12 PM	Main Vac valve opened
2/15/2012	11:15:12 PM	Helium MFC set to  0.000000
2/15/2012	11:15:12 PM	H2 MFC set to  0.000000
2/15/2012	11:15:12 PM	BCl3 MFC set to  0.000000
2/15/2012	11:15:12 PM	PH3 MFC set to  0.000000
2/15/2012	11:15:12 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:15:12 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:15:12 PM	Tube furnace set to 150
2/15/2012	11:15:13 PM	Run finished at 11:15 PM
2/15/2012	11:16:06 PM	Main Vac valve closed
2/15/2012	11:16:32 PM	Main Vac valve opened
2/15/2012	11:19:13 PM	Recipe started at 11:19 PM
2/15/2012	11:19:13 PM	Helium valve closed
2/15/2012	11:19:13 PM	H2 valve closed
2/15/2012	11:19:13 PM	BCl3 valve closed
2/15/2012	11:19:13 PM	PH3 valve closed
2/15/2012	11:19:13 PM	SiCl4 pre valve closed
2/15/2012	11:19:13 PM	SiCl4 post valve closed
2/15/2012	11:19:13 PM	Main Vac valve closed
2/15/2012	11:19:13 PM	Bypass valve closed
2/15/2012	11:19:13 PM	Bubbler valve closed
2/15/2012	11:19:13 PM	Helium MFC set to  0.000000
2/15/2012	11:19:13 PM	H2 MFC set to  0.000000
2/15/2012	11:19:13 PM	BCl3 MFC set to  0.000000
2/15/2012	11:19:13 PM	PH3 MFC set to  0.000000
2/15/2012	11:19:13 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:19:13 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:19:13 PM	Tube furnace set to 0
2/15/2012	11:19:16 PM	Helium valve closed
2/15/2012	11:19:16 PM	BCl3 valve closed
2/15/2012	11:19:16 PM	PH3 valve closed
2/15/2012	11:19:16 PM	SiCl4 pre valve closed
2/15/2012	11:19:16 PM	SiCl4 post valve closed
2/15/2012	11:19:16 PM	Main Vac valve closed
2/15/2012	11:19:16 PM	Bypass valve closed
2/15/2012	11:19:16 PM	Bubbler valve closed
2/15/2012	11:19:16 PM	H2 valve opened
2/15/2012	11:19:16 PM	Helium MFC set to  0.000000
2/15/2012	11:19:16 PM	H2 MFC set to  500.000000
2/15/2012	11:19:16 PM	BCl3 MFC set to  0.000000
2/15/2012	11:19:16 PM	PH3 MFC set to  0.000000
2/15/2012	11:19:16 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:19:16 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:19:17 PM	Tube furnace set to 0
2/15/2012	11:20:19 PM	Helium valve closed
2/15/2012	11:20:19 PM	BCl3 valve closed
2/15/2012	11:20:19 PM	PH3 valve closed
2/15/2012	11:20:19 PM	SiCl4 pre valve closed
2/15/2012	11:20:19 PM	SiCl4 post valve closed
2/15/2012	11:20:19 PM	Main Vac valve closed
2/15/2012	11:20:19 PM	Bypass valve closed
2/15/2012	11:20:19 PM	H2 valve opened
2/15/2012	11:20:19 PM	Bubbler valve opened
2/15/2012	11:20:19 PM	Helium MFC set to  0.000000
2/15/2012	11:20:19 PM	H2 MFC set to  500.000000
2/15/2012	11:20:19 PM	BCl3 MFC set to  0.000000
2/15/2012	11:20:19 PM	PH3 MFC set to  0.000000
2/15/2012	11:20:19 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:20:19 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:20:19 PM	Tube furnace set to 0
2/15/2012	11:20:20 PM	Helium valve closed
2/15/2012	11:20:20 PM	BCl3 valve closed
2/15/2012	11:20:20 PM	PH3 valve closed
2/15/2012	11:20:20 PM	SiCl4 pre valve closed
2/15/2012	11:20:20 PM	SiCl4 post valve closed
2/15/2012	11:20:20 PM	Main Vac valve closed
2/15/2012	11:20:20 PM	Bypass valve closed
2/15/2012	11:20:20 PM	H2 valve opened
2/15/2012	11:20:20 PM	Bubbler valve opened
2/15/2012	11:20:20 PM	Helium MFC set to  0.000000
2/15/2012	11:20:20 PM	H2 MFC set to  450.000000
2/15/2012	11:20:20 PM	BCl3 MFC set to  0.000000
2/15/2012	11:20:20 PM	PH3 MFC set to  0.000000
2/15/2012	11:20:20 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:20:20 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:20:20 PM	Tube furnace set to 1000
2/15/2012	11:45:20 PM	Helium valve closed
2/15/2012	11:45:20 PM	PH3 valve closed
2/15/2012	11:45:20 PM	Main Vac valve closed
2/15/2012	11:45:20 PM	Bypass valve closed
2/15/2012	11:45:20 PM	H2 valve opened
2/15/2012	11:45:20 PM	BCl3 valve opened
2/15/2012	11:45:20 PM	SiCl4 pre valve opened
2/15/2012	11:45:20 PM	SiCl4 post valve opened
2/15/2012	11:45:20 PM	Bubbler valve opened
2/15/2012	11:45:20 PM	Helium MFC set to  0.000000
2/15/2012	11:45:20 PM	H2 MFC set to  450.000000
2/15/2012	11:45:20 PM	BCl3 MFC set to  20.000000
2/15/2012	11:45:20 PM	PH3 MFC set to  0.000000
2/15/2012	11:45:20 PM	SiCl4 MFC set to  50.000000
2/15/2012	11:45:20 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:45:20 PM	Tube furnace set to 1000
2/15/2012	11:53:20 PM	Helium valve closed
2/15/2012	11:53:20 PM	BCl3 valve closed
2/15/2012	11:53:20 PM	PH3 valve closed
2/15/2012	11:53:20 PM	SiCl4 pre valve closed
2/15/2012	11:53:20 PM	SiCl4 post valve closed
2/15/2012	11:53:20 PM	Main Vac valve closed
2/15/2012	11:53:20 PM	Bypass valve closed
2/15/2012	11:53:20 PM	H2 valve opened
2/15/2012	11:53:20 PM	Bubbler valve opened
2/15/2012	11:53:20 PM	Helium MFC set to  0.000000
2/15/2012	11:53:20 PM	H2 MFC set to  500.000000
2/15/2012	11:53:20 PM	BCl3 MFC set to  0.000000
2/15/2012	11:53:20 PM	PH3 MFC set to  0.000000
2/15/2012	11:53:20 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:53:20 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:53:21 PM	Tube furnace set to 750
2/15/2012	11:58:21 PM	H2 valve closed
2/15/2012	11:58:21 PM	BCl3 valve closed
2/15/2012	11:58:21 PM	PH3 valve closed
2/15/2012	11:58:21 PM	SiCl4 pre valve closed
2/15/2012	11:58:21 PM	SiCl4 post valve closed
2/15/2012	11:58:21 PM	Main Vac valve closed
2/15/2012	11:58:21 PM	Bypass valve closed
2/15/2012	11:58:21 PM	Helium valve opened
2/15/2012	11:58:21 PM	Bubbler valve opened
2/15/2012	11:58:21 PM	Helium MFC set to  500.000000
2/15/2012	11:58:21 PM	H2 MFC set to  0.000000
2/15/2012	11:58:21 PM	BCl3 MFC set to  0.000000
2/15/2012	11:58:21 PM	PH3 MFC set to  0.000000
2/15/2012	11:58:21 PM	SiCl4 MFC set to  0.000000
2/15/2012	11:58:21 PM	Bypass solenoid MFC set to  0.000000
2/15/2012	11:58:21 PM	Tube furnace set to 0
